医用不锈钢表面沉积类金刚石薄膜的电化学腐蚀性能研究

医用316L不锈钢植入物植入体内后,体内环境可导致其产生腐蚀和Ni离子的析出。利用双放电腔微波等离子体源全方位离子注入设备,采用等离子体源离子注入(plasmasourceionimplantation,PSII)和等离子体增强化学气相沉积(plasmaenhancedchemicalvapordeposi tion,PECVD)复合工艺在医用316L不锈钢表面沉积类金刚石薄膜,进行表面改性,以提高其在模拟体液环境中的腐蚀阻抗。扫描电子显微镜和原子力显微镜观察发现,薄膜由纳米粒子构成,膜层连续光滑。电化学腐蚀测试表明:采用PSII+PECVD复合工艺制备的类金刚石薄膜与316L不锈钢改性体系在(37±1)℃的Troyde’s模拟体液中的自腐蚀电位约为120mV,体系的击穿电位超过1.9V,与基体316L不锈钢相比,其热力学稳定性与抗腐蚀性能得到增强,改性效果优于单独的PECVD工艺。     

热等离子体雾态气化制备薄膜技术

热等离子体雾态气化制备薄膜技术(mist plasma evaporation, MPE)以液态源物质溶液为先体,采用超声雾化将先体溶液雾化为细小液滴,用载气将雾化液滴输运到射频感应热等离子体中,利用热等离子体的超高温,将液滴中的源物质彻底气化和分解为其组分粒子,通过气相输运,最终在基片上沉积薄膜.MPE制备薄膜技术采用单一先体溶液,源物质来源广泛,沉积速率快,不需后续热处理.本文介绍了MPE制备薄膜技术原理及工艺,综述了近年来在制备薄膜方面的研究进展.     

金刚石薄膜的表面成分和形貌对表面能的影响

采用微波等离子体化学气相沉积法制备了(111)面和(100)面金刚石薄膜。测量了金刚石薄膜与液体的接触角、金刚石薄膜表面粗糙度和电阻率。通过扫描电镜、X射线衍射、X射线光电子能谱研究了金刚石薄膜的表面纯度和形貌等对表面能的影响。结果表明:金刚石纯度越高、表面粗糙度越大、晶粒尺寸越小,其表面能越大。经过空气等离子体后处理的金刚石薄膜的纯度和亲水性明显提高。随着在空气中放置时间的增加,亲水性逐渐减弱。在空气中放置相同时间,O2等离子体后处理的金刚石薄膜比H2等离子体后处理的金刚石薄膜亲水性好。     

光学玻璃上HFCVD法沉积金刚石膜的实验研究

采用热丝化学气相沉积(HFCVD)技术在石英玻璃上成功制备出高质量金刚石膜.采用表面三维轮廓仪和傅立叶红外光谱仪测试了不同工艺条件下金刚石薄膜的表面粗糙度和红外透射率,并分析了测试结果.结果表明所制备的金刚石膜表面平整,红外透射性能良好.     

二氧化硅基波导薄膜的制备方法

本文总结了目前制备二氧化硅基波导薄膜的各种制备工艺,包括广泛采用的等离子增强化学气相沉积法(PECVD)和火焰水解法(FHD)以及低压化学气相沉积法、溅射法、离子交换法、离子注入法和溶胶—凝胶法等制备方法,并对各种工艺的原理、特点和应用现状进行了详细的介绍。     

基于富勒烯液态源的超纳米晶金刚石薄膜生长

通过微波等离子体化学气相沉积技术(MWPCVD),以富勒烯(C60)甲苯饱和溶液为碳源,用载气携带的方式通入反应腔中生长金刚石膜。Raman光谱、SEM和AFM表征结果表明得到的超纳米晶金刚石薄膜相组成纯度较高,其平均晶粒尺寸约为15 nm,表面粗糙度为16.56 nm,薄膜平均生长速率约为0.6μm/h。此方法较其他以C60为碳源生长超纳米晶金刚石薄膜的方法更为简便,且容易控制富勒烯碳源的浓度,沉积速率更高,是一种新型的制备超纳米晶金刚石薄膜的可控工艺方法。     

Growth of ultra-nanocrystailine diamond thin films based on liquid source containing fullerenes

通过微波等离子体化学气相沉积技术(MWPCVD),以富勒烯(C60)甲苯饱和溶液为碳源,用载气携带的方式通入反应腔中生长金刚石膜.Raman光谱、SEM和AFM表征结果表明得到的超纳米晶金刚石薄膜相组成纯度较高,其平均晶粒尺寸约为15nm,表面粗糙度为16.56nm,薄膜平均生长速率约为0.6 μm/h.此方法较其他以C60为碳源生长超纳米晶金刚石薄膜的方法更为简便,且容易控制富勒烯碳源的浓度,沉积速率更高,是一种新型的制备超纳米晶金刚石薄膜的可控工艺方法.     

