Nano-slit probes for near-field optical microscopy fabricated by focused ion beams

The near-field probes described in this paper are based on metallized non-contact atomic force microscope cantilevers made of silicon. For application in high-resolution near-field optical/infrared microscopy, we use aperture probes with the aperture being fabricated by focused ion beams. This technique allows us to create apertures of sub-wavelength dimensions with different geometries. In this paper we present the use of slit-shaped apertures which show a polarization-dependent transmission efficiency and a lateral resolution of < 100 nm at a wavelength of 1064 nm. As a test sample to characterize the near-field probes we investigated gold/palladium structures, deposited on an ultrathin chromium sublayer on a silicon wafer, in constant-height mode.     

Towards better scanning near-field optical microscopy probes — progress and new developments

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30–50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.     

Interferometric measurement of femtosecond optical pulses emitted from a fibre probe

An interferometric technique is applied to a temporal analysis of the far-field radiation from a near-field optical fibre probe. A balanced homodyne scheme combined with lock-in detection at dual harmonics allows one to evaluate the temporal form of weak signal pulses, even in the presence of some environmental vibrations that disturb the optical interference. The transmission properties of a small aperture are formulated theoretically. It is shown that the sub-wavelength aperture should not distort the femtosecond optical pulses temporally, which is consistent with the experimental observation.     

Polarization properties of bent-type optical fibre probe for magneto-optical imaging

Quantitative evaluation of magneto-optical parameters is necessary in order to apply scanning near-field optical microscope (SNOM) technology to the study of magnetism on the mesoscopic scale. For this purpose, quantitative knowledge of polarization transmission properties through an optical fibre probe is required. We therefore determined the Stokes parameters of the bent-type optical fibre probe that is used as a cantilever for atomic force microscope operation in our SNOM system. As a result, it is found that the degree of polarization is maintained in the light emitted from the probe, although the probe acts as if it were a wave plate. This anisotropic polarization state of the light emitted from the probe was compensated for by using a Berek compensator placed in front of the fibre coupler.     

Near-field mapping of surface polariton fields

Using the general approach to image formation in collection near-field optical microscopy, I derive the symmetry relations for the amplitude coupling coefficients in the case of a weakly guiding single-mode fibre terminated with a probe tip possessing axial symmetry. It is shown that, for the symmetrical detection configuration, six elements of the coupling matrix can be expressed by using only three independent coupling coefficients. The obtained relations are further applied to describe near-field mapping of surface plasmon polariton (SPP) fields. I demonstrate that, for the symmetrical detection configuration, the near-field optical image reflects the intensity distribution of the SPP field components parallel to the surface plane, even though the strong perpendicular component is also being detected. This conclusion is supported with numerical simulations that elucidate the influence of symmetry of the fibre probe on the resulting near-field optical image. The near-field optical images simulated for scattering systems typical for SPP microoptics and localization are presented. It is found that the presence of asymmetry in the detection configuration increases the contribution of the perpendicular field component and results in the images approaching the corresponding SPP intensity distributions.     

Polarization contrast in reflection near-field optical microscopy with uncoated fibre tips

Using cross-hatched, patterned semiconductor surfaces and round 20-nm-thick gold pads on semiconductor wafers, we investigate the imaging characteristics of a reflection near-field optical microscope with an uncoated fibre tip for different polarization configurations and light wavelengths. It is shown that cross-polarized detection allows one to effectively suppress far-field components in the detected signal and to realize imaging of optical contrast on the sub-wavelength scale. The sensitivity window of our microscope, i.e. the scale on which near-field optical images represent mainly optical contrast, is found to be ≈100 nm for light wavelengths in the visible region. We demonstrate imaging of near-field components of a dipole field and purely dielectric contrast (related to well-width fluctuations in a semiconductor quantum well) with a spatial resolution of ≈100 nm. The results obtained show that such a near-field technique can be used for polarization-sensitive imaging with reasonably high spatial resolution and suggest a number of applications for this technique.     

Far-field characterization of small apertures

A far‐field method for characterizing apertures based on the relationship between the relative intensity of propagating modes in a given medium and a small aperture illuminated with a light beam is proposed. A simple optical set‐up based on computer‐generated holograms and spatial filters is suggested to measure the relative strength of modes and provide axial intensity measurements in the far‐field zone. It is shown that the minimal size of a spot that may be measured decreases with an increase in the refractive index of a medium into which light propagates and with the use of high‐order spatial mode filters. The intensities transmitted through tapered optical fibre tips have been measured and their aperture diameters determined using window‐type spatial filters. The results have been compared with measurements using scanning electron microscopy.     

