类金刚石碳膜的结构特性与耐磨性能

采用双离子束增强沉积（IBED）和离子束直接沉积（IBD）技术，在CHn 能量为200~550eV和3～25keV范围内沉积的类金刚石薄膜具有光滑平坦的表面和非晶结构。X光电子谱和Raman光谱分析、以及显微硬度测量的结果表明，随着轰击离子能量的降低，薄膜的金刚石特性增强；在200～550eV能量范围内制备的DLC膜具有明显的sp3键特征和很高的显微硬度。沉积在GCr15钢上的DLC膜与GCr15钢的摩擦学对比实验表明，DLC膜具有很低的摩擦系数、比磨损率和高的抗磨损指数，这证明采用上述两种方法制备的DLC膜具有优良的抗摩擦磨损性能。     

NiTi合金生物医用材料表面镀类金刚石薄膜的性能研究

用脉冲电弧离子镀技术在NiTi合金生物材料表面沉积了类金刚石(DLC)薄膜.研究分析结果表明制备的DLC薄膜是四面体非晶碳薄膜;随着DLC薄膜厚度的增加,薄膜的表面粗糙度增加,薄膜中sp3的含量减少;随着sp3含量的增加,薄膜的纳米硬度升高;划痕实验表明临界载荷大于0.9 N.研究得出与NiTi合金相比,DLC薄膜能够有效地降低摩擦系数和磨损.DLC薄膜的摩擦系数主要与薄膜的硬度及薄膜中sp3的含量有关,DLC薄膜的磨损主要是轻微的磨粒磨损及疲劳磨损.     

MAO层厚度对MAO/DLC复合膜层力学性能与摩擦学特性的影响

借助直流脉冲微弧氧化(MAO)电源,采用恒压模式在AZ80镁合金表面制备四种不同厚度MgO陶瓷层,并以此为基,采用离子束复合磁控溅射技术沉积类金刚石碳(DLC)膜,对比研究了四种膜层体系(MAO-1min/DLC、MAO-3min/DLC、MAO-5min/DLC及MAO-10min/DLC)的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随MAO层厚度增加,复合膜层表面微孔的孔径增大,表面粗糙度增加,且表层DLC膜具有颗粒特征,表现为MAO-3min/DLC及MAO-10min/DLC复合膜层具有较高的纳米硬度和弹性模量,且在磨损过程中对应的摩擦系数与磨痕宽度较小,其抗磨损性能优异;各复合膜层体系在磨损过程中摩擦系数均有波动,产生高温氧化,磨痕表面形成了Fe的转移层;MAO层可提高基体对DLC膜的支撑强度,表层DLC膜对磨损界面具有的润滑作用是复合膜层改善镁基体抗磨损性能之原因所在。     

PET基纳米Ag薄膜导电性能及AFM分析

为了研究在PET基非织造布上沉积纳米Ag薄膜厚度对薄膜表面形貌及导电性能的影响，采用磁控溅射法，在PET非织造布上制备了不同厚度的纳米结构Ag薄膜，采用原子力显微镜（AFM）分析不同厚度纳米结构Ag薄膜形貌及粒径的变化；研究了纳米Ag薄膜厚度与薄膜导电性能的关系。实验结果表明：随着膜厚的增加，膜表面逐渐形成连续结构；同时PET非织造布基银薄膜存在一个临界膜厚，在临界膜厚处，薄膜致密度更高，生长更为均匀，薄膜缺陷较少；同时，随着膜厚增加，导电性能提高，在临界膜厚处，电阻率达到最小。     

DLC膜厚度对镁基表面DLC/MAO复合膜层性能的影响

采用线性离子束沉积技术于AZ80镁合金微弧氧化(MAO)陶瓷层表面沉积不同厚度的类金刚石碳(DLC)膜,形成DLC/MAO复合膜层。对比研究4种膜基系统的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随DLC膜厚度增加,复合膜层表面微孔数量减少,孔径减小,但凹凸不平趋势增加,且DLC膜表面颗粒特征更加明显,表现为DLC-80min/MAO/AZ80膜基系统具有最小的表面粗糙度,最大的硬度H、弹性模量E及H/E值;不同厚度DLC/MAO/AZ80膜基系统平均摩擦因数较MAO/AZ80显著降低;DLC膜厚度增加导致3种复合膜基系统的表面微观结构改变,使得摩擦因数与磨痕形貌存在差异;各膜基系统表面磨痕处均形成了Fe的转移层,由于表层DLC膜"裸露"的大量C对磨损界面具有很好的润滑作用,而使得镁合金基体获得有效保护。     