二氧化硅基波导薄膜的制备方法综述

总结了目前制备二氧化硅基波导薄膜的各种制备工艺，包括广泛采用的等离子增强化学气相沉积法（PECVD）、火焰水解法（FHD）、低压化学气相沉积法、溅射法、离子交换法、离子注入法和溶胶-凝胶法等制备方法，并对各种工艺的原理、特点和应用现状进行了详细的介绍。     

圆柱形衬底金刚石涂层的制备与表征研究

采用偏压增强热丝化学气相沉积法(BE-HFCVD),以WC-Co硬质合金圆柱体为衬底沉积金刚石薄膜.研究了提高金刚石薄膜形核密度和涂层附着力的新型复合衬底预处理方法,研究结果表明,采用新型复合衬底预处理工艺后,衬底表面凸凹不平,粗糙度达到366nm,相比未采用预处理工艺的表面粗糙度94.5nm,可以大大提高金刚石形核密度,并且处理后钻的成分含量从6%减低到0.4%,在很大程度上提高了金刚石涂层与村底之间的附着强度.研览结果还表明制备的金刚石涂层均匀且具有较好的表面质量.     

类金刚石薄膜对Low-E膜系的保护作用分析

采用射频等离子体增强化学气相沉积法(RF-PECVD),在Low-E玻璃表面沉积类金刚石(DLC)薄膜作为保护层,通过耐洗刷试验和耐酸腐蚀试验研究了DLC薄膜对Low-E膜系的保护作用;同时对镀DLC薄膜的Low-E玻璃进行热处理,研究热处理后Low-E玻璃膜层结构、低辐射性能和光学性能的变化;然后通过摩擦磨损实验对镀DLC膜提高Low-E玻璃耐洗刷的原因进行分析。结果表明:DLC膜能够有效提高Low-E玻璃耐洗刷性和耐酸腐蚀性;并且DLC膜可以通过热处理去除,且热处理后的Low-E低辐射性能和光学性能未受到影响;一定厚度DLC膜能够有效降低Low-E玻璃摩擦系数,是提高Low-E玻璃耐磨性的主要原因。     

Deposition of diamond-like carbon coatings: Conventional to non-conventional approaches for emerging markets

Diamond-like carbon (DLC) coatings are recognized for a broad range of industrial applications due to their superior mechanical properties such as high hardness, low friction, and promising wear resistance. DLC coatings are commonly produced with physical vapour deposition (PVD) and plasma-enhanced chemical vapour deposition (PECVD) methods. New DLC markets are emerging in electronics, biomedical, additive manufacturing and textiles sectors with industrial transformations. The conventional PVD and PECVD methods may have limited usage for depositing emerging DLC products due to their elevated thermal and high vacuum environment, lack of localized deposition function, and production throughput restrictions.This review begins by briefly describing DLC coatings background, the volume of research outcomes and the global revenue in the past decade and projections for the future. DLC structural designs made with conventional deposition methods and corresponding operational parameters are then discussed in detail and enhancement in conventional methods to improve DLC coating quality and to resolve unaddressed problems are summarized. The emerging DLC applications and potential of non-conventional methods to produce DLC coatings are critically analysed with specific attention to scientific, technological and economical aspects. Representative investigations suggest that DLC coatings can be produced with hardness values up to ~20 GPa using dielectric-barrier-discharge deposition, hydrophobicity up to ~167° with electrospray assisted plasma jet coating, high deposition rates up to ~6 μm/min with microwave resonator deposition, and critical load of ~30 N with a friction coefficient of ~0.1 when deposited with the plasma gun technique. The review concludes by recommending systematic investigations to optimize geometric and operational parameters of non-conventional DLC deposition methods which can produce high-quality DLC coatings at low temperatures and atmospheric pressures with scalability to meet emerging market demands.     

