基于压电陶瓷管的三自由度微操作手建模与实验

微操作手是微操作机器人的重要组成部分，文章把压电扫描器的工作原理应用于微操作手的设计中，研制出压电陶瓷管驱动的三自由度微操作手，实现了机构、驱动、检测一体化设计，通过对四分压电陶瓷管的变形进行静力学分析，建立了微操作手微位移量与驱动电压的关系，修正了用几何法建立的公式，并通过实验对公式进行了验证。     

3-DOF并联机器人程控驱动电源研制

压电陶瓷驱动电源是压电陶瓷应用中的重要部件。采用分立元件组成高压放大电路,结合16位SPCE061A单片机,利用软件做数字式半闭环控制,研制开发了3自由度(3-DOF)并联机器人用压电陶瓷驱动器驱动电源,并介绍了驱动电源的组成及工作原理。通过软件算法实现了电源高精度可程控的设计目标,弥补了放大单元及压电陶瓷特性上的缺陷。     

压电陶瓷驱动并联微动机器人位姿测量与误差补偿

设计了一套针对六自由度微动并联机器人的位姿测量机构,并在压电陶瓷的开环与闭环控制状态下进行了位姿测量。实验证明,通过对压电陶瓷的闭环控制可消除压电陶瓷的迟滞与蠕变,系统定位误差明显减小,使用微位移循环修正法深入进行误差分析,确定初始误差,在此基础上,提出了误差补偿的方法,并验证了其可行性．     

压电陶瓷管驱动三自由度微操作手的研究与应用

基于机构、驱动、检测一体化的设计思想，研制出压电陶瓷管驱动的三自由度微操作手，研究了微操作手的建模、驱动与位置检测，给出了静力学建模公式，研制出双极性压电陶瓷驱动电源、微位移检测电路，并构成高精度位置闭环控制系统，实现了纳米级微动定位。最后以微操作手为核心构成微操作机器人系统，通过微操作手的微动调整，成功完成了直径为Φ0.2mm轴孔零件的微装配任务。     

微定位仿生机器人的设计与实验研究

根据尺蠖运动原理设计了一种新型微定位仿生运动模块．以压电陶瓷作为驱动元件．柔性铰链为导向机构，实现大范围移动和高精度定位。采用模块化设计思想，将两个运动模块集成，研制成功两维微定位仿生运动机器人。研制压电陶瓷驱动双重杠杆放大的刻字作业工具，并与微定位机器人结合实现了光盘表面的刻字作业，验证了系统的有效性。     

小型舞蹈机器人的驱动系统设计

介绍了某型舞蹈机器人驱动系统的硬件设计过程，讨论了该系统中驱动信号的隔离以及驱动器件的选择原则，同时给出了舵机驱动、直流电机驱动以及稳压二极管并联型稳压电路的设计方法。     

压电驱动三支链六自由度微动机器人机构设计

为简化6支链并联微动机器人结构、减小其装配误差,提出了压电陶瓷驱动的3支链6自由度并联微动机器人结构。采用整体式下平台和3条两端带有柔性球铰链和单轴直圆柔性铰链的支杆,使结构紧凑并有利于提高精度。在分析逆解的基础上,根据工作空间要求设计了整体尺寸。根据柔性铰链选取原则,对直角平板和支杆处柔性铰链进行尺寸选择,采用有限元分析对整体刚度进行分析和安全校验。样机测试结果表明了设计的可行性。     

基于压电陶瓷驱动的微操作手研究现状

微操作手是微操作机器人的重要组成部分 ,首先介绍了国内外研制的几种典型微操作手。在此基础上 ,对于微操作手的关键技术 ,从机构、驱动、传感、检测几个方面进行了论述 ,在机构上 ,介绍了微位移定位机构的特点 ;在驱动方式上 ,论述了压电陶瓷的驱动方法 ;在微位移检测上 ,介绍了几种纳米微位移检测手段。最后 ,阐述了微操作手的发展趋势 :微型化、集成化、智能化 ,达到纳米级或更高的定位精度     

基于压电陶瓷驱动的微操作手研究现状

微操作手是微操作机器人的重要组成部分,首先介绍了国内外研制的几种典型微操作手.在此基础上,对于微操作手的关键技术,从机构、驱动、传感、检测几个方面进行了论述,在机构上,介绍了微位移定位机构的特点;在驱动方式上,论述了压电陶瓷的驱动方法;在微位移检测上,介绍了几种纳米微位移检测手段.最后,阐述了微操作手的发展趋势:微型化、集成化、智能化,达到纳米级或更高的定位精度.     

基于压电陶瓷驱动的微操作手研究现状

微操作手是微操作机器人的重要组成部分，首先介绍了国内外研制的几种典型微操作手。在此基础上，对于微操作手的关键技术，从机构、驱动、传感、检测几个方面进行了论述，在机构上，介绍了微位移定位机构的特点；在驱动方式上，论述了压电陶瓷的驱动方法；在微位移检测上，介绍了几种纳米微位移检测手段。最后，阐述了微操作手的发展趋势：微型化、集成化、智能化，达到纳米级或更高的定位精度。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.