Temperature behavior of dielectric and piezoelectric properties of samarium-doped lead titanate ceramics

The dielectric and electromechanical coupling properties of Sm-doped and Mn-doped PbTiO(3) ceramics were investigated from 4.2 to 300 K. The upper and lower limits of the ceramic dielectric and piezoelectric properties were calculated by averaging the single-domain constants that were determined from a phenomenological theory. Comparisons of the measured and calculated properties were then made. The measured dielectric permittivity epsilon(T)(33) and piezoelectric strain coefficient d(33) appear to be mainly due to the averaging of the intrinsic single-domain response. The large piezoelectric and electromechanical anisotropies present in modified PbTiO(3) ceramics also appear to be an intrinsic property of the material. The piezoelectric coefficient d(31), as well as the planar coupling coefficient k(p), was found to have very small values over two temperature regions, from 120 to 170 K and from 240 to 270 K.     

Formation and properties of proton-exchanged and annealed LiNbO3 waveguides for surface acoustic wave

The proton-exchanged (PE) and annealed PE (APE) z-cut LiNbO₃ waveguides were fabricated using H₄P₂O₇. The positive strain, c-axis lattice constant change (Δc/c), was calculated to be about +0.43%, which was almost independent of the exchanged conditions. The penetration depth of H measured by secondary ion mass spectrometry (SIMS) exhibited a step-like profile, which was assumed to be equal to the waveguide depth (d). The surface acoustic wave (SAW) properties of PE and APE z-cut LiNbO₃ samples were investigated. The phase velocity (V_p) and electromechanical coupling coefficient (K ²) of PE samples were significantly decreased by the increase of kd, where k was the wavenumber (2π/λ). The insertion loss (IL) of PE samples was increased by the increase of kd and became nearly constant at kd>0.064. The temperature coefficient of frequency (TCF) of PE samples allowed an apparent increase with kd, reaching a maximum at kd=0.292, then slightly decreased at higher kd. The effects of annealing resulted in a restoration of V_p and an improvement of IL     

Optimized Stoneley wave device by proper choice of glass overcoat

The characteristics of a Stoneley wave propagated along an interface between a piezoelectric material and an isotropic material were investigated both theoretically and experimentally. First, the condition for the existence of Stoneley waves was shown for various piezoelectric materials. A rule of thumb for selecting the combination of the two materials was obtained. Then, LiTaO₃ was selected as the piezoelectric material and SiO₂ was selected the isotropic material. After the calculation of the Stoneley wave characteristics, actual devices were fabricated and measured. The experimental results were found to be in good agreement with the theory; zero slope temperature and high electromechanical coupling coefficient ( K²=1.5%) were obtained for Stoneley wave propagation between SiO₂/X-148° LiTaO₃. As a result, future surface-acoustic-wave (SAW) devices can be made without any package     

Optimal cuts of langasite, La3Ga5SiO14 for SAW devices

The results of a theoretical and experimental investigation of the SAW propagation characteristics in an optimal region of langasite defined by the Euler angles φ from -15° to +10°, &thetas; from 120° to 165°, and ψ from 20° to 45° are presented. Based on temperature coefficients of the elastic constants derived from experimental data, some optimal orientations of langasite characterized by high electromechanical coupling factor (k²), zero power flow angle (PFA) and low or zero temperature coefficient of frequency (TCF) were found. The SAW velocity in the region of interest is highly anisotropic; this results in a significant amount of diffraction, which must be taken into account in the search for orientations useful for SAW devices. An orientation having simultaneously zero PFA, zero TCF, negligible diffraction, and relatively high piezoelectric coupling has been found and verified experimentally. The experimental results are in excellent agreement with the calculated SAW characteristics. The frequency response of a SAW device fabricated on the optimal cut of langasite is presented and demonstrates that high performance SAW filters can be realized on this optimal cut of langasite     

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Green's function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.     

