Pulsed-laser atom probe studies of a precipitation hardened maraging TRIP steel

A precipitation hardened maraging TRIP steel was analyzed using a pulsed laser atom probe. The laser pulse energy was varied from 0.3 to 1.9 nJ to study its effect on the measured chemical compositions and spatial resolution. Compositional analyses using proximity histograms did not show any significant variations in the average matrix and precipitate compositions. The only remarkable change in the atom probe data was a decrease in the ++/+ charge state ratios of the elements. The values of the evaporation field used for the reconstructions exhibit a linear dependence on the laser pulse energy. The adjustment of the evaporation fields used in the reconstructions for different laser pulse energies was based on the correlation of the obtained cluster shapes to the TEM observations. No influence of laser pulse energy on chemical composition of the precipitates and on the chemical sharpness of their interfaces was detected.     

Quantitative comparison of energy-filtering transmission electron microscopy and atom probe tomography

Whereas transmission electron microscopy (TEM) is a well established method for the analysis of thin film structures down to the sub-nanometer scale, atom probe tomography (APT) is less known in the microscopy community. In the present work, local chemical analysis of sputtered Fe/Cr multilayer structures was performed with energy-filtering transmission electron microscopy (EFTEM) and APT. The single-layer thickness was varied from 1 to 6 nm in order to quantify spatial resolution and chemical sensitivity. While both the methods are able to resolve the layer structure, even at 2 nm thickness, it is demonstrated that the spatial resolution of the APT is about a factor of two, higher in comparison with the unprocessed EFTEM data. By calculating the influence of the instrumental parameters on EFTEM images of model structures, remaining interface roughness is indicated to be the most important factor that limits the practical resolution of analytical TEM.     

Broadening the applications of the atom probe technique by ultraviolet femtosecond laser

Laser assisted field evaporation using ultraviolet (UV) wavelength gives rise to better mass resolution and signal-to-noise ratio in atom probe mass spectra of metals, semiconductors and insulators compared to infrared and green lasers. Combined with the site specific specimen preparation techniques using the lift-out and annular Ga ion milling in a focused ion beam machine, a wide variety of materials including insulating oxides can be quantitatively analyzed by the three-dimensional atom probe using UV laser assisted field evaporation. After discussing laser irradiation conditions for optimized atom probe analyses, recent atom probe tomography results on oxides, semiconductor devices and grain boundaries of sintered magnets are presented.     

Atomic scale investigation on the distribution of boron in medium carbon steels by atom probe tomography and EELS

The medium carbon (0.5 wt% C) steels containing various boron contents were studied to observe the distribution of boron using atom probe tomography and electron energy loss spectroscopy. APT revealed the segregation of boron atoms at retained austenite for 100 ppm boron added steels and the trapped carbon atoms at micro-twins for 50 ppm boron treated steels. Moreover, it was also found that boron was randomly distributed for 20 ppm boron added steels regardless of the interactions between carbon and boron.     

Impact of laser pulsing on the reconstruction in an atom probe tomography

The implementation of fast pulsed laser has significantly improved the performance of the atom probe technique by enabling near-atomic-scale three-dimensional analysis of poorly conducting materials. This has broadened the range of applications for the atom probe, addressing a major limitation of the technique. Despite this, the implications of lasing on the tomographic reconstruction of atom probe data have yet to be fully characterised. Here, we demonstrate how changes in the shape of the specimen surface, induced by laser pulsing, affect the ion trajectories, and hence the projection parameters used to build the three-dimensional map.     

Field-dependent abundances of hydride molecular ions in atom probe tomography of III-N semiconductors

We investigate the microscopic behaviour of hydrogen-containing species formed on the surface of III-N semiconductor samples by the residual hydrogen in the analysis chamber in laser-assisted atom probe tomography (APT). We analysed AlGaN/GaN heterostructures containing alternate layers with a thickness of about 20 nm. The formation of H-containing species occurs at field strengths between 22 and 26 V/nm and is independent of the analysed samples. The 3D APT reconstruction makes it possible to map the evolution of the surface behaviour of these species issued by chemical reactions. The results highlight the strong dependence of the relative abundances of hydrides on the surface field during evaporation. The relative abundances of the hydrides decrease when the surface field increases due to the evolution of the tip shape or the different evaporation behaviour of the different layers.     

