微能源发展概述

产品小型化、微型化、集成化是当今技术发展的大趋势,能源供应已成为制约产品微型化技术发展的瓶颈,其微型化问题受到广泛的重视。结合目前国内外微能源的发展现状,分别介绍了微太阳能电池、同位素微能源和基于卡门涡街的压电微能源等几种典型的微能源,并展望了微能源的发展趋势和应用前景。     

微压电式振动能量采集器的研究进展

给出了微压电式振动能量采集器的基本工作原理和物理模型。按照压电单元结构类型的不同,将其分为单一的直线型悬臂梁、直线型悬臂梁阵列、L型悬臂梁和圆形压电膜,分别讨论了各种类型的微压电振动能量采集器的优缺点。详细介绍了国内外各研究小组研制的微压电式振动能量采集器的结构参数、性能及其应用现状,分析针对目前研究中存在的问题,指出如果能在分析建模、压电结构及压电材料优化方面取得实质性进展,微压电振动能量采集器作为新型供能设备在MEMS系统和低功耗无线传感网络中的应用将会具有更加诱人的前景。     

PZT压电薄膜在MEMS中的应用

从MEMS应用的角度介绍了PZT压电薄膜的制备、集成工艺与压电系数的测量,并给出了压电薄膜在MEMS中的应用实例。     

压电微悬臂有原子力显微镜中的应用

微悬臂是原子力显微镜中最重要的部件之一。用压电微悬臂代替常用的Ｓｉ、ＳｉＯ２或Ｓｉ３Ｎ微悬臂后的原子力显微镜有一定独特的优点。由于压电微悬臂中的压电薄膜具有压电效应，因此它既可致动微悬臂，又可探测微悬臂的位移量，使得原子力显微镜的结构简单、响应速度快、扫描速度加快．文中简要介绍了压电微悬臂的制作过程，分析了压电微悬臂在原子力显微镜中的各种应用及相应的原子力显微镜的工作原理和有关结果，并与普通原子力     

基于压电材料的振动能量回收技术现状综述

随着微机电系统(MEMS)技术的迅猛发展,基于压电振动的能量回收技术可以为MEMS提供电能,受到国内外众多学者的关注。该文介绍了压电式振动能量回收装置的工作机理;分别从能量回收装置的结构和材料、能量转化的接口电路、能量的存储技术、能量回收的应用实例等方面系统的介绍国内外的主要研究成果和研究进展;并对压电振动能量回收技术的发展方向进行了预测。     

压电双晶片驱动的压电微泵的研究

介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,利用双面湿法腐蚀形成被动阀,并利用压电双晶片作为驱动部件。对压电双晶片的理论变形量和压电微泵的泵腔变化量、泵腔压缩比进行了理论分析,并对其输出流量进行了测试。在100 V、20 Hz的方波驱动下,该压电微泵的最大输出流量为317μL/min。结果显示该压电微泵的制作工艺简单,具有良好的流体驱动性能。     

压电膜片的优化设计及在微泵中的应用

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一。该文采用ANSYS有限元软件对压电膜片结构参数和在微执行器上的装配方法进行了优化设计,得到PZT/Si,PZT/Cu压电膜片结构的优化数据,将其应用于有阀微泵的研制。经测试,微泵压电驱动效果与仿真结果一致,微泵背压可达836 Pa,流量达1.4 mL/min。     

管道微机器人中压电执行器的研究

微执行器作为微机械系统的核心单元,一直是微机械发展关键。文章介绍了一种应用于管道微机器人的足式压电执行器。在交变电压作用下,该压电执行器将压电体的弯曲振动转化成其弹性足沿管壁的移动,从而实现执行器的运动。在分析其工作原理的基础上,研制了压电微执行器的驱动电源,并进行了简单的实验研究。研究表明该执行器具有结构简单,易于微型化,响应快,驱动方便等特点。     

无阀压电微泵的动态特性研究

微泵作为微流控系统中的核心控制元件已成为MEMS研究的热点，现主要研究了无阀式压电微泵的工作原理及其动态工作特性。实验表明，无阀压电微泵的流速随频率呈抛物线关系变化，最佳工作频率为1250Hz。在频率固定时，微泵流速随驱动电压的升高而增加。泵膜的厚度对于微泵的性能影响很大，相同条件下，较薄的泵膜具有更高的流速，且泵膜越薄，其性能对于频率的变化越敏感。电压为50V时，微泵最大流量可达1．695μL/min。总体看来，无阀压电微泵结构简单，驱动电压较低，性能稳定可靠。     