Simulation of characteristics of a SiO2/c-axis-oriented LiNbO3/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been realized to date utilize c-axis-oriented ZnO as the piezoelectric thin film. This material, with SiO2 overlay, shows excellent characteristics of a high phase velocity of over 10,000 m/s and a zero temperature coefficient, and it has been successfully applied to high-frequency SAW filters and resonators. To expand on materials used on diamond, the theoretical calculation has been carried out for LiNbO3/diamond, and a high electromechanical coupling coefficient up to 9.0% is expected. In this work, the characteristics of SiO2/LiNbO3/diamond were studied by computer simulation, emphasizing a zero temperature coefficient with a high coupling coefficient. Calculations are carried out for the phase velocity, the electromechanical coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa wave. As a result, SiO2/IDT/LiNbO3/diamond is found to offer a zero temperature coefficient with a very high coupling coefficient up to 10.1% in conjunction with a high phase velocity of 12,100 m/s.     

铌掺杂PMS-PZ-PT三元系压电陶瓷温度稳定性研究

研究了软性Nb₂O₅掺杂对PMS-PZ-PT三元系压电陶瓷温度稳定性能的影响.实验结果表明,适量的掺杂不仅能优化体系的压电性能,而且改善了体系的温度稳定性.改性后的三元系陶瓷频移小,机电耦合系数K₃₁的温度稳定性较好,同时压电常数d₃₁温度稳定性也得到了改善,能满足超声马达等器件对压电陶瓷材料性能的要求.     

Elastic, piezoelectric, and dielectric properties of 0.955Pb(Zn(1/3)Nb(2/3))O(3)-0.45PbTiO(3 ) single crystal with designed multidomains

The elastic, piezoelectric, and dielectric properties of a 0.955Pb(Zn(1/3)Nb(2/3))O(3)-0.045PbTiO(3 ) (PZN-4.5%PT) multi-domain single crystal, poled along [001] of the original cubic direction, have been determined experimentally using combined resonance and ultrasonic methods. At room temperature, the PZN-4.5%PT single crystal has rhombohedral symmetry. After being poled along [001], four degenerate states still remain. Statistically, such a domain-engineered crystal may be treated as having an average tetragonal symmetry, and its material constants were determined based on 4 mm symmetry. It was confirmed that the electromechanical coupling coefficient k(33) for the domain-engineered samples is >90%, and the piezoelectric constant d(33) is >2000 pC/N. A soft shear mode with a velocity of 700 m/s was found in the [110] direction. From the measured experimental data, the orientational dependence of phase velocities and electromechanical coupling coefficients was calculated. The results showed that the transverse and longitudinal coupling coefficients, k(31) and k(33), reach their maximum along [110] and [001], respectively.     

Analysis of viscosity sensitivity for liquid property detection applications based on SAW sensors

An investigation of viscosity sensitivity for liquid property detection applications based on the ZnO/SiO₂/Si layered structure Love mode surface acoustic wave (SAW) sensors is presented. One of our interests in this paper is to optimize the SAW viscosity sensor under the condition of temperature stability by considering the relations among electromechanical coupling coefficient, viscosity sensitivity and temperature coefficient of delay (TCD). Some important results have been obtained by solving the system of coupled electromechanical field equations and Navier–Stokes equation. It is found that the electromechanical coupling coefficient and viscosity sensitivity can be further improved by adjusting the thickness of SiO₂ thin film and a zero TCD device also can be obtained by introducing a SiO₂ thin film with proper thickness. We try to obtain a device which possesses the viscosity sensitivity as high as possible and has zero TCD. Another interest of this paper is to improve the traditional viscosity sensitivity expression by considering the coupling effect between the liquid viscosity and density. It is shown that the coupling effect cannot be neglected from the numerical results. This modification could make the obtained viscosity more accurate. This analysis is meaningful for the manufactures and applications of the ZnO/SiO₂/Si structure Love wave sensor for liquid property detection.     

Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

This paper investigates acoustic properties, including the temperature coefficient of elasticity (TCE), of fluorine-doped silicon oxide (SiOF) films and proposes the application of the films to the temperature compensation of RF SAW devices. From Fourier transform infrared spectroscopy (FT-IR), SiOF films were expected to possess good TCE properties. We fabricated a series of SAW devices using the SiOF-overlay/Cu-grating/LiNbO(3)-substrate structure, and evaluated their performance. The experiments showed that the temperature coefficient of frequency (TCF) increases with the fluorine content r, as we expected from the FT-IR measurement. This means that the Si-O-Si atomic structure measurable by the FT-IR governs the TCE behavior of SiO(2)-based films even when the dopant is added. In comparison with pure SiO(2) with the film thickness h of 0.3 wavelengths (λ), TCF was improved by 7.7 ppm/°C without deterioration of the effective electromechanical coupling factor K2 when r = 3.8 atomic % and h = 0.28λ. Fluorine inclusion did not obviously influence the resonators' Q factors when r < 8.8 atomic %.     

Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

High-frequency, thickness mode resonators were fabricated using a 7 microm piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO2) was selected as a diffusion barrier layer and gave good results when used in conjunction with silicon oxide (SiO2) as an etch stop layer. Using these conditions, devices were produced and the acoustic properties measured and modeled. The resonators showed a resonant frequency of about 200 MHz, an effective electromechanical coupling coefficient of 0.34, and a Q factor of 22. Modeling was based on a Mason-type model that gave good agreement between the experimental data and the simulations. The latter showed, for the PZT thick film, an electromechanical coupling coefficient of 0.35, a stiffness of 8.65 x 10(10) N x m(-2) and an e33,f piezoelectric coefficient of 9 C x m(-2).     

Proton-exchanged Z-cut LiNbO3 waveguides for surfaceacoustic waves

Proton-exchanged (PE) waveguides in Z-cut LiNbO₃ have been fabricated using benzoic acid. Secondary-ion mass spectrometry (SIMS) measurements show that the distribution of hydrogen in the PE Z-cut LiNbO₃ samples exhibits a step-like profile with the diffusion constant D₀ and the activation energy Q of about 2.82×10⁸ μm²/h and 87.76 kJ/mol, respectively. On the other hand, the important parameters for the design of surface acoustic wave (SAW) devices are measured and discussed. The results show that the phase velocity and electromechanical coupling coefficient decrease with the increase of kd, where k is the wavenumber and d is the waveguide depth. The variation of insertion loss becomes saturated at about kd=0.068 with a maximum increase of about 4~5 dB. The temperature coefficient of delay calculated from the frequency change of the output of SAW delay line shows an evident increase in the PE layer. Moreover, the effects of postannealing can result in a restoration of the decreased velocity and an improvement of the insertion loss     

Dielectric and electromechanical properties of rare earth calcium oxyborate piezoelectric crystals at high temperatures

The electrical resistivity, dielectric, and electromechanical properties of ReCa(4)O(BO(3))(3) (ReCOB; Re = Er, Y, Gd, Sm, Nd, Pr, and La) piezoelectric crystals were investigated as a function of temperature up to 1000 °C. Of the studied crystals, ErCOB and YCOB were found to possess extremely high resistivity (p): p > 3 × 10(7) ω.cm at 1000 °C. The property variation in ReCOB crystals is discussed with respect to their disordered structure. The highest electromechanical coupling factor κ(26) and piezoelectric coefficient d(26) at 1000°C, were achieved in PrCOB crystals, with values being on the order of 24.7% and 13.1 pC/N, respectively. The high thermal stability of the electromechanical properties, with variation less than 25%, together with the low dielectric loss (<46%) and high mechanical quality factor (>1500) at elevated temperatures of 1000 °C, make ErCOB, YCOB, and GdCOB crystals promising for ultrahigh temperature electromechanical applications.     

BAW temperature sensitivity and coupling in langanite

One of the new materials belonging to the trigonal class 32, to which quartz belongs, is langanite (LGN, La3Ga5.5Nb0.5O14). High-quality LGN single crystals are now available, and, although similar in composition and structure to langasite (LGS, La3Ga5SiO14), LGN has smaller thermal expansion coefficients and comparable piezoelectric constants to LGS. These are desirable material properties for both SAW and BAW applications that require low frequency dependence on temperature. This paper examines in detail the LGN characteristics: phase velocity, temperature coefficient of frequency (TCF), electromechanical coupling coefficient, and power flow angle for both singly and doubly rotated plate cuts. Contour plots of these characteristics are constructed, revealing orientation regions where zero TCF and high coupling exist and suggesting potentially interesting cuts for practical BAW device design. Temperature compensated cut regions with coupling coefficients as high as 0.16 are predicted, which is twice the value for AT-cut quartz, along with a temperature compensated cut with cubic behavior around room temperature for one of the sets of material constants used. With such desirable properties, LGN is a promising candidate material for BAW applications requiring low temperature sensitivity with superior bandwidth characteristics due to its values of coupling coefficient larger than quartz. Several other orientations with low TCF and high coupling are also identified.     

