一种新型大刚度高灵敏度的并联六维力传感器设计研究

腕力传感器是一类重要的机器人传感器,腕力传感器的结构设计好坏直接影响到传感器的各项指标。在分析了并联力传感器的力变换原理,利用并联传感器的空间力传递关系,直接推导出感测力的六维雅可比矩阵,并将六维力雅可比矩阵用具体的结构参数解析表达,在此基础上设计了一种新的并联六维力传感器,新设计的附加弹性体的采用,使该传感器具有很大的刚度,同时具有很高的检测灵敏度,从而很好地解决了传感器的刚度与灵敏度之间的矛盾,探索了传感器设计的新方法和途径。     

0.5级力传感器示值误差测量结果的不确定度评定

采用杠杆式测力机标准装置依据JJG 391-2009《力传感器检定规程》测量0.5级力传感器并参考JJF 1059.1-2012《测量不确定度评定与表示》对其测量结果不确定度进行评定。文章探讨了检定力传感器测量结果的不确定度来源,评定过程和方法。     

光纤式机器人触觉传感器横向串扰信号的分析

本文对所研究的光纤式机器人触觉传感器的横向串扰信号进行理论分析和实验研究,提出消除这一串扰信号的方法,并给出实验结果。     

Development and evaluation of a compact 6-axis force/moment sensor with a serial structure for the humanoid robot foot

In order to walk safely, forces and moments exerted on humanoid robot foot should be measured and used for controlling the robot. This paper describes the development and evaluation of a six-axis force/moment sensor used under humanoid robot foot. The developed sensor is capable of measuring 400 N horizontal force, 1000 N vertical force, 20 N·m moment about the horizontal axis and 10 N·m moment about the vertical axis using rectangular cross-sectional beams. The structure of the sensor is newly modeled, and the sensing elements are simulated by using finite element method (FEM). Then the sensor is fabricated by attaching strain gages onto the beams. Finally, a characteristic test of the developed sensor is carried out, and the output from FEM analysis agrees with those from the characteristic test.     

Stewart结构六维力传感器力各向同性研究

对于Stewart并联结构的六维力传感器,当坐标系建立在下平台的几何中心处,根据传感器的静态数学模型,研究了力各向同性指标,得到力各向同性的具体解析表达式,同时对力各向同性进行了图谱分析,并研究了坐标系变化时力各向同性指标。     

一种六维轮力传感器标定分析

针对汽车六维车轮力传感器数值解耦精度不高的问题,设计了标定台架,并对一种新研制的六维WFS进行了标定和解耦,以评估该传感器的性能并研究和完善高精度的解耦方法。讨论和分析了六维WFS的测量原理和解耦理论,通过多向组合加载的方式,获得了传感器各通道对多维耦合力的响应,利用最小二乘法解耦得到了传感器的耦合系数矩阵;并对耦合系数矩阵和耦合率矩阵的特征进行了讨论。研究结果表明,采用多向组合加载结合最小二乘法进行解耦,解决了试验中难以精确施加纯单向力或力矩的困难,能使六维WFS具有更高的测量精度。     

过约束平面并联三维力/力矩传感器的研制

针对轴承的故障早期诊断和在线实时监测,提出了一种新型过约束平面并联三维力/力矩传感器。通过采用分支轴线均不过传感器中心的6条对称分布的测力分支,该传感器可同时测量轴承径向载荷和轴向力矩。根据静力学平衡方程,求解了其测量数学模型;基于传感器测量模型与性能指标分析了传感器性能,进而对其各结构参数进行优化设计。研制了传感器样机及其加载标定实验系统,开展了加载标定实验,得到了该传感器的测量精度。标定实验结果显示:传感器径向力测量精度为2.56%,力矩测量精度为0.92%,Ⅰ类误差为2.56%,最大Ⅱ类误差为2.29%。文中所做工作,为将该新型过约束平面并联三维力/力矩传感器应用于在线实时测量轴承径向载荷和轴向摩擦力矩奠定了基础。     

虚拟指尖力传感器的建模与实现

为了在灵巧手动力学研究领域提供更多的研究工具,根据真实三维指尖力传感器的原理,运用力传感器弹性体建模的方法,构造了虚拟指尖力传感器的模型。为了求解力传感器模型的弹性体变形量,采用了一种动力学方程数值积分方法。该虚拟指尖力传感器,通过在机器人灵巧手虚拟现实遥操作平台上的运用,实现了对抓取滑动的判断,并验证了模型的精度。最后,基于滑动的判断,系统确定了一种抓取策略,针对虚拟环境中灵巧手的自主抓取问题进行了有益的探索。     

Non-Destructive evaluation of separation and void defect of a pneumatic tire by speckle shearing interferometry

This paper describes the speckle shearing interferometry, a non-destructive optical method, for quantitative estimation of void defect and monitoring separation defect inside of a pneumatic tire. Previous shearing interferometry has not supplied quantitative result of inside defect, due to effective factors. In the study, factors related to the details of an inside defect are classified and optimized with pipeline simulator. The size and the shape of defect can be estimated accurately to find a critical point and also is closely related with shearing direction. The technique is applied for quantitative estimation of defects inside of a pneumatic tire. The actual traveling tire is monitored to reveal the cause of separation and the starting points. And also unknown void defects on tread are inspected and the size and shape of defects are estimated which has good agreement with the result of visual inspection.     

Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor

This paper describes an atomic force microscope (AFM) based instrument for nanometer edge profile measurements of diamond cutting tools. The instrument is combined with an AFM unit and an optical sensor for alignment of the AFM probe tip with the top of the diamond cutting tool edge in the submicrometer range. In the optical sensor, a laser beam from a laser diode is focused to generate a small beam spot with a diameter of approximately 10 μm at the beam waist, and then received by a photodiode. The tool edge top and the AFM probe tip are brought to the center of the beam waist, respectively, through monitoring the variation of the photodiode output. To reduce the influence of the electronic noise on the photodiode output so that the positioning resolution can be improved, a modulation technique is employed that modulates the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements are carried out.     

Development of a microlateral force sensor and its evaluation using lateral force microscopy

A microlateral force sensor (MLFS) was developed and evaluated using atomic force microscopy (AFM). The sensor was attached to a sensing table supported by a suspension system. The lateral motion of the sensing table was activated by a comb actuator. The driving voltage to the comb actuator was controlled to maintain a constant position of the sensing table by detecting the tunneling current at a detector, which consisted of two electrodes where the bias voltage was applied. An AFM was used to apply a lateral force to the sensing table of the sensor. When the probe of a cantilever was pressed against the sensing table and a raster scanning was conducted, the driving voltage of the comb actuator changed to compensate the friction force between the probe and sensing table. AFM measurements of an asperity array on the sensing table were conducted, and a lateral force microscopy image (LFM) was obtained from the change in driving voltage. The image by MLFS was very similar to the LFM image that was conventionally obtained from torsion of the cantilever. The LFM image strongly correlated with the gradient image calculated from the AFM topographic image. The force sensitivity of the MLFS was determined by comparing the LFM image obtained by using the MLFS with the tangential force derived from the gradient of the AFM image.     

On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor

This paper describes the measurement of a cylindrical surface with sinusoidal micro-structures over a large area on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on the periphery surface of a cylinder by the fast tool servo-based diamond turning, are superposition of periodic sine-waves along the cylinder axis and the cylinder circumference with amplitudes of 100 nm and wavelengths of 100 μm, respectively. An optical two-dimensional (2D) slope sensor with a multi-spot light beam is developed for measurement of the 2D local slopes of the sinusoidal micro-structured surface. A cylindrical lens is employed in the sensor for removing the influence of the curvature of the cylinder surface. Experiments of fabrication and measurement of the sinusoidal micro-structured surface on an ultra-precision diamond turning machine are carried out.     

基于空间光耦合系统的芯片温度传感器

研究了一种硅光子芯片空间光耦合系统,简化了集成光子芯片用光纤阵列耦合的方式,通过将1 550 nm附近波段的光通过空间光学系统,经光栅耦合器垂直耦合进入集成光子芯片,经过波导与微环谐振腔实现光学传感,采用多模光纤收集出射能量,并进行温度传感测试。实验结果表明,用波长探测方式,得到自由光谱范围（FSR）为0.85 nm,Q值为16 321的环形谐振腔直通端透射谱线。在温度传感测试中,其灵敏度达到127 pm/℃。通过进一步对比测试表明,空间光耦合与光纤阵列光耦合只在插入损耗方面有所差距,耦合系统可得到较好的温度传感测试结果。空间光耦合具有更换传感器芯片便捷,容易实现多通道测试等优点。     

基于Stewart结构六维大力传感器的性能分析及结构优化

针对基于Stewart结构新型六维大力传感器在结构设计时存在诸多性能指标难以均衡的问题,对传感器的结构几何参数与其性能的关系进行了分析。依据基于Stewart结构六维大力传感器的测量原理,建立了传感器测量精度与一阶静力影响系数矩阵条件数的关系模型。通过分析力及力矩一阶静力影响系数矩阵和力及力矩柔度矩阵,揭示了传感器的各向同性指标、灵敏度及其各向同性指标与其结构参数之间的相互关系。并通过图谱优化方法和遗传算法对新型六维大力传感器的结构参数进行了优化。其分析结果将为六维大力传感器的结构设计提供有效的参考。     

