Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure

This paper proposes a slit-resonant beam based on the double clamped resonant beam theory of silicon micro-machined resonant pressure sensors. The slit structure can enhance surface alternating stress in the root area of beam while vibrating. Finite element method (FEM) is applied to calculate the stress concentration magnification, and we carry out a computational study of the effects of size and location of slit structure in terms of mechanical properties of resonant beam, such as stress concentration on resonant beam and natural frequency of resonant beam, as well as sensing performance, such as resonant beam amplitude sensitivity. Our simulations show that the slit structure could strengthen the stress concentration and increase the amplitude detection sensitivity, and the variations of these parameters can substantially influence the performance of slit structure. The research of stress concentration, caused by silt structure, could provide reference for further optimization and design for the resonant beam.     

Higher resonant mode effect on the performance of piezo actuated 2-DOF rectangular cantilever shaped resonators (2-DOF RCR) for liquid viscosity and density sensing

According to the demand for a highly sensitive resonant sensor, a 2-DOF RCR (2-degrees of freedom rectangular cantilever shaped resonators) with higher resonant mode of vibration is developed for sensing of liquid viscosity and density. The measurement principle is based on tracking the resonant characteristics of 2-DOF RCR system which depends on the density and viscosity of liquids it operates in. The 2-DOF RCR consists of a driver and absorber mass of identical natural frequency with a disparity in mass and connected by a strong mechanical coupling unit, thus the resonant amplitude and resonant frequency is enhanced at 1st mode compared with 1-DOF (1-degree of freedom) system. For further improving the sensitivity performance, the 3rd resonant mode vibration of 2-DOF RCR system is investigated. The system is evaluated for its performance in liquids of viscosity ranging from 0.23 to 1400 mPas and density ranging from 713 to 1261 kg/m³ at 3rd mode and compared with 1st mode of vibration. Good agreement with the simulated results from theoretical model and experimental results is reported and the enhanced performance of 2-DOF RCR system by using higher mode is also confirmed. Compared to the 1st mode, the sensitivity in terms of resonant frequency against density is improved with 22.75 % and 19 % in aqueous based and oil based liquids respectively and the sensitivity in terms of quality factor against viscosity is improved by 22.4 % and 30 % in aqueous and oil based liquids, at 3rd mode of vibration.

     

Miniaturized dual‐band slot antenna design for GPS,amateur radio and WLAN applications

In this article, miniaturization of dual‐band slot antenna design for GPS, WLAN and amateur radio applications is presented. The proposed dual‐band miniaturized antenna is achieved using slits, rectangular split ring and metallic strips fed by 50 Ω microstrip feed. The first resonant frequency is achieved by loading reference antenna with eight slits that is antenna 1 and the second resonant frequency is achieved by loading with one center slits and rectangular split ring that is antenna 2. Dual‐band antenna is achieved by loading reference slot antenna with nine slits and rectangular split ring which resonates at frequency of 1.52 and 3.03 GHz respectively. As a result, it is achieved 53.79% reduction in first band resonant frequency with 76.07% improvement in ?10 dB bandwidth and 7.90% reduction in second band resonant frequency compared to reference slot antenna. Further, this dual‐band antenna is miniaturized by metallic strips which are placed on the bottom of the substrate. This results in 61.39% reduction in first band resonant frequency with 32.07% improvement in ?10 dB bandwidth and 26.13% reduction in second band resonant frequency in comparison with reference slot antenna topology.     

多晶硅双端固支梁高周循环下疲劳特性的分析

多晶硅固支梁是MEMS器件中较常见的可动部件,通过静电激励的方式对其进行疲劳振动加载;所用结构为面外运动结构,为了测试样品的加速疲劳特性,通过在固支梁面内引入缺陷的方式来增大应力水平值;器件在经历了1.72×1011次循环之后,微梁的谐振频率、振动幅度发生了较大偏移,其谐振频率的偏移量达到14.531 kHz,器件性能发生了严重的退化.研究结果表明,利用谐振频率的改变来表征材料性能的退化是一种准确、可行的方法,同时本文进一步分析指出,器件上引入凹槽缺陷的方法确实可起到加速疲劳的作用;可利用此方法制作不同应力水平幅度的结构进行振动载荷疲劳加载实验,从而得到固支梁结构疲劳加速因子.     