Quantitative binomial distribution analyses of nanoscale like-solute atom clustering and segregation in atom probe tomography data

The applicability of the binomial frequency distribution is outlined for the analysis of the evolution nanoscale atomic clustering of dilute solute in an alloy subject to thermal ageing in 3D atom probe data. The conventional chi(2) statistics and significance testing are demonstrated to be inappropriate for comparison of quantity of solute segregation present in two or more different sized system. Pearson coefficient, mu, is shown to normalize chi(2) with respect to sample size over an order of magnitude. A simple computer simulation is implemented to investigate the binomial analysis and infer meaning in the measured value of mu over a series of systems at different solute concentrations and degree of clustering. The simulations replicate the form of experimental data and demonstrate the effect of detector efficiency to significantly underestimate the measured segregation. The binomial analysis is applied to experimental atom probe data sets and complementary simulations are used to interpret the results.     

Investigation of the analysis parameters and background subtraction for high-k materials with atom probe tomography

In this paper we present depth profiles of a high-k layer consisting of HfO₂ with an embedded sub-nm thick ZrO₂ layer obtained with atom probe tomography (APT). In order to determine suitable measurement parameters for reliable, reproducible, and quantitative analysis, we have investigated the influence of the laser energy and the specimen temperature on the resulting elemental composition. In addition we devise a procedure for local background subtraction both for the composition and the depth scale that is crucial for gaining reproducible results. We find that the composition of the high-k material remains unaffected even for extreme laser energies and base temperatures, while higher laser energies lead to an accumulation of silicon at the upper interface of the high-k layer. Furthermore we show that APT is capable of providing sub-nm depth resolution for high-k materials with high reproducibility, good compositional accuracy, and high measurement yield.     

Qualification of the tomographic reconstruction in atom probe by advanced spatial distribution map techniques

New and improved spatial distribution map (SDM) methods are developed to identify and extract crystallographic information within atom probe tomography three-dimensional (3D) reconstructions. Detailed structural information is retrieved by combining z-SDM offset distribution analyses computed in multiple crystallographic directions, accurately determining inter-planar spacings and crystallographic angles. The advantages of this technique in comparison to applying the complete z-SDM and complementary xy-SDM analysis to a single crystallographic direction are investigated. Further, in determining these multidirectional z-SDM and xy-SDM profiles, background noise reduction and automatic peak identification algorithms are adapted to attain increased accuracy and is shown to be particularly effective in cases where crystal structure is present but poorly resolved. These techniques may be used to calibrate the reconstruction parameters and investigate their dependence on the design of individual atom probe experiments.     

Advances in the reconstruction of atom probe tomography data

Key to the integrity of atom probe microanalysis, the tomographic reconstruction is built atom by atom following a simplistic protocol established for previous generations of instruments. In this paper, after a short review of the main reconstruction protocols, we describe recent improvements originating from the use of exact formulae enabling significant reduction of spatial distortions, especially near the edges of the reconstruction. We also show how predictive values for the reconstruction parameters can be derived from electrostatic simulations, and finally introduce parameters varying throughout the analysis.     

Determination of matrix composition based on solute‐solute nearest‐neighbor distances in atom probe tomography

In this study, we propose a fast automatic method providing the matrix concentration in an atom probe tomography (APT) data set containing two phases or more. The principle of this method relies on the calculation of the relative amount of isolated solute atoms (i.e., not surrounded by a similar solute atom) as a function of a distance d in the APT reconstruction. Simulated data sets have been generated to test the robustness of this new tool and demonstrate that rapid and reproducible results can be obtained without the need of any user input parameter. The method has then been successfully applied to a ternary Al‐Zn‐Mg alloy containing a fine dispersion of hardening precipitates. The relevance of this method for direct estimation of matrix concentration is discussed and compared with the existing methodologies. Microsc. Res. Tech., 2010. © 2010 Wiley‐Liss, Inc.     

Imaging the three orientation variants of the DO22 phase by 3D atom probe microscopy

Three-phase NiAlV alloys were investigated using a three-dimensional atom probe. Ageing at 800 °C gives rise to the precipitation of two ordered phases within the supersaturated FCC solid solution, namely Ni₃Al (L1₂ structure) and Ni₃V (DO₂₂ structure). The DO₂₂ phase has three orientation variants which need to be identified in 3DAP images. It is shown that an appropriate choice of analysis site enables us to image the chemical order within both L1₂ and DO₂₂ ordered phases and to distinguish the three orientation variants of the DO₂₂ phase in reconstructed images. The lateral resolution of 3DAP in these experimental conditions was estimated through simple considerations to be less than 0.3 nm.     

