计算机在直线度误差测量中的应用

计算机在直线度误差测量中的应用四川省泸州化工学校（６４６００５）罗俊１建立正确合理的数学模型建立测量直线度误差的数学模型方法较多，下面介绍两种：１．１按两端点连线处理数据所获得的模型用被测实际线的两端点建立的理想直线作为评定基准来评定该实际线的直线度...     

便携式三坐标测量臂校准和误差补偿

本文提出了用高精度正交三坐标测量机作为空间位置基准,校准便携式三坐标测量臂空间位置误差的方法。采用Denavit-Hartenbeng方法建立了测量臂的测量方程及误差模型。测量臂给出其工作空间内三维坐标位置的测量值与三坐标测量机提供的标准值,分别代入测量臂的误差模型,以误差模型的计算结果作为补偿量,建立误差数据库,直接对测量臂空间位置误差进行校准和误差补偿。利用海克斯康G9128三坐标测量机对FARO便携式三坐标测量臂校准和误差补偿进行了实验研究,并对误差补偿前后实验结果进行了分析与讨论。研究结果表明该方法可有效、快速地对便携式三坐标测量臂空间位置误差进行校准和补偿。     

仪器误差曲线的数学模型

本文根据仪器误差的离散校准测量点数据,借助富立叶变换理论,得到仪器误差的理想数学模型。     

一种标准转矩发生系统设计及误差分析

测功机是一种用于测量发动机等设备功率的一种装置,测功装置包括转矩和转速校准系统。针对功率校准问题建立转矩发生系统并进行了总体方案的设计、数学模型的建立和误差分析,重点分析了杠杆力臂测量误差、杠杆水平位置控制误差、机体导线产生摆动惯性力矩误差、机体转轴动不平衡产生离心转矩误差,并对每一项提出了对应的解决方案。结果表明,该标准转矩发生系统可以实现在旋转状态下施加标准转矩的功能。     

双角度编码器超精密转台测角误差校准

为了提高超精密角度计量转台的测量精度,对转台所用编码器分度误差与细分误差的校准展开研究。首先,介绍了转台的结构,设计了方便进行相互比对的双角度编码器测角系统并描述了其多读数头布置方式。然后,基于直接比较法与自校准法进行了双编码器分度误差的快速、高精度校准。最后,借助精密电容式位移传感器测量系统,利用比较法检测了两套编码器各读数头的单信号周期测量误差。校准结果显示:采用双读数头均布的第一套编码器的分度误差为±0.27″,细分误差在±0.1″以内;基于四读数头均布方式进行测量的第二套编码器分度误差为±0.17″,细分误差在±0.2″以内;两套编码器的测量精度皆为亚角秒级。双编码器相互比对的校准方式有助于对转台的测角误差进行全面、准确地评估。     

三坐标测量机动态误差补偿的研究

本文研究了三坐标测量机在高速测量过程中的动态误差。针对一移动桥式三坐标测量机,分析了其动态误差的产生原因,建立了动态误差的数学模型,对动态误差进行了全面的测量和补偿。实验证明动态误差具有一定的重复性,可用软件补偿,从而提高三坐标测量机快速测量的精度。     

基于坐标测量机的圆度误差采样点分布研究

建立了采样点均匀分布情况下,圆度误差测量采样点数量与测量极限误差之间的定量关系数学模型。根据所得数学模型,对测量坐标值原则下给定圆度误差检测对象的采样点进行规划,并给出了测量实例,对数学模型进行了验证。     

航空平显火控系统误差分析

讨论了航空平显火控系统的原理误差、测量参数误差和显示器误差,分析了原理误差在建立瞄准数学模型中产生的原因,测量误差在火控计算中所使用的参数通过传感器测量而造成的问题,以及显示误差和其他误差带来设备误差等的形成及结果,并对数学模型的简化引起的误差、显示器误差、瞄准误差和系统误差等几个主要误差提出了解决方法及补偿措施。     

