Power consumption analysis of surface acoustic wave sensor systems using ANSYS and PSPICE

The power consumption of a surface acoustic wave (SAW) sensor system was investigated using ANSYS and PSPICE. Simulation results show that several design parameters of the surface acoustic wave sensor, such as the center distance between two interdigital transducers (IDT), the thickness of the piezoelectric substrate, the finger space of the IDT, etc., can greatly affect the power consumption of the whole system. The results of this study will be helpful to optimum design and fabricate the SAW sensor systems with very low-power consumption.     

声表面波传感器Q值改善的理论分析与实验结果

报道了带变迹叉指换能器（IDT）和倾斜金属反射栅的高Q值Y型声表面波（SAW）质量沉积传感器。用P矩阵方法分析了三种不同传感器的通带纹波。分别在振荡和非振荡模式下比较了这些传感器的通带纹波和Q值。分析了获得高Q值的原因。理论和实验结果表明：均匀孔径无反射栅的传感器旁瓣抑制为10dB，振荡模式下其Q值为5289；通过孔径变迹设计，传感器的旁瓣抑制和Q值分别改善到25dB和8689；而对孔径变迹并加入倾斜反射栅的传感器，这两个参数提高到25dB和12477。非振荡模式下带反射栅的传感器比没有反射栅器件的通带纹波约低2dB。因此，变迹IDT和金属反射栅的应用是SAW质量传感器Q值的改善的两个重要因素。由于Q值改善，质量沉积灵敏度达到5.24GHz?cm2/g     

声表面波传感器Q值改善的理论与实验分析

用P矩阵方法分析带变迹叉指换能器(IDT)和倾斜金属反射栅的高Q值Y型声表面波(SAW)质量沉积传感器的通带纹波,并分别在振荡和非振荡模式下比较了这些传感器的通带纹波和Q值.分析了获得高Q值的原因.理论和实验结果表明:均匀孔径无反射栅的传感器旁瓣抑制为10dB,振荡模式下其Q值为5 289;通过孔径变迹设计,传感器的旁瓣抑制和Q值分别改善到25dB和8689;而对孔径变迹并加入倾斜反射栅的传感器,这两个参数提高到25dB和12477.非振荡模式下带反射栅的传感器比没有反射栅器件的通带纹波约低2dB.因此,变迹IDT和金属反射栅的应用是SAW质量传感器Q值的改善的两个重要因素.由于Q值改善,质量沉积灵敏度达到5.24 GHz·cm2/g     

Design of SAW sensor for longitudinal strain measurement with improved sensitivity

This paper presents the design of a highly sensitive surface acoustic wave (SAW)-based sensor with novel structure for the longitudinal strain measurement. The sensor utilizes thin lithium niobate (LiNbO₃) diaphragm as the sensing element rather than the bulk substrate. The application of the diaphragm effectively decreases the cross-sectional area of the strain sensitive element, and meanwhile reduces the resistance between the sensor and the specimen. The newly designed strain sensor is to operate around a frequency of 50 MHz. The insertion loss of − 12 dB and quality factor of 63 are obtained analytically from impulse-response model. The sensor performance with tensile testing of the steel beam is predicted by the finite element method. The prestressed eigenfrequency analysis is conducted with the COMSOL commercial software. The simulation shows the resonance frequency of the sensor shifts linearly with the strain induced in the testing beam. For the SAW sensor with traditional configuration applying 1 mm thick substrate, the strain sensitivity is obtained as 0.41 ppm/με. For the sensor with the novel design employing thin diaphragm with the thickness of 200 μm, the strain sensitivity is increased to 0.83 ppm/με. With the availability of the bulk micromachining of LiNbO₃, the application of the piezoelectric diaphragm as sensing element in SAW strain sensor can be an alternative way to enhance the sensor sensitivity.

