Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor

To investigate the application of the multi-beam angle sensor (MBAS) to high-precision optical aspheric and freeform surfaces, which are critical components in optical systems, we present a method of using an MBAS to reconstruct an aspheric surface from angle data. The MBAS is based on a multi-autocollimator system with a microlens array, which can split the beam into several spots and can convert centroid detection of the light intensity into an angle measurement. The MBAS is designed to address the curvature-range problem via a circumferential scan better than other methods and automatically eliminates the tilt error caused by rotation of a workpiece. Using a tracking technique, the MBAS can automatically determine focal spot positions from the centroid measurement of the light intensity. This is directly related to the accuracy of the angular difference measurement. The experimental results confirm the feasibility of using an MBAS for 3D surface profile measurements of cylindrical surfaces.     

锥形内表面干涉测量误差分析

为了实现对回转锥形内表面的形貌精密测量,分析了干涉测量中误差产生的原因,明确了误差对测量结果造成的影响。通过在圆柱坐标系下建立数学模型,推导出偏移误差和角度误差的数学公式,并对误差公式进行分析。结果表明:圆锥反射镜的偏移量和顶角的加工误差都会造成光程差;当偏移量极小时,光程差与反射镜偏移量成线性关系;光程差对于角度误差非常敏感,为了保证测量精度,需要严格控制圆锥反射镜的顶角大小。     

高精密滚转角测量干涉仪

现有的各种激光干涉仪可以方便地测量围绕垂直于直线位移方向的两个转角偏移,但是对于围绕运动轴的滚转角偏移,特别是对于大行程运动,缺乏有效的测量方法。针对各种高精密直线运动定位装置,设计一个新型的差分平面干涉仪,并采用一个楔面棱镜和楔面反射镜,组合成为一个几何空间对称四光路系统,构成新型的高精密滚转角激光干涉测量仪。它不需要与行程同长的大反射参考镜,但同样能实现高分辨率,而且简便实用,可以直接溯源米定义。试验证明,几何空间对称四光路滚转角干涉测量仪能够有效地排除其他自由度运动的干扰,利用它可以快速高效地测量各种精密直线位移运动的滚转角。使用普通的2π/360细分相位计,测量分辨率为1.1″,若使用2π/36 000的高精密细分相位计,滚转角的测量分辨率可达到0.01″。     

被测件随机移相干涉面形测量方法

针对光学元件的面形测量,提出了一种被测件随机移相干涉面形测量法,用于降低移相干涉仪的成本,避免移相器老化产生的移相误差对面形检测精度的影响。该方法利用微位移驱动器驱动被测件在摩擦气浮复合导轨上移动进行随机移相并用相机采集若干幅干涉图;然后利用最小二乘迭代算法处理干涉图数据进而迭代出被测表面相位分布;最后进行一系列数据处理求解出被测件的面形结果。为了验证该方法的可行性,在实验室搭建了改进的斐索移相干涉系统,并选用一个凹面镜和一个平面镜作为被测件在搭建的系统上进行了实验测试,同时与同台仪器上的传统移相方法得到的测量结果进行了比对。结果表明:在激光光源波长λ为632.8nm的情况下,凹球面镜面形PV值和RMS值与传统移相方式测量结果相差0.001λ,和0.002λ;平面镜面形PV值和RMS值与传统移相方式的测量结果相差0.002λ和0.003λ,面形数据基本一致。该方法避免了移相器老化引入移相误差,降低了仪器成本,测量精度高。     

利用相位差异法检测镜面面形

为了验证相位差异波前检测器演示系统利用自带光源独立完成波前检测任务的能力,搭建了基于相位差异法检测镜面面形的实验平台。测试时在焦面和离焦面上同时采集短曝光图像,在已知离焦量的前提下解算出波前相位分布并恢复出目标,从而实现对大镜面像差的估计。为了进一步验证相位差异测量方法的准确性,对相位差异法与高精度的ZYGO干涉仪得到的测量结果进行了比较分析。实验结果表明:两种方法获得的面形误差分布及误差的峰谷值(PV)和均方根值(RMS)一致性很好,而波前RMS的测量精度达到了2.83/1 000λ。得到的结果表明提出的相位差异法能有效地检测出镜面的像差,且准确性很好。     

厚硅片的高速激光切片研究

基于激光切片原理的分析,给出了厚硅片的高速激光切片方法,采用平凸腔补偿工作物质的热透镜效应,利用Nd∶YAG棒本身的自孔径选模作用,获得了光束质量因子M²等于4.19的50 W 1.064 μm激光输出。选取合适的扩束倍数、重复频率和出气孔直径,当切割0.75 mm厚的硅片时,切片速度达400 mm/min;当切割两层叠放的0.75 mm厚的硅片时,切片速度达到100 mm/min。切片的切口光滑,切缝较窄,重复精度高,切片质量好,达到用传统方法难以达到的切片效果。     

Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L) mm × 130(W) mm × 90(H) mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented.     

