多弧离子镀(Ti,Cr)N膜层工艺及性能

用多弧离子镀膜机，以W6Mo5Cr4V2高速钢为基体材料，镀覆（Ti,Cr）N多元膜，研究了多弧离子镀工艺对膜层性能的影响，确定了最佳镀膜工艺参数，探讨了多元膜层的强化机理。结果表明：膜层硬度及膜基结合力随偏压的增大而增大，膜层强度随氮分压的升高而增大，孔隙率随氮分压的升高而增大。（Ti,Cr)N多元膜层强化机理主要是：晶粒细化、固溶强化、多元素优化。     

溅射工艺参数对TiAIN薄膜力学性能及结构成分的影响

采用反应磁控溅射法和钛-铝镶嵌靶制备TiAIN薄膜；运用纳米压入硬度测试仪、划痕仪和能谱仪、X射线衍射仪等对薄膜进行表征；研究了制备工艺参数对薄膜力学性能、薄膜成分及组织结构的影响。结果表明：随着氮气分压增大，薄膜厚度降低，薄膜（111）取向减弱，（220）和（311）取向增强，薄膜中的氮原子含量逐渐增多，而钛、铝原子含量逐渐减少；随着基体偏压增大，薄膜纳米硬度和膜／基界面临界载荷均逐渐增大，纳米硬度最高可达48．73GPa，膜／基界面临界载荷最高可达40N。     

硬质合金基体FCVA沉积TiAlN薄膜的试验研究

采用磁过滤阴极真空弧源(FCVA)沉积技术,通过改变氮气流量在硬质合金基体上沉积了TiAlN薄膜,用显微硬度计测定了TiAlN薄膜的硬度和厚度;采用X射线衍射(XRD)分析技术进行了TiAlN薄膜的相分析;并进行了摩擦磨损试验和对基体与薄膜的结合力进行定性的分析。结果表明:TiAlN薄膜厚度在450~520nm之间;最高硬度为2754Hv,对应氮气分压为N2分压在8.0×10-2Pa~1.1×10-1Pa;薄膜中主要存在Ti2AlN、Ti2N与TiN相。     

工艺参数对多弧离子镀TiAlN涂层铝含量和硬度的影响

为研究不同工艺参数对多弧离子镀制备TiAlN涂层性能的影响规律,设计了L9(3~4)正交试验表,并通过试验研究了弧电流、衬底负偏压、氮气/氩气流量比以及腔体压强对涂层Al含量和硬度的影响规律,得到了最佳工艺参数优化组合。结果表明:影响Al含量的因素按重要性排序依次是:腔体压强、氮气/氩气流量比、衬底负偏压、弧电流。影响涂层硬度的因素按重要性排序依次是:弧电流、氮气/氩气流量比、腔体压强、衬底负偏压。     

溅射工艺参数对TiAlN薄膜力学性能及结构成分的影响

采用反应磁控溅射法和钛一铝镶嵌靶制备TiAlN薄膜;运用纳米压入硬度测试仪、划痕仪和能谱仪、X射线衍射仪等对薄膜进行表征;研究了制备工艺参数对薄膜力学性能、薄膜成分及组织结构的影响.结果表明:随着氮气分压增大,薄膜厚度降低,薄膜(111)取向减弱,(220)和(311)取向增强,薄膜中的氮原子含量逐渐增多,而钛、铝原子含量逐渐减少;随着基体偏压增大,薄膜纳米硬度和膜/基界面临界载荷均逐渐增大,纳米硬度最高可迭48.73 GPa,膜/基界面临界载荷最高可达40 N.     

真空电弧沉积薄膜显微硬度与工艺参数的关系

测试了各种工艺条件下真空电弧沉积 (VAD)的TiN薄膜的显微硬度 ,并研究了TiN薄膜硬度随基材、电弧电流、基片温度、氮气压力及负偏压的变化。实验结果表明 :在多数基材上 ,薄膜硬度均接近或超过 2 0GPa ,且薄膜的硬度与基材的硬度不呈比例关系 ,TiN薄膜的硬度随电流的增加有减少的趋势 ;在相当宽的温区内 ,TiN薄膜的硬度随温度上升而增大 ,而且在高温下的硬度值比低温时稳定 ,总体上 ,VAD比其它离子镀具有更宽阔的T区 ;在氮气压力为 0 .1Pa～ 1Pa的区域内 ,TiN薄膜的硬度稳定在 2 0MPa以上 ,而且适当的负偏压有利于提高TiN薄膜的硬度。     