振动式微型发电机的研究现状与发展趋势

微能源具有体积小,重量轻等特点,是军民两用高新技术发展的迫切需求,已成为近年来MEMS领域的一个重要发展方向。微能源主要分为微型电池和微型发电机两大类。本文着重介绍基于MEMS技术的微型发电机的研究现状和通过振动实现能量转换的发电机系统及其电磁式、静电式和压电式三种主要实现方法,指出了微型发电机的发展趋势。     

On low-frequency electric power generation with PZT ceramics

Piezoelectric materials have long been used as sensors and actuators, however their use as electrical generators is less established. A piezoelectric power generator has great potential for some remote applications such as in vivo sensors, embedded MEMS devices, and distributed networking. Such materials are capable of converting mechanical energy into electrical energy, but developing piezoelectric generators is challenging because of their poor source characteristics (high voltage, low current, high impedance) and relatively low power output. In the past these challenges have limited the development and application of piezoelectric generators, but the recent advent of extremely low power electrical and mechanical devices (e.g., MEMS) make such generators attractive. This paper presents a theoretical analysis of piezoelectric power generation that is verified with simulation and experimental results. Several important considerations in designing such generators are explored, including parameter identification, load matching, form factors, efficiency, longevity, energy conversion and energy storage. Finally, an application of this analysis is presented where electrical energy is generated inside a prototype Total Knee Replacement (TKR) implant.     

MEMS热膜式微型流量传感器的研制

针对微型流量传感器的应用问题,提出了一种可以准确测量各种气体微型流量、基于MEMS工艺的新型MEMS热膜式传感器。基于热量传递原理的热膜式流量传感器由一个加热器和一对微型温度传感器组成,只要测得两个温度传感器的温度差值,就能得到气体的流量。分析了该器件的原理并进行了ANSYS仿真,设计了器件的结构,进行MEMS工艺开发,制作出可实用化的产品。测试表明,该器件的测量量程达到0.5～200m3/h,精度1.5级,响应时间20ms,量程比1:400,显示该器件测量流量的功能达到了实用化水平。     

直激式压电风力发电机的结构及其特性

随着无线传感网络技术的日趋成熟及其在环境监测等领域应用的普及,为其供电的微小型流体发电机研究受到国内外学者的广泛关注,其中利用压电进行风能回收已成为一个研究热点。首先,介绍了现有压电风力发电机的优势、特点及适用场合;其次,重点对直激式压电风力发电技术的发展概况与研究进展进行了分析与总结,归纳了直激式压电风力发电机的主要结构、基本原理、特性及应用情况;最后指出目前直激式压电风力发电机以梁式结构为主,振动方式以颤振和弛振为主,且缺乏统一的数学模型,以及现有的发电机存在结构可靠性低、稳定性较差等问题。以宽频带、高可靠性和集群布置为进一步发展趋势,以期推动直激式压电风力发电机的进一步发展与应用。     

MEMS微加速度与微角速率集成传感器的研制

介绍了一种全新的MEMS微型惯性器件,该器件是一种基于热对流原理的热膜式传感器,它利用一个单敏感元件同时测量加速度和角速率。该器件由一个加热器和两组微型温度传感器组成,加热器加热气体形成的热对流气体作为敏感元件,该器件通过微型温度传感器测得的热对流气体的温度差实现加速度和角速率的测量。分析了器件的工作原理,根据仿真结果设计了双层的器件结构,进行了工艺开发,加工出了原理样机。测试表明:该器件同时具备了加速度传感器和角速率传感器的检测功能,很好地验证了设计的可行性。     

低功耗电阻型MEMS半导体气体传感器研究进展北大核心

电阻型MEMS半导体气体传感器在环境空气质量监测和有毒有害气体检测等领域得到了广泛应用，但是受限于功耗较高的原因，这类传感器难以广泛应用于便携式气体检测系统。文章综述了近年来低功耗电阻型MEMS半导体气体传感器的研究进展，分别从气敏材料、传感器结构和传感器模组的集成电路等方面探讨如何实现低功耗的电阻型MEMS半导体气体传感器的制备，并展望低功耗的电阻型MEMS半导体气体传感器未来的发展方向。     

