激光小角度基准测量不确定度评定

基于透明箱模型采用蒙特卡洛法进行了激光小角度测量系统的不确定度评定。 根据测量原理建立了测量不确定度评定模型,分析各不确定度来源。 重点分析了初始零位角和被测角度大小对测量不确定度的影响,分析结果表明:当被测角度较小时,测量不确定度主要受随机误差的影响;随着被测角度的增大,测量不确定度逐渐增大;当未对初始零位角进行精确调整时,测量不确定度不再服从正态分布,其影响随着被测角度的增大而增大。     

HP5528A激光干涉仪在小角度细分精度测试中的应用

本文介绍用ＨＰ５５２８Ａ激光干涉仪的角度测量组件与多齿分度台相结合对圆感应同步器或圆光栅等测角系统的小角度细分精度进行测试的原理和实际应用，以多齿分度台为标准对ＨＰ５５２８Ａ测角系统在小角度测量范围内的系统误差进行检定，利用该仪器的预置功能对系统误差作补偿，可使１度范围内的细分测角精度提高到０．１角秒左右。     

激光跟踪仪测角误差的位移标定法

提出了激光跟踪仪测角误差的位移标定方法,通过在跟踪仪的切向位置上引入标准位移量,根据余弦定理对跟踪仪的角度码盘的误差进行标定.在小位移的情况下,跟踪仪角度的变化量很小,由此引入的非线性误差可以忽略,测角误差可以通过位移误差直接反映出来,当给定的标准位移测量不确定度已知时,其角度标定的不确定度可以直接估算出来.     

X射线衍射仪的角度溯源

采用溯源至SI国际单位的激光干涉仪和自准直仪分别对X射线衍射仪的θ角、2θ角进行校准,并且对角度引入的不确定度进行了分析.结果显示角度引入的扩展不确定度为0.02nm(k=2).     

提升激光跟踪仪长度测量准确度的方法

提出了利用激光跟踪仪进行高准确度测量的方法.描述了激光跟踪仪测量时的特定设置,以获得具有激光干涉仪准确度的长度测量结果.通过几何推导,证明了这种方法不受激光跟踪仪角度测量的影响.列出了方法中主要的测量不确定度来源和不确定度合成的公式.     

激光干涉仪测角系统的精度补偿方法

提出一种新的准直方法，对HP5528A激光干涉仪测角实现了精密计量。     

数字干涉仪移相器PZT位移测量与标定

干涉仪移相器的非线性会造成测量结果的不准确,因而对移相器非线性的测量和标定十分必要。本文提出了一种运用多普勒激光干涉仪测量PZT位移并进行标定的方法,该方法操作简单、结果精确,可以快速得到电压值与移相值的对应关系曲线,通过对曲线作非线性拟合并对电压值进行精密调整,完成移相器的精确标定。在改造后的干涉仪上对此标定方法进行验证,与Zygo干涉仪相比,相同元件下两者测量结果之差很小。     

半导体激光经纬仪光电自准直测角当量的标定

采用半导体激光器作光源、线阵ＣＣＤ作光电传感器研制了一台全新的、适于野外使用的半导体激光经纬仪。ＣＣＤ光电自准直测角零位及当量的标定,直接关系到仪器的精度,我们采用一种简便、易实现的方法对ＣＣＤ自准直测角零位及当量进行了标定,并给出了标定结果。     

新型高精度激光干涉小角度测量仪的研究

在分析小角度测量基本原理和特点的基础上，介绍了光波干涉小角度测量的方法和一种新型双参考镜激光干涉小角度测量仪的测角原理，功能特点及具体应用方法。     

激光两座标测量仪

本文扼要介绍最近研制的激光两座标测量仪的主体结构、所采用的基本干涉测长系统、以及由此演变而来的可补偿阿贝原则误差的干涉系统、小角度干涉仪、空气折射率干涉仪等共四种干涉系统。还介绍了为提高仪器导轨运动精度而采用的工作台运动的小角度和直度误差的随机检测和伺服校正系统,以及测头沿横向运动的直度检测和修正系统。对应用激光干涉测长中使用的细分和单位变换方法及两座标定位测头也作了简单介绍。     

Uncertainties in Small-Angle Measurement Systems Used to Calibrate Angle Artifacts