渗氮＋离子注入对M2高速钢的表面复合改性

对比了分别经可控渗氮、离子注入形成TiN及可控渗氮 离子注入Ti∧2 后,M2高速钢精冲模的使用寿命。结果表明,采用可控渗氮 离子注入Ti∧2 的复合处理工艺,可使零件的使用寿命获得明显提高。断口分析、表面硬度测试、金相分析、XRD和AES分析表明,寿命的提高是由于：（1）用Jonsson经验公式算得的该TiN注入层的真实硬度为HV3000,TiN的超高硬度是寿命提高的根本原理;（2）该复合工艺可使M2高速钢表面TiN注入层获得较厚较硬的氮化过渡层、增强了膜基间的结合力,从而提高了零件的抗磨损和抗冲击性能;（3）渗氮层增加了钛离子的注入深度,获得了更宽的TiN改性层,用JT-PRⅡ所得到的模拟计算结果与此吻合得很好。     

偏压对TiBN纳米复合涂层结构及力学性能的影响

采用多弧离子镀技术,在单晶硅和硬质合金衬底上制备Ti-B-N涂层,使用XRD,SEM,硬度计和划痕仪系统研究了偏压对TiBN涂层结构、表面形貌、硬度和附着力的影响。在不同的基体偏压下,涂层表现了(111)面择优生长。-100 V偏压时沉积的TiBN涂层表面最平滑。随着基体偏压升高,TiBN涂层硬度逐渐增大,膜基结合力逐渐减小。-200 V制备的TiBN涂层硬度最大3600 HV,-50 V制备的TiBN涂层膜基结合力接近40 N。     

Al/TiN软硬交替多层膜的制备及摩擦磨损性能研究

软硬交替的多层膜体系具有超硬、强韧、耐磨、自润滑的优势,能大大提高金属切削刀具在现代加工过程中的耐用度和适应性。设计Al/TiN软硬交替纳米多层膜体系,并采用直流磁控溅射和阴极弧磁过滤等离子体沉积相结合的技术,室温下在单晶硅Si（100）衬底上制备一系列不同TiN层厚度纳米多层膜,研究其结构、形貌、力学及摩擦磨损性能。结果表明：该涂层具有良好的多层结构,多层膜中Al呈非晶态或纳米晶态,TiN结晶质量随其厚度增加得到提高;Al/TiN多层膜硬度均高于混合法则计算的硬度值,出现了硬度增强效应;该多层膜体系虽具有较高的摩擦因数,但表现出较好的韧性。     

两步压入法--薄膜力学性能的可靠测量方法

提出了采用力学探针测量薄膜力学性能的两步压入法.该方法通过大载荷压入展示基体变形对薄膜硬度的影响,从而选择不影响基体变形的小载荷测出薄膜的硬度和弹性模量.对高速钢基片上的TiN硬质薄膜,单晶硅片上的金属Ni薄膜和(Ti,Al)N/VN纳米多层膜的测量表明,两步压入法能够测出各种性质薄膜的力学性能,并且具有准确可靠的特点.此外,两步法对(Ti,Al)N/VN纳米多层膜的力学性能的测量表明,该体系的纳米多层膜存在硬度和弹性模量异常升高的超硬、超模量效应.     

TiN薄膜的残余应力调控及力学性能研究

残余应力是制约物理气相沉积（Physical vapor deposition,PVD）硬质薄膜厚度的关键因素。采用多弧离子镀技术在高速钢基体上制备了厚度从3.7 m到15.5 m的TiN薄膜,结合曲率法和有限元法研究残余应力及结合性能随膜厚的变化规律。结果表明,随着膜厚的增加,基片弯曲程度加剧,而薄膜平均残余应力降低;膜层内残余应力的整体水平决定了界面切应力大小,薄膜结合性能随界面切应力的增加而降低。增加基体偏压、降低工作气压均导致薄膜内部残余应力的升高。当残余压应力较高时,TiN薄膜具有细小、致密的柱状晶结构,并呈现（111）择优取向,薄膜硬度及断裂韧度较高,耐磨性能良好。研究结果提示我们,通过残余应力的调控可提高硬质薄膜的力学特性。     

