计算机生成全息图在非球面检测中的应用

本文论述了在泰曼—格林干涉仪上用计算机生成全息图检测非球面面形的原理和方法,讨论了线型全息图的数学模型。利用全息图对一凹抛物面镜进行了检测,并给出了检测精度。     

基于干涉法的非球面测量技术

随着光学精密加工技术的发展,非球面光学元件在各种光学系统中广泛应用,高精度非球面检测技术对非球面光学元件的发展意义重大。论述了基于干涉法的非球面面形误差检测技术。根据检测原理,分别对零位干涉检验法与非零位干涉检验法进行了详细介绍。概述了近年来主流的非球面检测技术现状,展望了非球面面形检测技术的发展趋势。     

非球面光学元件面形检测方法

随着科技的发展,尖端产品和现代化武器对光学元件质量要求越来越高,非球面光学元件因性能优良而应用越来越广泛,需求越来越迫切,非球面元件面形检测也成为研究者的工作重点,该文着重阐述现有的非球面光学元件面形检测方法,介绍各种方法的检测原理,并给出了各种方法的优缺点。     

基于球坐标的逆向哈特曼面形测量法

提出一种基于球坐标的逆向哈特曼面形测量法,能够有效地降低非球面测量时的光线斜率,同时提高哈特曼法测量的动态范围和空间分辨率。利用该方法对口径340 mm非球面度较大的表面进行仿真测量,结果显示面形测量误差可保证在λ/10以内,高于直角坐标下的测量精度。该方法可用于光学生产现场对产品进行快速高精度测量, 测量成本低。     

补偿器法检测非球面过程中易出现的误区

补偿器法是测量非球面反射镜面形误差的一种重要的方法.在检测过程中,各个元件之间的调整会带来初级像差,这是影响最终检测结果的一个关键因素.本文以一个1 m 口径的非球面反射镜为例,首先详述了其面形误差检测的设计和测量过程,然后分析了各个元件的调整会带来相应的初级像差,随后给出了实际检测过程中出现的误区,并对其进行了分析和讨论,结合实际的检测过程得出了相应的判断和消除的方法.最后,分别对300 mm、700 mm 口径非球面反射镜与本文1 m 非球面镜的检测结果进行了比较,证明了该误区会使最后的检测数据发生变化,从而使最后的检测结果失真,并验证了先判别后消除方法的可靠性.最后利用正确的方法,检测得到1 m口径非球面被测镜的RMS 面形误差为0.038 λ,满足指标要求.     

光学元件检测技术的研究

介绍了光学非球面加工精磨阶段和抛光阶段的检测技术、柱面镜面形的测量方法、超高精度球面面形的测量方法和光学元件参数的高精度测量技术。     

非球面非零位横向剪切干涉检测与波前重建

本文分析了非球面非零位检测中3种典型的非球面度及其变化率、调整误差、回程误差以及干涉仪系统误差,提出了非球面度变化率是影响检测误差的主要因素,并给出了非球面非零位检测面形加工误差的确定方法.对基于Zernike多项式拟合的最小二乘法和系数转换法进行了对比研究,分析了剪切量和多项式拟合阶数对波前重建精度的影响,并给出了数值模拟结果.为了验证以上方法的可行性及检测精度,针对一单点金刚石车削的抛物面反射镜,利用顶点球作为测试波前进行非零位横向剪切干涉检测,并用最小二乘法进行波前重建.实验结果表明,在非球面度变化率最大的反射镜边缘处面形误差最大,达到0.203μm,研究结果为横向剪切干涉仪用于非球面加工过程中在位检测提供了技术支撑.     

大型非球面主镜能动磨盘加工模型

大型非球面主镜能动磨盘加工（CCAL）是有别于传统加工和数控加工（CCOS）的新型加工工艺。通过对能动磨盘结构的研究,建立了工件的能动磨盘磨削模型,分析了加工中的边缘效应,并采用压强补偿的方法对磨削模型进行了优化。在Φ1300mm（F／2）非球面主镜能动磨盘加工实验中,以该优化的模型仿真的主镜加工面形与经Hartmann-Shack传感仪检测的实际面形基本吻合。     

支撑光学制造的几何量计量技术(英文)

几何量计量技术大量应用于光学制造业以检测零件质量和控制生产过程,是光学制造业的核心技术,涉及微纳米结构的几何量计量以及平面、球面、非球面、直纹曲面及自由曲面的面形计量.本文综述了德国联邦物理技术研究院支撑光学制造的部分计量技术.介绍了一种测量范围为25 mm×25 mm×5 mm的计量型大范围原子力显微镜(AFM),可灵活多样地测量各种微纳结构.介绍了一种新颖的AFM探针(ACP),可实现微纳结构侧壁形貌的直接、无损测量.介绍了一种应用Flared AFM探针的真三维AFM及其用于减少针尖磨损的矢量探测技术,可应用于各种纳米结构的真三维测量.介绍了可用于平面和中等曲面面形绝对测量的两种方法:差分型激光束偏转法和可溯源多路传感器法(TMS).讨论了面形测量中存在的挑战性难题.介绍了可用于面形测量的高精度三坐标测量机.     

复杂非球面镜高效超精密车削加工法(英文)

本文中对复杂面形的非球面镜进行了分类,并从加工方法和加工路径优化设计等方面研究了复杂非球面镜的超精密车削方法.对回转对称的复杂非球面镜进行了加工实验,并借助超精密测量技术对各段曲面进行面形测量,依据测量结果实现面形补偿加工.最终粗糙度Ra达5.14 nm,形状精度P-V值达200 nm.采用提出的方法对非回转对称的非球面阵列进行加工路径设计,根据具体面形进行加工参数选择和实际加工,得到粗糙度Ra为7.81nm的表面.实验结果证明了提出的加工方法高效实用,可以满足大部分复杂非球面的应用需求.     

