Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms

We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carried out by engaging latching mechanism connected to the torsion bars through the off-centered thinned down silicon beams. When the latching mechanism is fully engaged, the assembled AVC actuator forms permanent initial tilt angle by the retraction force of electrothermal actuators. The AVC actuators and latching mechanisms are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etch steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0–80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6 × 10⁸ cycles at its resonance, the measured optical scan angle variation and resonant frequency change were within 1.1% and 8 Hz, respectively, and the robustness of the latched mechanism was ensured.     

A new flextensional piezoelectric ultrasonic motor—Design,fabrication and characterisation

This paper presents the techniques used for the characterisation of a new type of standing-wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or “cymbal”, to convert the radial mode vibrations of a piezoelectric ceramic disc into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted. The best stall torque, no load speed, transient time and efficiency for a 25 mm motor were 2 N mm, 680 rpm, 2 ms and 4.8%, respectively. The operational characteristics of the motor were evaluated by using two methods: one based on the pulley–brake principle and one on high-speed imaging. The results obtained from using these two techniques are contrasted and compared.     

Electrochemical actuator based on single-layer polypyrrole film

Polypyrrole film with porous and compact zones in its vertical direction has been synthesized by direct oxidation of pyrrole in the mixed solvent of acetonitrile and dichloromethane contained a certain amount of anion surfactant of sodium 1,4-bis(2-ethylhexyl)sulfosuccinate (AOT). The actuator based on this single-layer film bends uniformly with the maximum bending angle much larger than 90° and has a fast response rate (∼60° s⁻¹ at 1.0 V versus SCE) and a long lifetime (>20,000 cycles). The high performance of this actuator is mainly due to that the PPy film has a high conductivity and the actuator does not have delamination problem.     

Electroactive polymer based microfluidic pump

A planar, valveless, microfluidic pump using electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] based polymer as the actuator material is presented. P(VDF-TrFE) thick films having a large electrostrictive strain ∼5–7% and high elastic energy density of 1 J/cm³ have been used in a unimorph diaphragm actuator configuration. The microfluidic pump was realized by integrating a nozzle/diffuser type fluidic mechanical-diode structure with the polymer microactuator. The P(VDF-TrFE) unimorph diaphragm actuator, 80 μm thick and 2.2 mm × 2.2 mm in lateral dimensions, showed an actuation deflection of 80 μm for an applied electric field of 90 MV/m. The microfluidic pump could pump methanol at a flow rate of 25 μl/min at 63 Hz with a backpressure of 350 Pa. The flow rate of this pump could be easily controlled by external electrical field. Two different sizes of nozzle/diffuser elements were studied and the pumping efficiency of these structures is 11 and 16%, respectively.     

Simulation of solid thermal explosion and liquid thermal explosion of dicumyl peroxide using calorimetric technique

Dicumyl peroxide (DCPO), is produced by cumene hydroperoxide (CHP) process, is utilized as an initiator for polymerization, a prevailing source of free radicals, a hardener, and a linking agent. DCPO has caused several thermal explosion and runaway reaction accidents in reaction and storage zone in Taiwan because of its unstable reactive property. Differential scanning calorimetry (DSC) was used to determine thermokinetic parameters including 700 J g^–1 of heat of decomposition (ΔH_d), 110 °C of exothermic onset temperature (T₀), 130 kJ mol^–1 of activation energy (E_a), etc., and to analyze the runaway behavior of DCPO in a reaction and storage zone. To evaluate thermal explosion of DCPO with storage equipment, solid thermal explosion (STE) and liquid thermal explosion (LTE) of thermal safety software (TSS) were applied to simulate storage tank under various environmental temperatures (T_e). T_e exceeding the T₀ of DCPO can be discovered as a liquid thermal explosion situation. DCPO was stored under room temperature without sunshine and was prohibited exceeding 67 °C of self-accelerating decomposition temperature (SADT) for a tank (radius = 1 m and height = 2 m). SADT of DCPO in a box (width, length and height = 1 m, respectively) was determined to be 60 °C. The TSS was employed to simulate the fundamental thermal explosion behavior in a large tank or a drum. Results from curve fitting demonstrated that, even at the earlier stage of the reaction in the experiments, ambient temperature could elicit exothermic reactions of DCPO. To curtail the extent of the risk, relevant hazard information is quite significant and must be provided in the manufacturing process.     