Effect of Pulsed Biasing on the Droplet Formation and the Properties of Cylindrical Cathodic Arc–Grown Erosion-Resistant TiN Coatings

For the past few decades, cathodic arc–grown erosion-resistant coatings have become very popular and are widely used in aerospace applications to significantly enhance the service life of compressor blades. Though the coatings improve life, the concentrations of defects and stressed areas on the surface dictate the end life of the component. Therefore, in the present study, an attempt was made to minimize the defect area fraction along with the residual stresses in cylindrical cathodic arc–grown mono- and multilayer TiN coatings by optimizing pulsed bias voltage parameters such as duty cycle and magnitude of bias voltage. The effect of pulsed biasing and coating configuration on the physical, mechanical, and erosion properties of the TiN coatings was studied systematically. Within the monolayer TiN coating, the samples grown at ?500 V pulsed bias and 40% duty cycle had the best properties with about 50% enhancement in erosion resistance. These coatings were also found to exhibit the lowest residual stress, good adhesion, and moderately higher hardness. Further, the TiN coatings grown in a multilayer configuration (TiN_E-450/TiN_E-350) had the best erosion resistance.     

Characterization of DC magnetron sputtered diamond-like carbon (DLC) nano coating

Development in vapor deposition techniques over the last two decades has led to the introduction of many advanced coatings for metal-cutting tools. This paper examines the characteristics of multilayer Ti, TiN, and diamond-like carbon (DLC) coatings deposited on standard tool substrates at varying sputtering parameters and conditions, such as power density, partial pressure, substrate temperature, and reactive gases. The characteristics of films were examined using an X-ray diffractometer, Raman microscope, surface profilometer (to measure the thickness of the coating), Rockwell hardness tester (to test adhesion), and a micro hardness tester. The pin-on-disc test setup was used to find the coefficient of friction of the coatings. The results indicated that a graded multilayer coating showed better adhesion to the substrates. It was observed that higher target power density resulted in an increase of micro hardness and crystalline planes of coating. Lattice constant matching among layers of coating, proper substrate preparation, and a sequence of cleaning processes are the crucial factors for the enhancement of adhesion strength.     

Investigation of antiwear coatings deposited by the pvd process

The tribological properties of various PVD‐deposited coatings (vacuum arc method) have been tested, both single‐layer coatings (TiN, CrN, Ti(C,N), and Cr(C,N)) and multilayer coatings (Cr(C,N)/CrN/Cr and CR(C,N)/(CrN+Cr₂N)/CrN/Cr). An unlubricated ball‐on‐disc tribosystem was used in which an Al₂O₃ ball is pressed against a coated steel disc rotating in the horizontal plane. A novelty of the method is the removal of wear debris from the contact zone using a draught of dry argon. This improves the repeatability of the test results and the stability of the tribological characteristics. It is shown that CrN coatings exhibit the best antiwear properties and Ti(C,N) the worst. Multilayer coatings have better antiwear properties than single‐layer ones. The friction coefficients for CrN and Cr(C,N) coatings are much smaller than for the commonly used TiN. A correlation has also been found between the physical properties of the coatings tested (adhesion of the coating to the substrate assessed in scratch tests, and coating hardness) and their antiwear properties. An improvement in coating‐substrate adhesion results in wear reduction, while greater hardness (causing a coating embrittlement increase and a change in the wear mechanism) brings about greater wear. There is no correlation between the physical properties and the friction coefficients of the coatings tested.     

Substrate Effects on the Micro/Nanomechanical Properties of TiN Coatings

Nanoindentation and nanoscratch tests were performed for titanium nitride (TiN) coatings on different tool steel substrates to investigate the indentation/scratch induced deformation behavior of the coatings and the adhesion of the coating–substrate interfaces and their tribological property. In this work, TiN coatings with a thickness of about 500 nm were grown on GT35, 9Cr18 and 40CrNiMo steels using vacuum magnetic-filtering arc plasma deposition. In the nanoindentation tests, the hardness and modulus curves for TiN/GT35 reduced the slowest around the film thickness 500 nm with the increase of indentation depth, followed by TiN/9Cr18 and TiN/40CrNiMo. Improving adhesion properties of coating and substrate can decrease the differences of internal stress field. The scratch tests showed that the scratch response was controlled by plastic deformation in the substrate. The substrate plays an important role in determining the mechanical properties and wear resistance of such coatings. TiN/GT35 exhibited the best load-carrying capacity and scratch/wear resistance. As a consequence, GT35 is the best substrate for TiN coatings of the substrate materials tested.     

