首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 62 毫秒
1.
在氧压20Pa,衬底温度600℃,靶材与衬底距离4cm的最优化条件下,利用脉冲激光沉积(PLD)技术首次在无诱导电压和任何缓冲层的情况下,在单晶Si(111)衬底上生长具有优良结晶品质和高c轴取向的LiNbO3晶体薄膜.利用X射线衍射(XRD)、扫描电子显微镜(SEM)和原子力显微镜(AFM)对LiNbO3薄膜的结晶品质,择优取向性以及表面形貌进行了系统的分析.结果表明生长出了具有优异晶体质量的c轴取向LiNbO3薄膜,表面光滑平整且无裂纹产生,表面粗糙度约4.8nm,有利于硅基光电子器件的制备和利用.  相似文献   

2.
采用等化学计量比的LiNbO3多晶陶瓷为靶材,利用脉冲激光沉积技术在以非晶SiO2为缓冲层的金刚石/Si衬底上制备c轴取向LiNbO3薄膜。研究了靶材与衬底之间的距离对LiNbO3薄膜的结晶质量和c轴取向性的影响,发现在靶材与衬底之间的距离为4.0cm时获得了具有优异结晶质量的完全c轴取向LiNbO3压电薄膜。采用扫描电子显微镜和原子力显微镜对最佳条件下制备的薄膜进行了分析,结果表明制得的薄膜呈与衬底垂直的柱状结构,且薄膜表面光滑,晶粒均匀致密,表面平均粗糙度约为9.5 nm。  相似文献   

3.
采用脉冲激光沉积技术,在以c轴取向ZnO作为缓冲层的金刚石/硅基底上制备出了结晶良好的高c轴取向LiNbO3薄膜。利用X射线衍射对薄膜的结晶质量和c轴取向性进行了研究,结果表明制得的LiNbO3薄膜具有高度c轴取向且结晶质量良好。采用扫描电子显微镜和原子力显微镜对薄膜的表面形貌进行了分析,发现薄膜表面光滑,晶粒尺寸均匀,薄膜表面粗糙度约为20nm。  相似文献   

4.
硅基LiNbO3薄膜的微结构研究   总被引:1,自引:0,他引:1  
利用透射电子显微镜及X射线衍射,研究脉冲激光沉积技术(PLD)在Si(001)衬底上生长LiNbO3薄膜的微结构.结果表明,在600℃的衬底温度、30Pa的氧分压条件下,在硅片表面5nm厚的非晶氧化层上生长的薄膜,为c轴择优取向的单相LiNbO3晶体,本文还讨论了获得c轴择优取向LiNbO3薄膜的生长机理.  相似文献   

5.
氧压对PLD法硅上生长c轴取向LiNbO3晶体薄膜的影响   总被引:1,自引:1,他引:0  
本文采用脉冲激光沉积 (PLD)法在Si衬底上生长c轴取向LiNbO3 (LN)晶体薄膜 ,研究氧气压强对薄膜质量的影响。结果表明 ,氧压是生长c轴择优取向LN薄膜的一个重要影响参数。X射线衍射和透射电子显微镜分析表明 ,氧压为 30Pa时生长得到了完全c轴取向的LN薄膜 ,LN(0 0 6 )衍射峰的半高宽为 0 2 1°。这是首次报道不施加缓冲层和诱导电场采用PLD技术在硅衬底上生长出了结晶质量良好的完全c轴取向的LN薄膜  相似文献   

6.
采用LiNbO3单晶靶材,以激光脉冲沉积方法在六方GaN(0001)基片上沉积制备c轴取向的LiNbO3薄膜。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和原子力显微镜(AFM)研究了沉积温度和氧气压强对生长的薄膜的相组成、外延关系、表面形貌、晶粒大小的影响。结果显示,沉积温度500℃、氧分压20~30 Pa是在GaN基片上生长c轴取向LiNbO3薄膜的最优生长条件。XRD分析表明,生长的LiNbO3薄膜具有两种晶畴结构,其外延关系分别为[1-100](0001)LiNbO3//[11-20](0001)GaN和[10-10](0001)LiNbO3//[-12-10](0001)GaN。SEM和AFM对薄膜的表面形貌表征表明,在最优生长条件下沉积的薄膜表面平整,致密度好。  相似文献   

7.
利用射频磁控溅射技术在不同温度的(100)Si和玻璃衬底上成功地制备了c轴择优取向的Mg0.1Zn0.9O薄膜.通过X射线衍射(XRD)、场发射扫描电镜(FESEM)、紫外可见光分光光度计和光致发光谱研究了衬底温度对Mg0.1Zn0.9O薄膜结构、表面形貌和光学性能的影响,结果表明,在衬底温度为400℃时生长的Mg0.1Zn0.9O薄膜具有很好的c轴取向和较好的光学性能.用激发波长为300nm的氙灯作为激发光源得到不同衬底温度下Mg0.1Zn0.9O薄膜的室温PL谱.分析表明,紫外发光峰与薄膜的结晶质量密切相关,蓝光发射与氧空位有关.简单探讨了衬底温度影响紫外光致发光峰红移和蓝移的可能机理.  相似文献   

8.
衬底温度对ZnO薄膜生长过程及微观结构的影响研究   总被引:8,自引:0,他引:8  
以醋酸锌水溶液为前驱体,采用改进的超声喷雾热解法在Si(100)衬底上沉积ZnO薄膜,以X射线衍射(XRD)、扫描电镜(SEM)等手段分析所得ZnO薄膜的晶体结构和微观形貌,着重考察了衬底温度对ZnO薄膜生长过程及微观结构的影响.结果表明,在衬底温度为500℃下所得ZnO薄膜表面均匀光滑,属六方纤锌矿结构,且沿c轴择优生长,晶粒尺寸的为40~50nm;衬底温度对ZnO薄膜生长过程影响显著,随衬底温度的升高,薄膜生长速率存在一极限值,且ZnO薄膜的c轴取向趋势增强,晶粒尺寸得到细化.  相似文献   

9.
通过中频磁控反应溅射,在Si(100)衬底上沉积AlN薄膜,并用X射线衍射、扫描电子显微镜和Raman光谱表征AlN薄膜的微观特征.实验中,研究了氮分压、靶基距、溅射功率对AlN薄膜质量的影响,并优化参数制备高质量的c轴取向的AlN薄膜.结果表明,提高溅射功率、降低靶基距以及降低氮分压,有利于c轴择优取向AlN的生长.在优化条件下制备的AlN薄膜具有高度c轴取向,(002)摇摆曲线的半高宽为5.7°,Raman光谱E2(high)声子峰的FWHM为13.8cm-1.  相似文献   

10.
文军  陈长乐  潘峰 《功能材料》2008,39(5):761-763
通过射频磁控溅射技术在Si(111)衬底上制备了未掺杂和Nd掺杂ZnO薄膜,研究了衬底温度、氧分压以及Nd不同掺杂浓度等工艺参数对薄膜的影响.薄膜的结构和表面形貌通过XRD分析和AFM观测,表明制备的薄膜为ZnO:Nd纳米多晶薄膜,其表面形貌粗糙,不同沉积条件对薄膜生长有很大的影响.在纯氩气氛中、衬底温度为300℃的条件下,ZnO:Nd薄膜具有c轴择优取向.  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

15.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

16.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

17.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

18.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

19.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号