Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance

We propose a non-contact temperature measurement method that combines the temperature dependence of transmittance below 600 °C and radiation thermometry above 600 °C. The combined method uses a polarization technique and the Brewster angle between air and a dielectric film such as SiO₂ or Si₃N₄ grown on silicon wafers. A prominent feature of this method is that both measurements of transmittance and radiance are performed with the same geometrical arrangement.For a semitransparent wafer, the measurement of p-polarized transmittance at the wavelengths of 1.1, 1.2 and 1.3 μm enables temperature measurement in the range from room temperature to 600 °C. For an opaque wafer above 600 °C, the p-polarized radiation thermometry at the wavelength of 4.5 μm allows the temperature measurement without the emissivity problem. The combined method with the use of transmittance and radiance is valid in the entire temperature range irrespective of variations of film thickness and resistivity.     

Preparation,characterization, electrical conductivity and dielectric studies of Na2SO4 and V2O5 composite solid electrolytes

Composite solid electrolytes (1 − x) Na₂SO₄–(x) V₂O₅ were prepared and characterized by various techniques such as XRD, FT-IR, DTA and SEM. AC impedance spectroscopy revealed that the contribution of grain is strong enough over the grain boundary. Arrhenius plot of the Na₂SO₄ shows a sharp increase in conductivity at 523 K due to the structural phase transition (phase V → I). Composites show the enhanced ionic conductivity than the pristine Na₂SO₄ over the entire temperature range. The maximum conductivity σ = 0.003 S cm⁻¹ at 773 K with the lowest activation energy of 0.28 eV was observed for the x = 0.4 sample. The enhanced value of dielectric constant and dielectric loss in the case of composites was obtained because of increase of conductivity, resulted from the increase of space charge polarization and charge motion.     

Effect of SiC particles on the friction and wear behavior of Ti3Si(Al)C2-based composites

The non-lubricated, sliding friction and wear behavior of Ti₃Si(Al)C₂ and SiC-reinforced Ti₃Si(Al)C₂ composites against AISI 52100 bearing steel ball were investigated using a ball-on-flat, reciprocating tribometer at room temperature. The contact load was varied from 5 to 20 N. For monolithic Ti₃Si(Al)C₂, high friction coefficients between 0.61 and 0.90 and wear rates between 1.79 × 10⁻³ and 2.68 × 10⁻³ mm³ (N m)⁻¹ were measured. With increasing SiC content in the composites, both the friction coefficients and the wear rates were significantly decreased. The friction coefficients reduced to a value between 0.38 and 0.50, and the wear rates to between 2.64 × 10⁻⁴ and 1.93 × 10⁻⁵ mm³ (N m)⁻¹ when the SiC content ranged from 10 to 30 vol.%. The enhanced wear resistance of Ti₃Si(Al)C₂ is mainly attributed to the facts that the hard SiC particles inhibit the plastic deformation and fracture of the soft matrix, the oxide debris lubricate the counterpair, and the wear mode converts from adhesive wear to abrasive wear during dry sliding.     

Effect of silicon nitride coating thickness on fatigue of silicon microbeams

In this paper, two silicon nitride layers with thickness, 0.2 and 0.4 μm, are coated onto single crystal silicon (SCS) in order to achieve Si₃N₄/Si cantilever microbeams. The effect of LPCVD silicon nitride surface coatings on fatigue properties of SCS cantilever microbeams is investigated. Fatigue testing is conducted at both 40 Hz and 100 Hz. Typical S–N (strain amplitude–fatigue cycle) curves of the beams are achieved and correlated fatigue failure modes are investigated. It is found that thinner Si₃N₄ coating of 0.2 μm results in better fatigue lives of Si₃N₄/Si beams than thicker Si₃N₄ coating of 0.4 μm. Both thinner and thicker coated beams have major fatigue crack planes along {1 1 1} planes; however, thicker coated beams possess specific failure mode of delamination, which is not found in thinner coated beams. Delamination reduces the reinforcing effect of thicker Si₃N₄ coating and leads to its shorter fatigue life. For thicker coated beams, fatigue life at 100 Hz is longer than that at 40 Hz. The mechanism for delamination and the effect of cyclic frequency is investigated, and factors for better fatigue life are proposed.     