     

基于超支化聚合物的声表面波化学毒剂传感器

基于声表面波（SAW）技术的化学毒剂传感器在检测下限、响应速度以及减小温度、湿度交叉敏感等方面还需进一步提高。提出了在SAW双端口谐振器上涂敷超支化聚合物的方法提高传感器的检测下限和灵敏度。通过建立Van Dyke模型,分析了敏感膜对SAW化学毒剂传感器Q值、插入损耗以及电路阻抗匹配的影响。利用谐振器代替延迟线,确保了器件具有插入损耗、高Q值的特点。实验证实,在谐振器的中心栅结构上涂覆聚合物可以减小粘弹性聚合物对谐振器插损、Q值以及输入输出阻抗的影响。对设计的化学毒剂传感器进行了沙林毒剂检测实验,采用315MHz的SAW谐振器结合超支化聚合物膜,检测沙林气体浓度为5．0mg／m^3。实验表明：这种传感器的灵敏度可达到600Hz／mg／m^3,响应时间为50s,恢复时间约为60s。     

声表面波器件的反射特性及性能

为了准确分析反射型声表面波器件参数对其性能的影响,基于耦合模理论和P矩阵方法建立了器件的耦合模模型,分析得到器件的电反射特性即反射系数S11曲线,并在128°Y-X LiNbO3压电基片试制了频率为90 MHz的多种参数的器件,分析与测试结果表明:单个叉指换能器器件的S11中心频率为91.26 MHz,幅值为-20.58 dB,与理论分析结果91.44 MHz和-19.21 dB相近;带有反射栅的器件比单个叉指换能器件在中心频率处S11幅值增大约8.5 dB,谐振峰增多,时域曲线有明显的反射峰信号,验证了反射栅的反射特性;叉指换能器叉指对数减小使器件中心频率处的S11幅值减小,时域中的回波信号更尖锐,信噪比明显增大,表明对数较多的IDT具有较强的反射特性,对回波信号干扰较大,过小的叉指对数对器件声电转换效率影响很大,会使器件性能下降;较大的反射栅指条数对回波信号影响不大,但过小的指条数会降低反射栅反射系数,使得回波信号信噪比减小,纹波增多.     

用于气体传感器的声表面波振荡器频率稳定性分析

作为声表面波(SAW)气体传感器的关键元件,SAW振荡器的频率稳定性直接影响到传感器的灵敏度和检测下限.因此,提高SAW振荡器的频率稳定度是传感器研究的关键.这里在ST石英基片上研制了一种具有低插入损耗(在10dB以内)、单一模式控制的SAW双延迟线型振荡器,并分析了作为频控元件的延迟线Q值以及系统温度对振荡器频率稳定性的影响,提出了改善方法.另外还研究了高频SAW延迟线型振荡器的频率稳定性,研制了一种300MHz频段上的SAW双延迟线型振荡器,其频率稳定度达到了0.066×10-6量级.     

新型抗腐蚀结构声表面波湿度传感器的研究

为解决声表面波(SAW)湿度传感器存在易被污染、不易清洁、稳定性差等问题,提出了一种新的基于改进的单端口SAW谐振器结构用于湿度检测。在此结构中,在ITO材料制作的叉指换能器和反射阵上溅射厚度为5pm Si3N4层以屏蔽各种腐蚀性物质如酸性、碱性等腐蚀性气体对SAW谐振器电极的侵蚀。相比常规谐振器,新结构加大了谐振器叉指换能器与一个反射阵之间距用于涂敷湿敏材料,同时在石英基片背面布设ITO材料脱湿电路。给出了基于此类结构SAW湿度传感器的制作工艺、感湿实验测试结果。实验验证了该结构SAW湿度传感器的可清洁性、耐腐蚀性及该结构的有效性。     

基片表面力负载对SAW谐振器的特性影响研究

分析了SAW谐振器表面力负载对谐振器谐振频率和机械损耗产生的影响。进行了两种表面力加载方式的实验研究,对比实验结果表明:基片底面固定时,表面力负载对SAW谐振器谐振频率的影响主要与负载在基片表面产生的应力大小有关,而谐振器的机械损耗主要与力在基片表面的分布有关。实验结果为SAW力传感器的结构设计提供了参考。     

基于延迟线理论的新型无源声表面波传感器研究

基于声表面波的延迟线理论,设计出一款新型的无线无源SAW温度和压力混合传感器.该传感器中温度对信号的影响掺杂在检测压力变化的信号中,通过引入权重因子,把压力信号从温度和压力共同影响的混合信号中分离出来,从而达到温度和压力同时检测的目的.此设计充分利用了IDT的转换能量,减少了信号之间的干扰,并对IDT及反射器进行优化设计,提高了传感器的灵敏度.此传感器具有无线无源等特点,适合在复杂环境下工作.     