A 400 μm thickness diamond-like carbon preparation

A 400 μm thick diamond-like carbon (DLC) film was prepared on an aluminum alloy (A5052) substrate by a hybrid process of plasma-based ion implantation and deposition using toluene as a precursor gas. The plasma-based ion implantation during deposition relaxed the residual stress in DLC film to almost 0, indicating the production of stress-free DLC. The carbon ion implantation from the methane and acetylene plasmas to the substrate surface, prior to deposition, resulted in an interface graded in carbon composition as well as the formation of amorphous-like structure at the carbon ion-implanted layer that should work as a buffer for stress-relaxation. As a result, a supra-thick DLC film more than 400 μm in thickness was prepared on the substrate.     

Electrochemical behavior of diamond-like-carbon coatings deposited on AlTiC (Al2O3 + TiC) ceramic composite substrate in HCl solution

The electrochemical characterization/corrosion behavior of diamond-like carbon thin films is worthwhile to study and needed in the field (as there has been limited comprehensive evaluation of this across all types of DLC in the literature). In this paper, newly developed tetrahedral amorphous carbon (ta-C) and hydrogenated amorphous carbon (a-C:H) films, prepared by filtered cathodic arc deposition (FCVA) and plasma enhanced chemical vapor deposition (PECVD) respectively were deposited over AlTiC (Al₂O₃ + TiC) ceramic composite substrate. Electrochemical impedance spectroscopy (EIS) and polarization measurements have been used to evaluate the coating performance in 2 M HCl solution. This ceramic substrate is used widely for the hard disk drives and read and write heads in computer. The memory of the hard disks can be increased by improving the surface quality and decreasing the pinholes. The DLC coatings were modified under different preparation conditions by changing the nitrogen-doping ratios as an attempt for improving the surface distribution and minimizing the surface coating defects.     

Low friction and protective diamond-like carbon coatings deposited by asymmetric bipolar pulsed plasma

Diamond-like carbon (DLC) thin films have been prepared at room temperature by plasma-enhanced chemical vapour deposition (PECVD) using pulsed-DC power and CH₄ as precursor. Tribological tests of these DLC films have been carried out with a nanotribometer and a calotest instrument adapted for wear measurements. Friction coefficients ranged from 0.15 to 0.20, which differ from values obtained by other techniques. In this study we have systematically measured the abrasive wear rate and friction coefficient of DLC films deposited at different conditions (pulse frequency and peak voltage), and we have discussed the results in terms of DLC structure and surface morphology. These films could find application as ultrathin anti-friction and anti-wear protective coatings, hydrophobic coatings, gas diffusion barriers and dielectric layers in electronic devices.     

Effect of gold oxide incorporation on electrochemical corrosion resistance of diamond-like carbon

Gold oxide nanoparticles were incorporated into diamond-like carbon (DLC) films in order to improve protection of AISI-1020 from electrochemical corrosion. The AuO_x:DLC films were prepared by plasma enhanced chemical vapor deposition and were subsequently characterized by scanning electron microscopy, Raman spectroscopy and electrochemistry measurements. The electrochemical corrosion performance of the AuO_x:DLC coating was contrasted to AISI-1020 and DLC without AuO_x coating. The electrochemical techniques that were utilized for this investigation were potentiodynamic and electrochemistry impedance spectroscopy. The electrochemical analysis indicated that AuO_x:DLC films presented superior corrosion resistance as compared to DLC. This resulted in 99.8% and 96.8% protection efficiency respectively, when compared to AuO_x:DLC and DLC coatings.     

Antibacterial activity of DLC and Ag–DLC films produced by PECVD technique

Diamond-like carbon (DLC) films have been the focus of extensive research in recent years due to its potential application as surface coatings on biomedical devices. Doped carbon films are also useful as biomaterials. As silver (Ag) is known to be a potent antibacterial agent, Ag–DLC films have been suggested to be potentially useful in biomedical applications. In this paper, DLC films were growth on 316L stainless steel substrates by using Plasma Enhanced Chemical Vapour Deposition (PECVD) technique with a thin amorphous silicon interlayer. Silver colloidal solution was produced by eletrodeposition of silver electrodes in distilled water and during the deposition process it was sprayed among each 25 nm thickness layer DLC film. The antibacterial activity of DLC, Ag–DLC and silver colloidal solution were evaluated by bacterial eradication tests with Escherichia coli (E. coli) at different incubation times. With the increase of silver nanoparticle layers in Ag–DLC, the total compressive stress decreased significantly. Raman spectra showed the film structure did not suffer any substantial change due to the incorporation of silver. The only alteration suffered was a slightly reduction in hardness. DLC and Ag–DLC films demonstrated good results against E. coli, meaning that DLC and Ag–DLC can be useful to produce coatings with antibacterial properties for biomedical industry.     