Investigation of the phase equilibria in Ti-Ni-Hf system using diffusion triples and equilibrated alloys

In present work, the phase equilibrium relations in the Ti-Ni-Hf ternary system, which are of great importance for the design of Ti-Ni based high temperature shape memory alloys, were investigated using diffusion triples and sixteen key equilibrated alloys. Based on the experimental results from electron-probe microscopy analysis (EPMA) and X-ray diffraction (XRD) techniques, two isothermal sections were constructed, which consist of 13 and 12 three-phase regions at 900 °C and 800 °C, respectively. Hf can substitute for Ti in TiNi and Ti₂Ni phases increasing from 30, 62 at% at 800 °C to 36, 64 at% at 900 °C, respectively. The Hf₇Ni₁₀ and Hf₉Ni₁₁ phases show wide ternary composition ranges, while the solubility of Ti in HfNi₅, Hf₂Ni₇, and HfNi phases are relatively limited. A new ternary phase of τ was detected for the first time, and the stoichiometry of τ phase is close to Ni:(Hf,Ti) = 11:14, with Ti substituting for Hf from ～5 at% to ～22 at%. The single-phase region of the τ phase became narrow as the decreasing of annealing temperature. Based on comparison of phase relations at 900 °C and 800 °C, it is speculated there is an invariant reaction TiNi + τ → HfNi + Ti₂Ni at between 900 °C and 800 °C.     

Experimental investigation and first-principle calculations coupled with thermodynamic modeling of the Mn–Nd phase diagram

The complete Mn–Nd phase diagram was established experimentally by means of key samples and diffusion couple techniques. The phase transformation temperatures, crystal structures and phase equilibria were studied using differential scanning calorimetry (DSC), X-ray diffraction (XRD), electron probe microanalysis (EPMA), and scanning electron microscope (SEM) techniques. Three compounds in the Mn-rich side and two terminal solid solutions in the Nd-rich side were observed. The compounds Mn₂Nd, Mn₂₃Nd₆, and Mn₁₇Nd₂ form peritectically at 850, 940, and 1025 °C, respectively. The eutectoidal decompositions of the compounds, Mn₂Nd, and Mn₂₃Nd₆, were confirmed in the temperature ranges of 650–550 and 550–400 °C, respectively, using EPMA. The maximum solubility of Mn in DHCP-Nd was found to be 2.3 at% Mn at the 685 °C eutectic temperature. The solvus line of DHCP-Nd was determined using EPMA. The solubility of Mn in BCC-Nd was extrapolated from DSC data to be 5.0 at% Mn at 728 °C. The existence of a Mn₁₇Nd₂ phase of the Th₂Ni₁₇ type structure was confirmed using EPMA and XRD. The system was modelled using CALPHAD methodology. The quasi-chemical model (QCM) was used to describe the liquid phase, the terminal solution phases were modeled as substitutional solutions using the random mixing model, and the intermetallic compounds were treated as stoichiometric phases. The enthalpies of formation of the system compounds were calculated using the electronic density functional method. The resulting enthalpy of mixing was in good agreement with the literature.     

Dielectric and piezoelectric properties of [0 0 1] and [0 1 1]-poled relaxor ferroelectric PZN–PT and PMN–PT single crystals

The properties of PZN–PT and PMN–PT single crystals of varying compositions and orientations have been investigated. Among the various compositions studied, [0 0 1]-optimally poled PZN-(6–7)%PT and PMN-30%PT exhibit superior dielectric and piezoelectric properties, with K^T ≈ 6800–8000, d₃₃ ≈ 2800 pC/N, d₃₁ ≈ −(1200–1800) pC/N for PZN-(6–7)%PT; and K^T = 7500–9000, d₃₃ = 2200–2500 pC/N and d₃₁ = −(1100–1400) pC/N for PMN-30%PT. These two compositions are also fairly resistant to over-poling. The [0 0 1]-poled electromechanical coupling factors (k₃₃, k₃₁ and k_t) are relatively insensitive to crystal composition. [0 1 1]-optimally poled PZN-7%PT single crystal also exhibits extremely high d₃₁ values of up to −4000 pC/N with k₃₁ ≈ 0.90–0.96. While [0 1 1]-poled PZN-7%PT single crystal becomes over-poled with much degraded properties when poled at and above 0.6 kV/mm, PZN-6%PT crystal shows no signs of over-poling even when poled to 2.0 kV/mm. The presence of a certain amount (i.e., 10–15%) of orthorhombic phase in a rhombohedral matrix has been found to be responsible for the superior transverse piezoelectric properties of [0 1 1]-optimally poled PZN-(6–7)%PT. The present work shows that flux-grown PZN–PT crystals exhibit superior and consistent properties and improved over-poling resistance to flux-grown PMN–PT crystals and that, for or a given crystal composition, flux-grown PMN–PT crystals exhibit superior over-poling resistance to their melt-grown counterparts.     

