Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is abo...     

17×17 波谱响应平坦化聚合物阵列波导光栅工艺效果分析

Based on transmission theory, a 17×17 polymer arrayed waveguide grating(AWG) multiplexer parameter optimization is performed, and the influence of the fabrication results on the transmission characteristics are analyzed. In this paper, we mainly discuss three of the main errors in the fabrication of polymer AWG devices. One is n1, which is caused by the tuning of the core refractive index n1, the second is b, which results from the rotating-coating of the core thickness b, and the other is the non-ideal core cross-section, which is caused by steam redissolution. The effects of the above fabrication errors on the transmission characteristics of the AWG device are investigated, and compensation techniques are proposed. By comparing the theoretical simulation and experimental results, the shift in the transmission spectrum is reduced by 0.028 nm, the 3 dB bandwidth is increased by about 0.036 nm, the insertion loss is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 1.5 dB.     

A 45-channel 100 GHz AWG based on Si nanowire waveguides

A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about ?23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of ?8 dB. This work has been supported by the National High Technology Research and Development Program of China (No.2015AA016902), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn      

Narrow-channel-spacing 32-channel AWG multiplexer with an innovative alignment method

A 32-channel 50 GHz spaced arrayed-waveguide grating（AWG） with our innovative configuration has been designed and fabricated. The performance of the device has been fully tested by using a system that consists of a tunable laser light source （TLS）, an optical power meter and a polarization controller. The insertion loss （IS） of the device is 4.2-7.4 dB. The crosstalk is about - 28 dB. The IS uniformity is less than 3.3 dB. With our configuration,the performance of the device has been enhanced effectively and the difficulty in alignment process has been decreased obviously.     

16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides

A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed.The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB.The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate.The demultiplexing characteristics are observed with crosstalk of 5-8 dB,central channel’s insertion loss of 2.2 dB,free spectral range of 24.7 nm and average channel spacing of 1.475 nm.The cause of the spectral distortion is analyzed specifically.     

Design and fabrication of 25-channel 200 GHz AWG based on Si nanowire waveguides

A 25-channel 200 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the simulation and error analysis of AWG with width fluctuations. The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB, crosstalk of ?13 dB, and central wavelength of 1 560.55 nm. The error analysis can explain the experimental results of 25-channel 200 GHz AWG well. By using deep ultraviolet lithography (DUV) and inductively coupled plasma etching (ICP) technologies, the devices are fabricated on silicon-on-insulator (SOI) substrate. This work has been supported by the National Key Research and Development Program of China (No.2016YFB0402504), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn      

An ultra-compact cross/bar optical routing switch using two polymer electro-optic microrings

A 2×2 cross/bar polymer electro-optic(EO) routing switch is proposed,which is composed of two passive channel waveguides and two active EO polymer microrings with bending radius of only 13.76 μm.Detailed structure,theory and formulation are provided to characterize the output power of the switch.For obtaining fundamental mode propagation,small bending loss and phase-matching between channel waveguide and microring resonator(MRR) waveguide,the structural parameters are optimized under the wavelength of 1550 nm.Analyses and simulations on output power and output spectra indicate that a switching voltage of 5 V is desired to realize the exchange between cross state and bar state,the crosstalk under cross state and that under bar state are about 28.8 dB and 39.9 dB,respectively,and the insertion losses under these two states are about 2.42 dB and 0.13 dB,respectively.Compared with our four EO switches reported before,this device possesses ultra-compact size of 0.233 mm×0.233 mm as well as low crosstalk and insertion loss,and therefore it can serve as a good candidate for constructing large-scale optical routers or switching arrays in photonic network-on-chip(NoC).     

Optimal design and characteristics analysis of a polymer electro-optic switch with seven vertical-turning serial-cou- pled microrings

A novel 1 x2 polymer electro-optic （EO） switch based on seven vertical-mining serial-coupled microrings is proposed for dropping crosstalk and obtaining fiat boxlike spectrum. The device structure, theory and formulation are presented, and the microring resonance order and coupling gaps are optimized. The switching voltage of the device for obtaining crosstalk lower than -30 dB under through state is decided to be about 1.86 V. Under the operation voltages of 0 V （drop state） and 1.86 V （through state）, the switching performance is characterized, and the output spectrum is ana- lyzed. The calculation results show that the crosstalk at through state and that at drop state are -30.2 dB and -53.2 dB, respectively, while the insertion losses are 0.86 dB and 3.18 dB, respectively. Owning to the seven serial-coupled mi- crorings resonance structure, the proposed switch reveals the favorable boxlike spectrum compared with the simple device with only one microring, and thus the crosstalk under drop state is improved from -26.8 dB to -53.2 dB. Due to the low crosstalk, this device can be used in optical networks-on-chip for signal switching and routing.     