Moulded photoplastic probes for near-field optical applications

The inexpensive fabrication of high-quality probes for near-field optical applications is still unsolved although several methods for integrated fabrication have been proposed in the past. A further drawback is the intensity loss of the transmitted light in the 'cut-off' region near the aperture in tapered optical fibres typically used as near-field probes. As a remedy for these limitations we suggest here a new wafer-scale semibatch microfabrication process for transparent photoplastic probes. The process starts with the fabrication of a pyramidal mould in silicon by using the anisotropic etchant potassium hydroxide. This results in an inverted pyramid limited by < 111 > silicon crystal planes having an angle of ∼ 54°. The surface including the mould is covered by a ∼ 1.5 nm thick organic monolayer of dodecyltrichlorosilane (DTS) and a 100-nm thick evaporated aluminium film. Two layers of photoplastic material are then spin-coated (thereby conformal filling the mould) and structured by lithography to form a cup for the optical fibre microassembly. The photoplastic probes are finally lifted off mechanically from the mould with the aluminium coating. Focused ion beam milling has been used to subsequently form apertures with diameters in the order of 80 nm. The advantage of our method is that the light to the aperture area can be directly coupled into the probe by using existing fibre-based NSOM set-ups, without the need for far-field alignment, which is typically necessary for cantilevered probes. We have evidence that the aluminium layer is considerably smoother compared to the 'grainy' layers typically evaporated on free-standing probes. The optical throughput efficiency was measured to be about 10⁻⁴. This new NSOM probe was directly bonded to a tuning fork sensor for the shear force control and the topography of a polymer sample was successfully obtained.     

Fundamental differences between micro- and nano-Raman spectroscopy

Electric field polarization orientations and gradients close to near-field scanning optical microscope (NSOM) probes render nano-Raman fundamentally different from micro-Raman spectroscopy. With x -polarized light incident through an NSOM aperture, transmitted light has x, y and z components allowing nano-Raman investigators to probe a variety of polarization configurations. In addition, the strong field gradients in the near-field of a NSOM probe lead to a breakdown of the assumption of micro-Raman spectroscopy that the field is constant over molecular dimensions. Thus, for nano-Raman spectroscopy with an NSOM, selection rules allow for the detection of active modes with intensity dependent on the field gradient. These modes can have similar activity as infra-red absorption modes. The mechanism can also explain the origin and intensity of some Raman modes observed in surface enhanced Raman spectroscopy.     

Design and optimization of tapered structure of near-field fibre probe based on finite-difference time-domain simulation

The finite-difference time-domain method was employed to simulate light propagation in tapered near-field fibre probes with small metal aperture. By conducting large-volume simulations, including tapered metal-cladding waveguide and connected optical fibre waveguide, we illustrated the coupling between these guiding modes as well as the electric field distribution in the vicinity of the aperture. The high collection efficiency of a double-tapered probe was reproduced and was ascribed to the shortening of the cut-off region and the efficient coupling to the guiding mode of the optical fibre. The dependence of the efficiency on the tapered structure parameters was also examined.     

Spatial distribution and polarization dependence of the optical near-field in a silicon microfabricated probe

This paper reports on the spatial distribution and polarization behaviour of the optical near-field at the aperture of a Si micromachined probe. A sub-100 nm aperture at the apex of a SiO₂ tip on a Si cantilever was successfully fabricated by selective etching of the SiO₂ tip in a buffered-HF solution using a thin Cr film as a mask. The aperture, 10–100 nm in size, can be reproducibly fabricated by optimizing the etching time. The optical throughput of several apertures was measured. For a 100 nm aperture, a throughput of 1% was approved. The probe shows a very high optical throughput owing to the geometrical structure of the tip. The spatial distribution of the near-field light is measured and simulated using a finite difference-time domain method. The polarization behaviour of apertures with different shapes was analysed using a photon counting camera system.     

Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy

We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.     