Microstructural,dielectric and piezoelectric properties of low-temperature sintering Pb(Co1/2W1/2)O3–Pb(Mn1/2Nb2/3)O3–Pb(Zr,Ti)O3 ceramics with the addition of Li2CO3 and Bi2O3

In this study, in order to develop the low-temperature sintering ceramics for multilayer piezoelectric devices, Pb(Co_1/2W_1/2)O₃–Pb(Mn_1/2Nb_2/3)O₃–Pb(Zr,Ti)O₃ (PCW–PMN–PZT) ceramics doped with Li₂CO₃, Bi₂O₃ and CuO as sintering aids were manufactured, and their microstructural, dielectric and piezoelectric properties were investigated. When the only CuO was added, specimens could not be sintered below 980 °C. However, when Li₂CO₃ and Bi₂O₃ with CuO were simultaneously added to the basic composition ceramics, specimens could be sintered below 980 °C. The addition of Li₂CO₃ and Bi₂O₃ were proved to lower sintering temperature of piezoelectric ceramics due to the effect of Li₂CO₃–Bi₂O₃ liquid phase. Piezoelectric properties of Li₂CO₃ and Bi₂O₃ added specimens showed higher values than those of the only CuO added specimens. At 0.2 wt% Li₂CO₃ and 0.3 wt% Bi₂O₃ added specimen sintered at 920 °C, the dielectric constant (ɛ_r) of 1457, electromechanical coupling factor (k_p) of 0.56 and mechanical quality factor (Q_m) of 1000 were shown, respectively. It is considered that these values are suitable for piezoelectric device application such as multilayer piezoelectric transformer and ultrasonic vibrator with pure Ag internal electrode.     

Fabrication and frequency response of dual-element ultrasonic transducer using PZT-5A thick film

Ultrasonic transducers based on PZT-5A thick films deposited onto polycrystalline Al₂O₃ substrates using screen-printing were successfully fabricated. Considering the relatively high sintering temperature of PZT-5A thick films and better impedance matching characteristics with PZT-5A, polished polycrystalline Al₂O₃ were used as substrates. For electrodes, high quality platinum (Pt) was deposited by a thin film process, because the surface state of electrodes greatly affects the quality of piezoelectric films. Applying Pt/PZT-5A/Pt/Al₂O₃ structures, dual-element ultrasonic transducers were assembled. The assembled transducers included a wear plate (normally alumina with 40.21 × 10⁶ kg/m² s of impedance), backing (tungsten carbide-epoxy), electrical matching, an epoxy glue layer, and a housing. The optimum measurement ranges of 5 and 10 MHz ultrasonic transducers were 2.51–300.2 and 2.50–250.1 mm, respectively. From the time and frequency response measurements of the assembled 10 MHz DEUTs, the value of −20 dB level waveform duration and the −6 dB bandwidth was 481.8 ns and 34.4%, respectively. Also, the measurement accuracies of both 5 and 10 MHz DEUTs assembled in this study were below 0.1 and 0.4%, respectively.     

A novel tiny ultrasonic linear motor using the radial mode of a bimorph

The new-typed tiny ultrasonic motor has been introduced to have compact and simple structure. The linear motion of a new-type linear motor is operated by a principle of inertia displacement. The motor can be realized by the central movement of transducing part, which is the maximum displacement of the up-and-down movement. The transducing parts, using different diameters, 3.0 and 5.0 mm and thickness of 0.1 and 0.2 mm metal disks, were fabricated and the dynamic characteristics of the motors were measured. The motor with piezoelectric ceramic of Ø3 needs higher operating voltage than the motor with the piezoelectric ceramic of Ø5.     