A new analytical model of single-stage microleverage mechanism in resonant accelerometer

Microleverage mechanism which is widely applied in microelectromechanical systems (MEMS) transfers and amplifies force or displacement from input to output. In this work, one-stage microleverage mechanism is integrated into a biaxial micro resonant accelerometer to improve sensitivity. Force amplification factor of the microleverage is analyzed and deduced by integral method. The results from theoretical model match well with the ones from finite element method (FEM) simulation, which proves that the proposed model is relatively accurate and the width of lever beam is a quite important parameter in design. The resonant accelerometer is successfully fabricated by MEMS technology. Preliminary experiments are conducted and demonstrate differential sensitivity of 71 Hz/g for the accelerometer with resonant frequency of 267.726 kHz.     

减小临界振幅的机理与试验研究

对于受迫振动系统，当激励频率增加并且通过共振(临界)频率时，系统的振幅将达到其峰值．通过相位调制可以有效地减小共振振幅，其机理是振幅的变化取决于相应和激励之间的相位差，而此相位差可以通过控制激励频率的变化规律进行调制．该方法由受变频率脉冲激励的悬臂梁进行了实验验证．实验结果表明，对于给定的最大频率增加速率，通过相位调制可以将共振振幅减小18％左右．     

静电刚度式谐振微加速度计设计

运用梁的横向振动特性分析了梁振动频率与平行板电容形成的静电刚度的关系,并以此设计了静电刚度式谐振微加速度计。在加速度作用下,检测质量产生的惯性力使电容器极板发生位移来改变电容结构的间隙大小,从而使谐振频率发生变化,通过检测频率变化量来测量输入加速度的大小。根据加速度计的工作原理说明检测过程中梁的机械刚度保持不变,只与产生静电刚度的电容间隙变化相关,减小了检测信号对机械误差与残余应力的依赖性。运用加工参数进行理论计算得出加速度计的灵敏度为21．17Hz／gn,在CoventorWare2005中进行仿真表明：加速度计的固有频率为23．94kHz,灵敏度约为20Hz／gn,与理论设计值相近。     

基于MEMS的参量放大的设计与实现

参量放大效应是一种非线性振动放大效应,利用该效应可以极大地增加MEMS陀螺和加速度计等谐振式传感器的振幅,从而提高谐振式传感器检测灵敏度和信噪比。根据理论分析和有限元仿真结果,设计了一种MEMS参量放大结构。该结构采用SOG工艺加工,在950Pa左右的气压环境下对该结构进行了实验研究,并得到了该结构参激电压、相位与放大倍数之间的关系。实验结果表明：参量放大效应的实测结果与理论分析结果吻合很好,当参数激励电压为5.7V时,参量放大倍数超过50倍,大幅提高了结构的振幅,为以后应用参量放大效应提高MEMS惯性仪表性能提供了一种新方法。     

基于无线传感器网络的压电能量收集技术

随着物联网的发展,多节点的传感器供电成为关键问题,由于环境中普遍存在低频振动,采用了压电悬臂梁结构,建立压电悬臂梁结构的电学模型,并进行了ANSYS的仿真,仿真得到电压76 V,约等于模型的理论值,验证了模型的正确性。进而继续研究了压电悬臂梁几何尺寸对固有频率的影响,振子越长,质量块越长,频率越低。从而收集低频振动环境中的能量,为传感器供电装置提供了设计的理论依据。     

动态轴向载荷下谐振梁振动响应分析

在航空航天飞行控制中,为实现关键参数的高精度高动态测量,急需发展具有快速响应特性的谐振式传感器。谐振式传感器本质上是输入与谐振器振动状态之间的映射。这种映射一般通过跟随输入的轴向载荷调制谐振梁的固有频率实现。高动态应用中的核心问题是动态轴向载荷下谐振梁的振动响应。利用基本的微元力学平衡关系建立了动态轴向力作用下谐振梁振动行为的数学模型。此模型比Mathieu方程的适用面更广,在一般假设下更难以进行解析或数值求解。为此引入了等效电路方法进行模型求解。通过对等效电路的仿真,得到了谐振梁在多种典型动态载荷下的振动响应。动态轴向载荷对于谐振梁的作用具有强烈的非线性和独特的规律,值得进一步深入研究探讨。     

