406～920nm的绝对光谱响应高准确度标度

描述美国国家标准与技术研究院所建立的４０６￣９２０ｎｍ绝对光谱响应标度，该标度完全是建立在探测器测量基础上的，并可溯源到ＮＩＳＴ高准确度低温辐射计。硅光电二极管光吸收探测器被用来将光功率测量由ＨＡＣＲ传递到进行日常校准的单色仪装置。传递也包括建立硅光电二极管光吸收探测器的量子效率模型，最后给出了这些测量为基础的ＮＩＳＴ现有能力的简单介绍。     

200～400nm波段光电探测器光谱响应度测量装置研究

本文叙述了200~400nm波段光电探测器光谱响应度的测量装置原理、测量系统及不确定度。采用紫外光谱强度大的氙灯作为光源,采用紫外分光效率高的单色仪进行分光,腔型热释电探测器与标准硅光电探测器进行相对光谱响应比较得到标准硅光电探测器相对光谱响应度。绝对值标定则是利用低温辐射计对无窗紫敏硅光电探测器进行测量后再传递到标准硅光电探测器,从而最终测量出标准硅光电探测器在紫外波段的绝对光谱响应度。     

关于新的光电探测器光谱响应度工作标准的研究

本文介绍了新的光电探测器光谱响应度工作标准 ,该项标准参加了 2 0 0 0年CCPR(国际计量委员会所属光度和辐射咨询委员会 )组织的国际比对。在新的工作标准中 ,用调制光代替原来的直流光 ,以减少杂散光、噪声等对测量准确度的影响 ;用锥腔型热释电探测器代替原来的热电堆探测器作为参考探测器 ,用锁相测量仪器代替原来的直流测量仪器并增加温度控制 ,以便提高测量系统的灵敏度和光谱响应度标准的平坦程度 ,进而提高准确度 ;以双单色仪代替原来的单色仪 ,大大减少杂散光 ;同时增加了光谱响应度的绝对定标     

高精度宽光谱低温绝对辐射计研制

研制了一种可用于高精度光辐射功率测量以及光电探测器的光谱响应率校准的低温绝对辐射计,其核心探测器采用壁厚为50μm、内表面具有高分散性碳纳米管黑色镜面涂层的高纯铜腔。经实验分析得到该核心探测器腔体对0.25～16μm波段光的吸收率大于0.9999,对0.5～16μm波段光的吸收率大于0.99995。低温绝对辐射计工作在5.2K时,等效噪声功率在纳瓦(n W)量级。经考察分析评定,低温绝对辐射计对0.25～16μm波段100μW水平的光辐射功率进行测量的相对标准不确定度为0.041%,对0.5～16μm波段1mW水平的光辐射功率进行测量的相对标准不确定度为0.015%。     

基于低温辐射计的光探测器响应度基准

基于低温辐射计建立了一系列激光波长上光探测器响应度测量基准。进行了基准装置性能的研究,应用光辐射有效加热功率检验方法进行了不确定度评估。在氦氖、氩氪离子以及钛蓝宝石激光器的10个波长上测量了作为标准探测器的陷阱探测器的响应度。在氦氖、氩氪离子激光波长测量结果的不确定度达到0.8×10^-4,在钛蓝宝石激光器达到1.1×10^-4。对标准探测器的面响应均匀性、非线性、偏振响应、角度响应等特性对响应度测量结果的影响进行了研究。     

硅光电探测器光谱响应度测量标准装置

本文介绍了硅光电探测器光谱响应度测量的原理和装置，描述了相对和绝对光谱响应度标定方法，详细分析了引起标定误差的因素和误差合成，简要分析了国际比对结果。本装置的波长范围为３００￣１０００ｎｍ，相对光谱响应的不确定度（１σ）为０．２１％￣０．８６％，绝对光谱响应的不确定度（１σ）为０．２５％￣０．８７％。     

红外探测器光谱响应率定标方法

采用新的方法对波长范围1-3μm的红外探测器绝对光谱响应率进行定标.红外探测器的光谱响应率定标是在两套定标系统上利用两种参考探测器实现的.首先在红外光谱比较系统上利用一个平响应的腔式热电堆探测器作为参考探测器,测量待测红外探测器相对于标准探测器的连续光谱响应率;然后在可见一近红外定标系统上,利用低温辐射计和激光器在几个单立波长上进行绝对光谱响应率测量.这样,通过计算就能得出待测红外探测器在每个波长上的绝对光谱响应率.采用上述方法对TS-76探测器进行光谱响应率定标,联合不确定度小于0.95%.     