Hexagon-based all-quadrilateral mesh generation with guaranteed angle bounds

In this paper, we present a novel hexagon-based mesh generation method which creates all-quadrilateral (all-quad) meshes with guaranteed angle bounds and feature preservation for arbitrary planar domains. Given any planar curves, an adaptive hexagon-tree structure is constructed by using the curvature of the boundaries and narrow regions. Then a buffer zone and a hexagonal core mesh are created by removing elements outside or around the boundary. To guarantee the mesh quality, boundary edges of the core mesh are adjusted to improve their formed angles facing the boundary, and two layers of quad elements are inserted in the buffer zone. For any curve with sharp features, a corresponding smooth curve is firstly constructed and meshed, and then another layer of elements is inserted to match the smooth curve with the original one. It is proved that for any planar smooth curve all the element angles are within [60° ? ε, 120° + ε] (ε ? 5°). We also prove that the scaled Jacobians defined by two edge vectors are in the range of [sin (60° ? ε),  sin 90°], or [0.82, 1.0]. The same angle range can be guaranteed for curves with sharp features, with the exception of small angles in the input curve. Furthermore, an approach is introduced to match the generated interior and exterior meshes with a relaxed angle range, [30°, 150°]. We have applied our algorithm to a set of complicated geometries, including the China map, the Lake Superior map, and a three-component air foil with sharp features. In addition, all the elements in the final mesh are grouped into five types, and most elements only need a few flops to construct the stiffness matrix for finite element analysis. This will significantly reduce the computational time and the required memory during the stiffness matrix construction.     

Design and fabrication of an alternating dielectric multi-layer device for surface plasmon resonance sensor

An alternating dielectric multi-layer device was fabricated and tested in the laboratory to show that dielectric mirrors of alternating high/low refractive index materials, based on the design of distributed Bragg reflector (DBR) for vertical cavity surface emission lasers (VCSELs), can be used in designing SPR biochemical sensors. The thickness, number of layers, and other design parameters of the device used were optimized using optical admittance loci analysis. The proof-of-concept device was fabricated with a symmetrical structure using Au/(SiO₂/TiO₂)₄/Au.Using a 632 nm-wavelength light source on a BK7 coupling prism, our laboratory tests showed that, under water, there was an 11.5° shift in resonant peak position towards the critical angle (from 74° in a conventional single-layer Au film), and a 3.25 times decrease in FWHM (the half-peak width). Our design also resulted in a wider dynamic range of up to a 1.50 refractive index unit (RIU), compared to 1.38 RIU in a conventional single-layer Au film. Using glucose solutions in ddH₂O, the calculated resolution was 1.28 × 10⁻⁵. The calculated intensity sensitivity was 10 000 a.u./RIU, about twice the improvement over the conventional single-layer Au film.     

Piezoelectric unimorph valve assembled on an LTCC substrate

In this paper a piezoelectric initially open valve was designed in low temperature co-fired ceramic (LTCC), manufactured using standard processes, and tested with integrated gas channels inside the LTCC module. Actuation of the valve was based on a piezoelectric unimorph with a diameter of 15 mm and thickness of 0.35 mm glued onto the fired LTCC substrate. Subsequently, a series of tests, including flow, displacement and switching time measurements, was carried out. Measurements of the valve revealed a flow of 143 ml/min under 1 bar pressure, leakage levels of 4%, valve displacement of 1.3 μm, and closing times less than 30 ms. Additional miniaturization and integration of an embedded valve in the LTCC will be pursued, enabling improved manufacturing as a batch process and micro- and nano-litre fluid management for various applications.     

