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1.
射频磁控溅射室温下制备ITO薄膜的光学性能研究   总被引:3,自引:0,他引:3  
靶材为铟锡氧化物(In2O3:SnO2=1:1),用射频磁控溅射法在低温下制备了光电性能优良的ITO薄膜.质量流量计调节Ar气压强为0.2~3.0Pa,氧流量为0~10sccm,并详细探讨了溅射时氩气压强和氧流量变化对ITO薄膜光学性能的影响.结果表明:溅射Ar气压强为0.8Pa,氧流量为2.4sccm时,薄膜的折射率最低n=1.97,较接近增透膜的光学匹配.薄膜厚度为241.5nm时,薄膜的最大透过率为89.4%(包括玻璃基体),方阻为75.9Ω/□,电导率为8.8×10-4Ω·cm.  相似文献   

2.
磁控溅射制备增透ITO薄膜及其性能研究   总被引:4,自引:0,他引:4  
用射频磁控溅射法在低温下制备了光电性能优良的ITO(In2O3:SnO2=1:1)薄膜。质量流量计调节氩气压强PAr为0.2~3.0Pa,氧流量fO2为0~10sccm,并详细探讨了溅射时PAr和fO2变化对ITO薄膜光学性能的影响。结果表明:fO2的改变引起薄膜中氧空位浓度变化而影响ITO薄膜折射率n;fO2对ITO靶材表面的溅射阀值和对Ar 散射而改变溅射速率。衬底表面粗糙度对ITO薄膜的折射率测量准确性有较大影响。PAr为0.8Pa,fO2为2.4sccm,薄膜厚度为241.5nm时,nmin=1.97,最大透过率为89.4%(包括玻璃基体),方阻为75.9?/□,电阻率为8.8×10-4?·cm。AFM分析表明薄膜表面针刺很少,表面平整(RMS=3.04nm)。  相似文献   

3.
室温直流磁控溅射制备ITO膜及光电性能研究   总被引:1,自引:0,他引:1  
室温条件下,在玻璃衬底上,采用直流磁控溅射法制备了ITO膜.研究了溅射压强,氧流量和溅射功率等工艺参数对薄膜光电性能的影响.结果表明当Ar流量为44.2 sccm和溅射时间20 min等参数不变时,溅射气压0.7 Pa,氧流量0.62 sccm和溅射功率130 W为最佳工艺条件.并得到了电阻率5.02×10-4 Ω·cm,在可见光区平均透过率80%以上ITO薄膜.  相似文献   

4.
在室温条件下通过直流磁控溅射法在普通玻璃基体上制备了光电性能优良的ITO薄膜。靶材为ITO陶瓷靶,其中In2O3与SnO2的质量比为9∶1。运用UV-2550紫外可见光光度计测量样品的透光率,采用SZT-2四探针测试仪测量样品表面的电阻率,用扫描电镜(SEM)对样品进行表征。研究了溅射压强、溅射功率等参数对薄膜光电性能的影响。研究表明,ITO薄膜的电阻率随着溅射功率的增大而减小,在溅射功率为110W时ITO薄膜的透光率有相对好的数值。溅射压强为1.0Pa时既能保持ITO薄膜低的电阻率又能保证高的透光率。  相似文献   

5.
磁控溅射制备ITO薄膜光电性能的研究   总被引:1,自引:0,他引:1  
采用直流磁控溅射方法在玻璃基底上制备了ITO薄膜.分别用分光光度计和四探针仪测试了所制备ITO薄膜在可见光区域内的透过率和电阻率,研究了溅射气压、氧氩流量比和溅射功率三个工艺参数对ITO薄膜光电性能的影响.研究结果表明,制备ITO薄膜的最佳工艺参数为:溅射气压0.6 Pa,氧氩流量比1:40,溅射功率108 W.采用此工艺参数制备的ITO薄膜在可见光区平均透过率为81.18%,薄膜电阻率为8.9197×10-3Ω·cm.  相似文献   

