共溅射法制备AZO薄膜及其光电性能的研究

目的研究Al靶直流溅射功率对Al掺杂ZnO(AZO)薄膜光电性能的影响。方法以金属Al和ZnO陶瓷作为靶材,采用直流与射频双靶磁控共溅射的方法,在玻璃基片上制备AZO薄膜。通过改变Al靶直流溅射功率,获得不同的薄膜。采用X射线衍射仪(XRD)、光电子能谱仪(XPS)、原子力显微镜(AFM)、紫外-可见分光光度计(UV-Vis)、四探针测试仪,对薄膜的微观形貌结构及光电性能进行表征和分析。结果所制备的AZO薄膜均具有C轴取向生长的六角纤锌矿结构,在可见光区域平均透过率超过90%,AZO薄膜的吸收边相比于ZnO薄膜出现了蓝移。当Al靶溅射功率为18 W时,AZO薄膜的最低电阻率为2.49×10~(-3)?·cm,品质因子为370.2 S/cm。结论 Al直流溅射功率对AZO薄膜光电性能的影响较大,溅射功率为18 W时,制备的AZO薄膜性能最优。     

射频磁控溅射Al掺杂ZnO薄膜的退火性质分析

采用射频磁控溅射技术制备了高度择优取向的Al掺杂ZnO(ZAO)薄膜,并对所制备的薄膜在纯氩气氛中进行了400℃、1h和2h的退火处理,将前者再于空气中相同温度下退火1h.利用X射线衍射(XRD)、扫描电子显微镜(SEM)、光谱仪和四探针测试仪等对退火前后薄膜进行了表征和光学、电学性能研究.研究表明,退火处理对ZAO薄膜的晶体、光学和电学性能有影响.原位沉积的薄膜电阻率为2.59Ω·cm,可见光区透过率约70%.400℃纯Ar气氛中退火1h后,ZAO薄膜的平均晶粒有所长大,薄膜内应力有所减小;薄膜可见光区平均透过率从70%提高到将近80%;薄膜的电阻率变化不明显,从2.59Ω·cm降低到1.37Ω·cm.400℃纯Ar气氛中退火2h后,薄膜的可见光区透过率和电阻率分别为75%和14.7Ω·cm.400℃纯氩气氛中退火1h再经过空气中退火1h后,薄膜的可见光区透过率和电阻率分别为80%左右和0.69Ω·cm.     

不同沉积温度下AZO透明导电薄膜的性能研究

以纯度为99.99%氧化锌铝(w(Zn O)=98.00wt%,w(Al_2O_3)=2.00wt%)陶瓷靶为原料,利用直流磁控溅射法在普通白玻璃衬底上制备铝掺杂氧化锌(AZO)薄膜。利用X射线衍射仪(XRD)、扫描电镜(SEM)、四点探针测试仪和紫外可见光分光光度计等对薄膜的形貌、结构及光电性能进行分析。结果表明:薄膜具有c轴择优取向。随沉积温度升高,薄膜的结晶度先提高后下降,晶粒尺寸逐渐减小。当沉积温度为200℃时,可获得晶粒尺寸为18.30 nm、电阻率为4.1×10~(-3)Ω·cm、透过率为93.80%的AZO透明导电薄膜。     

能量过滤磁控溅射低温沉积ITO 膜及其光电性能研究

利用能量过滤磁控溅射技术,于低温条件下,在玻璃衬底上制备ITO薄膜,研究了过滤电极金属网栅目数、溅射功率、衬底温度对ITO薄膜光电性能的影响。结果表明:在网栅目数为60目、衬底温度为81℃、溅射功率为165W的条件下,所得ITO薄膜的电阻率为4.9×10-4Ω.cm,可见光区平均透过率达到87%。     

射频反应磁控溅射法制备ZnO:Al透明导电薄膜的光电性能

室温下采用射频(RF)反应磁控溅射技术在玻璃衬底上沉积具有(002)择优取向的透明导电Al掺杂ZnO(AZO)薄膜。XRD结果表明,制备的AZO薄膜为多晶,具有c轴择优取向。退火处理能提高其结晶度。在Al靶射频功率为40W,ZnO靶射频功率为250W,氩气流量为15mL/min的条件下,获得200nm厚的薄膜电阻率约3.8×10-3?·cm,在可见光范围内有很好的光透过率。     

直流磁控溅射法在PET基板上制备AZO薄膜

室温下用直流磁控溅射法在PET塑料基板上制备氧化锌薄膜及掺铝氧化锌AZO(ZnO∶Al)薄膜.通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)、四点探针仪、霍尔效应仪及光谱仪等装置,考察了氧分率、溅射功率及铝掺杂量等工艺参数对薄膜微观结构和光电性能的影响.结果表明:AZO薄膜晶体结构为纯ZnO的六角纤锌矿结构.随着Al掺杂量增多,AZO薄膜导电性增加,透光率下降.在氧分率为8.2％,ZnO(40 nm)/Al(6 nm)三层膜条件下,得到电阻率为5.66×10-2Ω·cm,可见光范围内透光率约为80％的AZO薄膜.     

