共查询到18条相似文献,搜索用时 125 毫秒
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本文用数值方法计算C型和E型硅膜片电容压力传感器的输入、输出关系及性能指标,给出了能减少非线性误差的新的电极形状。 相似文献
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灵敏度和非线性是表征硅压阻式压力传感器性能的两个最重要参数,这是压力传感器的设计目标.最初出现的硅压阻式压力传感器都采用圆形均厚膜设计,但由于膜片本身 相似文献
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本文介绍一种周边固支圆形膜片硅压阻式冲击加速度计的工作原理和结构,以及硅膜片尺寸与传感器输出的计算关系,冲击加速度传感器的电阻设计,及其器件的制作工艺流程。通过冲击试验,证明了该加速度传感器在高加速度作用下的实用性。 相似文献
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设计了一种大量程硅压阻式压力传感器,通过理论模型分析优化传感器结构尺寸,保证薄膜的线性变化和抗过载能力;并通过有限元建模分析可动薄膜位移及应力随压力变化关系,对结构进行优化设计;同时用有限元仿真验证理论分析的正确性.通过理论与仿真优化分析,提出了采用C型膜片一体化硅压阻式压力传感器结构,可动薄膜选用方膜边长为1000μm,厚度为50μm,实现0~2 MPa的压力测量. 相似文献
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This paper presents a novel high sensitive MEMS capacitive pressure sensor that can be used as a part of LC tank implant circuit for biomedical applications. The pressure sensor has been designed to measure pressures in the range of 0–60 mmHg that is in the range of intraocular pressure sensors. Intraocular pressure sensors are important in detection and treatment of an incurable disease called glaucoma. In this paper two methods are presented to improve the sensitivity of the capacitive pressure sensor. First low stress doped polysilicon material is used as a biocompatible material instead of p++silicon in previous work (Gu in Microfabrication of an intraocular pressure sensor, M.Sc Thesis, Michigan State University, Department of Electrical and Computer Engineering, 2005) and then some slots are added to the poly Si diaphragm. The novelty of this research relies on adding some slots on the sensor diaphragm to reduce the effect of residual stress and stiffness of diaphragm. The slotted diaphragm makes capacitive pressure sensor more sensitive that is more suitable for measuring intraocular pressure. The results yield a sensor sensitivity of 1.811 × 10?5 for p++silicon clamped, 2.464 × 10?5 1/Pa for polysilicon clamped and 1.13 × 10?4 1/Pa for polysilicon slotted diaphragm. It can be seen that the sensitivity of the sensor with slotted poly Si diaphragm increased 6.2 times compared with previous work (clamped p++silicon diaphragm). 相似文献
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针对高温环境下压力测量需求,提出采用蓝宝石材料来构造适用于特殊环境下的光纤高温法珀压力传感器。基于圆形膜片压力敏感原理设计了传感器敏感单元结构尺寸,通过Comsol有限元软件建立了敏感单元模型,对敏感膜片的表面位移及应力分布情况进行了仿真,验证了传感器设计的可靠性;同时分析了传感器的温敏效应,结果表明随温度升高,传感器的灵敏度会增大,会对压力测量产生误差,约为1.51kPa/℃,上述结果为蓝宝石高温压力传感器的结构和性能优化设计提供了有效指导。 相似文献
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Theoretical studies of a silicon integral pressure transducer characteristics are made. The sensitive element of the transducer is a strain sensitive controlled unijunction transistor (SSCUJT) with controlling p–n-junction. The transistor has horizontal structure and could be considered as combination of p–n–p bipolar and n+–p–n+ unijunction transistors. The unijunction transistor is integrated in the planar side of the silicon square-shaped diaphragm with two rigid islands (the EE-type diaphragm). Using Green’s function formalism characteristics of the pressure transducer are investigated and the optimal topology of the sensitive element is determined. It has been shown that high sensitive pressure sensors with frequency output could be created on base of the unijunction transistors. 相似文献
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Polysilicon strain-gauge transducers 总被引:2,自引:0,他引:2
Strain-gauge transducers with polysilicon resistors can be used successfully in various sensors. They have some advantages in comparison to monocrystalline silicon strain-gauge transducers. However, not enough information is available for the qualitative design of such transducers. The theoretical principles of the temperature dependence of the output signal for a constant supply voltage and constant supply current are described. A polysilicon strain-gauge transducer with a square diaphragm fabricated on the discussed principles is reported. It has an operating temperature range of −190- +300 °C, and weak temperature dependence of the output signal. 相似文献