全液体静压支承结构磨削系统的磨削成圆规律及圆度极限预测

主轴轴颈的圆度直接影响液体静压主轴系统的回转精度,要制造纳米级回转精度的液体静压主轴系统,必须不断提高主轴零件轴颈的圆度。目前国内外高精密磨床可实现的轴颈磨削圆度范围在0.2～0.5μm,要想进一步提高轴颈磨削圆度,以上磨削方案已很难满足需要。基于此,系统研究头架主轴、尾架主轴和砂轮主轴均采用液体静压支承的全静压支承结构磨削系统的磨削成圆规律,探讨可能达到的圆度极限。首先建立计入头架主轴回转误差、尾架主轴回转误差、双顶尖不同轴误差、砂轮主轴回转误差和工件初始表面轮廓圆度误差的磨削系统耦合动力学模型;提出基于Newmark-β数值积分方法的“磨削力-瞬态磨削深度”循环迭代收敛算法,实现工件外圆轮廓形成过渡过程的定量仿真。研制全液体静压主轴支承结构磨削系统,通过磨削实验和磨削成圆仿真结论的对比,证实所建立模型和所提出算法的有效性。最后根据所提模型和仿真算法,研究各磨削系统误差对磨削圆度的影响规律,并在此基础上对可实现的磨削圆度极限进行了预测。     

液体静压主轴回转误差的形成机理研究

液体静压主轴是精密、超精密机床的核心功能部件,虽然已在工程领域获得广泛应用,但其回转误差的形成机理长期以来并不明确。利用现有的静压主轴计算模型,难以对主轴从静平衡位置到动态回转误差轨迹的过渡过程进行定量精确的计算和仿真,难以揭示出回转误差运动的扰动因素与主轴位置、轴承流量和油膜力等因素之间的内在联系,因而不能从物理本质上合理解释静压主轴回转误差的形成机理。建立了液体静压主轴回转误差的动力学模型,采用全程动网格方法、平衡位置动网格方法和平衡位置油膜刚度阻尼等三种方法,定量再现了主轴从轴颈与轴承的同心初始位置到形成回转误差运动轨迹的过渡过程,揭示了静压主轴形成平均回转中心和回转误差时扰动因素与主轴合力、轴承流量和轴心位置之间的相互影响规律。采用最小二乘法对回转误差轨迹进行评价,对比分析了三种方法计算结果存在差异的原因,提出了可同时兼顾计算效率和计算精度的将动网格与油膜刚度阻尼相结合的回转误差计算方法。     

精密磨床主轴轴颈形状误差对动静压轴承性能的影响

考虑主轴轴颈制造中的圆度误差和圆柱度误差,应用FLUENT软件,对精密数控磨床砂轮主轴深浅油腔动静压轴承的性能进行了分析。结果表明:主轴轴颈圆度误差和圆柱度误差的种类对动静压轴承性能的影响各不相同,随着轴承间隙的变化而变化。动静压轴承承载能力、功耗以及油膜最高温升等性能参数都会随着主轴轴颈误差幅值的增加而增加;但动静压轴承流量的变化趋势却相反。要提高磨削加工精度,必须考虑精密数控磨床主轴轴颈的形状误差的影响。     

可控节流液体静压主轴回转精度提升的机理研究

可控节流技术可以显著提高液体静压主轴的刚度和回转精度,在工程上已得到实验证实,但是液体静压主轴在可控节流条件下是如何提高回转精度的过渡过程一直不明确。利用现有的液体静压主轴理论,还不能定量解释可控节流静压主轴从不平衡状态到平衡状态、以及稳态回转误差显著缩小的过渡过程。在考虑轴颈惯性力和非线性油膜力的基础上,根据可控节流器的工作原理和节流特性,建立了可控节流液体静压主轴动态轴心轨迹的理论模型,利用该模型进行数值模拟对过渡过程中的一系列物理现象做出了合理的定量解释。研究发现,在轴承结构参数和液压系统参数相同的条件下,可控节流主轴相比于固定节流可以显著缩短轴心轨迹的过渡过程响应时间、减小轴颈偏心位移、降低主轴稳态回转误差,从理论上揭示了可控节流器可以提高液体静压主轴油膜刚度和回转精度的物理机理。     