基于BP神经网络的矩形压电振子振动模态区分*

采用BP神经网络,把矩形压电振子的各阶振型位移输入到神经网络中进行训练,提取各阶模态的振型特征,可实现矩形压电振子的共振振幅分布和振动模态阶次的非线性映射,以此区分各个模态。仿真实验结果显示,建立的神经网络模型可以从ANSYS输出的各模态中准确识别出矩形压电振子的B(3,1)模态,对训练样本外的尺寸也有一定的识别效果,表明所建立的BP神经网络可以有效地用于该矩形压电振子的振动模态区分。     

Modeling and Simulation for a Microstructure Silicon Concentrated Force Sensor

Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring concentrated force is established. The relationship between the basic natural frequency of the beam resonator and the concentrated force is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a se...     

Free and forced vibration analysis of viscoelastic damped FG-CNT reinforced micro composite beams

In this paper, free and forced vibration analysis of viscoelastic microcomposite beam reinforced by functionally graded single-walled carbon nanotubes (FG-SWCNTs) is studied using the modified couple stress theory (MCST). The material properties of micro composite beam by generalized rule of mixtures carbon nanotubes are estimated. In addition, these properties are stated as uniform, and functionally graded (FG) distributions in the thickness direction. Energy method and Hamilton’s principle are employed to establish the governing equations of motion for the vibration of viscoelastic damped micro composite beam reinforced by SWCNTs based on the Kelvin–Voigt model. The influences of material length scale parameter, structural damping coefficient and different distributions of SWCNTs on non-dimensional complex natural frequency and amplitude vibration of the viscoelastic micro composite beam are investigated. The results reveal that the lowest vibration amplitude of FG microcomposite beam by the FG-X and the highest occurs by FG-◊. Moreover, in the presence of external periodic load and the absence of structural damping coefficient, the vibration amplitude increases and FG microcomposite beam becomes unstable, even though the amplitude of vibration decreases with increasing structural damping coefficient. It is shown that the natural frequency of SWCNT reinforced composite is more than the frequency of multi-walled carbon nanotubes because SWCNT have more stiffness. In addition, the results illustrate that the experimental data by Lei et al. agree well with those predicted by the MCST in the present work.

     

Effect of thermal and mechanical properties variations on microcantilever mass sensor performance

Ensuring desirable performance for piezoelectric microcantilever sensors constitutes a crucial research subject particularly for the applications such as detection of biochemical entities, virus particles or human biomarkers. However, these sensors’ performance may be affected by the environmental conditions such as temperature variation, and/or the uncertainty in the material properties. The objective of this study is to explore Young modulus uncertainty of microcantilever’s structural layer, thermo-mechanical and geometrical temperature dependency effects, on the natural frequency, bias and sensitivity of microcantilever mass sensors. These effects have been investigated for different sensor lengths and resonant modes. Also, a temperature compensation method which omits the need for bulky non-contact thermometers or fabrication of built-in temperature sensor has been proposed. As theoretical model, Euler–Bernoulli beam theory has been employed and solved by Galerkin expansion procedure. Using this model, it is demonstrated that the sensitivity of microcantilever sensor decreases with increasing the added mass. The microcantilever sensor sensitivity operating at the second resonant mode has been improved almost five times comparing to the first mode sensitivity regardless of microcantilever length. The simulation results show that temperature variation causes thermal frequency shift which in turn introduces a significant mass bias far beyond the sensors’ minimum detectable mass. This mass bias is constant for a given microcantilever in its first and second resonant mode. Additionally, the effect of temperature variation on the sensitivity of the given mass sensors is negligible. However, it has been shown that the variations in sensors sensitivity due to uncertainty of Young modulus remain constant for different lengths and two resonant modes of the microcantilever sensor.     

微型之字形压电式能量收集器输出电压的建模和仿真

为了有效解决无线传感器网络节点的供电难题,提出之字形结构的微型压电式能量收集器。相比于传统的直悬臂梁,此结构等效加大了压电梁的长度,降低了系统的固有振动频率。建立了之字形压电梁的本构方程和受迫振动方程,推导得到其输出电压的频域表达式。基于之字形压电梁的结构,利用ANSYS软件对其进行了谐响应分析。仿真结果表明,压电梁的输出电压在各阶固有振动频率处存在极值,符合理论分析的结果;输出电压大小随压电梁长度增加而降低,随压电梁宽度增加而升高,但均为非线性关系;压电梁末端质量块的长度和厚度、基体层厚度减小时,会导致输出电压的增大。在论文中所提出的结构尺寸下,10根直梁构成的之字形结构压电梁,在其一阶固有振动频率处,输出电压可达10 V以上,符合无线传感器网络节点的实际供电需求,证明了之字形压电梁结构的有效性。     

A micro electromagnetic low level vibration energy harvester based on MEMS technology

This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnet-spring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 μm when the input vibration amplitude is 14 μm and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 μW of maximal output power with peak–peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s² (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak–peak) of 18 mV and output power of 0.61 μW for 14.9 m/s² external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).     