荧光量子效率绝对法测量系统校准及不确定度评定

荧光量子效率是发射与吸收的光子数之比,是表征荧光材料发光性能的关键参数。然而,用于绝对法测量荧光量子效率的光路和探测器未经校准溯源或是校准方法不当,会造成测量光谱的不准确,进一步影响荧光量子效率计算结果的不准确。采用汞氩灯对单色仪进行校准,保证了激发波长和发射波长的准确性,利用标准辐射源对光路、发射单元单色仪和探测器进行光谱相对强度校准,保证了激发波段和发射波段光谱相对强度的准确性;最后从测量模型出发,对测量不确定度进行了分析,得到在300~360nm的激发光波段和370~900nm的发射光波段内相对合成标准不确定度为3.58%,相对扩展不确定度为7.16%,k=2。通过对单色仪波长校准以及对光谱相对强度进行校准,为荧光量子效率的准确测量提供了参考。     

NPL改进的光谱响应标准（400nm—20μm）（上）

英国国家物理实验室已建立了两套光谱响应标准。用高量子效率的硅光电二极管建立４００－９２０ｎｍ范围内的光谱响应标准，ＮＰＬ此标准的传递不确定度为０．１％。用装有半球形反射腔的热释电探测器建立了１－２０μｍ范围内的光谱响应经标准的不确定度小于１．６％。     

NPL改进的光谱响应标准(400nm～20μm)(一)

英国国家物理实验室已建立了两套光谱响应标准。用高量子效率的硅光电二级管建立400～92Onm范围内的光谱响应标准，NPL此标准的传递不确定度为0．1％。用装有半球形反射腔的热释电探测器建立了1～20μm范围内的光谱响应标准，此标准的不确定度小于1．6％。     

Intramural Comparison of NIST Laser and Optical Fiber Power Calibrations

The responsivity of two optical detectors was determined by the method of direct substitution in four different NIST measurement facilities. The measurements were intended to demonstrate the determination of absolute responsivity as provided by NIST calibration services at laser and optical-communication wavelengths; nominally 633 nm, 850 nm, 1060 nm, 1310 nm, and 1550 nm. The optical detectors have been designated as checks standards for the purpose of routine intramural comparison of our calibration services and to meet requirements of the NIST quality system, based on ISO 17025. The check standards are two optical-trap detectors, one based on silicon and the other on indium gallium arsenide photodiodes. The four measurement services are based on: (1) the laser optimized cryogenic radiometer (LOCR) and free field collimated laser light; (2) the C-series isoperibol calorimeter and free-field collimated laser light; (3) the electrically calibrated pyroelectric radiometer and fiber-coupled laser light; (4) the pyroelectric wedge trap detector, which measures light from a lamp source and monochromator. The results indicate that the responsivity of the check standards, as determined independently using the four services, agree to within the published expanded uncertainty ranging from approximately 0.02 % to 1.24 %.     

Establishing a high-accuracy spectral response scale in the near infrared with digital filters

Spectrally invariant detectors are commonly used to interpolate or extrapolate the responsivity of InGaAs detectors in the infrared from absolute calibrations at a few wavelengths. The random noise in such detectors limits the accuracy that can be achieved in a narrowband, double-monochromator setup. We propose the application of a dedicated digital filter, which reduces the uncertainty by 30%, and combine it by calibrating a group of three detectors. The uncertainties are propagated from the observed variance in the relative measurement to the combined uncertainty of 0.4% (2sigma) in the responsivity values of the InGaAs detectors in the range of 1010-1640 nm.     