Nanotribology of silver and silicon doped carbon coatings

Amorphous hydrogenated carbon coatings a-C:H become very popular materials mainly because of their excellent properties such as low coefficient of friction, high hardness, good anti-wear and corrosion properties. More and more often are carried works aimed at improvement of biocompatibility and adhesion of bacterial cells by doping diamond-like carbon (DLC) coating with third element. Among them recently a great majority is devoted to carbon coatings doped with silver or silicon. The presence of silver in the coating ensures protection of the implant against the disadvantageous influence of bacteria and fungi causing biofilm associated infections, local inflammation and other implant-tissue reactions. Incorporation of silicon promotes osteointegration and leads to the enhancement of mechanical and tribological properties of the coating, which is beneficial for biomedical applications.Silver and silicon incorporated DLC coatings were prepared by a hybrid Radio Frequency Plasma Assisted Chemical Vapor Deposition/Magnetron Sputtering deposition technique on AISI316L substrates. Obtained coatings were characterized in terms of morphology, surface topography and mechanical properties. Tribological properties of the coatings were measured by lateral force microscopy and reciprocating sliding test using nanoindenter.     

Influence of a hard transition layer on the microstructure and properties of diamond-like carbon/hydroxyapatite composite coating prepared by magnetron sputtering

The nanostructured diamond-like carbon/hydroxyapatite composite coating (DLC/HA) was deposited using magnetron sputtering technique with a densely packed columnar cross-sectional structure and a uniform granular surface morphology. After heat treatment, the amorphous structure of the coating was transformed into a crystal structure. Nanohardness and scratch tests results demonstrated the DLC transition layer significantly enhanced the nanohardness of Ti6Al4V substrates from 4.8 GPa to 10.4 GPa, and increased critical load from 16.6 N (pure HA layer) to 26.5 N (DLC layer) without obvious brittle fracture, flaking and delamination. Electrochemical and immersion tests results demonstrated that DLC/HA composite coatings with a dense gradient transition interlayer had better corrosion resistance and could prevent harmful metal ions being released into the SBF solution more effectively than single HA coatings. Furthermore, active Ca²⁺ ions can be rapidly released from the coating surface during initial immersion in the SBF solution, and facilitated the formation of bone-like apatite.     

Influence of plasma nitriding treatment on the adhesion of DLC films deposited on AISI 4140 steel by PVD magnetron sputtering

Duplex surface treatments composed of diamond like carbon (DLC) coating followed by plasma nitriding have drawn attention for a while. In this study, AISI 4140 steel substrates were plasma nitrided at different treatment temperatures and times. Then, DLC films were deposited on both untreated and plasma nitrided samples using PVD magnetron sputtering. The effect of different plasma nitriding temperatures and times on the structural, mechanical and adhesion properties of DLC coatings was investigated by XRD, SEM, microhardness tester and scratch tester, respectively. It was found that surface hardness, intrinsic stresses, layer thickness values and phase distribution in modified layers and DLC coating were the main factors on adhesion properties of duplex coating system. The surface hardness and residual stress values of AISI 4140 steel substrates significantly increased with both DLC coating and duplex surface treatment (plasma nitriding + DLC coating). Increasing plasma nitriding temperature and time also increased the diffusion depth and the thickness of modified layers. Hard surface layers led to a significant improvement on load bearing capacity of the substrate material. However, it was also determined that the process parameters, which provided lower intrinsic stresses, improved the adhesion properties of the duplex coating system.     

A comparative study on the synthesis and properties of suspension and solution precursor plasma sprayed hydroxyapatite coatings

In the present study, hydroxyapatite (HAp) coatings were deposited on Ti-6Al-4V alloy by solution precursor plasma spray (SPPS) and suspension plasma spray (SPS) processes and the properties of the coatings were compared. The feedstock powder for SPS method was prepared by coprecipitation technique and characterized for phase and morphology. The obtained HAp coatings were characterized by X-ray diffractometry, Raman spectroscopy and FT-IR spectroscopy. The biocompatibility of the coatings was evaluated using osteoblast like cells. Both the SPS and SPPS hydroxyapatite coatings exhibited similar crystallinity. Interestingly, the HAp-SPS coating showed marginally higher biocompatibility compared to HAp-SPPS and control samples. The wear and corrosion behavior of these coatings was also studied in Hanks' medium. The hydroxyapatite coating fabricated from SPS technique exhibited better corrosion and wear resistance compared to SPPS coating.