鱼眼镜头径向畸变的校正方法

针对鱼眼图像存在的径向畸变,提出了一种通过计算鱼眼镜头径向畸变函数来校正鱼眼图像的方法。首先,根据鱼眼镜头本身的特性运用Hough变换获取鱼眼图像的圆心以及校正半径;运用所提出的圆柱形棋盘格模版来完成径向畸变的标定,通过多项式拟合出鱼眼图像直径上采样点到圆心的距离和实际该采样点像点对应的物点所在视角之间的关系,从而将鱼眼图像恢复到球形投影面上;最后运用平面投影模型矫正出符合人类视觉感官的平面透视图像,并用一个圆柱形的投影面校正出了360°全景图。最后的实验结果证明了此方法的有效性。     

A novel approach for the field calibration of line structured-light sensors

A new approach for the field calibration of line structured-light sensors is presented, which is fulfilled using a planar target and a raising block. The camera model is firstly established according to the mapping between the world coordinate frame and the computer image coordinate frame. Based on the rule of cross-ratio invariance the calibration points are extracted from the squares on the target, and the lens distortion coefficients are simultaneously acquired. The unknown parameters in the camera model are solved using these points. On the projection of the laser plane, two intersection lines are formed by the laser plane with the target and the raising block, respectively. The angle between the laser plane and the target is worked out by fitting plane using the two lines. Utilizing this angle, the three coordinates of a point in the laser plane can be represented by two of them. Thus the two coordinates can be directly obtained from the camera model. This method simplifies the calibration procedure of structured-light sensors, and facilitates online use. Experiment studies show that the calibrated sensor possesses good accuracy.     

基于激光位移传感器的面角度测量技术研究

针对面角度现场测试需求,利用激光位移传感器的漫反射测量特性,搭建了面角度非接触测量装置,提出了一种结合三坐标测量机和位置敏感探测器对激光位移传感器进行空间坐标化标定的方法,从而构建出精确的面角度测量模型;采用蒙特卡洛法对面角度非接触测量装置的不确定度进行评定,在±25°测量范围内其结果为U=0.044°~0.046°(k=2);通过性能验证试验、重复性试验和稳定性试验对装置的性能指标进行考核,在±25°测量范围内其绝对测量示值误差不超过0.036°,重复性不超过0.004°,稳定性不超过0.021°;实验结果表明该基于激光位移传感器的面角度非接触测量装置准确可靠,具备开展面角度现场测试应用的前景。     

“高分二号”上相机和星敏感器相对安装姿态的测量

为了精确测量"高分二号"(GF-2)卫星上相机和星敏感器的相对安装姿态,建立了一套高精度自动化测量系统。针对该系统研究了基于多传感器数据融合的高精度测量算法、基于理论安装数据驱动的自动测量模型、以及基于图像识别的立方镜法线搜索算法。该测量系统主要由二维龙门导轨、精密转台和CCD成像辅助准直的自准直经纬仪构成,通过融合精密转台的转动角度、自准直经纬仪的俯仰角和偏航角等数据计算被测设备安装姿态角度。测量时需先对系统进行标定,制定自动测量规划,然后通过电机驱动使设备自动到达预定位置和角度进行测量。若星上设备安装偏差较大导致被测对象超出自准直经纬仪测量范围时,可启动CCD相机对被测对象局部区域进行搜索识别,并引导自准直经纬仪实现精确准直测量。对测量系统进行了实验验证,结果显示:该系统姿态测量精度可以达到5″,与标准值比对最大偏差为4.1″;该测量系统已用于GF-2卫星的相机和星敏器相对姿态测量中,重复标准差最大为3.5″,满足GF-2对机上设备安装姿态测量精度的需求。     

基于点源透过率测试系统的杂散光标定

为了提高点源透过率(PST)测试系统的杂散光测试能力及测试精度,提出并设计了一种标准镜头,用于在大离轴角范围内对系统的杂散光测试范围及测试精度进行标定。利用简单的物理模型设计了一种在实验室内对点源透过率测试系统杂散光测试精度定标的标准镜头;测量了标准镜头的表面物理参数,并将其带入TracePro软件计算出了不同离轴角对应的PST。对设计分析的PST值与实测的PST值进行比较,从而计算得到了该测试系统的测量精度。验证实验表明,该标准镜头的PST分析值与实测值之差优于lg/0.5,满足实验室内对点源透过率测试系统杂散光测量精度进行标定的要求,是PST绝对测量的可靠方法。该项技术为国内PST测试系统的精度校准问题提供了技术保障。     

激光跟踪视觉导引测量系统的全局校准方法

针对柔性装配中现有激光跟踪测量系统存在效率低、成本高、自动化程度低等问题,提出用单目视觉系统联合激光跟踪仪实现大尺寸组合式自主导引测量.为实现该系统的全局校准,提出了一种新的基于平面的全局校准方法,该方法通过获取靶标平面分别在视觉系统和激光跟踪仪坐标系中的平面方程,求解两坐标系间转换矩阵,完成系统全局校准.建立了数学模型,进行了算法仿真和全局校准实验.实验中测量30个不同位姿的平面靶标,并进行全局校准.结果表明,该方法操作简单,稳定性强,有实际应用价值,校准后平面法向量夹角、原点到平面距离的RMS误差分别为0.13°和1.50 mm.     