基于P矩阵模型的声表面波胎压微传感器研究

轮胎压力监视系统是一种当轮胎气压与温度超出正常标准时,能及时提醒驾驶者的系统。研究的目的在于对该系统一款新型无源无线声表面波微传感器的设计进行理论分析和参数优化。为此,根据耦合模理论推出了P矩阵模型新的表示形式并验证了该表示形式在分析双向对称一致IDT和反射器方面的适用性和精确性。应用P矩阵方法分析IDT的输入导纳和该SAW器件的插损,结果显示该传感器设计具有优良的插损性能。     

基于WIFI的无线声表面波传感器信号采集系统

将声表面波传感器与信号无线保真(WIFI)技术相结合,提出了一种基于WIFI的无线声表面波传感器信号采集系统.该系统由声表面波传感器、信号调理电路、处理器、WIFI模块和无线接收终端组成.声表面波传感器混频后的信号经过信号调理电路后,转换为处理器可计频的低频方波信号,并通过WIFI模块将采集到的信号无线发送到接收终端.通过一个输出信号范围在100 kHz~350 kHz声表面波传感器信号采集系统的实现,对该系统的结构、性能进行了验证和测试.实验结果表明,该系统可以实现测试范围内信号的采集、发送和无线接收,系统输入信号与无线接收终端接收信号之间的平均绝对误差为0.843 kHz,最大相对误差为0.51%,无障碍环境有效采集范围约为100 m,有障碍环境有效采集范围约为50 m.     

Mitigation of a Heading Drift in Pedestrian Dead-reckoning Caused by the Sensor Bandwidth

In this paper, we analyze the relationship between sensor bandwidth and heading drift, and improve a pedestrian dead-reckoning (PDR) system considering the heading drift by the insufficient bandwidth. The PDR system using foot-mounted inertial measurement unit (IMU) is generally based on an inertial navigation system (INS). In order to reduce the estimated position error, INS is combined with the zero-velocity update (ZUPT), which assumes that the pedestrian shoe velocity is zero at the stance phase. Although the error can be reduced through ZUPT, the estimation errors due to other causes remain. The angular rate and acceleration signals measured from the inertial sensor have various frequency components depending on the motion of the shoe. In the heel strike phase, the signals change sharply due to the impact, and the high frequency components are generated compared to the other phase. Considering only the accuracy of the inertial sensor and using a sensor with insufficient bandwidth, estimation errors occur in the PDR system. In the standard PDR system, loss of information due to narrow bandwidth causes heading drift, which is the unobservable state in the filter. In order to compensate for the heading drift due to the insufficient bandwidth, we analyze the estimation errors according to the bandwidth. Moreover, we propose a PDR system considering the heading drift estimated based on sensor bandwidth. To improve the estimation performance of the PDR system, the proposed system compensates the heading drift according to the sensor bandwidth in the heel strike with the high frequency components. The experimental results show that the improved performance of the proposed system compared with the standard algorithm.

     

SAW nanopump for handling droplets in view of biological applications

This paper reports on the fabrication and development of a surface acoustic waves (SAW) platform dedicated to digital micro fluidics for biological applications. SAW at about 20 MHz are generated by InterDigital Transducers (IDT) laid on a LiNbO₃ piezoelectric substrate. An electrical characterization of the IDT is reported and first results related to droplet handling with the SAW platform are given. We show that accurate droplet displacement is the result of both a radio frequency (RF) pulsed excitation and a chemical pre-treatment of the platform surface. For biological applications the droplet carrying the biomaterial is squeezed between the platform and a cover to increase the surface exchange between the droplet and hydrophilic functionalized areas. Out of such areas the free displacement is significantly improved by a surface hydrophobic pre-treatment. Moreover, the fabrication of additional hydrophilic micro tracks is shown to be a solution for crossing these areas without droplet splitting. This result is a key point to validate the structure of the novel micro fluidic platform proposed in this paper.     