Dynamic etching method for fabricating a variety of tip shapes in the optical fibre probe of a scanning near-field optical microscope

A novel etching method for an optical fibre probe of a scanning near-field optical microscope (SNOM) was developed to fabricate a variety of tip shapes through dynamic movement during etching. By moving the fibre in two-phase fluids of HF solution and organic solvent, the taper length and angle can be varied according to the movement of the position of the meniscus on the optical fibre. This method produces both long (sharp angle) and short (wide angle) tapered tips compared to tips made with stationary etching processes. A bent-type probe for a SNOM/AFM was fabricated by applying this technique and its throughput efficiency was examined. A wide-angle probe with a 50° angle at the tip showed a throughput efficiency of 3.3 × 10⁻⁴ at a resolution of 100 nm.     

Brighter near-field optical probes by means of improving the optical destruction threshold

The optical destruction thresholds of conventionally etched and tube-etched near-field optical probes were measured. One of the main advantages of tube-etched tips is their smooth glass surface after taper formation. Presumably for this reason, a destruction limit of over 120 μJ was obtained, almost twice as large as that of the rougher, conventionally etched fibre probes. The use of additional adhesion layers (Ti, Cr, Co and Ni) between the glass surface and the aluminium coating produced, especially for tube-etched tips, a significant increase in the optical destruction threshold. With increasingly thin metal coatings, the use of a protection coating that prevents corrosion during aging is recommended. An additional increase in optical stability was achieved by applying mixed-metal coatings: alternating thin titanium and thick aluminium layers yielded fibre probes with superior properties that achieved average optical destruction thresholds of > 270 μJ. This is an increase in stability of > 400% compared with conventionally fabricated near-field optical tips.     

Optical-fibre scanning near-field optical microscope for cryogenic operation

We have developed a new type of scanning near-field optical microscope (SNOM) utilizing optical fibres. The probe tip is controlled by shear force feedback with a fibre interferometer and signal light is collected directly by a multimode fibre. These features make the SNOM head more compact and less sensitive to vibration. Further advantages of this new type of SNOM are that it obviates the need for optical windows in the cryostat and offers easy optical alignment.     

Spectrally resolved cathodoluminescence analyses in the optical near-field

By implementing a scanning near-field optical microscope into the specimen chamber of a scanning electron microscope, cathodoluminescence can be locally detected in the optical near-field. The achievable spatial resolution in this set-up is only limited by the size of the aperture in a coated fibre probe and its separation from the sample, rather than by the energy dissipation volume of the primary electrons and diffusion processes of excess carriers inside the specimen. We demonstrate how electronically active defects in polycrystalline diamond can be distinguished and localized with sub-wavelength lateral resolution by spectral filtering of the cathodoluminescence signal.     

Transmission line probe based on a bow-tie antenna

A high transmission probe for scanning near-field optical microscopy is discussed that is based on a bow-tie antenna. The proposed design of the transmission line probe relies on batch-fabricated hollow pyramidal silicon dioxide tips that are partly coated with aluminium to accomplish the tapered dipole antenna. Theoretical calculations of the field distribution were performed to investigate its optical properties. Results were compared with those of conventional aperture tips based on the same silicon dioxide tip configuration, and revealed unique properties with respect to the transmission efficiency.     

Photoconductive imaging in a photon scanning tunnelling microscope capable of point-contact current sensing using a conductive fibre probe

A photoconductive photon scanning tunnelling microscope was developed to investigate the point-contact photoconductive properties of condensed matter. In order to detect the current and the optical signal at a local point on a surface, we coated the edge of a bent type fibre probe with indium tin oxide. Thus it was possible to measure both photocurrent and optical property with subwavelength resolution. The performance of the novel microscope was evaluated by analysing an organic thin film of copper phthalocyanine (CuPc), which is known to be an efficient photoconductive material. Photocurrent and current–voltage characteristics were observed at the local point on the CuPc thin films. Furthermore, photoconductive images were obtained with topography and near-field optical imaging using this system. The photoconductive PSTM shows potential in various areas of future optics and electronics.     

Towards better scanning near-field optical microscopy probes--progress and new developments

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.     

Nano-slit probes for near-field optical microscopy fabricated by focused ion beams

The near-field probes described in this paper are based on metallized non-contact atomic force microscope cantilevers made of silicon. For application in high-resolution near-field optical/infrared microscopy, we use aperture probes with the aperture being fabricated by focused ion beams. This technique allows us to create apertures of sub-wavelength dimensions with different geometries. In this paper we present the use of slit-shaped apertures which show a polarization-dependent transmission efficiency and a lateral resolution of < 100 nm at a wavelength of 1064 nm. As a test sample to characterize the near-field probes we investigated gold/palladium structures, deposited on an ultrathin chromium sublayer on a silicon wafer, in constant-height mode.