室温条件下射频磁控溅射法制备AZO薄膜的结构与光电性能（英文）

采用高致密度靶材在室温条件下玻璃衬底上RF磁控溅射制备铝掺杂氧化锌(AZO)薄膜。用X射线衍射仪、冷场发射扫描电子显微镜、紫外可见光分光光度计、四探针测试仪和霍尔测试仪分析表征薄膜的显微组织、表面形貌和光电学性能。结果表明,所制备的薄膜均为多晶六方纤锌矿结构,溅射功率对AZO薄膜的光电学性能,尤其是电学性能有重要影响。不同溅射功率下薄膜可见光平均透过率均大于85%,当溅射功率为200 W时,获得最小电阻率4.5×10~(-4)?·cm和87.1%的透过率。AZO薄膜禁带宽度随溅射功率不同在3.48~3.68 e V范围内变化。     

纯Ar气氛中退火对Al掺杂ZnO薄膜性能的影响

用射频磁控溅射技术制备了高度择优取向的Al掺杂ZnO(ZAO)薄膜,并对薄膜在纯氩气中进行了400～600℃的退火处理.利用X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线光电子能谱(XPS)、光谱仪和四探针测试仪等对退火前后薄膜进行了表征和光学、电学性能研究.研究表明,纯氩气中退火处理对ZAO薄膜的晶体、光学和电学性能有影响.原位沉积的薄膜电阻率2.59Ωcm,可见光区透过率约70%.500℃纯Ar气氛中退火1h后,ZAO薄膜的平均晶粒有所长大,薄膜内应力达到最小,接近于松弛状态;薄膜可见光区平均透过率从70%提高到80%左右;而薄膜的电阻率变化不明显,从2.59Ωcm降低到1.13Ωcm.     

氩气流量对掺铝氧化锌薄膜光电性能的影响

采用双靶射频磁控溅射沉积掺铝氧化锌(AZO)薄膜作为铜锌锡硫(CZTS)太阳能电池的低阻窗口层。研究了在溅射功率60 W、溅射时间30 min的工艺条件下,氩气(Ar)流量对AZO薄膜的结晶性、表面形貌、光透过率、电阻率、载流子浓度等光电性能的影响。结果表明,最优Ar气流量为22 cm~3/min,该流量下AZO晶粒大,结晶性能好,AZO薄膜的载流子浓度高,电阻率小,薄膜在400~1100 nm波长下的光透过率为87.2%。     

ATO薄膜太阳能电池电极的磁控溅射沉积及其光电转换性能研究

以自制氧化锡锑(ATO)陶瓷靶材为原料,采用磁控溅射法于200℃、不同氧气流量(0~15 cm3/min)下,同时在石英玻璃基片和铜锌锡硫(CZTS)电池原件上制备了ATO薄膜电极。采用XRD、FESEM以及霍尔效应测试等手段研究了氧气流量对薄膜微观结构和光电性能的影响;采用太阳能效率测试仪测试了CZTS薄膜电池的光电转换效率。结果表明:氧气流量对薄膜的结晶度具有显著影响,从而影响其平均可见光透过率和电阻率。当氧气流量从0 cm~3/min上升至5 cm~3/min时,薄膜结晶性提高使得平均可见光透过率下降;同时,薄膜中Sb~(3+)向Sb~(5+)转变使得载流子浓度上升,电阻率下降。当氧气流量从5 cm~3/min上升至15 cm3/min时,薄膜结晶度降低,平均可见光透过率上升;而氧空位的急剧减少使得载流子浓度降低,电阻率上升。本实验所制备的ATO薄膜在氧气流量为5 cm3/min时具有最低电阻率6.84×10~(-3)?·cm,平均可见光透过率85.49%,同一时间在CZTS电池上制备的ATO薄膜电极与基底结合牢固,且该CZTS电池具有最佳光电转换效率1.47%。     