Design and implementation of capacitive proximity sensor usingmicroelectromechanical systems technology

This paper presents an innovative proximity sensor using microelectromechanical systems (MEMS) technology. The proximity sensor works on the principle of fringe capacitance. The target object does not need to be part of the measuring system and could be either a conductor or nonconductor. Modeling of the proximity sensor is performed and closed-form analytical solution is obtained for a ring-shaped sensing pattern. The proximity sensors could be batch fabricated using MEMS technology, and the fabrication process is relatively simple. Measurement of the prototype sensors revealed promising results. The size of the proximity sensor could vary from a few hundred micrometers to the size of the substrate. The flexibility on sensor size, sensing patterns, and sensing pattern geometrical parameters makes the sensor very versatile and capable of precision measurement of proximity in the range from micrometers to centimeters. The small size of the sensor makes it possible to surface mount the sensor in many space-constrained places. This advantage is vital in many areas, such as MEMS, microrobotics, precision engineering, machine automation, inspection tools, and many other applications. The ability of the proximity sensor in measuring relative permittivity of materials also finds the sensor useful applications in biomedical and tissue engineering. In addition, this micro proximity sensor is an ideal building block for many other types of sensors, such as force, tactile, and flow sensors     

Piezoelectric Nanogenerators Derived Self-Powered Sensors for Multifunctional Applications and Artificial Intelligence

With the arrival of the Internet of Things (IoTs) era, there is a growing requirement for systems with many sensor nodes in a variety of fields of applications. The demands for wireless, sustainable and independent operation are becoming more and more important for large-scale sensor networks and systems. For these purposes, a self-powered sensory system that can utilize the self-harvested energy from its surroundings to drive the sensors and directly sense external stimuli has attracted great attention. The invention and rapid development of piezoelectric generators (PENGs), which take Maxwell's displacement current as the driving force, has been pushing forward research on self-powered active mechanical sensors, electronic skins, and human-robotic interaction. Here, this review starts with a brief introduction of piezoelectric materials, fabrication, and performance improvement. Then, the energy harvesters used for self-power systems based on recent progress are reviewed. After that, PENGs applications toward recent self-powered active sensors are divided into four aspects and highlighted, respectively. Moreover, some challenges and future directions for the self-powered multifunctional sensors are put forward. It is believed that through the continuous investigations into PENG-based self-powered active sensors, they will soon be used in touch screens, electronic skins, health care, environmental monitoring, and intelligence systems.     

基于微尺度压电振动发电机的微电源设计

为弥补传感器网络传统供电存在的不足,该文设计了一种基于微尺度压电发电机的微电源,其可有效拾取周围环境中的振动能量,从而为低功耗的传感器系统提供电能。该电源由具有微尺度效应的微振动发电机与外部高效的无源峰值监测开关电路集成而得,结合Matlab仿真分析可知,其输出电压可达0.24V;无源峰值监测开关电路能保证压电片间电荷的全部输出,与具有经典接口的微电源相比其输出功率提高了3倍。     

用于传感器节点供电的压电振动发电机研究

悬臂梁式压电振动发电机是一种新型的供电装置,可广泛应用于无线传感器网络节点进行供电.首先建立以悬臂梁为结构方式的压电振动换能器的模型;然后从遗传算法和田口稳健设计的理论方法出发,以输出平均功率为优化目标的对换能器进行稳健优化设计;接着以钽电容和稳压二极管为核心设计了换能器的能量收集电路,最后用优化后的参数制成样机进行测试.测试结果证明,该发电机完全能满足功耗为50 μW的传感器节点的使用要求,验证了该研究方案的可行性.     

Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system

A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules: a data acquisition module, a data processing and display module, and a data sharing module. It can detect the power radiation in the environment and the date information can be processed and shared. The measured results show that the thermoelectric MEMS microwave power sensor and the power radiation monitoring system both have a relatively good linearity. The sensitivity of the thermoelectric MEMS microwave power sensor is about 0.101 mV/mW, and the sensitivity of the monitoring system is about 0.038 V/mW. The voltage gain of the monitoring system is about 380 times, which is relatively consistent with the theoretical value. In addition, the low-frequency and low-power module in the monitoring system is adopted in order to reduce the electromagnetic pollution and the power consumption, and this work will extend the application of the thermoelectric MEMS microwave power sensor in more areas.