功率VDMOS热阻的温度系数特性研究

对功率VDMOS源漏间寄生PN结正向结电压VDS随温度变化的特性进行了测量,发现VDS与结温T存在良好的线性关系,通过理论推导进行了分析验证。同时发现,温度系数α=dVDS/dT与测试电流IF满足指数关系;且VDS-T线性曲线在不同的IF下具有聚焦特性,即在绝对零度时,不同IF下的VDS具有相同的值。经过对试验点的拟合分析,得到新的VDS表达式,很好地解释了VDS-T曲线与IF的关系及其在不同IF下的聚焦特性。该研究有利于实现结温的精确测量,保证热阻测试结果更加准确可靠,为器件的热特性分析提供强有力的依据。     

GaAs MESFET正向肖特基结电压温度特性的研究

本文对ＧａＡｓＭＥＳＦＥＴ正向肖特基结电压Ｖｇｓｆ随温度的变化特性进行了测量与分。析，得到了在较宽的温度范围内恒定电流下的Ｖｇｓｆ随温度的变化有很好的线性关系，并发现其温度系数α＝ｄＶｇｓｆ／ｄＴ与测试电流有关，随着Ｉ的增大｜α｜减少．经过对试验点的拟合发现，ｋＴ与Ｉ的变化满足指数关系，且Ｖｇｓｆ随温度的变化曲线在不同的测试电流下具有聚焦特性，即在绝对零度时，不同电流下的Ｖｇｓｆ具有相同的值．据此，我们得到了新的肖特基结电流电压关系式，很好地解释了Ｖｇｓｆ－Ｔ曲线与测试电流的关系及其不同测试电流下的聚焦特     

基于脉冲式U-I 特性的高功率型LED 热学特性测试

热学特性是影响功率型LED光学和电学特性的主要因素之一,设计了一套基于脉冲式U-I特性的功率型LED热学特性测试系统,可以测试在不同结温下LED工作电流与正向电压的关系,从而获得LED的热学特性参数。该系统通过产生窄脉冲电流来驱动LED,对其峰值时的电压电流进行采样,同时控制和采集LED的热沉温度,从而获得不同温度下LED的U-I特性曲线。与其他U-I测试系统相比,文中采用了窄脉冲(1 s)工作电流,LED器件PN结区处于发热与散热的交替过程,不会造成大的热积累,大大提高了测量精度。实验中,对某功率型LED进行了测试,获得了该器件的电压、电流和结温特性曲线,并利用B样条建立该器件的U-I-T模型,进而实现了对其结温的实时在线检测。     

器件热阻随测试结温变化规律研究

为探究半导体分立器件电学法热阻测试时器件结温与热阻的变化规律,开展了基于热阻测试实验分析。详细介绍了热阻测试程序和典型热阻测试电路,并对4款典型VDMOS器件开展热阻测试,结合器件结构特性、热响应曲线和微观导热理论中声子导热系数与温度关系,研究获得器件热阻与结温的变化规律。通过热阻与结温的正相关性规律,有效提升器件在老炼和实际工况下结温计算的准确性。     

多孔硅M/PS结的研究

对不同金属形成的M／PS／Si/Al结构样品进行测试，发现其I－V特性曲线具有相似的形状，区别仅在于高偏压下的串连电阻不同，通过进行表面态对M／PS影响的分析可知M／PS具有欧姆行为特性。     

ESD应力下深亚微米GGNMOS二次击穿物理级建模仿真

基于静电放电(ESD)应力下深亚微米栅接地N型场效应晶体管(GGNMOS)二次击穿的物理特性,将建立的热击穿温度模型、热源模型与温度相关参数模型相结合,提出了一种新的电热模型,并进行了优化。基于这些模型,可仿真出器件的二次击穿电流值It2(GGNMOS的失效阈值),进而模拟出GGNMOS全工作区域的VD-ID曲线。对两种不同的GGNMOS样品进行模拟仿真,将得到的结果与TLP(传输线脉冲)实验测试的结果相比较,证实了模型的可行性。利用该物理级模型,可快速评估GGNMOS的工艺、版图参数以及脉冲应力宽度对ESD鲁棒性的影响。     

大功率白光LED的结温测量

大功率LED器件的结温是其热性能的重要指标之一,温度对LED的可靠性产生重要的影响。采用板上封装的方法,利用大功率芯片结合金属基板封装出了大功率白光LED样品,利用LED光强分布测试仪测试了器件的I—V曲线,用正向电压法测量了器件的温度敏感系数,进而通过测量与计算得到器件的结温和热阻。最后利用有限元对器件进行实体建模,获得了器件的温度场分布。测量结果表明：正向电压与结温有很好的线性关系,温度敏感系数为2mV·℃^-1,LED的结温为80℃,热阻为13℃·W^-1。有限元模拟的结果与实测值具有良好的一致性。     

低压应用的毫米波AlN/GaN MIS-HEMT器件研制

提出了一种适用于低电压工作的毫米波AlN/GaN MIS-HEMT器件,开展了材料外延结构的设计,在SiC衬底上生长了AlN/GaN外延材料。基于此材料开展了器件制作,优化了高温快速退火工艺,获得良好的欧姆接触电阻。对所制备的器件进行直流测试,结果显示,电流输出能力为2.4 A/mm,跨导极值为518 mS/mm,小信号ft达到85 GHz,fmax大于141 GHz。在5G毫米波段28 GHz频率点测试了大信号特性,当VDS =3 V时,输出功率密度为0.55 W/mm,功率附加效率(PAE)为40.1%；当VDS = 6 V时,输出功率密度为1.6 W/mm,PAE达到47.8%。该器件具有低压毫米波应用的潜力。     

异常掺杂引起的AlGaInP同型结结构

用电化学C－V和I－V特性分析的方法，对Mg掺杂在MOCVD生长AlGaInP发光二极管（LED）的影响进行了研究。通过电化学C－V分析，确定了在生长结构中Mg掺杂从有源层到GaP窗口层由高到低的情况；用I－V特性分析的方法对器件结构进行了分析，发现了异常的实验结果。同时理论计算得到了同型结（N^ -N,P^ -P)的势垒高度和空间电荷区的宽度，由此得到了在同型结两侧浓度比不同时的差异，极好的解释了异常的I－V测试结果。     

LED在光注入与电注入下的电特性

本文通过对发光二极管电压-电流特性的影响因素的研究,探讨了电流注入和光激励下其电压电流特性的关系。通过分析在相同注入强度时电流注入和光激励下LEDI-V曲线的区别与联系,发现I-V曲线在电压值上的明显差异来自于不同注入方式下产生的结温差异。实验表明如果通过脉冲光激励使得在激励点产生的热效应差异能够被忽略,以致于两种注入方式下结温几乎相同,那在电流注入和光激励下LED的电压电流特性将会一致。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.