Differential spectral responsivity measurement of photovoltaic detectors with a light-emitting-diode-based integrating sphere source

We present an experimental realization of differential spectral responsivity measurement by using a light-emitting diode (LED)-based integrating sphere source. The spectral irradiance responsivity is measured by a Lambertian-like radiation field with a diameter of 40 mm at the peak wavelengths of the 35 selectable LEDs covering a range from 280 to 1550 nm. The systematic errors and uncertainties due to lock-in detection, spatial irradiance distribution, and reflection from the test detector are experimentally corrected or considered. In addition, we implemented a numerical procedure to correct the error due to the broad spectral bandwidth of the LEDs. The overall uncertainty of the DSR measurement is evaluated to be 2.2% (k = 2) for Si detectors. To demonstrate its application, we present the measurement results of two Si photovoltaic detectors at different bias irradiance levels up to 120 mW/cm(2).     

New PTB Setup for the Absolute Calibration of the Spectral Responsivity of Radiation Thermometers

The paper describes the new experimental setup assembled at the PTB for the absolute spectral responsivity measurement of radiation thermometers. The concept of this setup is to measure the relative spectral responsivity of the radiation thermometer using the conventional monochromator-based spectral comparator facility also used for the calibration of filter radiometers. The absolute spectral responsivity is subsequently measured at one wavelength, supplied by the radiation of a diode laser, using the new setup. The radiation of the diode laser is guided with an optical fiber into an integrating sphere source that is equipped with an aperture of absolutely known area. The spectral radiance of this integrating sphere source is determined via the spectral irradiance measured by a trap detector with an absolutely calibrated spectral responsivity traceable to the primary detector standard of the PTB, the cryogenic radiometer. First results of the spectral responsivity calibration of the radiation thermometer LP3 are presented, and a provisional uncertainty budget of the absolute spectral responsivity is given.     

Traceable radiometric calibration of semiconductor detectors and their application for thermodynamic temperature measurement

The non-contact measurement of temperature by using the emitted thermal radiation has been an innovative field of measurement science and fundamental physics for more than a hundred years. It saw the first highlight in Gustav Kirchhoff’s principle of a blackbody with ideal emission characteristics and culminated in Max Planck’s formulation of the law of thermal radiation, the so-called Planck’s law, forming the foundation of quantum physics. A boost in accuracy was the development of semiconductor detectors and the cryogenic electrical substitution radiometer in the late 1970s. Semiconductor detectors, namely photodiodes, deliver an electrical current proportional to the absorbed optical radiation. Due to the measurements of thermal radiation over a wide range of temperature and wavelength, thermodynamic temperature measurements with radiometric methods have set benchmarks to all, the electrical, dimensional and optical metrology. The paper describes the measurement of the spectral responsivity of semiconductor detectors traceable to the SI units and their application for thermodynamic temperature measurement by the absolute measurement of thermal radiation using filter radiometers with calibrated spectral irradiance responsivity.     

Spectral reflectance and responsivity of Ge- and InGaAs-photodiodes in the near-infrared: measurement and model

The spectral reflectance and responsivity of Ge- and InGaAs-photodiodes at (nearly) normal and oblique incidence (45 degrees) were investigated. The derived data allow a calculation of the photodiodes responsivities for any incident angle. The measurements were carried out with s- and p-polarized radiation in the wavelength range from 1260 to 1640 nm. The spectral reflectance of the photodiodes was modeled by using the matrix approach developed for thin-film optical assemblies. The comparison between the calculated and measured reflectance shows a difference of less than 2% for the Ge-photodiode. For the InGaAs-photodiode, the differences between measured and calculated reflectance are larger, i.e., up to 6% for wavelengths between 1380 and 1580 nm. Despite the larger differences between calculated and measured spectral reflectances for the InGaAs-photodiode, the difference between calculated and measured spectral responsivity is even smaller for the InGaAs-photodiode than for the Ge-photodiode, i.e., < or =1.2% for the InGaAs-photodiode compared to < or =2.2% for the Ge-photodiode. This is because the difference in responsivity is strongly correlated to the absolute spectral reflectance level, which is much lower for the InGaAs-photodiode. This observation also shows the importance of having small reflectances, i.e., appropriate antireflection coatings for the photodiodes. The relative standard uncertainty associated with the modeled spectral responsivity is about 2.2% for the Ge-photodiode and about 1.2% for the InGaAs-photodiode for any incident angle over the whole spectral range measured. The data obtained for the photodiodes allow the calculation of the spectral responsivity of Ge- and InGaAs-trap detectors and the comparison with experimental results.     