轮廓误差的综合测量与评定

介绍了弹头外形轮廓误差综合测量的原理，以及直线和任意曲线轮廓的最佳拟合数学模型及误差评定方法，并结合测量结果分析了系统的性能。     

圆度误差测量及误差分析

介绍了圆度误差的最小二乘法及其数学模型的建立 ,并分析了影响圆度误差测量的几种误差因素。     

射频仿真中数控衰减器校准方法及其误差分析

研究了8位数控衰减器的控制码规律和校准方法,分析了校准控制码步长与校准误差的关系,得到校准误差随控制码步长螺旋上升的结论,该结论表明选取局部"凹点"处的校准步长产生的校准误差没有明显增加,既能兼顾校准精度又节省大量的校准时间;同时,分析了校准舍入误差,根据实测数据可知,8位数控衰减器校准舍入误差为0.12 dB,能够满足绝大部分应用需求。     

A RKK-1-100 X-ray calibration facility

A RKK-1-100 automated X-ray calibration facility has been developed. This system allows studies of surfaces, near-surface layers, interfaces, and multilayer structures within a wide range of wavelengths of 0.1–100 nm. The first results of quantitative certification of the roughnesses of flat quartz substrates and substrates with evaporation-deposited UNi layers have been obtained. X-ray optical constants for thin UNi layers have been measured.     

Absolute calibration of X-ray optical elements and detectors at a wavelength of 46.9 nm

The results are presented of the absolute calibration of X-ray optical elements (diffraction gratings and Sc/Si multilayers) and detectors (an УΦ-4 photographic film and a vacuum X-ray diode) used in diagnostic devices to study generation of X-ray laser radiation in an argon plasma of a capillary discharge (λ = 46.9 nm). The measurements have been performed at the soft X-ray and vacuum UV station of the VEPP-4 storage ring at the Siberian International Center of Synchrotron Radiation. An absolutely calibrated AXUV 100G photodiode has been used as a reference detector. The relative error of calibration is 10%. The measured reflectances of the multilayer mirrors and gratings are in good agreement (within the limits of errors) with the results of their calibration at the RKK-1-100 X-ray calibration facility.     

2-UPR-SPR并联机构转轴分析

两转一移(2R1T)并联机构转动自由度的轴线包括瞬时转轴和连续转轴。转轴的性质和在空间的分布对2R1T并联机构的轨迹规划和运动学标定等具有重要意义,尤其是在对末端姿态能力要求高的应用如五轴数控加工中更为重要。五自由度Exechon混联加工中心被广泛应用于高端制造业,其由属于2R1T并联机构的2-UPR-SPR并联机构和RR串联机构组成。运用螺旋理论,建立2-UPR-SPR并联机构在初始位形、动平台发生单自由度连续转动后的位形、动平台发生两自由度连续转动后位形下的各分支运动螺旋系和约束螺旋系。根据刚体转轴与约束力作用的关系,确定了动平台的两条连续转轴,这两条转轴的方向与机构位形相关,且分别过参考坐标系原点和球铰中心点。     

基于无迹卡尔曼滤波和设备的三轴磁强计校正

采用无迹卡尔曼滤波(unscented Kalman filter,UKF)磁强计模型参数估计方法,提出对三轴磁强计的总量及分量误差进行校正。采用高精度质子磁力仪提供磁场基准值,借助无磁转台实现磁强计全方位转动,对一款DM-050三轴磁强计进行了参数估计,并将参数估计值运用到总量和分量校正。仿真结果表明,参数估计值与磁强计实际参数值一致。校正后,磁强计总量误差从427.9 nT减少到2.06 nT;X、Y、Z轴分量误差分别减少到1.84 nT、1.96 nT、1.72 nT。而且证明了UKF对磁强计模型参数估计的重复性良好,并研究了噪声幅度大小对UKF的性能影响程度。实验结果表明,磁强计误差从114.94 nT减少到14.47 nT,表明该方法能有效提高磁强计测量精度。     

超光谱成像仪的精细光谱定标

为了精细标定棱镜色散超光谱成像仪1024×80光谱像元的中心波长和响应带宽,建立了一套光谱定标装置,提出了实现1nm光谱定标精度的定标方法。首先,介绍了产生谱线弯曲与谱线倾斜的原因,确定了精细光谱定标的方法和数据处理算法;然后,利用光谱定标装置测定了全部光谱响应像元的离散单色光响应值,利用高斯方程拟合了相对光谱响应曲线;最后,建立了中心波长矩阵表和带宽矩阵表,采用多项式拟合算法确定了空间视场像元的色散方程和光谱通道谱线弯曲方程,实验测定了温度变化谱线漂移结果。另外,还对光谱定标精度对辐射定标精度的影响进行了分析。光谱定标结果表明:超光谱成像仪的光谱定标精度达到了±1nm,各谱段带宽平均为8.75nm;色散方程及谱线弯曲与设计结果相符,谱线弯曲值为14～19nm,平均值为17nm;1nm的定标精度对辐射定标精度的影响分别小于1%(3000K黑体)和0.25%(6000K黑体),满足超光谱成像仪1nm光谱定标精度的要求。     

