内箝位型压电精密步进旋转驱动器

提出一种新型的压电精密步进旋转驱动器。该驱动器以仿生运动的原理,以压电陶瓷叠堆为动力源,采用定子内侧箝位的方式和薄壁柔性铰链微变形结构,提高该驱动器箝位的稳定性和步进旋转的稳定性。通过静力学有限元分析和动力学分析,较深入地研究了该驱动器的运动特性,并对驱动器旋转分辨率、旋转速度、驱动转矩等方面进行试验研究。研制的内箝位型压电精密步进旋转驱动器能够实现高频率(40 Hz),较高速度(325 μrad /s),大行程(大于360°),高分辨率(1 μrad),较大驱动力矩(30 N·cm)等特点,有效提高了压电精密步进旋转驱动器的驱动性能。该驱动器在精密运动、微操作、光学工程以及精密定位等精密工程中具有广阔的应用前景。     

Impact drive rotary precision actuator with piezoelectric bimorphs

An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorphs, a specific fixed-frequency and adjustable-amplitude is confirmed to control the actuator. The results show that an actuator excited by fixed-frequency and the adjustable-amplitude ramp voltage waveform works with a large travel range (180°), high resolution (1 μrad), speed (0.2 rad/min) and heavy-load ability (0.02 Nm). With advantages of high-precision positioning ability, simple structure and only one percent the cost of traditional impact drive mechanisms, the actuator is expected to be widely used in precision industries. __________ Translated from Optics and Precision Engineering, 2005, 13(3): 298–304 [译自: 光学精密工程]     

压电直线精密驱动器研究

提出一种新型的压电直线精密步进驱动器。该驱动器采用仿生运动的原理,以定子主动箝位的方式和双侧薄壁铰链微变形结构,解决了以往压电精密驱动器箝位不牢固、步进频率较低、行程小、分辨率低、速度低、驱动力不稳定等问题。研制的精密直线驱动器能够实现高频率100 Hz,高速度30 mm/min,大行程>10 mm,高分辨率0.05 μm,大驱动力100 N等特点,大幅度提高了压电型步进驱动器的驱动性能。     

Impact drive rotary precision actuator with piezoelectric bimorphs

An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorphs, a specific fixed-frequency and adjustable-amplitude is confirmed to control the actuator. The results show that an actuator excited by fixed-frequency and the adjustable-amplitude ramp voltage waveform works with a large travel range (180°), high resolution (1 ?rad), speed (0.2 rad/min) and heavy-load ability (0.02 Nm). With advantages of high-precision positioning ability, simple structure and only one percent the cost of traditional impact drive mechanisms, the actuator is expected to be widely used in precision industries.     

压电双晶片型惯性冲击式旋转精密驱动器研究

研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元的新型惯性冲击式旋转精密驱动器。对自由端带有集中质量的悬臂式压电双晶片的动态特性进行了有限元法和实验分析,提出了压电双晶片型惯性冲击式精密驱动器特定的定频调压驱动方法。对压电双晶片型惯性冲击式旋转精密驱动器进行了性能测试,驱动器旋转行程为180°、旋转步长分辨力为1μrad、最大转速为0.2 rad/min、最大扭矩为0.02 Nm。该驱动器结构简单,特别是成本为传统惯性冲击式驱动器的1/100左右。     

用于光阑的旋转型驻波压电作动器

为了驱动光阑实现对光束的控制和调节,提出一种新型的旋转型驻波压电作动器。现有压电作动器中,性能稳定的多为单一振子复合模态工作方式,要求各工作模态频率差小,除了对加工精度要求高之外,由于工作磨损对各模态频率影响不同,工作模态的频率差增大,使作动器的性能和效率下降。针对这一问题和光阑的工作特点,研制了一种新型的旋转型压电作动器。该作动器利用两个相同结构杆形压电振子的同形模态,经摩擦驱动光阑活动环转动,达到调节光阑孔径的目的。原理样机实验表明:当预压力为8N时,在驱动电压为200V_(p-p)～400V_(p-p)范围内,作动器的旋转速度与电压成正比,最大的逆时针旋转速度为75.36rad/min,最大的顺时针运动速度为62.8rad/min;在驱动电压为400V_(p-p)下分辨率可以达到0.34mrad。该压电作动器满足了光阑光束控制的要求,具有结构简单、响应快速、调速平稳和精度高等优点。     

Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

This paper develops a 30 mm × 30 mm × 50 mm spherical micro actuator driven by piezoelectric ceramic stacks (PZT), and analyzes its dynamic performances. First, the space coordinate relationship of the spherical micro actuator and a dynamic model are set up. Second, The Runge-Kutta arithmetic is used to calculate the dynamical parameters of the micro actuator; the SIMULINK module of MATLAB is used to build the dynamical simulating model and then simulate it. Third, an experimental sample of the spherical micro actuator is developed, a micromanipulator is integrated with a micro-gripper based on the sample spherical micro actuator, and the experimental research on the micro assembly is conducted between a micro shaft of Φ180 μm and a micro spindle sleeve of Φ200 μm. Finally, the characteristics of the spherical micro actuator influenced by the mass of the metal sphere of the micro actuator, driving signal frequency, friction coefficient of the contact surface between the metal sphere and the friction block of the micro driving unit are analyzed. The experimental results indicate that the rotation resolution of the micro actuator reaches 0.000 1°, the rotation positioning precision reaches 0.000 5°, and the maximum working frequency is about 1200 Hz. The experimental results validate the back rotation vibration model of the spherical micro actuator. The micromanipulator integrated by the spherical micro actuator can meet the requirements of precise micro operation and assembly for micro electro mechanical systems (MEMS) or other microelements in micro degree fields. __________ Translated from Optics and Precision Engineering, 2007, 15(2): 248–253 [译自: 光学精密工程]     

压电型步进精密旋转驱动器

提出了一种将压电叠堆驱动元件应用到精密旋转驱动器上的研究方案。在对驱动器机械结构及旋转运动工作原理进行分析的基础上,建立了以压电叠堆为驱动元件的旋转驱动数学模型,采用有限元分析软件对机械结构进行了分析,并从旋转运动分辨率、运动稳定性等方面对所设计加工的样机进行了实验研究。实验结果表明设计的结构具有分辨率高、行程大和运行稳定等优点,克服了目前精密驱动机构存在的位移最小分辨率和大行程共存性不好的问题。     

基于微操作的大行程高分辨率旋转微驱动器的研究

根据仿生学原理,采用分立式布局,研制出大行程高分辨率旋转微驱动器.该微驱动器采用电磁铁箝位、压电陶瓷驱动的爬行式步进机构形式,实现了光学镜面的二维微调整操作.实验表明,该微驱动器具有分辨率高、行程大、步距可变等特点,也适用于其它微操作中大行程高分辨率的旋转驱动.     

非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验

针对目前光波导封装使用的精密定位平台行程小,结构与控制系统复杂的问题,提出了非共振型压电电机驱动的大行程精密旋转定位平台。该平台通过压电电机的连续作动和步进作动两种工作模式来满足大行程和高精度要求。首先对该精密旋转定位平台进行动力学建模,确定了系统运动方程。然后,分析其作动机理,研究影响旋转平台转速的不同因素。最后,实验研究该精密旋转定位平台的速度、步距、分辨率与负载特性,确定平台连续作动与步进作动的驱动方式。实验结果表明,在直流偏置为60V,峰峰电压为120V,频率为180 Hz的正弦波电压激励下,该精密旋转定位平台最大转速可达47 963.2μrad/s,分辨率和最大负载分别为3μrad和60g。与现有的大行程精密定位旋转平台相比,设计的平台具有行程大,精度高,结构简单,稳定可控,且装配调试方便,易于批量化生产等优势。     