高灵敏度大量程六维力传感器设计

为满足空间在轨组装望远镜地面装配试验的相关需求,综合考虑六维力传感器的量程、刚度和灵敏度等因素,设计了一种高灵敏度大量程六维力传感器。首先对经典十字梁六维力传感器进行数学建模,通过对比各通道单独作用时,应变梁表面应变和弹性体变形刚度的数学表达式,提出一套提高传感器灵敏度的改进方案;然后对传感器结构进行详细设计,并通过传感器的有限元仿真验证结构方案可行性;最后,对六维力传感器进行加工与标定,得到传感器线重复性误差小于0. 33%FS,力通道测量灵敏度大于0. 83 m V/V,力矩通道测量灵敏度大于2. 6 m V/V。该六维力传感器各项性能优良,目前已应用于在轨组装望远镜地面实验当中。     

Research on the parallel load sharing principle of a novel self-decoupled piezoelectric six-dimensional force sensor

This paper presents a novel integrated piezoelectric six-dimensional force sensor which can realize dynamic measurement of multi-dimensional space load. Firstly, the composition of the sensor, the spatial layout of force-sensitive components, and measurement principle are analyzed and designed. There is no interference of piezoelectric six-dimensional force sensor in theoretical analysis. Based on the principle of actual work and deformation compatibility coherence, this paper deduces the parallel load sharing principle of the piezoelectric six-dimensional force sensor. The main effect factors which affect the load sharing ratio are obtained. The finite element model of the piezoelectric six-dimensional force sensor is established. In order to verify the load sharing principle of the sensor, a load sharing test device of piezoelectric force sensor is designed and fabricated. The load sharing experimental platform is set up. The experimental results are in accordance with the theoretical analysis and simulation results. The experiments show that the multi-dimensional and heavy force measurement can be realized by the parallel arrangement of the load sharing ring and the force sensitive element in the novel integrated piezoelectric six-dimensional force sensor. The ideal load sharing effect of the sensor can be achieved by appropriate size parameters. This paper has an important guide for the design of the force measuring device according to the load sharing mode.     

Design and development of compliant mechanisms for electromagnetic force balance sensor

Compared with the lever-type amplifier, the rhombus-type amplifier has attracted more attention by virtue of large displacement amplification ratio, compact structure, and linear output displacement. In this paper, a novel electromagnetic force balance sensor (EFBS) based on the rhombus-type amplifier is presented to measure the mass with high precision. First, the structure and operating principle of the EFBS are described, and the requirements for the design and manufacture of the amplifier are put forward. Then, the analytical models of the two-stage rhombus-type amplifier are given out, and two guiding mechanisms are analyzed and modeled. Furthermore, the validity of the established model is verified by finite element analysis (FEA). Thanks to the theoretical guidance, an electromagnetic force balance sensor based on the two-stage rhombus-type amplifier and double parallelogram flexure mechanism is designed and tested. The experimental results demonstrate that the developed EFBS can measure the mass of the objects with high precision, and also verifies the correctness of the analytical model. This provides a new concept for the structural design of the EFBS.     

基于新型导电橡胶的三维力柔性阵列触觉传感器研究

针对目前多维阵列触觉传感器不能兼有柔韧性和测量多维力特征信息等难题,研究了一种基于导电橡胶的新型柔性三维力触觉传感器,通过检测橡胶的电阻变化来分析受力信息.该传感器的敏感单元采用"整体液体成型"的方法制作而成,操作简便,有利于触觉传感器的产品化.介绍了该传感器的基本结构及其工作原理,并对三维力的检测进行了仿真研究,结果表明该传感器能够实现对三维力信息的检测.     

轿车车门关闭力自动测试评价系统开发

应用力与位移传感器和计算机技术,研制了轿车车门关闭力一位移自动测量系统。该系统能够同时采集关门过程中车门的关门力和位移。实测结果表明,该测量系统结构简单、操作方便,测量精度满足实际要求。     

用于假手指尖的光纤光栅触觉力传感器研究

针对现有假手触觉测量常用的薄膜压力传感器精度不佳、线性度差、迟滞性高等问题,研究了一种可安装于假手指尖的光纤布拉格光栅触觉力传感器。首先,通过传感单元的微小化结构设计,可以将施加的外力转化为光纤承受的轴向力;进而,通过有限元对传感器结构参数进行优化,提高了光纤光栅对于压力的灵敏度;然后,围绕假手指尖应用的需求,制作了这种光纤布拉格光栅触觉力传感器;最后,对该传感器进行了性能标定、对比分析和应用抓取3个实验分析,实验结果表明:该传感器压力灵敏度为0.103 8 nm/N,线性度R~2为0.998,重复性误差为1.32%和迟滞性误差为2.19%;与现有的薄膜压力传感器对比,该传感器的线性度和重复度都更高,迟滞性更低。