一种采用穴番-A敏感膜的新型声表面波瓦斯传感器的研究

本文利用笼形超分子材料穴番-A对甲烷分子的特异性包合作用,提出了一种能够在室温下工作的采用穴番-A敏感膜的新型声表面波瓦斯传感器。设计研制了中心频率为300 MHz的低损耗、高Q值SAW谐振器,并以所研制的谐振器构成双通道差分振荡器。分别以点涂法和旋涂法在传感通道SAW谐振器表面进行了敏感膜的镀膜。通过实验观察对比了采用两种镀膜方式的SAW瓦斯传感器在常温下对5%甲烷气体的响应。实验结果显示点涂镀膜的传感器响应约为1 kHz,远大于旋涂镀膜方式。AFM表面形貌表征显示了敏感膜表面粗糙度是造成这一差异的主要原因。实验还研究了传感器对不同浓度甲烷气体的响应,结果表明传感器响应随气体浓度降低而减小,两者存在良好的线性关系,测试灵敏度为205 Hz/%,检测下限约为0.2%。     

基于SAW表面气液相效应和GC分离柱的气敏传感器的研究

限于传统涂敷敏感膜的声表面波（SAW）气敏传感器存在成膜困难和选择性差、重复性差以及再生性差等问题，本研究提出一种基于压电基底表面气体气液相转换效应机理的瑞利波传感器。首先建立了挥发性有机气体(VOCs)液相凝聚体薄层负载下的SAW波传模型，并仿真计算了其波传频散和波传衰减。然后在此基础上开发了一种基于瑞利声表面波传感器和气相色谱（GC）分离柱的便携式气体检测系统。最后实验论证了方案的可行性，初步的实验结果表明该系统具有分析时间短、选择性好、灵敏度高（可检测ppb浓度的混合VOCs）以及成本低等优势，因此其在痕量挥发性有机气体检测和分析应用上有良好的潜力和前景。     

高灵敏度SAW纱线张力传感器研究

灵敏度是声表面波（ SAW）纱线张力传感器成功检测纱线张力的关键。通过对SAW纱线张力传感器的灵敏度和基片应变率之间关系的研究,提出了通过增加基片应变率来提高传感器灵敏度的理论。以该理论为指导,给出了通过灵活设计基片尺寸来获得最佳基片应变率的设计方案。为了得到最佳基片应变率对应的基片尺寸,建立了基片应变率和基片尺寸之间的数学模型,提出了求解最大基片应变率所对应基片尺寸的线性规划模型,即最佳灵敏度所对应基片尺寸。实验表明：该方法可以有效提高SAW纱线张力传感器的灵敏度,灵敏度达3132.4 Hz/gf。     

无源声表面波谐振器的无线温度传感系统

介绍了一种基于声表面波谐振器的无源无线温度传感系统。作为传感器的谐振器受到正弦脉冲串的无线激励。因激励信号的中心频率不同于谐振器的谐振频率，所以回波信号是一调幅信号，其包络的主频就是谐振器的谐振频率和激励信号中心频率的差频。给出了传感系统的电路设计以及信号处理方法。实验数据和器件的温度系数吻合。     

SAW压力传感器的理论计算及推导

首先介绍了声表面波(SAW)传感器的基本工作原理。而后从理论分析的角度出发,综合运用各有关知识,探讨了声表面波压力传感器的设计计算问题,并给出了具体的计算方法与步骤。     

A compact and wideband array antenna with efficient hybrid feed network

This study presents a high‐efficient, compact, and broadband microstrip patch antennas (MPAs) based on substrate‐integrated waveguide (SIW) for X‐band applications. The proposed array consists of three stacked layers from top to bottom, including one layer as the antenna layer and two SIW layers as a feeding network. The performance was focused on improving the impedance bandwidth and radiation efficiency by mitigating the loss from the feed network while also maintaining the compact design. To this end, the SIW feeding network was designed to feed the MPA to save the physical aperture size which resulted in a more compact and efficient radiating structure. The overall size of the proposed array is compact and extra surface area around the radiation aperture has not been occupied. The measured ?10 dB impedance bandwidth span is from 8.9 to 10.9 GHz (20.2%). The maximum measured gain at 10.6 GHz is 10.6 dBi. The results show that the simulated radiation efficiency and the measured aperture efficiency are more than 75% and 50%, respectively. The fabricated array exhibits great advantages such as wide operating bandwidth, lightweight, low‐cost, high aperture efficiency, high radiation efficiency, and compactness which make it a good candidate for X‐band applications.