Effects of Post-weld Heat Treatment on Microstructure,Mechanical Properties and the Role of Weld Reinforcement in 2219 Aluminum Alloy TIG-Welded Joints

In as-welded state, each region of 2219 aluminum alloy TIG-welded joint shows diff erent microstructure and microhardness due to the diff erent welding heat cycles and the resulting evolution of second phases. After the post-weld heat treatment, both the amount and the size of the eutectic structure or θ phases decreased. Correspondingly, both the Cu content in α-Al matrix and the microhardness increased to a similar level in each region of the joint, and the tensile strength of the entire joint was greatly improved. Post-weld heat treatment played the role of solid solution strengthening and aging strengthening. After the post-weld heat treatment, the weld performance became similar to other regions, but weld reinforcements lost their reinforcing eff ect on the weld and their existence was more of an adverse eff ect. The joint without weld reinforcements after the post-weld heat treatment had the optimal tensile properties, and the specimens randomly crack in the weld zone.     

The First Phase of the SRIF Industrialized Base in ＂West Area＂ Has Been Put into Operation

After nearly two years＇ tense construction, the first phase of industrialized base of Shenyang Research Institute of Foundry （SRIF）, located at the Tiexi Casting and Forging Industrial Park in the west of Tiexi District, has now been completed and formally put into operation.     

Thermodynamics Study on the Decomposition of Chromite with KOH

Institute of Process Engineering, Chinese Academy of Sciences, China, has proposed a method for oxidative leaching of chromite with potassium hydroxide. Understanding the mechanism of chromite decomposition, especially in the potassium hydroxide fusion, is important for the optimization of the operating parameters of the oxidative leaching process. A traditional thermodynamic method is proposed and the thermal decomposition and the reaction decomposition during the oxidative leaching of chromite with KOH and oxygen is discussed, which suggests that chromite is mainly destroyed by reactions with KOH and oxygen. Meanwhile, equilibrium of the main reactions of the above process was calculated at different temperatures and oxygen partial pressures. The stable zones of productions, namely, K2CrO4 and Fe2O3, increase with the decrease of temperature, which indicates that higher temperature is not beneficial to thermodynamic reactions. In addition, a comparison of the general alkali methods is carried out, and it is concluded that the KOH leaching process is thermodynamically superior to the conventional chromate production process.     

Influence of Heat Treatment on Damping Behaviour of the Magnesium Wrought Alloy AZ61

The effect of isochronal heat treatments for 1h on variation of damping, hardness and microstructural change of the magnesium wrought alloy AZ61 was investigated. Damping and hardness behaviour could be attributed to the evolution of precipitation process. The influence of precipitation on damping behaviour was explained in the framework of the dislocation string model of Granato and Lücke.     

Effect of Rare Earth Doping on Impedance,Modulus and Conductivity Properties of Multiferroic Composites:0.5(BiLa_xFe_(1-x)O_3)–0.5(PbTiO_3)

The Lanthanum-doped bismuth ferrite–lead titanate compositions of 0.5(Bi LaxFe1-xO3)–0.5(Pb Ti O3)(x = 0.05,0.10,0.15,0.20)(BLxF1-x-PT) were prepared by mixed oxide method.Structural characterization was performed by X-ray diffraction and shows a tetragonal structure at room temperature.The lattice parameter c/a ratio decreases with increasing of La(x = 0.05–0.20) concentration of the composites.The effect of charge carrier/ion hopping mechanism,conductivity,relaxation process and impedance parameters was studied using an impedance analyzer in a wide frequency range(102–106Hz) at different temperatures.The nature of Nyquist plot confirms the presence of bulk effects only,and non-Debye type of relaxation processes occurs in the composites.The electrical modulus exhibits an important role of the hopping mechanism in the electrical transport process of the materials.The ac conductivity and dc conductivity of the materials were studied,and the activation energy found to be 0.81,0.77,0.76 and 0.74 e V for all compositions of x = 0.05–0.20 at different temperatures(200–300 °C).     

Quantitative Analysis of the Crystallographic Orientation Relationship Between the Martensite and Austenite in Quenching–Partitioning–Tempering Steels

The orientation relationships(ORs)between the martensite and the retained austenite in low-and medium-carbon steels after quenching–partitioning–tempering process were studied in this work.The ORs in the studied steels are identified by selected-area electron diffraction(SAED)as either K–S or N–W ORs.Meanwhile,the ORs were also studied based on numerical fitting of electron backscatter diffraction data method suggested by Miyamoto.The simulated K–S and N–W ORs in the low-index directions generally do not well coincide with the experimental pole figure,which may be attributed to both the orientation spread from the ideal variant orientations and high symmetry of the low-index directions.However,the simulated results coincide well with experimental pole figures in the high-index directions{123}_(bcc).A modified method with simplicity based on Miyamoto’s work was proposed.The results indicate that the ORs determined by modified method are similar to those determined by Miyamoto’method,that is,the OR is near K–S OR for the low-carbon Q–P–T steel,and with the increase of carbon content,the OR is closer to N–W OR in medium-carbon Q–P–T steel.     

