Vertical-cavity surface-emitting lasers based on submonolayer InGaAs quantum dots

Molecular beam epitaxy-grown 0.98-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs) with a three-stack submonolayer (SML) InGaAs quantum-dot (QD) active region and fully doped Al/sub x/Ga/sub 1-x/As-GaAs DBRs was studied. Large-aperture VCSELs demonstrated internal optical losses less than 0.1% per one pass. Single-mode operation throughout the whole current range was observed for SML QD VCSELs with the tapered oxide apertures diameter less than 2 /spl mu/m. Devices with 3-/spl mu/m tapered-aperture showed high single-mode output power of 4 mW and external quantum efficiency of 68% at room temperature.     

Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

Sub-mA threshold 1.5-/spl mu/m VCSELs with epitaxial and dielectric DBR mirrors

In this letter, we report low threshold 1.5-/spl mu/m vertical-cavity surface-emitting lasers with epitaxial and dielectric distributed Bragg reflector (DBRs). The device consists of a lattice-matched InAlAs-InAlGaAs DBR grown on an InP substrate, an InAlGaAs quantum well active region, a metamorphic GaAs tunnel junction, and a SiO/sub 2/-TiO/sub 2/ dielectric DBR. The current confinement is achieved by oxidizing an AlAs metamorphic layer grown on top of the active region. Small aperture devices show a minimum threshold of 0.8 mA at room temperature in continuous-wave operation.     

High-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers with InGaAs-GaAsP strain-compensated quantum wells

We present the first room-temperature continuous-wave operation of high-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers (VCSEL's). The lasers contain strain-compensated InGaAs-GaAsP quantum wells (QW's) in the active region grown by metalorganic vapor phase epitaxy. The threshold current is 190 /spl mu/A for a 2.5/spl times/2.5 /spl mu/m/sup 2/ device, and the threshold voltage is as low as 1.255 V for a 6/spl times/6 /spl mu/m/sup 2/ device. Lasing at a wavelength as long as 1.1 /spl mu/m was also achieved. We discuss the wavelength limit for lasers using the strain-compensated QW's on GaAs substrates.     

80/spl deg/C continuous-wave operation of 2.01-/spl mu/m wavelength InGaAlAs-InP vertical-cavity surface-emitting lasers

Electrically pumped buried tunnel junction InGaAlAs-InP vertical-cavity surface-emitting lasers (VCSELs) with self-adjusted lateral current and optical confinement and record emission wavelengths beyond 2 /spl mu/m are presented. Front and back side mirrors are realized using 31.5 epitaxial layer pairs of alternating InGaAs-InAlAs and a dielectric 2.5 pair CaF/sub 2/-a-Si layer stack. The devices show single-mode continuous-wave operation up to heat sink temperatures over 80/spl deg/C. The maximum output power at 20/spl deg/C reaches 0.43 mW, threshold current and voltage are as low as 0.66 mA and 0.73 V, respectively. To reach the long emission wavelength, we use an optimized active region comprising heavily strained quantum wells. High-resolution X-ray diffraction and photoluminescence measurements reveal excellent material quality without relaxation in the quantum wells.     

1.3-/spl mu/m Vertical-cavity surface-emitting lasers with double-bonded GaAs-AlAs Bragg mirrors

We demonstrate, for the first time, double-bonded AlGaInAs strain-compensated quantum-well 1.3-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs). GaAs-AlAs Bragg mirrors were wafer-bonded on both sides of a cavity containing the AlGaInAs strain-compensated multiple-quantum-well active layers sandwiched by two InP layers. The lasers have operated under pulsed conditions at room temperature. A record low pulsed threshold current density of 4.2 kA/cm/sup 2/ and a highest maximum light output power greater than 4.6 mW have been achieved. The maximum threshold current characteristic temperature T/sub 0/ of 132 K is the best for any long wavelength VCSELs. The laser operated in a single-longitudinal mode, with a side-mode suppression ratio of more than 40 dB, which is the best results for 1.3-/spl mu/m VCSELs.     