一种基于高斯光束的平凹激光腔对准方法

给出了一种基于高斯光束的平凹激光腔对准方法。在高斯准直光束后加一透镜系统,恰当地调整准直高斯光束到某一种汇聚发散的状态。在这种状态下,可使由平凹腔凹面镜和平面镜反射回来的光斑直径大小相仿,解决了不加透镜系统时,两反射回来光斑直径相差很大,难于对准的问题,提高两光斑的对准精度。实验使用束腰为0.6 mm的氦氖光,其后加一优化好的透镜系统,在889 mm的距离下,对凹面镜曲率半径为50 mm的平凹腔进行对准。得到由凹面镜和平面镜反射回来的光斑直径分别为4.8 mm和5.1 mm,平凹腔的角度对准精度达到了3.18'。对准好的腔体在点亮LD后,均能出基模光斑。实验结果与理论分析相符,证明了该对准方法结构简单,执行方便。     

OPTICAL OPTIMIZATION FOR LIQUID CRYSTAL TEST BY LASER-CCD SYSTEM

0 INTRODUCTIONBased on the technical development of the dynamic opticalguided mode, high-quality focal light beam and charge-coupleddevice (CCD) are usually used to detect liquid crystal (LC) mole-cule anchor in a small range, and the dynamic response can…     

Measurement of PCI connector tilts using phase-shift fringe projection

The tilt angles of peripheral component interconnect (PCI) connectors on a printed circuit board assembly (PCBA) were measured using the phase-shift fringe projection method. The inspection system developed consists of a personal computer, digital camera, a standard projector and a mirror. The projector was used for projecting a sinusoidal fringe pattern onto the connectors. Phase-shifting was achieved by using a mirror mounted on a rotary stage in the path of the projected fringes. Since the light source used is non-collimated, calibration was performed to obtain an equation for the incident angle of the beam along the length of the object surface for different object heights. Glass blocks of known dimensions were used to test and verify the measurement system. The phase-shifting technique was applied to determine the tilt angles on the glass blocks and later applied to actual connectors. The vision-based inspection system developed using phase-shifting technique demonstrates successful tilt angle measurement on a PCBA.     

Caustic imaging of gallium droplets using mirror electron microscopy

We discuss a new interpretation of mirror electron microscopy (MEM) images, whereby electric field distortions caused by surface topography and/or potential variations are sufficiently large to create caustics in the image contrast. Using a ray-based trajectory method, we consider how a family of rays overlaps to create caustics in the vicinity of the imaging plane of the magnetic objective lens. Such image caustics contain useful information on the surface topography and/or potential, and can be directly related to surface features. Specifically we show how a through-focus series of MEM images can be used to extract the contact angle of a Ga droplet on a GaAs (001) surface.     

Head geometry effects on pneumatic three-hole pressure probes for wide angular range

Recent investigations Argüelles et al. (2008) [5] have demonstrated that it is possible to increase the operative angular range of pneumatic three-hole pressure probes (THP) using a two-zoned method in the data reduction procedure. In this study, the influence of the head geometry on the performance of this type of probes is addressed, especially in the extended regions of the angular range, previously unconsidered in the literature. Three different geometries have been built to carry out the analysis, corresponding to cylindrical, trapezoidal and cobra type probes, with a separation angle of 60° between the holes. Additionally, cylindrical and cobra type probes have been manufactured with angular distances of 30° and 45° between the holes, in order to advance the effect of the construction angle on the probes performance. The uncertainty transmitted from the measurements to the resultant flow variables has been also addressed. Moreover, the sensitivity of the different head designs to variations in the Reynolds number or deviations of the flow with respect to the measurement plane of the probe (pitch misalignments) has been addressed. Major conclusions indicate that cobra type probes provide the largest operative angular range, while cylindrical designs minimize the errors in the determination of both pressure and velocity flow variables when the Reynolds number or the pitch angle differ from the baseline calibration.     

傅里叶变换红外光谱仪动镜倾斜误差分析

通过建立傅里叶变换光谱仪中动镜、定镜和干涉面的坐标对应关系,对动镜存在多个方向倾斜时的干涉光路进行了详细的分析。建立了非准直状态下干涉面光强分布的二维数学模型,确立了干涉图函数的数学表达式,从调制度、相位误差和频率噪声的角度,对动镜倾斜造成的影响进行了系统分析。在动镜的运动中,左右方向的倾斜和俯仰方向的倾斜对系统的影响彼此具有独立性,又具有叠加性;干涉图中初相位因子随光程差改变缓慢变化或快速变化,对相位误差的影响也不全相同。在倾斜误差分析的基础上,对动镜的最大倾斜角度和减少误差的方法进行讨论,并提出了两种动态准直校正的思路。