Using Finite Element and Contour Method to Evaluate Residual Stress in Thick Ti-6Al-4V Alloy Welded by Electron Beam Welding

This work was to reveal the residual stress profile in electron beam welded Ti-6Al-4V alloy plates(50 mm thick) by using finite element and contour measurement methods.A three-dimensional finite element model of 50-mmthick titanium component was proposed,in which a column–cone combined heat source model was used to simulate the temperature field and a thermo-elastic–plastic model to analyze residual stress in a weld joint based on ABAQUS software.Considering the uncertainty of welding simulation,the computation was calibrated by experimental data of contour measurement method.Both test and simulated results show that residual stresses on the surface and inside the weld zone are significantly different and present a narrow and large gradient feature in the weld joint.The peak tensile stress exceeds the yield strength of base materials inside weld,which are distinctly different from residual stress of the thin Ti-6Al-4V alloy plates presented in references before.     

Microstructures and Tensile Properties of Ultrafine-Grained Ni–(1–3.5) wt% SiC_(NP) Composites Prepared by a Powder Metallurgy Route

Silicon carbide nanoparticle-reinforced nickel-based composites(Ni–Si CNP),with a Si CNPcontent ranged from1 to 3.5 wt%,were prepared using mechanical alloying and spark plasma sintering.In addition,unreinforced pure nickel samples were also prepared for comparative purposes.To characterize the microstructural properties of both the unreinforced pure nickel and the Ni–Si CNPcomposites transmission electron microscopy(TEM) was used,while their mechanical behavior was investigated using the Vickers pyramid method for hardness measurements and a universal tensile testing machine for tensile tests.TEM results showed an array of dislocation lines decorated in the sintered pure nickel sample,whereas,for the Ni–Si CNPcomposites,the presence of nano-dispersed Si CNPand twinning crystals was observed.These homogeneously distributed Si CNPwere found located either within the matrix,between twins or on grain boundaries.For the Ni–Si CNPcomposites,coerced coarsening of the Si CNPassembly occurred with increasing Si CNPcontent.Furthermore,the grain sizes of the Ni–Si CNPcomposites were much finer than that of the unreinforced pure nickel,which was considered to be due to the composite ball milling process.In all cases,the Ni–Si CNPcomposites showed higher strengths and hardness values than the unreinforced pure nickel,likely due to a combination of dispersion strengthening(Orowan effects) and particle strengthening(Hall–Petch effects).For the Ni–Si CNPcomposites,the strength increased initially and then decreased as a function of Si CNPcontent,whereas their elongation percentages decreased linearly.Compared to all materials tested,the Ni–Si CNPcomposite containing 1.5% Si C was found more superior considering both their strength and plastic properties.     

Directional Growth of Tin Crystals Controlled by Combined Solute Concentration Gradient Field and Static Magnetic Field

A new method was introduced to achieve directional growth of Sn crystals. Microstructures in liquid(Pb)/liquid(Sn) diffusion couples were investigated under various static magnetic fields. Results show that the β-Sn crystals mainly reveal an irregular dendritic morphology without or with a relatively low static magnetic field(B0.3 T). When the magnetic field is increased to 0.5 T, the β-Sn dendrites close to the final stage of growth begin to show some directional character. With a further increase in the magnetic field to a higher level(0.8–5 T), the β-Sn dendrites have an enhanced directional growth character, but the dendrites show a certain deflection. As the magnetic field is increased to 12 T, the directional growth of the β-Sn dendrites in the center of the couple is severely destroyed. The mechanism of the directional growth of the β-Sn crystals and the deflection of the β-Sn crystals with the application of static magnetic field was tentatively discussed.     

电化学噪声数据处理方法概述

综述了常见的电化学噪声数据处理方法,介绍了直流趋势剔除、统计分析、快速傅立叶变换(FFT)法计算功率谱密度(PSD)以及小波变换处理电化学噪声信号的基本过程,并阐释了各种数学处理及所得参数的物理意义。