复杂型面测量中测头中心的轨迹曲面及测头半径的三维补偿

根据球形测头的中心轨迹与被测曲面互为等距曲面的关系，采用双三次Ｂ样条曲面建立了描述测头中心轨迹的数学模型，并提出了一种新的三维测头半径补偿方法。     

非球面表面形状的线测量技术

描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统.首先,论述了一般用于平面形状测量的两点法不能直接用于非球面形状测量的原因在于测头的设置误差会引起很大的形状测量误差.提出了先通过两点法测量平面形状得出机床的运动误差,然后对测量非球面形状的另外一个测头的输出进行补偿以得出正确的非球面形状.用此系统测量了一个直径为30 mm的非球面镜头的表面形状.     

Efficient testing of segmented aspherical mirrors by use of reference plate and computer-generated holograms. I. Theory and system optimization

Telescopes with large aspherical primary mirrors collect more light and are therefore sought after by astronomers. Instead of large mirrors as a single piece, they can be made by use of numerous smaller segments. Because the segments must fit together to create the effect of a single mirror, segmented optics present unique challenges to fabrication and testing that are absent for monolithic optics. We have developed a new method for measuring large quantities of segments accurately, quickly, and economically using an interferometric test plate and computer-generated hologram (CGH). In this test, the aspheric mirror segments are interferometrically measured by use of a test plate with a best-fit spherical surface. The aspherical departure is accommodated with a small CGH that is imaged onto the test plates. The radius of curvature is tightly controlled by maintaining the gap between the test plate and the segment. We present a summary of the test and give the basic design tradeoffs for using a single system to measure all of the segments of a large aspheric mirror.     

Design of an aspherical lens to generate a homogenous irradiance for three-dimensional sensors with a light-emitting-diode source

A design of a large-numerical-aperture aspherical singlet for three-dimensional (3-D) sensor applications is presented. This lens can be used to generate a homogenous irradiance on the target in a 3-D sensor, which is based on the principle of time of flight and uses an LED as light source. A numerical method was used in the design. The designed planoaspherical singlet has a numerical aperture of 0.67, low refractive index, and moderate surface shape for easy fabrication. The simulation results revealed that the irradiance deviation within 97% of the designed area is less than 5% and that the transmittance of the lens is greater than 90.5%. The results from a Lambertian source were compared with those from a point source.     

原子力显微镜的发展与表面成象技术

原子力显微镜（ＡＦＭ）因其具有超高三维分辨，非接触无损成像，显微倍率连续可调等特点，被誉为是目前国际显微宾重大在和现代表面分析技术的革命性能，通过采用ＡＦＭ对材料的表面实时扫描成象，获得更为真实而丰富三维图像信息，其在材料的表面科学研究领域中将人 应用前景。     

计算机数控应用盘面形研究

简要讨论了计算机控制应力盘抛光大口径高陡度非球面的基本原理,用Ｚｅｒｎｉｋｅ多项式拟合的数学方法研究应力盘工作过程中的面形动态变化,对这一方法所能达到的精度进行了分析,给出了计算结果。     

Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new (to our knowledge) optical test method, in which the Fizeau principle is now perfectly fulfilled by generating reference and measuring wavefront on the last optical surface, which carries a diffractive optical element. This method has been examined experimentally by testing a reference f/0.68 spherical mirror and can be applied identically for testing aspheres. Several advantages of this method are discussed and proved experimentally.     

大矢高凸柱面的超精密车削轨迹计算方法研究

阵列微结构光学元件广泛用于各种光束匀化场合,而常规的加工方法难以满足大矢高凸柱面阵列的精度要求.本文采用超精密车削成型法,分析了影响金刚石车削的主要因素,设计了顺序搜索法和二分搜索法寻找车削轨迹,并对比了两种方法的优缺点,结合Matlab软件用二分搜索法成功找到车削轨迹及数控程序,并在超精密车床上进行了车削实验,得到了...     

Computer simulation on reconstruction of 3-D flame temperature distribution

 To measure non-symmetric unsteady three dimensional temperature distribution in flame by simple, economic, fast and accurate means, and to apply a priori information to the measurement both sufficiently and efficiently, we conducted computer simulations. Simulation results proved that finite series-expansion reconstruction method is more suitable for measurement of temperature distribution in flame than transform method which is widely used in medical scanning and nondestructive testing. By comparing errors of simulations with different numbers of views, different domain shapes, different numbers of projections per view, different angles of views and different grid shapes, etc., we find that circle domain, triangular grid and sufficient number of projections per view, can improve the accuracy in the reconstruction of 3-D temperature distribution with limited views. With six views, errors caused by reconstruction computation are reduced, they are smaller than those caused by measurement. Therefore, a comparatively better means of measuring 3-D temperature distribution in flame with limited projection views by emission tomography is achieved. Experimental results also showed that the method we used was appropriate for measurement of 3-D temperature distribution with limited number of views [1].     

集成光学非球面消球差双凸波导透镜的研制

针对微透镜制作采用的球透镜研磨,多组分玻璃基板离子交换,结晶化玻璃基板光热法,本文提出非球匠消球差双凸波导透镜设计、制备及参数测试方法.该方法根据集成光学原理,研制了一种非球面消球差双凸波哥透镜.该透镜数值孔径大,放大倍数高,接近衍射极限,采用光刻、复制工艺,结构简单,一致性好.实验结幂表明,NA=0.35,β=6.932,光强分布与理论值一致,达到设计要求.