Simulation of characteristics of a LiNbO3/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO2/ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO3 on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO3/diamond with the assumption that the LiNbO3 film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO3/diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.     

Characteristics of pure-shear mode BAW resonators consisting of (1120) textured ZnO films

Thickness pure-shear mode film bulk acoustic wave resonators (FBARs) made of (1120) textured ZnO films have been fabricated. We also have fabricated FBAR structure consisting of two layers of the (1120) textured ZnO film with opposite polarization directions. This FBAR structure operated in second overtone pure-shear mode and allowed shear-mode FBARs at higher frequency. The effective electromechanical coupling coefficients k2 of pure-shear mode FBAR and second overtone pure-shear mode FBAR in this study were found to be 3.3% and 0.8%, respectively. The temperature coefficient of frequency (TCF) of thickness extensional mode FBAR, pure-shear mode FBAR, and second overtone pure-shear mode FBAR were measured in the temperature range of 10-60 degrees C. TCF values of -63.1 ppm/degrees C, -34.7 ppm/degrees C, and -35.6 ppm/degrees C were found for the thickness extensional mode FBAR, the pure-shear mode FBAR, and the second overtone pure-shear mode FBAR, respectively. These results demonstrated that pure-shear mode ZnO FBARs have more stable temperature characteristics than the conventional thickness extensional mode ZnO FBARs.     

Scattering matrix approach to STW resonators

The scattering matrix method was used for the analysis of surface transverse wave (STW) resonators on quartz. An expression for the transfer function of the resonators with different numbers of electrodes in the reflectors was derived. It was found that, for a proper ratio of these numbers, the spurious signal level below the resonance frequency can be lowered. The STW resonator for the frequency near 1090 MHz was designed, fabricated, and measured. By matching the measured and calculated transfer functions, the velocity, the electromechanical coupling coefficient, and the reflection coefficient of one aluminium strip of the STW on the 36°Y-cut quartz were determined. The insertion loss about 7 dB, loaded quality coefficient near 4200, and the spurious signal level about 5 dB lower compared with the resonance one were obtained for the resonator     

PZT/环氧树脂1-3-2型压电复合材料的制备及性能

采用压电陶瓷基板与1-3型压电复合材料串联连接,沿表面两相互垂直的方向切割PZT陶瓷,在切槽间浇注环氧树脂,制备出新型的1-3-2型压电复合材料.实验测试了材料的压电和介电性能,结果表明其d33常数达到400 pC/N,振动位移113.5pm,声速3500m/s,声阻抗17.6Mraly,厚度机电耦合系数0.62,带宽3.6kHz,相对介电常数817,介质损耗0.02.     

Dielectric behaviour and improved anisotropy in piezoelectric properties of modified lead titanate ceramics

Polycrystalline samples of the nominal composition Pb_0.76−xSm_xCa_0.24Ti_0.98Mn_0.02O₃ were prepared using a solid state reaction technique. Single-phase formation was checked through X-ray diffraction. Dielectric properties were studied as a function of frequency and temperature. The transition temperature determined from dielectric constant vs. temperature plots was found to decrease with increasing Samarium substitution. Poling field was optimized to achieve maximum piezoelectric properties. Piezoelectric coefficients e.g. d₃₃, d₃₁, g₃₃, g₃₁, g_h, d_h, k_t and k_p were measured. The experimental results successfully showed that samarium substitution is helpful to obtain a much higher value of thickness electromechanical coupling coefficient, k_t (∼ 57%) while maintaining a smaller planar electromechanical coupling coefficient, k_p in PCT ceramics.