铝合金表面DLC薄膜中间层对磨损性能的影响

为了改善铝合金表面磨损特性,采用离子镀方法在8种不同类型的铝合金表面制备了类金刚石(DLC薄膜,DLC沉积之前,用磁控溅射方法和离子镀方法在铝合金表面沉积Ti,SiC和VMS 3种不同的中间层;用球?盘磨损试验机对涂层材料磨损性能进行了表征。结果表明:铝合金表面DLC薄膜的摩擦系数约为0.2～0.3,不同的铝合金,随中间层的不同具有不同的磨损效果,中间层对DLC薄膜的磨损性能影响明显,中间层为SiC的6061铝合金表现出最好的摩擦磨损特性。     

不同摩擦副条件下二硫化钼薄膜的摩擦学性能研究

为了研究MoS₂-Ti薄膜与9Cr18钢、W-DLC和DLC薄膜的摩擦学行为，分别采用磁控溅射技术和等离子体增强化学气相沉积技术在9Cr18钢表面沉积了MoS₂-Ti薄膜、W-DLC和DLC薄膜。用扫描电子显微镜(SEM)、能量色散谱仪(EDS)和X射线衍射仪(XRD)研究了薄膜的表面形貌、化学成分和相组成。利用纳米压痕仪和球-盘摩擦试验机对不同薄膜的纳米硬度和摩擦学性能进行了分析。研究结果表明，MoS₂-Ti薄膜与DLC薄膜的摩擦因数和磨损率最小。相比MoS₂-Ti薄膜与不镀膜的9Cr18钢球摩擦副，MoS₂-Ti薄膜与W-DLC薄膜摩擦副的摩擦因数和磨损率没有减小。MoS₂-Ti薄膜与W-DLC薄膜摩擦副的磨损机制为磨粒磨损和黏着磨损，与DLC薄膜摩擦副的磨损机制为黏着磨损。摩擦副表面沉积DLC薄膜有助于降低MoS₂-Ti薄膜的摩擦因数和磨损率。     

类金刚石薄膜对纯钛的磨损保护及安全性评价

评价了以TiN为过渡层的类金刚石（DLC）复合梯度膜对齿科纯钛（TA2）的磨损防护效果以及生物安全性。采用脉冲真空多弧等离子体镀膜机,在齿科纯钛表面镀制TiN梯度膜和DLC表面膜。在体外对比检测镀膜的耐磨损能力和与纯钛的结合力,同时观察检测磨损后的表面形貌和元素分布。应用MTT法评价其生物相容性。结果表明,DLC薄膜的耐磨损能力以及与纯钛的结合力明显高于其余表面处理方法,表面形貌改变小。细胞毒性实验表明,DLC膜表面的L-929细胞增值良好。复合梯度膜的应用,可以明显提高DLC镀膜与纯钛基体的结合力。耐磨试验表明,DLC复合梯度膜可以承受日常口腔刷牙的磨耗,安全可靠,可以应用于人体。     

离子束溅射沉积Co纳米薄膜表面特征AFM、XPS分析

采用离子束溅射沉积法，在单晶Si基片上制备了不同厚度（1nm-100nm）的Co纳米薄膜。利用原子力显微镜和X射线光电子能谱仪对不同厚度的Co纳米薄膜的表面进行了分析和研究。结果表明：当薄膜厚度为1nm～10nm时，沉积颗粒形态随着薄膜厚度的增加将由二维生长的细长胞状过渡到多个颗粒聚集成的球状；当膜厚继续增加，小颗粒球消失，集结成大颗粒球，颗粒球呈现三维生长状态；表面粗糙度随着膜厚（膜厚为1nm～10nm）的增大，呈现先增加后减小的趋势，在膜厚为3nm时出现极值。通过XPS全程宽扫描和窄扫描，薄膜表面的元素成分为Co：主要以金属Co和Co氧化物的形式存在。     

常温生长类金刚石薄膜的实验研究

利用射频等离子体增强化学气相沉积(RFPECVD)工艺在常温下实现在不锈钢、硅片、玻璃等基底上大面积沉积类金刚石(DLC)膜.薄膜表面光滑致密,与衬底的结合力较高.用Raman,FTIR,SEM,EDX研究了薄膜的形貌、结构与组分.用栓-盘摩擦磨损试验机测试了薄膜的摩擦系数.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.01.在摩擦过程中DLC膜的磨损机制借助SEM进行了研究.     