Synthesis of multiple degrees-of-freedom spatial-motion compliant parallel mechanisms with desired stiffness and dynamics characteristics

This paper presents a new design method to synthesize multiple degrees-of-freedom (DOF) spatial-motion compliant parallel mechanisms (CPMs). Termed as the beam-based structural optimization approach, a novel curved-and-twisted (C-T) beam configuration is used as the basic design module to optimize the design parameters of the CPMs so as to achieve the targeted stiffness and dynamic characteristics. To derive well-defined fitness (objective) functions for the optimization algorithm, a new analytical approach is introduced to normalize the differences in the units, e.g., N/m or N m/rad, etc., for every component within the stiffness matrix. To evaluate the effectiveness of this design method, it was used to synthesize a 3-DOF spatial-motion (θ_x − θ_y − Z) CPM that delivers an optimized stiffness characteristics with a desired natural frequency of 100 Hz. A working prototype was developed and the experimental investigations show that the synthesized 3-DOF CPM can achieved a large workspace of 8°×8°×5.5 mm, high stiffness ratios, i.e., >200 for non-actuating over actuating stiffness, and a measured natural frequency of 84.4 Hz.     

Wavelength-modulation Fourier interferometry with elimination of DC phase error

Wavelength-modulation Fourier interferometry has been employed to measure the thickness of a glass plate. However, nonlinear phase-modulation error causes a DC error in the evaluated phase distribution. In this study, a 5 N–2 phase-extraction algorithm was derived for the simultaneous measurement of the thickness and surface shape of a glass plate with eliminating the DC phase error. First, the condition for the error elimination on a complex plane was derived and a new algorithm polynomial was proposed to satisfy this condition. Next, using this condition and 5 N–4 algorithm, 5 N–2 algorithm was derived. The newly developed 5 N–2 algorithm was visualized in the frequency domain using the Fourier transform method. The DC error elimination ability of the 5 N–2 algorithm was confirmed through numerical error analysis. Finally, the surface shape and thickness of the glass plate were simultaneously measured using a large-aperture Fizeau interferometer and the 5 N–2 algorithm. The standard deviations of the thickness and surface shape profiling were 3.113 nm and 10.689 nm, respectively, which were smaller than those obtained using other phase-extraction algorithms.     

1-N-alkyl -3-methylimidazolium ionic liquids as neat lubricants and lubricant additives in steel–aluminium contacts

The influence of the alkyl chain length and of the anion on the lubricating ability has been studied for the room-temperature ionic liquids (IL) 1-n-alkyl-3-methylimidazolium X⁻ [X = PF₆; n = 6 (L-P106). X = BF₄; n = 2 (L102), 6 (L106), 8 (L108). X = CF₃SO₃; n = 2 (L-T102). X = (4-CH3C6H4SO3); n = 2 (L-To102)]. Neat IL have been used for AISI 52100 steel-ASTM 2011 aluminium contacts in pin-on-disk tests under variable sliding speed. While all IL give initial friction values lower than 0.15, real-time sharp friction increments related to tribochemical processes have been observed for L102 and L-P106, at room-temperature and at 100 °C. Electronic microscopy (SEM), energy dispersive (EDS) and X-ray photoelectron (XPS) spectroscopies show that wear scar surfaces are oxidized to Al₂O₃ and wear debris contain aluminium and iron (for L102) fluorides. For L-P106, the steel surface is covered with a P-containing tribolayer. A change of anion (L-T102; L-To102) reduces friction and wear, but the lowest values are obtained by increasing the alkyl chain length (L106; L108). When the more reactive L102 and L-P106 are used as 1 wt.% base oil additives at 25 °C, tribocorrosion processes are not observed and a friction reduction (69–75% for 1 wt.% L102) and a change from severe (10⁻³ mm³ m⁻¹) to mild wear (10⁻⁴ to 10⁻⁶ mm³ m⁻¹) is obtained with respect to the neat IL. 1 wt.% IL additives also show good lubricating performance at 100 °C.     

Determination of the thermal conductivity of composted material

The objective of this study was to develop a reliable method for the determination of the thermal conductivity of composted material using the TP08 probe. Study was set out to determine whether the selection of a signal fragment used to establish thermal conductivity (λ), has a significant influence on the results. Also minimum number of measurements was determined for every phase of the composting process. No significant differences were reported between results, but certain changes in the value of λ were noted. In successive stages of the process, thermal conductivity of composted material were: 0.31 ± 0.09, 0.45 ± 0.14, 0.27 ± 0.03 and 0.37 ± 0.17 W m⁻¹ K⁻¹.     

Phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer

Optical thickness variation is a fundamental characteristic of transparent optical devices. When measuring this variation by using a wavelength-tuning Fizeau interferometer, the measurement accuracy depends on the phase-shifting algorithm being used. Therefore, the phase-shifting algorithm should compensate for any errors incurred during the measurement, including the phase-shift error, coupling errors, and bias modulation of intensity. Among these errors, however, the coupling errors between the higher harmonics resulting from the inner reflections of the transparent plate and phase-shift error have not previously been considered. This paper presents a derivation of a 19-sample phase-shifting algorithm that can compensate for the miscalibration and 1st-order nonlinearity of the phase shift, coupling errors, and bias modulation of intensity during wavelength tuning. The characteristics of the 19-sample algorithm were estimated with respect to the Fourier representation in the frequency domain. The phase error of measurements performed using the 19-sample algorithm was discussed and compared with that of measurements obtained using other conventional phase-shifting algorithms. Finally, the optical thickness variation of a fused silica parallel plate was obtained using a wavelength-tuning Fizeau interferometer and the 19-sample algorithm. The measurement accuracy was discussed by comparing the ripples in the crosstalk noise with those calculated using other phase-shifting algorithms. The experimental results indicated that the optical thickness variation measurement accuracy for the fused silica plate was approximately 2 nm.     

Wear of aligned silicon nitride under dry sliding conditions

The wear behaviour of textured silicon nitride (Si₃N₄) ceramics with aligned microstructures was analyzed under abrasive wear conditions. Dry reciprocating self-mated ball-on-flat wear tests were performed to study the influence of different microstructural plane/orientation combinations on the Si₃N₄ tribological behaviour. Textured materials showed superior wear resistance than non-textured reference Si₃N₄ for the whole range of loads and contact pressures, 5–50 N and 1.7–3.6 GPa, respectively, with an increase of about 70% for the maximum applied load. Within textured materials, the plane perpendicular to the extruding direction exhibited a 50% higher wear resistance (4 × 10^?5 mm³ N^?1 m^?1) than the parallel plane where the elongated grains were aligned. The severe wear process involved debonding, fracture and debris formation mechanisms. The progress of this sequence depended on the particular microstructure of each plane/orientation combination. A relationship between abrasive wear resistance and selected microstructural parameters has been established.     

Study on methods to optimize laser-sharpening quality,efficiency and topography

This paper aims to improve bond surface smoothness, sharpening quality and efficiency as well as control grain protrusion height. Systematic research was performed on pulsed fiber laser sharpening of a coarse-grained bronze-bonded diamond grinding wheel. The results show that bond surface smoothness is related to the laser spot overlap ratio U_c and the laser scan track overlap ratio U_l. In the range 10–70%, an increase in U_c and U_l improved the sharpened bond surface smoothness. Sharpening quality and efficiency are both related to laser power density I_p. In the range 2.115–6.344 × 10⁷ W cm⁻², an increase in I_p gradually improved sharpening efficiency, but the sharpening quality trend initially improved followed by a subsequent decline. The grain protrusion height is related to the laser scan cycles N. An excessively small N will result in an insufficient chip space such that the grinding wheel is likely blocked. Grains will likely fall off due to an insufficient holding force if N is excessively large. Compared with silicon carbide grinding wheel sharpening, a pulsed laser-sharpened grinding wheel exhibits less surface grain fall-off, better grain height uniformity, more chip space around the grain and superior grinding wheel surface topography.     

Uncertainty evaluation of the 20 kN m deadweight torque standard machine

A deadweight-type torque standard machine of 20 kN m rated capacity (20 kN m-DWTSM) has been designed and developed by the National Metrology Institute of Japan (NMIJ) at the National Institute of Advanced Industrial Science and Technology (AIST). Each uncertainty contribution comes mainly from the performance of each mechanical part of the 20 kN m-DWTSM. Authors evaluated the uncertainty of the mass of the linkage weights, local acceleration of gravity, influence of air buoyancy on deadweight loading, initial moment-arm length (including CMM measurement and temperature compensation), and sensitivity of the fulcrum. This report deals especially with evaluation of the remaining contributions, namely the influence of arm flexure and reference line variation at the end of the moment-arm on best measurement capability (BMC). Estimation of BMC in the 20 kN m-DWTSM gave a relative expanded uncertainty of less than 7.0 · 10⁻⁵ (k = 2) for the calibration range from 200 N m to 20 kN m.     