High-performance 1.3 /spl mu/m InGaAs vertical cavity surface emitting lasers

A report is presented on high-performance InGaAs/GaAs double quantum well vertical cavity surface emitting lasers (VCSELs) with record long emission wavelengths up to 1300 nm. Due to a large gain-cavity detuning these VCSELs show excellent temperature performance with very stable threshold current and output power characteristics. For 1.27 /spl mu/m singlemode devices the threshold current is found to decrease from 2 to 1 mA between 10 and 90/spl deg/C, while the peak output power only drops from 1 to 0.6 mW. Large-area 1300 nm VCSELs show multimode output power close to 3 mW.     

Continuous-wave operation of all-epitaxial InP-based 1.3 /spl mu/m VCSELs with 57% differential quantum efficiency

All-epitaxial InP-based 1.3 /spl mu/m VCSELs with a record-high continuous-wave differential quantum efficiency (57%) for single active region long-wavelength devices are demonstrated. Low-loss optical mode confinement is achieved through a selectively etched undercut tunnel-junction aperture. Singlemode continuous-wave lasing was observed up to 87/spl deg/C and the room-temperature output power was 1.1 mW at a current of 4.1 mA and a wavelength of 1.305 /spl mu/m.     

Long-wavelength InAlGaAs VCSELs with Al/sub 2/O/sub 3/ embedded current-confinement apertures

Long-wavelength InAlGaAs VCSELs with Al/sub 2/O/sub 3/ embedded current-confinement structures are reported. Using atomic layer deposition, the current confinement structures are fabricated by depositing Al/sub 2/O/sub 3/ on airgap surfaces of undercut apertures, which are formed by laterally etching the active region. 1.57 /spl mu/m VCSELs showing an output power of over 1 mW and direct modulation characteristics at 4 Gbit/s are reported using these current-confinement apertures.     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

Electrically pumped room temperature CW VCSELs with 2.3 /spl mu/m emission wavelength

Continuous wave (CW) operation at room temperature of electrically pumped InGaAlAs/InP vertical-cavity surface-emitting lasers (VCSELs) at emission wavelengths as high as 2.3 /spl mu/m is demonstrated for the first time. Devices with 15 /spl mu/m active region diameter show a maximum output power of 0.75 mW at 20/spl deg/C and a maximum CW operating temperature of 45/spl deg/C.     

MOVPE-grown GaInNAs VCSELs at 1.3 /spl mu/m with conventional mirror design approach

1.3 /spl mu/m oxide confined GaInNAs VCSELs designed using the same design philosophy used for standard 850 nm VCSELs is presented. The VCSELs have doped mirrors, with graded and highly doped interfaces, and are fabricated using production-friendly procedures. Multimode VCSELs (11 /spl mu/m oxide aperture) with an emission wavelength of 1287 nm have a threshold current of 3 mA and produce 1 mW of output power at 20/spl deg/C. The maximum operating temperature is 95/spl deg/C. Emission at 1303 nm with 1 mW of output power and a threshold current of 7 mA has been observed from VCSELs with a larger detuning between the gain peak and the cavity resonance.     

A 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode (APD) array. The mean breakdown voltage of the APD was 57.9 V and the standard deviation was less than 0.1 V. The mean dark current was /spl sim/2 and /spl sim/300 nA, and the standard deviation was /spl sim/0.19 and /spl sim/60 nA at unity gain (V/sub bias/ = 13.5 V) and at 90% of the breakdown voltage, respectively. External quantum efficiency was above 40% in the wavelength range from 1.0 to 1.6 /spl mu/m. It was /spl sim/57% and /spl sim/45% at 1.3 and 1.55 /spl mu/m, respectively. A bandwidth of 13 GHz was achieved at low gain.     

Performance analysis of 10-/spl mu/m-thick VCSEL array in fully embedded board level guided-wave optoelectronic interconnects

We introduce a simple and effective heat sink structure for thin-film vertical cavity surface emitting lasers (VCSELs) in fully embedded board level guided-wave interconnects. A 50% quantum efficiency increase is experimentally confirmed for the 10-/spl mu/m thin-film VCSELs. The thermal resistance of a 1 /spl times/ 12 embedded thin-film VCSEL array in printed circuit board (PCB) is further analyzed. The experimental results show an excellent match with the simulated results. The 10-/spl mu/m-thick VCSEL had the lowest thermal resistance and the highest differential efficiency compared to 250-, 200-, 150-, and 100-/spl mu/m-thick VCSELs. A substrate removed VCSEL can be used in fully embedded board level optical interconnects without special cooling techniques.     