Effect of analysis direction on the measurement of interfacial mixing in thin metal layers with atom probe tomography

The accuracy and precision of thin-film interfacial mixing as measured with atom probe tomography (APT) are assessed by considering experimental and simulated field-evaporation of a Co/Cu/Co multilayer structure. Reconstructions were performed using constant shank angle and Z-scale reordering algorithms. Reconstruction of simulated data (zero intermixing) results in a 10-90% intermixing width of ∼0.2 nm while experiential intermixing (measured from multiple runs) was 0.47±0.19 and 0.49±0.10 nm for Co-on-Cu and Cu-on-Co interfaces, respectively. The experimental data were collected in analysis orientations both parallel and anti-parallel to film growth direction and the impact of this on the interfacial mixing measurements is discussed. It is proposed that the resolution of such APT measurements is limited by the combination of specimen shape and reconstruction algorithms rather than by an inherent instrumentation limit.     

Optimisation of mass ranging for atom probe microanalysis and application to the corrosion processes in Zr alloys

Atom probe tomography uses time-of-flight mass spectrometry to identify the chemical nature of atoms from their mass-to-charge-state ratios. Within a mass spectrum, ranges are defined so as to attribute a chemical identity to each peak. The accuracy of atom probe microanalysis relies on the definition of these ranges. Here we propose and compare several automated ranging techniques, tested against simulated mass spectra. The performance of these metrics compare favourably with a trial of users asked to manually range a simplified simulated dataset. The optimised automated ranging procedure was then used to precisely evaluate the very low iron concentration (0.003-0.018 at%) in a zirconium alloy to reveal its behaviour in the matrix during corrosion; oxygen is injected into solution and has the effect of increasing the local iron concentration near the oxide-metal interface, which in turn affects the corrosion properties of the metal substrate.     

Clustering and nearest neighbour distances in atom probe tomography: the influence of the interfaces

The statistical 1NN method is an elegant way to derive the composition of small B‐enriched clusters in a random AB solid solution from 3D atomic fields. An extension of this method is proposed that includes the contribution of interface region and provides an estimate of the core composition of clusters. This model is applied to boron‐implanted silicon containing boron‐enriched clusters. A comparison with the previous model is performed. This new approach gives relevant information, i.e. the core composition of clusters and the cluster–matrix interface width.     

Characterization of dilute species within CVD‐grown silicon nanowires doped using trimethylboron: protected lift‐out specimen preparation for atom probe tomography

Three‐dimensional quantitative compositional analysis of nanowires is a challenge for standard techniques such as secondary ion mass spectrometry because of specimen size and geometry considerations; however, it is precisely the size and geometry of nanowires that makes them attractive candidates for analysis via atom probe tomography. The resulting boron composition of various trimethylboron vapour–liquid–solid grown silicon nanowires were measured both with time‐of‐flight secondary ion mass spectrometry and pulsed‐laser atom probe tomography. Both characterization techniques yielded similar results for relative composition. Specialized specimen preparation for pulsed‐laser atom probe tomography was utilized and is described in detail whereby individual silicon nanowires are first protected, then lifted out, trimmed, and finally wet etched to remove the protective layer for subsequent three‐dimensional analysis.     

饲料对牛乳的碳稳定同位素比值的影响

通过等电点沉淀与离心分离牛乳中的酪蛋白和脂肪,采用元素分析 串联稳定同位素比值质谱法（EA-IRMS）测定牛乳组分的δ¹³C值。经验证,该方法具有良好的准确性和重复性,牛乳及其各组分δ¹³C值测定精度标准偏差（SD）均小于0.1‰（n=5）。对不同牛乳中δ¹³C值进行比较表明,饲料组成直接影响牛乳中的碳稳定同位素组成。以玉米为主要饲料的奶源地牛乳中δ¹³C值均高于-17.6‰,若饲料中含有羊草和苜蓿会使牛乳的δ¹³C值相对偏负。购自不同地区的市售乳样品δ¹³C值具有不同特点,中国市售乳样品的δ¹³C值与一些发达国家样品的δ¹³C值具有显著差异。研究结论验证了牛乳δ¹³C值在牛乳溯源中的作用,为稳定同位素分析技术在牛乳真实性溯源的应用积累了数据与理论基础。