真空二流体制作35μm/35μm细线路的研究

文章尝试了采用真空二流体蚀刻试做35μm/35μm线路的可行性。经过实验证明:采用DES工艺&搭配合适的蚀刻设备,如真空二流体蚀刻机,可以把细线路制作等级提升到35μm/35μm;能获得大于3的蚀刻因子,局部区域的蚀刻因子更是高达14.99-11.82。此外,3μm铜箔可以获得集中度更高的线宽&更高的蚀刻因子。     

厚铜板线路制作工艺探讨

在厚铜板件的生产制作过程中,蚀刻一直是一个难点。为了达到蚀刻目的,制作上一般选择多次快速蚀刻或者一次性慢速蚀刻。本文通过对比不同面铜厚度的板进行蚀刻,分析比较不同蚀刻方式对蚀刻因子、线宽和线形的影响,并对其差异性进行原因分析。为生产和设计提供有价值的参考。     

电调整微蚀刻

评述了采用电调整微蚀刻试验表明,它适用于各种各样的线宽和间距的精细导线的制造。比起常规喷射蚀刻工艺来,其侧蚀小、蚀刻因子和tanθ高的效果。     

水池效应对厚铜板蚀刻的影响分析

结合厚铜PCB(205.7μm/205.7μm)的蚀刻实践和理论分析,找出了水池效应是影响厚铜线路蚀刻因子的重要原因,提出了从喷淋和板面设计两方面改善厚铜板蚀刻效果的建议并进行了实验验证,对厚铜板线路的蚀刻有一定价值的参考意义。     

印制电路板制造中大腔体等离子体机的蚀刻均匀性研究

随着5G产品的逐步推广,国内主流通信设备制造商的PCB尺寸也达到了单板651.5 mm以上.因此,为提高生产效率,大腔体的等离子机开始逐步应用于PCB钻孔后的除胶渣流程.但是等离子除胶渣需要满足一定的树脂蚀刻均匀性要求,大腔体的设计对蚀刻均匀性是一个挑战.文章主要从树脂蚀刻均匀性测试方法、计算方法和等离子机工艺气体进气...     

二氧化硅干法蚀刻参数的优化研究

阐述了二氧化硅干法蚀刻的原理和主要的蚀刻参数.应用正交实验,进行了蚀刻速率、均匀性、选择比等主要蚀刻参数的优化,得出主要工艺参数的设置方法和理想条件漂移时的调整方法以及优化选择比的蚀刻方案.     

酸性氯化铜蚀刻液与碱性氯化铜蚀刻液比较

本文针对酸性氯化铜蚀刻液与碱性氯化铜蚀刻液的组成本性计算方面作一简单的对比,为业界同仁提供一 个参考方向,对新手或行外人士以启迪,有事半功倍之受用。     

正交法制作50μm／50μm精细线路工艺参数的优化

在公司批量生产HDI板最小线宽／间距为75μm／75μm能力的基础上制作了线宽／间距为50μm／50μm的精细线路,试验用LDI曝光机曝光后再用正交试验法的L9（3^4）正交表安排了显影速度、蚀刻速度、显影压力、蚀刻压力四因素试验,选取线宽和蚀刻因子作为指标。通过对两个指标的综合分析,试验得到最佳工艺参数为：显影速度为4．0m／min,显影上压力为0．18MPa,下压力为0．15MPa,蚀刻速度为4．5m／min,蚀刻上压力为O．28MPa,下压力为0．25MPa。     

美国开发一种新的砷化镓晶圆蚀刻法

正美国伊利诺大学(University of Illinois)实验室开发出一种以金属为蚀刻催化剂的砷化镓晶圆蚀刻法,这种蚀刻方法,其制造速度较传统的湿式蚀刻制程来得快、而成本又较干式蚀刻来得低,一旦该制程获得推广,可望有效推进用以生产太阳能砷化镓产品的商业应用技术。     

印制板碱性氯化铜蚀刻液的作用及控制

介绍了印制板蚀刻液各成分和条件对蚀刻过程影响的试验情况，提出了控制蚀刻成分和蚀刻条件的简便方法。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.