Optimization of a polymer four-port microring optical router with three channel wavelengths

Optimization and simulation are performed for a polymer four-port microring optical router with three channel wavelengths, which contains four-group basic routing elements with two different ring radii. In terms of microring resonance theory, coupled mode theory and transfer matrix method, expressions of output power of basic routing element and optical router are derived. In order to realize single-mode propagation, low optical transmission loss and phase match between microring waveguide and channel waveguide, the device parameters are optimized. With the selected three channel wavelengths of 1550 nm, 1552 nm and 1554 nm, characteristics are calculated and analyzed, including output spectrum, insertion loss and crosstalk. Simulation results indicate that the device has 12 possible I/O routing paths, the insertion losses of three channel wavelengths along their routing paths are within the range of 0.02-0.61 dB, the maximum crosstalk between the on-port along each routing path and other off-ports is less than -39 dB, and the device footprint size is -0.13 mm^2. Based on the proposed structure, through proper selection on ring radius, the routing structure can also be used for other channel wavelengths. Therefore, the designed structure shows wide applications in integrated optical networks-on-chip （NoC）.     

Non-blocking four-port optical router based on thermo- optic silicon microrings

By using silicon-on-insulator(SOI) platform, 12 channel waveguides, and four parallel-coupling one-microring resonator routing elements, a non-blocking four-port optical router is proposed. Structure design and optimization are performed on the routing elements at 1 550 nm. At drop state with a power consumption of 0 m W, the insertion loss of the drop port is less than 1.12 d B, and the crosstalk between the two output ports is less than-28 d B; at through state with a power consumption of 22 m W, the insertion loss of the through port is less than 0.45 d B, and the crosstalk between the two output ports is below-21 d B. Routing topology and function are demonstrated for the four-port optical router. The router can work at nine non-blocking routing states using the thermo-optic(TO) effect of silicon for tuning the resonance of each switching element. Detailed characterizations are presented, including output spectrum, insertion loss, and crosstalk. According to the analysis on all the data links of the router, the insertion loss is within the range of 0.13—3.36 d B, and the crosstalk is less than-19.46 d B. The router can meet the need of large-scale optical network-on-chip(ONo C).     

Optimization of silicon-on-insulator based optical switch using tapered waveguides

Optimized 2×2 switches based on silicon-on-insulator (SOI) were demonstrated. In the design, single mode rib waveguidesand multimode interferences (MMIs) are connected by tapered waveguides to reduce the mode coupling loss between thetwo types of waveguides. The average insertion loss of the switches is about -16.9 dB and the excess loss of one is measuredof -1.3 dB. The worst crosstalk is larger than 25 dB. Experimental results indicate that some of the main characteristics ofoptical switches are improved in the modified design, which is according with theoretic analysis. The novel design can beused to improve the characteristics of optical switch matrixes based on 2×2 switch units.     

An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides

A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication systems.The fabricated device exhibits low loss and good coupling uniformity.The excess loss is lower than 0.8dB,and the uniformity is 0.45dB at the wavelength of 1550nm.Moreover，the polarization dependent loss is lower than 0.7dB at 1550nm.The device size is only 2mm×10mm.     

Analysis and Simulation of S-shaped Waveguide in Silicon-on-insulator

The simulation and analysis of S-shaped waveguide bend are presented.Bend radius larger than 30 mm assures less than 0.5 dB radiation loss for a 4-μm-wide silicon-on-insulator waveguide bend with 2-μm etch depth.Intersection angle greater than 20° provides negligible crosstalk (<-30 dB) and very low insertion loss.Any reduction in bend radius and intersection angle is at the cost of the degradation of characteristics of bent waveguide and intersecting waveguide, respectively.     

A novel loss compensation technique analysis and design for 60 GHz CMOS SPDT switch

A novel loss compensation technique for a series-shunt single-pole double-throw (SPDT) switch is presented operating in the 60 GHz. The feed-forward compensation network which is composed of an NMOS, a couple capacitance and a shunt inductance can reduce the impact of the feed forward capacitance to reduce the insertion loss and improve the isolation of the SPDT switch. The measured insertion loss and isolation characteristics of the switch somewhat deviating from the 60 GHz are analyzed revealing that the inaccuracy of the MOS model can greatly degrade the performance of the switch. The switch is implemented in TSMC 90-nm CMOS process and exhibits an isolation of above 27 dB at transmitter mode, and the insertion loss of 1.8-3 dB at 30-65 GHz by layout simulation. The measured insertion loss is 2.45 dB at 52 GHz and keeps<4 dB at 30-64 GHz. The measured isolation is better than 25 dB at 30-64 GHz and the measured return loss is better than 10 dB at 30-65 GHz. A measured input 1 dB gain compression point of the switch is 13 dBm at 52 GHz and 15 dBm at 60 GHz. The simulated switching speed with rise time and fall time are 720 and 520 ps, respectively. The active chip size of the proposed switch is 0.5×0.95 mm².     