液体静压主轴的回转精度规律及其极限预测

液体静压主轴是精密、超精密机床的核心功能部件,对机床的加工效率、加工精度和加工表面质量具有直接而重要的影响.回转精度是液体静压主轴的关键性能,目前学术界和工程界对回转精度的各种评价指标之间的内在联系尚缺乏统一认识,对回转精度的机理和形成规律尚缺乏深入研究.系统分析了回转精度各种评价指标和测试方法之间的内在联系,明确了不同误差成分的来源和成因;针对现有回转精度评价方法的局限性,提出了"最小峰峰值+同步误差+异步误差"的综合评价方法.系统比较了不同节流方式对液体静压轴承刚度的影响规律,提出了采用可控节流实现高回转精度的方法.建立了可控节流液体静压主轴的流固热耦合模型,实现了轴心运动轨迹形成过渡过程的精确定量仿真,揭示了供油压力、供油压力波动、动不平衡量和轴颈圆度误差对回转精度的影响规律.最后对液体静压主轴可能达到的回转精度极限进行了预测.     

精密离心机结构安装误差对主轴回转精度的影响

针对精密离心机的精度控制,建立了精密离心机结构安装误差对静压气体轴承主轴回转精度影响的定量计算模型,运用该模型开展了多方面结构安装误差参量对主轴回转精度影响规律的研究。研究表明主轴回转误差随转盘与静压气体轴承轴线间偏心量、静压气体轴承轴线铅垂度安装误差和转盘与静压气体轴承轴线安装垂直度误差的增加而增大,其中偏心量和垂直度误差对主轴回转误差的影响较大,铅垂度误差对主轴回转误差的影响较小。研究可为精密离心机的设计提供帮助。     

圆度误差对气体静压主轴回转精度的影响研究

针对圆度误差对气体静压主轴回转精度的影响,建立了基于主轴圆度误差的气浮力和离心惯性力动态计算模型。以Talyrond 585LT-500圆柱度仪的检测结果为源数据进行计算,得出这两种力对气静压主轴回转精度的影响结果。经过分析得到以下结论:由轴套和转子圆度误差产生的不平衡气浮力对主轴回转精度的影响很小;由转子外圆表面圆度误差产生的离心惯性力对主轴回转精度的影响较大,且离心惯性力会显著影响主轴在高转速下的回转精度。     

液体静压电主轴回转精度测量与结果分析

为解决高精密液体静压电主轴回转误差难以精密测量与分离的问题,提出了一种主轴回转精度测量与分析的新方法。以液体静压电主轴为测量对象,设计一套以电容微位移传感器为基础,以VC++和Matlab为软件平台的主轴回转误差测量系统,采用自为基准原理,以机床精车后的工件代替传统的检验棒进行直接测量,利用频域三点误差分离法,对主轴回转误差和圆度误差进行测量与分析。实验表明该系统能对高精密主轴回转误差进行测量,在转速(0⁶00)r/min范围内,该主轴的回转误差为0.28μm。     

液体静压主轴液膜剪切模型重构与试验反求研究

液体静压轴承由于具有精度高、刚度高、减振性好和无磨损等优点,在精密超精密机床主轴中获得了广泛应用。但现有的基于液膜牛顿剪切假设的液体静压轴承设计理论在实际应用中与测试结果存在显著的差别,难以满足液体静压主轴精确定量设计的需要。在对液体静压主轴长期研究并跟踪其实际应用发现,按照最佳节流比原则设计的液体静压主轴,理论上的节流间隙和轴承流量等参数往往与实际采用或测试的参数存在显著差异,部分案例的差异达到40%以上。为了建立更精确的液体静压轴承设计理论,有必要对其基本假设——液膜牛顿剪切模型,进行重新研究。利用滚动轴承电主轴和液体静压轴承作为动力源和测试对象,建立了带回油槽的4腔液体静压轴承原理性试验台,利用该试验台进行了不同液膜间隙、不同轴颈表面粗糙度、不同转速和供油压力等条件下的轴承流量等参数试验,发现了不同参数条件下理论设计值和实际测试值的偏离规律。在此基础上,逆向重构了与试验测试结果吻合度高的液体静压轴承液膜压力流量模型,进而反求得到了数学形式上可能的液体静压轴承液膜剪切新模型;进一步通过对各类新模型物理意义的解读,选择确认了轴颈表面带滑移的液膜剪切模型。研究工作为进一步建立可准确进行...     