6.
溅射功率和氧分压对ITO薄膜光电性能的影响研究   总被引:2,自引:0,他引:2  
采用直流反应磁控溅射法制备了氧化铟锡(ITO)透明导电薄膜,通过四探针、紫外可见分光光度计、X射线衍射(XRD)、霍尔效应仪、扫描电镜(SEM)等对薄膜样品进行了表征,研究了溅射功率和氧分压对ITO薄膜微观结构和光电性能的影响,结果表明:溅射功率对ITO的光电性能影响较小,沉积速率随着溅射功率的增大而加快;随着氧分压的升高,载流子浓度降低,霍尔迁移率先增大后减小,电阻率逐渐增大。在优化的工艺条件下,制备了在可见光区平均透过率达85%、电阻率为1×10-4Ω.cm的光电性能优良的ITO薄膜。  相似文献   

7.
氩气压强对直流磁控溅射ZnO:Al薄膜结构和性能的影响   总被引:1,自引:0,他引:1  
基于Al2O3掺杂量为3wt%的氧化锌铝陶瓷靶材,采用直流无反应磁控溅射法在载玻片衬底上制备了ZnO:Al透明导电薄膜.研究了氩气压强对薄膜微观结构和光电性能的影响.结果表明:氩气压强对薄膜的平均透光率影响微小,其值均在86%以上,但对薄膜的微观结构和方块电阻有非常明显的影响.随着氩气压强的增大,薄膜的晶粒形状由片状向球状变化,并呈现出c轴择优生长特性.氩气压强在0.6~3.0 Pa范围内增长时,薄膜的方块电阻先缓慢减小,2.0Pa后急剧增大.在压强为1.5Pa时,薄膜具有最好的电学性能,其电阻率为1.4×10-3Ω·cm,方块电阻为10Ω/sq,优值为1.6Ω-1,符合评价标准.  相似文献   

8.
采用磁控溅射方法在玻璃衬底上使用掺杂3%(质量分数)Al2O3的ZnO陶瓷靶材制备出了掺铝氧化锌(ZnO∶Al,AZO)透明导电薄膜。分别用XRD、SEM、四探针测试仪、紫外-可见分光光度计对薄膜的性能进行了表征和分析。研究了溅射过程中不同氩气压强(0.3~1.2Pa)对薄膜结构、形貌及光电性能的影响。XRD测试结果表明,所制备的薄膜均具有呈c轴择优取向的纤锌矿结构。当氩气压强为0.3Pa时,AZO薄膜的电阻率最低为6.72×10-4Ω·cm。所有样品在可见光波段的平均透过率超过85%。  相似文献   

9.
室温下,利用直流磁控溅射法在玻璃衬底上制备了铌掺杂氧化锌(NZO)薄膜,研究了溅射压强(2~12 Pa)对薄膜结构、残余应力、表面形貌及其光电性能的影响.X射线衍射测量结果表明,所有样品都具有c轴择优取向的六角纤锌矿多晶结构,薄膜应力随压强的增大而减小.扫描电镜表明,随着溅射压强的增大,薄膜表面逐步趋向平整光滑、均匀致密.当溅射压强为10 Pa时,制备的ZnO∶Nb薄膜的最低电阻率可达3.52× 10-4 Ω·cm,残余应力为-0.37 GPa.压强由2Pa增大到12 Pa时,光学带隙由3.29eV增大到3.43 eV.紫外-可见透射光谱表明,所有薄膜在可见光范围内平均透过率均超过87%.  相似文献   

10.
康淮  陆轴  钟志有  龙浩 《材料导报》2018,32(11):1938-1942
以MgO∶Ga_2O_3∶ZnO(2%∶2%∶96%,质量分数)陶瓷靶作为溅射源,采用磁控溅射技术在石英玻璃衬底上制备了镁镓共掺氧化锌(MGZO)透明半导体薄膜。采用XRD、SEM、霍尔效应仪和分光光度计对MGZO薄膜进行测试表征,研究了溅射压强对MGZO薄膜晶体结构、电学性质和光学性能的影响。结果表明:所有MGZO薄膜均为六角纤锌矿结构并具有(002)择优取向生长特性,溅射压强对薄膜晶体结构和光电性能有明显影响,但几乎不影响其直接光学能隙(3.41~3.44eV)。当溅射压强为3.5Pa时,MGZO薄膜的结晶质量最好、张应力最小(8.29×10-2 GPa)、电阻率最低(1.62×10-3Ω·cm)、可见光区平均透过率最高(87.8%)、品质因数最大(4.76×103Ω~(-1)·cm~(-1)),具有最好的光电综合性能。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

19.
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from  相似文献   

20.
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.  相似文献   

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