All-optical hydrogen sensor based on a high alloy content palladium thin film

Optical reflectance measurements were performed to determine the hydrogen response characteristics of 20 nm thick Pd_0.6Au_0.4 films. The response time and signal change characteristics were determined as a function of hydrogen concentrations ranging from 0.05% to 4% in a balance of dry CO₂ free air. The detection limit was determined to be 0.05%, with a corresponding response time of 130 s, while at 4% hydrogen concentrations the response time was 5 s at ambient temperatures. A linear decrease of both the signal change and response time was measured within an operating temperature range between 25 °C and 100 °C for a 1% hydrogen in air gas mixture. The sensor response dependence of the Pd_0.6Au_0.4 film with a change in humidity was determined between ambient levels and 95% relative humidity (RH). While the signal change was independent of humidity the response time increased due to water adsorption on the Pd alloy sensing layer. A similar increase in response time was shown for 100 ppm of background CO mixed with 1% hydrogen in nitrogen at room temperature. At an elevated operating temperature of 80 °C, 100 ppm of CO did not affect the sensor response towards 1% hydrogen in a balance of nitrogen. Reliability tests have been performed over a 1-year time period and the sensing specifications have not drifted beyond 2% and 13% of the calibrated signal change and response time, respectively. A response time on the order of seconds and the proven stability of the high alloy content Pd thin film demonstrate the promising attributes of this material for use in an all-optical hydrogen sensor.     

Investigation of Ni-based thermal bimaterial structure for sensor and actuator application

Thermal bimaterial structures made of Ni and Ni-diamond nanocomposite for sensor and actuator application are proposed, fabricated, and tested. Two deflection types of thermal bimaterial structures, including upward and downward bending types, can be easily fabricated by controlling electroplating sequence of Ni and Ni-diamond nanocomposite. According to thermal performance measurement, the tip deflection of upward and downward types can reach about 82.5 μm and ?22.5 μm for a temperature change of 200 °C, respectively. In the condition, the thermomechanical sensitivity and output force are 412.5 nm/K and 97.0 μN for upward type thermal bimaterial structure; and ?112.5 nm/K and ?26.5 μN for downward type one. Due to the low electroplating process temperature (～50 °C) for both Ni-based layers, diminutive pre-deformation of as-fabricated structure and strong interlaminar bonding strength are verified by SEM and vibrational test. The resonant frequency of the structure remains unchanged after 10⁹ cycles.     

Humidity-insensitive and low oxygen dependence tungsten oxide gas sensors

Gas sensing characteristics of WO₃ powder and its physical properties under different heat treatment conditions have been investigated. The WO₃ powder was synthesized by wet process from ammonium tungstate parapentahydrate and nitric solution. The precipitated product was then calcined at 300–800 °C for 2–12 h. The physical properties of the products were characterized by using X-ray diffractometer (XRD), scanning electron microscope (SEM), and BET method. It was found that the crystallite size, particle size and surface area of the WO₃ powders were in the range of 30–45 nm, 0.1–3.0 μm and 1.2–3.7 m²/g, respectively. Calcination at higher temperature and longer time led to the increase of particle size by more than 300%, and reduction in specific surface area by more than 60%. However, the crystallite size was found to increase only by ∼30% under identical heat treatment. These results inferred that such heat treatment had more profound effect on crystallite aggregation than on crystallite growth. Gas sensing measurement showed that the largest change of output voltage to both ethyl alcohol and ammonia was obtained from the sensor calcined at 600 °C for 2 h, which had the highest surface area. However, the highest sensitivity which is defined as the ratio of sensor's resistance in air to that in the sample gas, R_air/R_gas, was obtained from the sensor calcined at 600 °C for 6 h due to its highest background resistance in air. Moreover, it was also found that the sensors were less sensitive to the oxygen content in the carrier gas and did not sensitive at all to water vapor.     

Development of SAW based gyroscope with high shock and thermal stability

A novel surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on a 128° YX LiNbO₃ piezoelectric substrate. The developed sensor was composed of a SAW resonator, metallic dots, and two SAW delay lines. A SAW resonator was employed to generate a stable standing wave with a large amplitude, metallic dots were used to induce a Coriolis force and to form a secondary SAW, and two delay lines were formed to extract the Coriolis effect by comparing the resonance frequencies between these two delay lines. Coupling of modes (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, resonant frequency differences between the two oscillators were observed because of the secondary wave, generated by the Coriolis force, perturbed the propagation of the SAW in the sense element. Depending on the angular velocity, the difference of the resonance frequency was linearly modulated. The obtained sensitivity was approximately 172 Hz deg^?1 s^?1 at an angular rate range of 0–500 deg/s. Device performances depending on different mass weights and temperatures were also characterized. Good thermal and shock stabilities were observed during the evaluation process.