Laser-induced fluorescence for film thickness mapping in pure sliding lubricated, compliant, contacts

A laser-induced fluorescence (LIF) technique has been used to measure fluid film thickness in a compliant, sliding contact under low-load/low-pressure conditions. The soft contact between an elastomer hemisphere and a glass disc is lubricated by a liquid containing fluorescent dye. The contact is then illuminated with 532 nm laser light through the glass disc, and viewed with a fluorescence microscope. From the intensity of emitted radiation, film thickness maps of the contact are determined. Previous calibration procedures have used a separate calibration piece and test specimen with possible errors due to differences in reflectivity between the calibration and test specimens. In the work reported in this paper a new calibration process is employed using the actual test sample, thereby avoiding such errors.Results are reported for a sliding contact between PDMS and glass, lubricated with glycerol and water solutions under fully flooded and starved conditions. It was found that, for glycerol, the measured film thickness is somewhat lower than numerical predictions for both lubrication conditions. It is suggested that a combination of thermal effects and the hygroscopic nature of glycerol may cause the lubricant viscosity to drop resulting in thinner films than those predicted for fully flooded contacts. Starvation occurs above a critical entrainment speed and results in considerably thinner films than predicted by fully flooded I-EHL theory. A numerical study has been carried out to determine the effect of the observed starvation on film thickness. Predicted, starved film thickness values agree well with those obtained experimentally.     

A New Method of Non-Contact Measurement for Microtopography in Semiconductor Wafer Implementing a New Optical Probe Based on the Precision Defocus Measurement

In this paper, a new method of non-contact measurement has been developed for 3D topography for a semiconductor wafer, implementing a new optical probe based on precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. A distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. A precision calibration technique has been applied, giving about 10 nm resolution and 72 nm four-sigma uncertainty. In order to quantitise the micro pattern on the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and the excellent 3D measurement capability.     

Cryo-electron microscopy and three-dimensional reconstruction of actin filaments

Actin filaments have been examined by electron microscopy whilst in a frozen-hydrated state. Filaments embedded in a vitreous water layer are basically similar to those prepared by negative staining and show characteristic helical substructure, where the pitches of the helices are about 70 nm and 6 nm. Variability in spacing between long pitch helix cross-over points has been observed, which is consistent with intrinsic angular disorder between successive filament subunits. Fourier transforms of the most ordered filaments show four strong layer lines that index as the first, fifth, sixth and seventh orders of a 35 nm repeat. A three-dimensional helical reconstruction, calculated to a resolution of about 4 nm, shows the individual subunits to be orientated with their long axes roughly perpendicular to the filament axis. Each subunit is somewhat curved and is resolved into two domains. Most connections between successive subunits appear to be made close to the filament axis. We also report on the performance of the specimen holder (Philips PW 5699) used in this work.     

基于球形目标的激光位移传感器光束方向标定

搭建了非接触式的三坐标测量系统以便精密测量三维型面。将激光位移传感器通过具有两个回转轴的回转体安装在测量机的Z轴上,从而可根据待测表面的形状来调整传感器的方位。为了使传感器在各个方位上实现测量功能,提出了基于球形目标的光束方向标定方法,并详细阐述了其数学原理。标定时,驱动测量机使传感器分别沿测量机的X,Y和Z轴做等间距步进,根据步长和激光束长度的变化建立方程组求解出激光束所在直线的单位方向向量。最后,多次测量尺寸参数已知的六面体标准块规,检验了该测量系统的重复性。结果显示,该系统的测量不确定度为0.048mm;测量另一直径已知的被测球时,传感器在各个方位上的误差小于0.05mm,表明所提出的标定方法使测量系统达到了逆向工程的使用要求。得到的数据表明,本文所提出的方法有较高的标定精度和较好的重复性,为实现三维型面的快速扫描测量奠定了基础。