超精密车削加工中的圆度补偿

提高工件形状精度是开发超精密加工技术的主要目标。本文应用综合计算机、动态检测、信号处理、控制理论、微位移技术等手段，在国产SI—235超精密车床上进行切削试验，开发一种主轴回转运动误差补偿技术来提高金刚石刀具超精密车削工件的圆度精度，可达50％以上，圆度值＜0．0     

一种圆柱度测量基准的误差分离方法

通过对主轴回转误差运动的分析，结合三点法圆度误差分离技术，提出了一种完全分离圆柱度测量基准误差的分离方法，即利用主轴回转轴线平均线、测量传感器及直行导轨之间的空间位置关系，建立相应的坐标系，在分离出被测截面圆度误差、最小二乘圆心初始坐标的基础上，完整地分离出影响圆柱度精密测量的径向回转运动误差和导轨的直行运动误差。该技术不仅可以消除测量基准误差对圆柱度测量精度的影响，还可以实现主轴回转误差、导轨直线度以及导轨对主轴平行度误差的精密测量，对高精度误差补偿加工和机床的精度检验也具有重要意义。     

平行三点法圆度误差分离技术的精度分析

阐述了一种能临床测量与分离工件圆度误差和主轴系统回转误差的新方法——平行三点法误差分离技术的测量原理 ,定量分析了测量装置的结构参数、传感器初始调零误差、传感器随机误差和标定误差对圆度测量精度的影响 ,给出了误差传播方程。并讨论了一些消除或减小上述误差的方法。     

Form Error Characterisation by an Optical Profiler

Form errors are deviations of the machined surface from the geometrical surface excluding position errors, waviness and roughness. From a functional point of view, as for surface roughness, form error characterisation is also important. In the present work, an optical profiler is used to measure and numerically characterise form errors such as roundness and cylindricity of cylindrical surfaces. A double orientation method using mean value analysis has been applied to separate the workpiece error from the spindle error during roundness measurement. Software is developed for data generation, fitting the reference data for assessing form errors in terms of statistical and functional parameters including new parameters. An optical profiler measures all the surface irregularities and hence can be used to study both micro and macro errors of the profile measured. A study of both roughness and roundness parameters along the circumferential direction is made for the unfiltered signal using different filter cut-off values. It is known that filtering greatly affects the value of the form error parameters measured. The form measurements obtained by the optical profiler are compared with the stylus profiler and the results are presented.     

Rotation error measurement technology and experimentation research of high-precision hydrostatic spindle

The hydrostatic spindle is widely applied in the field of high-precision machine tools, which has some advantages such as high stiffness, high rotary precision, and the high damping shock absorption. The spindle rotation error is an important index to measure the machining accuracy of machine tools. Due to the installing eccentric error of the test bar, conventional method based on the standard test bar to measure the rotation error indirectly is applied to the precision machine tools and common machine tools whose rotation error is greater than 1 μm only. In order to eliminate the installing eccentric error of the standard test bar, it presents a self-reference approach that takes the online finish turning test bar, rather than that of the standard test bar, as the measuring datum. Using the capacitive micro-displacement sensor and the LMS data acquisition equipment as the test platform, it designs a set of spindle rotation error measurement system. Then it studies the frequency domain three-point method and has the rotation error and roundness error of high-precision hydrostatic spindle separated. Experimental study shows that the rotation error and the roundness error of the spindle are 0.9 and 0.3 μm, respectively, under the circumstance of conventional standard test bar as the measuring datum. However, if it takes the online finish turning test bar as the measuring datum, the rotation error and the roundness error of the spindle are only 0.3 and 0.1 μm, respectively. The self-reference method is able to eliminate the installing eccentric error of standard test bar directly, and the measurement system has realized the accurate measurements of the rotation error and roundness error of the high-precision hydrostatic spindle.     

<Emphasis Type="Bold">Roundness Error Prediction with a Volumetric Error Model Including Spindle Error Motions of a Machine Tool</Emphasis>

This paper proposes a modified volumetric error model that includes spindle error motions as well as geometric errors. The model is constructed using rigid-body kinematics and homogeneous transformation matrices and an additional error matrix describing spindle error motions is included. The suggested model predicts the positioning errors at a given axis position as a function of both the axis position and the engaged spindle rotation angle. Two circular interpolation tests (inner and outer circle of the same radius) are simulated and the machined part profiles are predicted. To verify the simulation results, machining tests are performed according to the ISO 10791-7 standard. The error model with spindle errors shows a better agreement, between the simulated and measured roundness errors, than the simple geometric model. It can be seen that the geometric errors determine the basic part profiles and the spindle errors change the basic profiles according to the magnitude of the errors and the spindle rotation angle.     