Cavitation erosion of Fe–Mn–Si–Cr shape memory alloys

Cavitation erosion tests of three Fe–Mn–Si–Cr shape memory alloys were carried out at speed 34 and 45 m/s using a rotating disc rig, and their cavitation damage has been investigated by comparison with a referring 13Cr–5Ni–Mo stainless steel used for hydraulic turbine vanes. The research results proved that the cavitation erosion of the Fe–Mn–Si–Cr shape memory alloys is a failure of low cycle fatigue and fracture propagates along grain boundaries. After 48 h cavitation erosion the cumulative mass losses of the studied alloys at speed 45 m/s are more than theirs at speed 34 m/s; however, the effect of velocity on cavitation damage of the Fe–Mn–Si–Cr alloys is much lower than that of 13Cr–5Ni–Mo stainless steel. The cumulative mass loss of the 13Cr–5Ni–Mo stainless steel are 26.3 mg at speed 45 m/s and 3.2 mg at speed 34 m/s, and the mass losses of the Fe–Mn–Si–Cr alloys are within the range of 3.6–7.3 mg at speed 45 m/s and 2.0–4.1 mg at speed 34 m/s. The surface elasticity of the Fe–Mn–Si–Cr shape memory alloys is better than that of the 13Cr–5Ni–Mo stainless steel, and the effect of surface elasticity on cavitation damage increases with velocity. The excellent surface elasticity of the cavitation-induced hexagonal closed-packed (h.c.p.) martensite plays a key role in contribution of phase transformation to the cavitation erosion resistance of the Fe–Mn–Si–Cr shape memory alloys. The cavitation damage of the studied alloys at speed 45 m/s mainly depends on their surface elasticity, and the variation of 48 h cumulative mass loss (Δm) as a function of the elastic depth (h_e) can be expressed as Δm=2.695+[1371.94/(4(h_e−46.83)²+12.751)] with a correlation factor of 0.99345.     

Refined reconstruction of liquid–gas interface structures for stratified two-phase flow using wire-mesh sensor

Wire-mesh sensors (WMS), developed at HZDR [4], [13], are widely used to visualize two-phase flows and measure flow parameters, such as phase fraction distributions or gas phase velocities quantitatively and with a very high temporal resolution. They have been extensively applied to a wide range of two-phase gas–liquid flow problems with conducting and non-conducting liquids. However, for very low liquid loadings, the state of the art data analysis algorithms for WMS data suffer from the comparably low spatial resolution of measurements and from boundary effects, caused by e.g. flange rings – especially in the case of capacitance type WMS. In the recent past, diverse studies have been performed on two-phase liquid–gas stratified flow with low liquid loading conditions in horizontal pipes at the University of Tulsa. These tests cover oil–air flow in a 6-inch ID pipe and water–air flow in a 3-inch ID pipe employing dual WMS with 32×32 and 16×16 wires, respectively. For oil–air flow experiments, the superficial liquid and gas velocities vary between 9.2 m/s≤ν_SG≤15 m/s and 0.01 m/s≤ν_SL≤0.02 m/s, respectively [2]. In water–air experiments, the superficial liquid and gas velocities vary between 9.1 m/s≤ν_SG≤33.5 m/s and 0.03 m/s≤ν_SL≤0.2 m/s, respectively [17], [18]. In order to understand the stratified wavy structure of the flow, the reconstruction of the liquid–gas interface is essential. Due to the relatively low spatial resolution in the WMS measurements of approximately 5 mm, the liquid–gas interface recognition has always an unknown uncertainty level. In this work, a novel algorithm for refined liquid–gas interface reconstruction is introduced for flow conditions where entrainment is negligible.     