Design of a piezoelectric transducer cylindrical phase modulator for simulating acoustic emission signals

To conveniently carry out the pipeline leak experiment in a laboratory, leak acoustic signals are simulated by using the converse piezoelectric effect of a piezoelectric transducer (PZT) cylindrical phase modulator. On the basis of the piezoelectric equations and electromechanical equivalence principle, the transfer function of a PZT cylindrical phase modulator is delivered. A PZT cylindrical phase modulator is designed, and the numerical simulation is conducted. Results prove that the PZT cylindrical phase modulator can effectively simulate leak acoustic emission signals when the frequency is lower than 25 KHz. __________ Translated from Journal of Beijing University of Technology, 2006, 32(8): 683–687 [译自: 北京工业大学学报]     

Cryogenic tilt table

We describe the design and development of a cryogenic tilt table that will be used to test the flight hardware for NASA’s Satellite Test of the Equivalence Principle (STEP). Our table can tilt the hardware around two axes and is part of a test bed that has 6-degree-of-freedom controllability. The goal was to build a tilt table with a resolution better than ∼5 μrad (1 arcsec). Our table consists of three aluminum plates. The outermost plate is attached to the cryogenic probe and is fixed. The middle and inner plates rest on the outer and middle plates, respectively, using knife edges and knife edge holders made of silicon nitride that are glued to the aluminum plates. A cryogenic tilt sensor was also developed and integrated with the table. The sensor consists of an electrically grounded copper cube hanging from a support, and is placed between two pairs of capacitive electrodes. Any motion of the cube caused by tilting is measured differentially using a Wheatstone bridge circuit. The table is connected to the bottom of a cryogenic probe. A voice coil actuator, located on top of the probe at room temperature, is used to create the necessary tilt. A thin fiber is used to connect the actuator and the table. The system is controlled using a dSPACE control card. A test of the table at cryogenic temperatures (4.5 K) and low pressure (1 μTorr) showed a noise level of ∼0.7 μrad (150 marcsec), which is nearly an order of magnitude better than the required resolution.     

一种微位移促动器的设计和检测

设计制造了一套微位移促动器并进行了检测。比较了常用的实现高精度、大行程的微位移机构的工程方法,并结合大天区面积多目标光纤光谱天文望远镜(LAMOST)微位移调节机构的实现原理,采用步进电机驱动减速器、精密丝杆型式,及高精度的杠杆缩放结构,实现了高精度、大行程的微位移促动器。根据该传动机构的特点,对机构的误差进行了分析,通过计算机查表校正丝杆的传动误差。双频激光干涉仪的检测结果表明该微位移促动器在行程范围内灵敏度达到了201 nm±48 nm,步长为10 μm,单向精度达到了标准偏差237 nm。     

Application of AZ4903 to production of stator windings

To satisfy the needs of the high deep-width ratio and thickness of a planar micromotor’s stator windings, a process method to produce an electromagnetic planar micromotor with AZ4903 is proposed. Optimum relationships, such as the desired rotation speed vs. thickness of the coating process, and the temperature vs. time of pre-baking, are obtained. The appropriate time of lithography and development are also achieved. The thickness of the produced windings is 40 μm with ideal perpendicularity. Finally, stators and rotors are fabricated. The rotation speed and pull-out torque of the micromotor are tested. The experiment proved that the micromotor worked with a steady speed and a low ripple of pull-out torque. __________ Translated from J Tsinghua Univ (Sci & Tech) 2005, 45(8): 1062–1065 [译自: 清华大学学报(自然科学版)]     