利用PLC实现外圆磨削圆度误差在线测量

一直以来，圆度误差在线测量都离不开对主轴的误差分离，而误差分离又因为计算时间的限制影响测量的实时性。文章介绍了利用球顶尖装卡工件实现圆度误差在线测量的方法，并给出具体实验装置。指出在外圆磨削加工中实现圆度误差在线测量的重要意义。     

三点法中测头角位置的精密测量方法

研究了三点法圆度及轴系误差测量中测头角位置的精密测量方法。设计了能直接测量非接触电容传感器测头实测状态下的角位置的测角系统,提出了克服测头角位置测量误差及三个测头灵敏度标定误差影响的校正方法。实验表明：采用本文提出的“多刻线”法测角精度优于1′,测头角位置测量误差及三个测头灵敏度标定误差对测量精度的影响可降致最小。     

轴颈外圆磨削成圆过程的双转子耦合模型及仿真算法

主轴轴颈外圆的圆度对机床主轴部件的回转精度具有直接而重要的影响。磨削加工是实现轴颈外圆高精度加工的最重要的手段。虽然磨削技术在主轴外圆加工上已长期应用,但是利用现有的研究成果,还难以对一个既定的磨削系统的磨削成圆过渡过程进行完整有效的定量仿真,也难以对磨削工件的最终圆度进行科学合理的预测。在吸收国内外磨削转子系统模型成果的基础上,进一步考虑外圆磨削过程中砂轮和工件之间的相互耦合作用、材料去除、转子振动及变形协调规律,建立了外圆磨削系统的双转子耦合振动模型,提出了模拟轴颈材料去除和圆度变化的"磨削力-瞬时磨削深度"迭代算法。利用所建立的双转子模型和迭代算法,对不同磨削策略下轴颈外圆成圆的过渡过程进行了定量仿真,再现了轴颈材料去除和外圆轮廓变化的全过程;比较研究了不同磨削策略对磨削效率和最终加工圆度的影响规律。进行了相应的磨削试验和对比验证,试验结果证实了所提出的轴颈外圆磨削的双转子模型和迭代算法的有效性和合理性。     

Experimental Study of a Precision, Hydrodynamic Wheel Spindle for Submicron Cylindrical Grinding

Hydrodynamic journal bearings have been widely used in various types of rotating machinery, ranging from heavy duty, high-impact applications, such as the crank shaft of an internal combustion engine and turbine rotor, to high-precision, light load applications, such as precision spindles in cylindrical grinding machines. Although extensive theoretical and experimental results have been presented for hydrodynamic bearings, the available literature seems to be limited for precision hydrodynamic bearing spindles. In this study, practical methods have been developed to quantify the performance of a hydrodynamic wheel spindle operating in the horizontal mode to produce precision parts with submicron roundness tolerance and very fine surface finish. These methods can easily and cost effectively be implemented on various machines in an actual production environment for effective predictive maintenance. The main experimental results show that the long-term drift of the spindle at steady state is less than 1 μm vertically and 0.2 μm horizontally, and the radial error motion of the spindle based on unfiltered data is less than 1.6 μm for all the speeds tested. It is also found that the shaft center position (vertical lift and horizontal shift) at the cold condition is substantially different from that in the steady-state warm condition. From the results, an optimal spindle speed is recommended.     

Error motion of a kinematic spindle

A prototype spindle for low-force, low-speed applications that is kinematically constrained in accordance with the principles of exact constraint was designed, fabricated, and tested. In the prototype spindle, the position and orientation of the shaft (rotor) are constrained at five contact points; four constraints are arranged radially around the rotor, and one constraint is located at the end of the rotor. This paper describes the design of the prototype spindle and presents a study of its error motion for the hardened steel rotor sliding on brass and UHMW-PE bonded to ceramic. The error motion is observed to be highly repeatable with less than 100 nm asynchronous errors, and a simple analytical model enables the prediction of the synchronous error motion using measurements of the rotor’s roundness profiles.