Improved Near-Infrared Spectral Responsivity Scale

A cryogenic radiometer-based system was constructed at the National Institute of Standards and Technology for absolute radiometric measurements to improve detector spectral power responsivity scales in the wavelength range from 900 nm to 1800 nm. In addition to the liquid-helium-cooled cryogenic radiometer, the system consists of a 100 W quartz-tungsten-halogen lamp light source and a 1 m single-grating monochromator for wavelength selection. The system was characterized and the uncertainty in spectral power responsivity measurements evaluated. A variety of photodetectors, including indium gallium arsenide photodiodes (InGaAs), germanium (Ge) photodiodes, and pyroelectric detectors, were subsequently calibrated. Over most of the spectral range, the spectral power responsivity of the photodetectors can be measured with a combined relative standard uncertainty of 0.4 % or less. This is more than a factor of two smaller than our previous capabilities, and represents a significant improvement in the near infrared (NIR) spectral power responsivity scale maintained at NIST. We discuss the characterization of the monochromator-based system and present results of photodetector spectral power responsivity calibrations.     

The NIST High Accuracy Scale for Absolute Spectral Response from 406 nm to 920 nm

We describe how the National Institute of Standards and Technology obtains a scale of absolute spectral response from 406 nm to 920 nm. This scale of absolute spectral response is based solely on detector measurements traceable to the NIST High Accuracy Cryogenic Radiometer (HACR). Silicon photodiode light-trapping detectors are used to transfer optical power measurements from the HACR to a monochromator-based facility where routine measurements are performed. The transfer also involves modeling the quantum efficiency (QE) of the silicon photodiode light-trapping detectors. We describe our planned quality system for these measurements that follows ANSI/NCSL Z540-1-1994. A summary of current NIST capabilities based on these measurements is also given.     

Calibration of an extreme-ultraviolet transmission grating spectrometer with synchrotron radiation

The responsivity of an extreme-ultraviolet transmission grating spectrometer with silicon photodiode detectors was measured with synchrotron radiation. The spectrometer was designed to record the absolute radiation flux in a wavelength bandpass centered at 30 nm. The transmission grating had a period of 200 nm and relatively high efficiencies in the +1 and the -1 diffraction orders that were dispersed on either side of the zero-order beam. Three photodiodes were positioned to measure the signals in the zero order and in the +1 and -1 orders. The photodiodes had aluminum overcoatings that passed the desired wavelength bandpass centered at 30 nm and attenuated higher-order radiation and wavelengths longer than approximately 80 nm. The spectrometer's responsivity, the ratio of the photodiode current to the incident radiation power, was determined as a function of the incident wavelength and the angle of the spectrometer with respect to the incident radiation beam. The spectrometer's responsivity was consistent with the product of the photodiode responsivity and the grating efficiency, both of which were separately measured while removed from the spectrometer.     

Comparison of Two Cryogenic Radiometers at NIST

Two cryogenic radiometers from NIST, one from the Optical Technology Division and the other from the Optoelectronics Division, were compared at three visible laser wavelengths. For this comparison, each radiometer calibrated two photodiode trap detectors for spectral responsivity. The calibration values for the two trap detectors agreed within the expanded (k = 2) uncertainties. This paper describes the measurement and results of this comparison.