基于带通滤波器的幅频特性调节光电开关灵敏度

研究探讨了调制光频率与检测距离的相关性,旨在通过软件改变红外调制光频率,实现"一键式"智能调节检测距离.以连续周期矩形脉冲信号为例,选用二阶窄带带通放大电路对输入信号进行放大和滤波处理,使不同频率的脉冲信号经过窄带带通放大器自动调节其输出信号幅度,进而影响传感器的灵敏度.经理论推导、仿真设计、实验分析,结果表明:当设定脉冲幅值和占空比为常数时,改变脉冲信号频率可实现传感器灵敏度的调节,从而实现对检测距离的调节.即当ff0时,灵敏度随着f增大而减小.在红外光电开关传感器上应用该方法实现了利用软件调节频率来调节传感器的测量距离.     

电容式微机械陀螺双环路闭环驱动电路研究

为了提高微机械陀螺系统的检测灵敏度,对微机械陀螺系统的驱动电路进行了研究.分析了微陀螺闭环驱动系统理论,基于此提出一种双环路闭环驱动方法,并且利用数学工具simulink建立系统模型,验证此方法的可行性,最后设计完成相应电路.此方法引入锁相环实现闭环驱动电路的稳频控制;采用自动增益控制器(AGC)实现恒幅控制.利用Hspice完成电路级仿真.结果表明,微机械陀螺双环路闭环驱动电路建立稳定振荡的时间为45 ms,稳定振荡频率为2.7553 KHz,频率偏差为0.1 z,频率抖动为0.056563 Hz.相对于传统的AGC闭环驱动电路,此闭环驱动电路建立稳定振荡时间缩短了30.77%,频率稳定性是传统AGC闭环驱动电路的32.72%.微机械陀螺环路闭环驱动电路提高驱动信号性能,对于微机械陀螺检测灵敏度的提高有着重要意义.     

基于正弦力激励的预紧压电式力传感器的研究

为了校准预紧的压电式力传感器动态灵敏度并研究其频响特性和预紧结构的设计,首先介绍了正弦力激励的方法并建立校准数学模型。分别在传感器正立和倒立安装方式下进行测试,通过对比试验研究传感器端部等效质量引入的惯性力对传感器动态灵敏度的影响。然后根据传感器固有频率的落球测试方法,将传感器和附加质量块安装于振动系统。通过白噪声激励得到系统安装谐振频率,进而研究传感器有效频率范围和测量精度与安装谐振频率的关系。最后通过理论分析,说明传感器非对称设计的原因。试验结果表明,当附加质量块质量约为传感器质量的121倍时,可忽略端部等效质量对灵敏度标定的影响;压电式力传感器固有频率高达46kHz,但其有效使用频率范围受安装谐振频率限制,当试验频率与安装谐振频率比 时,压电式传感器精度等级为1%;传感器两端等效质量不同,预紧结构是非对称的,用于动态测试时要将端部等效质量轻的一端连接到被测物体。本研究结果可为开展传感器的现场标定和预紧结构的设计提供理论依据。     

耦合结构对音叉式陀螺振动特性的影响

耦合结构对MEMS音叉式陀螺振动特性具有重要影响。针对一种典型结构的音叉式陀螺及其耦合结构,在分析其工作原理的基础上,建立了其驱动模态的振动模型。基于该模型,计算了在陀螺刚度不对称、驱动力幅值不对称及质量不对称三种情况下,该耦合结构对陀螺振动特性的影响。利用有限元仿真软件,对该耦合结构在三种情况下对陀螺振动特性的影响进行了仿真比较。计算与仿真结果表明,通过改变耦合结构尺寸,能够调整陀螺固有频率,进而对振动特性产生影响。根据结果,提出了音叉式陀螺耦合结构的设计准则。