We have studied a number of effects that can give rise to errors in small-angle measurement systems when they are used to calibrate artifacts such as optical polygons. Of these sources of uncertainty, the most difficult to quantify are errors associated with the measurement of imperfect, non-flat faces of the artifact, causing the instrument to misinterpret the average orientation of the surface. In an attempt to shed some light on these errors, we have compared autocollimator measurements to angle measurements made with a Fizeau phase-shifting interferometer. These two instruments have very different operating principles and implement different definitions of the orientation of a surface, but (surprisingly) we have not yet seen any clear differences between results obtained with the autocollimator and with the interferometer. The interferometer is in some respects an attractive alternative to an autocollimator for small-angle measurement; it implements an unambiguous and robust definition of surface orientation in terms of the tilt of a best-fit plane, and it is easier to quantify likely errors of the interferometer measurements than to evaluate autocollimator uncertainty.     

100 mm一等量块自动测量仪测量不确定度评定

分析了100mm一等量块自动测量仪的误差来源，确定了测量量块的合成标准不确定度和扩展不确定度。     

Measurement of Gage Blocks on a Kosters Interferometer

Computational modeling has been employed to study how the uncertainty in the estimate of a fractional part of an interference order affects the results of gage block measurements with a Kosters interferometer at different values of the standard uncertainty for the fractional-order measurements. The statistical characteristics of the standard uncertainty of the distribution function for deviations of the measured results from the true value have been estimated at different values of the standard uncertainty of the fractional-order measurements.     

A new refractometer by combining a variable length vacuum cell anda double-pass Michelson interferometer

A new refractometer with a variable length vacuum cell has been developed to eliminate errors caused by deformations in optical windows of the cell. The refractive index of air is determined by measuring the changes in the optical path difference between the air of interest and a vacuum as a function of the changes in the cell length. An optical phase modulation technique and a dark fringe detection method are used to obtain a high resolution in measuring the optical path difference by a double-pass Michelson interferometer. A combined standard uncertainty of 5×10^-9 in the measurement of the refractive index of air has been achieved     

二等量块标准装置不确定度评定

以二等标准量块做标准器、接触式干涉仪为比较仪检定三等量块时，标准装置不确定度评定。     

Inline fiber-optic polarization analyzers for sensor application

Theoretical and experimental investigations of a new type of inline fiber-optic polarization analyzer are described in this paper. The discussed devices are based on a polarimeter, as well as a Sagnac interferometer configuration, and give the possibility to detect the full polarization changes. Detection of the polarization state as well as its degree in real time by the systems containing a standard single-mode fiber and application of appropriate modulation technique is a new property of the arrangement. The comparison of the described systems based on experimental device investigation is also presented in this paper.     

Accurate wavelength meter for cw lasers

An accurate wavelength meter (wavemeter) for cw lasers has been developed. The wavemeter is a Michelson-type fringe-counting two-beam interferometer operated in vacuum. A multicoincidence fringe counting technique has also been developed by which fringe fractions are determined with an uncertainty of 1/500 of a fringe. The result of wavelength comparisons between 612- and 633-nm I2 stabilized He-Ne lasers showed good agreement with the value recommended by CIPM 1983. The discrepancy was <4 x 10(-10) and the standard deviation of the comparison was 4 x 10(-10).     

用改造后的柯氏干涉仪测量量块中心长度的测量不确定度评定

通过用６３３ｎｍ 短频Ｈｅ－Ｎｅ 激光代替氪灯,提高小数测量的准确度等措施,对常规柯氏干涉仪进行了改造,结果获得测量量块中心长度的标准不确定度为ｕｃ＝ （５．５ｎｍ ）２＋ （８．３×１０－ ８Ｌ）２,大大优于一等量块的最大允许不确定度     

Two-dimensional surface profile imaging technique based on a double-grating frequency shifter

A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 microm for a displacement range of 43 microm. The surface profile of a glass sample with low effective reflectivity was acquired.     

移相干涉技术在活塞外径测量中应用

基于传统接触式测长仪器存在不足,通过对长度干涉仪测量原理方法的分析研究,提出采用移相干涉技术进行瞄准定位的方法,并应用在活塞外径测量系统中.通过实验验证:采用双移相干涉测头结构的活塞外径测量系统,对活塞表面瞄准定位的重复性较好,活塞外径系统测量不确定度达到0.1μm,移相干涉在高精度基准活塞外径测量中成功应用,具有较好的推广价值.