沉积参数对磁控溅射CrN_x膜结构和性能的影响

本文采用非平衡直流磁控溅射方法制备CrN_x薄膜,研究沉积参数对膜结构和性能的影响。结果表明沉积过程中增加N_2的分压,薄膜的组成由Cr_2N相转变成CrN相,膜的表面形貌也由胞状转化为正四面体。增加样品台的负偏压,沉积膜层更加致密,表面更加平坦。     

基体负偏压对CrAlN涂层组织和性能的影响

采用真空多弧离子镀技术,使用Cr30Al70(原子分数)复合靶,在不同的基体负偏压下,在不锈钢基体上制备了一系列CrAlN涂层;采用能谱仪、X射线衍射仪、扫描电子显微镜、粗糙度仪、显微硬度仪、摩擦磨损试验机和划痕仪等系统分析了涂层的成分、表面形貌、相结构、粗糙度、显微硬度、摩擦磨损性能和界面结合性能。结果表明:随着负偏压的增大,涂层中x(Cr)/x(Cr+Al)的比值先增大后减小,当负偏压为150V时,该值达到最大,并与靶材成分接近;基体负偏压为200V时,涂层的表面粗糙度最大,涂层结晶度、硬度最佳,晶体相为固溶铬的面心立方AlN;涂层的摩擦磨损性能不仅与涂层的表面粗糙度相关,还与涂层非晶相中铝元素的含量以及涂层的内应力大小密切相关;界面过渡层制备工艺相同时,基体偏压对涂层和基体之间的界面结合性能影响较小。     

MECHANICAL PROPERTIES AND ANTI-WEARABILITY STUDIES OF MULTILAYER THIN COATINGS ON CUTTING TOOLSS

0INTRODUCTIONhadcoatingsPlayani~troleininduStryforilnpwhngtoollifetimeandperfo~e.OneOfthe~tacandstudiedCOatingtodateisTiN,archhasboeficialPropertiesincludinghigh~ss,lowfrictionandchewhcalinertnes,[l].TiCN,incontraSttoTiN,hasbetteranti-abusiveandanti-abusivecapabilityly].BesideSfrictioncoefficients,aweax-resistantcoatingInUSthashighmicro~,hightoughneSsandadheresatisfaCtorilytotheunderlyingsuhahate.ac,theuseOfanlute~atelayertoimproVetheadheSion~theedingandthesubstratehashostudiedlsj…     

高能离子源清洗对AlCrN刀具涂层结构及性能的影响

采用自主研发的离子源增强多弧离子镀设备,研究涂层沉积前不同清洗工艺对基材表面粗糙度以及所制备的AlCrN涂层的表面形貌、硬度、膜基结合力、摩擦磨损和切削性能的影响。研究结果表明,高能Ar⁺清洗可以更有效清洁基材表面。与传统弧源清洗技术相比,经高能离子源清洗后的基体表面粗糙度降低,沉积态涂层的表面粗糙度更低。相比于传统弧源清洗工艺,高能Ar⁺清洗可以显著提高膜基结合强度,达到48.7 N,摩擦因数和磨损率均降低,涂层刀具寿命提高了3倍。     

Abrasive wear behavior of sprayed hydroxyapitite coatings by gas tunnel type plasma spraying

Hydroxyapatite (HA) coatings were sprayed using gas tunnel type plasma spraying at different arc currents. Abrasive wear test was carried out for the coatings sprayed at different arc currents under unlubricated conditions in air atmosphere. The abrasive wear rate was measured at different coatings thickness to study the effect of coating thickness on the anti-abrasion resistance of HA coatings. The results showed that the abrasive wear resistance of HA coatings increases as the operating arc current of the plasma torch increases. On the other hand, the abrasive wear rate reaches a minimum value near the substrate with coating thickness less than 50 μm. The results showed that the coating hardness increases in the region near the substrate and increases as the arc current increases. The experimental results indicated that there is a relation between the abrasion resistance and hardness properties of HA coatings.