压电陶瓷驱动器蠕变特性的研究

压电陶瓷驱动器具有位移分辨率高、体积小、响应快、输出力大、不发热等优点，但其固有的迟滞、蠕变和非线性，严重影响了它的定位精度。在大行程微动工作台中，需要借助于位移放大机构来克服压电陶瓷驱动器位移行程小的缺点，但放大机构在放大位移的同时，也放大了压电陶瓷蠕变和迟滞误差的影响。本文通过对一种大行程压电陶瓷微动工作台蠕变特性的研究性实验，得到了该机构的蠕变特性曲线，找到了压电陶瓷驱动器蠕变的规律，为进一步修正和减少蠕变误差的影响、提高系统的定位精度，提供了科学的依据。     

Optimization model for rotor blades of horizontal axis wind turbines

This paper presents an optimization model for rotor blades of horizontal axis wind turbines. The model refers to the wind speed distribution function on the specific wind site, with an objective to satisfy the maximum annual energy output. To speed up the search process and guarantee a global optimal result, the extended compact genetic algorithm (ECGA) is used to carry out the search process. Compared with the simple genetic algorithm, ECGA runs much faster and can get more accurate results with a much smaller population size and fewer function evaluations. Using the developed optimization program, blades of a 1.3 MW stall-regulated wind turbine are designed. Compared with the existing blades, the designed blades have obviously better aerodynamic performance. __________ Translated from Journal of Shantou University (Natural Science), 2006, 21(1): 44–49 [译自: 汕头大学学报 (自然科学版)]     

新型压电步进型精密直线驱动器

以压电叠堆为驱动元件,设计了新型的步进型精密直线驱动器。驱动器由于设计了独特的双侧对称箝位结构,可以利用精调斜块准确调整箝位面与动子的配合间隙,同时采用整体加工的柔性结构,保证了工作的稳定性和准确性。应用有限元分析方法对步进型精密直线驱动器进行了力学分析,并进行了大量的试验研究。试验测试结果表明:驱动器的分辨率达到40 nm、行程18 mm、驱动速度达到6 mm/min,可牵引150 g的载荷。     

基于改变正压力的惯性式压电旋转机构的研究

提出通过机械方式控制压电移动机构和支撑面之间摩擦力的有序变化,形成有规律的新型惯性式压电旋转机构的研究方案。设计了旋转机构的结构模型,分析了机构的运动原理,建立了机构的动力学模型,应用现代控制理论,利用Matlab对机构进行了运动学仿真,得到了机构位移、速度仿真曲线,设计、制作了旋转机构样机,并作了相关的性能测试。仿真分析结果和试验结果表明了运动机理和动力学模型的正确性。     

压电旋转驱动器制作及性能测试

提出了通过控制正压力来改变摩擦力的方案,进而研制了一种以压电叠堆为动力转换元件的新型压电旋转驱动器。采用两个驱动用压电叠堆对称布置的方式设计了该旋转驱动器结构,探讨了旋转驱动器运动机理,制作了压电旋转驱动器试验样机并对其进行了试验测试。试验结果表明,该驱动器输出步长线性度较好,当驱动电压为10 V、频率为2 Hz时,驱动器旋转步长为20 μrad。分析了驱动器输出稳定性,针对存在的问题提出通过施加控制系统来有效提高不同起始位置驱动器的运动稳定性。对试验结果进行误差分析,找出了产生误差的原因,为驱动器的进一步优化设计提供了参考。研究证明了该压电旋转驱动器设计方法的可行性,利用该方法可以制作出结构简单,体积小,适合在微驱动领域中应用的驱动器。     

新型惯性式压电驱动机构的研究

基于控制移动机构和支撑面之间摩擦力的方法,提出了新型惯性冲击式压电陶瓷驱动机构的研究方案.分析了驱动机构的工作原理,驱动电压与驱动力、位移之间的关系,设计、制做了可实现直线往复运动的压电微型驱动器结构,并作了相关的性能测试.实验结果表明,采用简单的对称信号波形能驱动机构运动.直线驱动器最高速度可达1 mm/s,最大步长分辨率为20 nm,最大承载能力为1 000g.