The design of polyaniline based sensor for the qualitative estimation of malonaldehyde

The detection of contaminated food in every stage of processing required new technology for fast identification and isolation of toxicity in food. Since effect of food contaminant are severe to human health, the need of pioneer technologies also increasing over last few decades. In the current study, MDA was prepared by hydrolysis of 1,1,3,3-tetramethoxypropane in HCl media and used in the electrochemical studies. The electrochemical sensor was fabricated with modified glassy carbon electrode with polyaniline. These sensors were used for detection of sodium salt of malonaldehyde and observed that a high sensitivity in the concentration range ∼1 × 10⁻¹ M and 1 × 10⁻² M. Tafel plots show the variation of over potential from − 1.73 V to − 3.74 V up to 10⁻⁵ mol/L indicating the lower limit of detection of the system.     

Modified nanoporous carbon as a novel sorbent before solvent-based de-emulsification dispersive liquid–liquid microextraction for ultra-trace detection of cadmium by flame atomic absorption spectrophotometry

Combination of different extraction methods is an interesting work in the field of sample pretreatment. In the current study, for the first time, solid phase extraction combined with solvent-based de-emulsification dispersive liquid–liquid microextraction (SPE-SD-DLLME) was developed for preconcentration and trace detection of cadmium in water samples using flame atomic absorption spectrophotometry (FAAS). The adsorbed cadmium ions on prepared SPE (75 mL of aqueous solution) were eluted by optimized elution solvent and introduced to the second microextraction step. The effective variables of SPE including the pH of sample, flow rates, type, concentration and volume of the eluent and the effect of potentially interfering ions of the separation of cadmium were evaluated and optimized. Also, several factors that influence the SD-DLLME step such as pH, neocuproine concentration (the cadmium binding ligand), type of dispersed/de-emulsifier solvent, volume of disperser/de-emulsifier solvent and type and volume of extraction solvents were investigated. SPE-SD-DLLME provides a preconcentration factor of 165 for cadmium ions. Calibration plot was linear in the range of 0.1–50 μg L⁻¹ with correlation of determination (r²) of 0.988. The precision and limit of detection of proposed method were 5.1% (RSD%, n = 8) and 0.03 μg L⁻¹, respectively.     

Tribological properties of Ni3Al produced by pressure-assisted volume combustion synthesis

The production of Ni₃Al was performed under an uniaxial pressure of 150 MPa at 1050 °C for 1 h. The formation temperature of Ni₃Al was determined to be 655 °C. The presence of Ni₃Al was confirmed by XRD analysis. SEM analysis revealed that the Ni₃Al phase has very low porosity. The relative density and microhardness of test materials were 97.8% and about 359±31 HV_1.0, respectively. The specific wear rate of Ni₃Al was 0.029 mm³/N m for 2 N, 0.017 mm³/N m for 5 N and 0.011 mm³/N m for 10 N, respectively. The distribution of alloying elements was determined by energy-dispersive spectroscopy (EDS).     

Uncertainty analysis for a phase-detector based phase noise measurement system

Phase noise is an important parameter to characterise the frequency stability of oscillators and synthesised signal generators. Accurate measurement of phase noise is required for various applications in radar, communication and navigation systems. A single-channel phase-detector based phase noise measurement system is described. The system’s measurement errors and uncertainties have been analysed in details. The expanded uncertainty is about 2.7 dB for calibrating phase noise of a signal generator at 0.001–1.6 GHz for frequency offsets from 1 Hz to 100 kHz. The uncertainty budget for measuring a signal generator’s phase noise at 640 MHz is also presented.     

Machining with AlCr-oxinitride PVD coated cutting tools

AlCrO_xN_1−x coatings were arc deposited onto HSS drills and WC–Co end mills at N₂/O₂ ratios of 0.9–0.75 using DC or 10 kHz pulse bias. Lower O₂ content coatings had a hardness of 32.5 GPa. whereas 0.25 O₂ ratio coatings were 24–25 GPa. AlCrO_xN_1−x coated 6.35 mm Dia. HSS jobber drills were tested by drilling 2.5D holes in AISI D2. 10 kHz 0.9 N₂ 0.1 O₂ coatings drilled a mean of 17.6 holes/µm, similar to commercial AlCrN coated drills at 17.8 holes/µm, whereas DC 0.75 N₂ 0.25 O₂ coatings drilled 9 holes/µm. AlCrO_xN_1−x coated WC–Co end mills had low steady state wear in milling AISI 316L (70 m/min, MQL) and cut >24 m whereas uncoated tools cut 6 m. In contrast to drilling DC 0.75 N₂ 0.25 O₂ tools had the least corner wear and low adhesion on the rake face.