钛离子注入类金刚石碳膜的结构与性能的研究

使用金属离子注入的方法制备了 Ti掺杂的DLC膜。采用原子力显微镜观察了薄膜的表面形貌,Ti掺杂后 DLC 膜的表面粗糙度明显减小,表面光洁度增加,颗粒细化。拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,掺杂Ti后的 DLC膜的拉曼光谱存在明显的肩峰,DLC膜化学结构中的sp2 组分增加,sp3 组分减少。透射电子显微镜分析表明Ti注入后有TiC纳米晶形成。掺入Ti的 DLC膜的硬度从 14GPa增加到 20GPa。Ti 掺杂后的 DLC 膜的摩擦系数(0.15)明显低于未掺杂的DLC膜的摩擦系数(0.21),Ti离子注入有助于提高薄膜的抗磨损性。     

Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around −30 keV, which was thought to be the optimum implanting voltage in this study.     

Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique

Cr-containing diamond-like carbon (Cr-DLC) films was deposited on silicon wafers by a hybrid beams system, which consists of a DC magnetron sputtering and a linear ion source. The chromium content in the films was adjusted by varying the fraction of Ar in the Ar and CH₄ gas mixture. The composition, microstructure, surface morphology, mechanical properties and tribological behavior of the films were investigated by XPS, TEM, AFM, SEM, nano-indentation and tribological tester as a function of Cr content. It is shown that, as the Cr content increased from 1.49 to 40.11 at.%, the Cr-DLC films transfer from amorphous DLC with dispersed metallic-like Cr to composite DLC with carbide phases embedding in the DLC matrix, and the film surface morphology also evolve from flat surface into rough surface with larger hillocks. The amorphous Cr-DLC films exhibit a low friction coefficient and wear rate as pure DLC, while the composite Cr-DLC films show a higher friction coefficient and wear rate, although they possess a relatively high hardness.     

Analysis of plastic deformation in diamond like carbon films-steel substrate system with tribological tests

The influence of plastic deformation of the substrate on the tribological properties of diamond like carbon (DLC) films was investigated in DLC films-steel substrate system. The tribological properties of DLC films deposited on different hardness steel were evaluated by a ball on disk rotating-type friction tester at room temperature under different environments. In dry nitrogen, DLC films on soft steel exhibited excellent tribological properties, especially obvious under high load (such as 20 N and 50 N). However, DLC films on hard steel were worn out quickly at load of 20 N. Plastic deformation was observed on soft steel after tribological tests. The width and depth of plastic deformation track increased with increase of the experimental load. Super low friction and no measurable wear were kept in good condition even large plastic deformation under high load conditions in DLC films-soft steel system. In open air, DLC films on soft steel exhibited high coefficient of friction and DLC films on ball were worn out quickly. Plastic deformation was not observed on soft steel because the contact area increased and the thick hardened layer on contact surface were formed by DLC films and debris particles together on the steel substrate. The wear track on steel became deep and wide with increase of loads and DLC films were worn out. The experimental results showed that super low friction and high wear resistance of DLC films on soft steel can be attributed to the good adhesion and plastic deformation. Plastic deformation played an active role in the tribological properties of DLC films on soft steel in the present work.     

Characteristics and mechanical properties of titanium-containing diamond like carbon films deposited by cathodic arc evaporation

Depositions of titanium-containing diamond-like carbon (Ti-DLC) films were conducted by mixing C+ and Ti+ plasma streams originated from cathodic arc plasma sources in argon (Ar). The deposition was processed at Ti target current ranging from 20 Amp to 70 Amp. Film characteristics were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS). Film microstructures were evaluated using field emission scanning electron microscopy (FEGSEM), an atomic force microscope (AFM), X-ray diffractometry (XRD) and high-resolution transmission electron microscopy (HRTEM). Mechanical properties were investigated by using a nanoindentation tester and ball on disc wear test. Results shows that surface roughness (Ra) of the films ranged between 2.4 and 7.2 nm and roughness increased relative to the increase in Ti target current. The FESEM studies showed that the surface micrographs of Ti-DLC films revealed a cauliflower-like microstructure and the cross-sectional micrograph revealed a snake-skin like structure. HRTEM studies showed that the Ti-DLC films consisted of nano scale TiC particles which were comparable with low angle XRD and XPS results. XPS analysis established that the Ti2p spectrum is present when the Ti target current reaches 30 Amp or higher. Ti concentration increased as the Ti target current was increased. An extremely thin TiO2 layer exists on the top of the Ti-DLC films which was comparable with the AES results. The film thickness which could be deposited for Ti-DLC is much higher than that of conventional DLC films. Nanoindentation tests show that the nanohardness of the films ranging 15-22 GPa, with Er values ranging from 145 to 175 GPa. The wear test demonstrates the friction coefficient of the 420SS substrate, DLC and Ti-DLC films were about 0.8, 0.3 and 0.2, respectively. Obviously, the friction coefficients of the Ti-DLC films were lower than that of the DLC films.     

Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma

Diamond-like carbon (DLC) films were deposited by a cathodic arc plasma evaporation (CAPD) process, using a mechanical shield filter combined with a magnetic filter with enhanced arc structure at substrate-bias voltage ranging from − 50 to − 300 V. The film characteristics were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and high-resolution transmission electron microscopy (HRTEM). The mechanical properties were investigated by using a nanoindentation tester, scratch test and ball on disc wear test. The Raman spectra of the films showed that the wavenumber ranging from 900 to 1800 cm^− 1 could be deconvoluted into 1140 cm^− 1, D band and G band. The bias caused a significant effect on the sp³ content which was increased with the decreasing of I_D/I_G ratio. The XPS spectra data of the films which were etched by H⁺ plasma indicated the sp³ content are higher than those of the as-deposited DLC films. This implied that there is a sp²-rich layer present on the surface of the as-deposited DLC films. The nanoindentation hardness increased as the maximum load increased. A 380 nm thick and well adhered DLC film was successfully deposited on WC-Co substrate above a Ti interlayer. The adhesion critical load of the DLC films was about 33 N. The results of the wear tests demonstrated that the friction coefficient of the DLC films was between 0.12 and 0.2.     

Corrosion behavior of aluminum doped diamond-like carbon thin films in NaCl aqueous solution

Aluminum doped diamond-like carbon (DLC:Al) thin films were deposited on n-Si(100) substrates by co-sputtering a graphite target under a fixed DC power (650 W) and an aluminum target under varying DC power (10-90 W) at room temperature. The structure, adhesion strength and surface morphology of the DLC:Al films were characterized by X-ray photoelectron spectroscopy (XPS), micro-scratch testing and atomic force microscopy (AFM), respectively. The corrosion performance of the DLC:Al films was investigated by means of potentiodynamic polarization testing in a 0.6 M NaCl aqueous solution. The results showed that the polarization resistance of the DLC:Al films increased from about 18 to 30.7 k(omega) though the corrosion potentials of the films shifted to more negative values with increased Al content in the films.     

通过制备Ti/TiC和Si/SixNy过渡层在铜基体上沉积类金刚石膜的研究

将磁控溅射物理气相沉积（MS-PVD）和电子回旋共振-微波等离子体增强化学气相沉积（ECR—PECVD）技术相结合，在铜基体上通过制备两种不同的过渡层，成功地沉积了类金刚石膜。拉曼光谱结果分析表明，所制备的碳膜都具有典型的类金刚石结构特征。通过原子力显微镜对薄膜的微观形貌进行分析，采用纳米压痕测量薄膜的硬度和模量。并对Ti／TiC过渡层和Si／SixNy过渡层上沉积的类金刚石薄膜进行了研究对比。     

非平衡磁控溅射类金刚石碳膜的性能

用非平衡磁控溅射的方法在室温下制备了光滑、均匀、致密的类金刚石(DLC)薄膜,分析和研究了DLC膜的形貌、结构和摩擦特性.结果表明,靶工作电流对DLC膜的沉积有重要的影响.随着工作电流的增大,薄膜的沉积速率增大,薄膜中sp3键的含量增加.薄膜的摩擦系数随着工作电流的增加略有增大,在摩擦的初始阶段,摩擦系数较高,随着摩擦循环次数的增加,摩擦系数逐渐减小,并逐渐趋于稳定.     

用于微机电系统的类金刚石膜制备及表征

采用等离子体源离子注入和电子回旋共振-微波等离子体辅助化学气相沉积技术相结合的方法在Si衬底上制备出了性能良好的类金刚石膜.通过共聚焦Raman光谱验证了薄膜的类金刚石特性,用原子力显微镜、微摩擦计和扫描电镜等对薄膜的表面形貌、摩擦系数和耐磨损性能进行了表征和测量.结果表明,用离子注入法制备过渡层大大提高了DLC膜与衬底的结合强度,薄膜的表面比较光滑,粗糙度大约为0.198 nm,具有较低的摩擦系数(0.1～0.15),具有较好的耐磨损性能.