A novel polymer-on-silicon Mach-Zehnder interferometer optical filter and the performance analysis based on spectrum-periodized theory

The analysis on the traditional asymmetric Mach-Zehnder interferometer (AMZI) optical filter based on two 3 dB directional couplers (DCs) shows that by adding an additional nonlinear phase generated by phase-generating coupler (PGC) to the original phase difference of the AMZI, its non-periodic frequency response can be modified, and a strictly periodic spectrum can be obtained. A novel structure of the AMZI filter using two PGCs before and after the AMZI region is proposed. With the needed free spectrum range (FSR) of 20 nm, the design and optimization of the device are performed using polymer SU-8 as the core and PMMA-GMA as the buffer. Though the insertion loss (IL) gets larger than that of the traditional AMZI filter, the FSR is nearly uniform as the expected period of 20 nm.     

Ultra compact triplexing filters based on SOI nanowire AWGs

An ultra compact triplexing filter was designed based on a silicon on insulator(SOI) nanowire arrayed waveguide grating(AWG) for fiber-to-the-home FTTH.The simulation results revealed that the design performed well in the sense of having a good triplexing function.The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.The experimental results showed that the crosstalk was less than -15 dB,and the 3 dB-bandwidth was 11.04 nm.The peak wavelength output from ports a,c,and b were 1455,1510 and 1300 nm,respectively,which deviated from our original expectations.The deviation of the wavelength is mainly caused by 45 nm width deviation of the arrayed waveguides during the course of the fabrication process and partly caused by material dispersion.     

TM-pass polarizer based on multilayer graphene polymer waveguide

A TM-pass polarizer based on multilayer graphene polymer waveguide is proposed and theoretically analyzed. The mode properties, the extinction ratio, the insertion loss and the bandwidth are also discussed. The results show that a TM-pass polarizer, which only guides the TM mode, can be achieved by multilayer graphene polymer waveguide. With length of 150 μm, the proposed polarizer can achieve extinction ratio of 33 dB and insertion loss of 0.5 dB at optical wavelength of 1.55 μm. This device has an excellent performance, including large extinction ratio and low insertion loss within the spectral range from 1.45 μm to 1.6 μm.     

应用于数字和模拟光通信的高速电吸收光调制器

An electro-absorption （EA） modulator is one of key components for optical fiber communications due to the high speed, small size, low voltage and integration ability with other semiconductor devices. A 40 Gb/s InGaAsP/InP multiple-quantum-well （MQW） EA modulator monolithically integrated with a semiconductor optical amplifier （SOA） was fabricated for digital communications. The modulator capacitance was reduced to obtain 40 GHz bandwidth, and the SOA section helped reduce the insertion loss from 18 dB to 3 dB. InGaAlAs/InP MQW EA modulators have also been fabricated and characterized for analog optical fiber communications. A low driving voltage of 2.7 V and high spurious free dynamic range of 107 dB·Hz^2/3 were estimated by static and dynamic measurements.     

Optimum design of a polymer electro-optic microring resonator switch

Novel transfer functions are presented for a polymer electro-optic microring resonator switches. The resonating process of the light in the microring is simulated using the formulas. Then the optimization of the structural parameters is performed, and the characteristics are analyzed, such as the resonance time, output spectrum, operation voltage, insertion loss and crosstalk were analyzed. The simulation results show that the designed device exhibits favorable switching functions.     

基于级联微环谐振器的集成化可重构光学上下路插分复用器

We report on an eight-channel reconfigurable optical add-drop multiplexer based on cascaded microring resonators with a high tuning power consumption and a compact footprint. Microheaters are fabricated on top of the microring resonators and can be modulated using the thermo-optic effect to achieve the reconfigurable functionality of the device. We demonstrate the reconfigurable add-drop multiplexing functionality for channel spacings of 100 GHz and 50 GHz, with the centre wavelengths of the channels aligned to International Telecommunication Union grid specifications. The crosstalk for channel spacings of 100 GHz and 50 GHz are less than..22:5 dB and..15:5 dB, respectively. The average tuning efficiency is about 4.5 mW/nm, and the response speed is about 13.0 kHz.