Low-threshold operation of 1.34-/spl mu/m GaInNAs VCSEL grown by MOVPE

Low-threshold operation was demonstrated for a 1.34-/spl mu/m vertical-cavity surface-emitting laser (VCSEL) with GaInNAs quantum wells (QWs) grown by metal-organic vapor-phase epitaxy. Optimizing the growth conditions and QW structure of the GaInNAs active layers resulted in edge-emitting lasers that oscillated with low threshold current densities of 0.87 kA/cm/sup 2/ at 1.34 /spl mu/m and 1.1 kA/cm/sup 2/ at 1.38 /spl mu/m, respectively. The VCSEL had a low threshold current of 2.8 mA and a lasing wavelength of 1.342 /spl mu/m at room temperature and operated up to 60/spl deg/C.     

Thermal impedance of VCSELs with AlOx-GaAs DBRs

The authors have measured the thermal impedance of vertical-cavity surface-emitting lasers (VCSELs) with oxide/GaAs DBRs and shown that it is comparable to that of VCSELs with all-semiconductor DBRs. A VCSEL with an 8-μm oxide aperture shows a thermal impedance of 2.8°C/mW. By varying the aperture size, the thermal conductance of the material below the active area is 0.255 W/cm°C. These results demonstrate that the oxide is not a major barrier to heat transport out of the active region     

Low-threshold distributed reflector laser consisting of wide and narrow wirelike active regions

We demonstrate a low-threshold distributed reflector laser, consisting of a distributed feedback section with wirelike active regions and a passive distributed Bragg reflector section with narrower ones, by utilizing the lateral quantum confinement effect. A threshold current under the room-temperature continuous-wave condition as low as 3.2 mA, which corresponds to a threshold current density of 290 A/cm/sup 2/, was obtained with the stripe width of 4.3 /spl mu/m and the active region length of 260 /spl mu/m. The differential quantum efficiency of 19% from the front facet, a high output ratio of 11 from the front facet to the rear facet, and a submode suppression ratio of 47 dB at a bias current 3.75 times the threshold were also achieved.     

Long-wavelength In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As large-area avalanche photodiodes and arrays

Large-area (500-/spl mu/m diameter) mesa-structure In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiodes (APDs) are reported. The dark current density was /spl sim/2.5/spl times/10/sup -2/ nA//spl mu/m/sup 2/ at 90% of breakdown; low surface leakage current density (/spl sim/4.2 pA//spl mu/m) was achieved with wet chemical etching and SiO/sub 2/ passivation. An 18 /spl times/ 18 APD array with uniform distributions of breakdown voltage, dark current, and multiplication gain has also been demonstrated. The APDs in the array achieved 3-dB bandwidth of /spl sim/8 GHz at low gain and a gain-bandwidth product of /spl sim/120 GHz.     

Near room-temperature continuous-wave operation of all-monolithic InAlGaAs/InP 1.3 /spl mu/m VCSELs

InAlGaAs/InP-based all-monolithic 1.3 /spl mu/m VCSELs operating continuous wave up to 18/spl deg/C are demonstrated. The whole structure is grown by a single step of MOCVD. Selective wet etching of an InP layer is used to form an air-gap aperture for the current confinement. The threshold current of an 8 /spl mu/m device at 15/spl deg/C is /spl sim/2.8 mA.     

Improved CW operation of GaAs-based QC lasers: T/sub max/= 150 K

We present a substantial improvement in the CW performance of GaAs-based quantum cascade lasers with operation up to 150 K. This has been achieved through suitable changes in device processing of a well-characterized laser. The technology optimizes the current injection in the laser by reducing the size of the active stripe whilst maintaining a strong coupling of the optical mode to preserve low current densities. The reduction of total dissipated power is critical for these lasers to operate CW. At 77 K, the maximum CW optical power is 80 mW, threshold current is 470 mA, slope efficiency is 141 mW/A, and lasing wavelength /spl lambda//spl sim/10.3 /spl mu/m.