Mechanism of laser assisted field evaporation from insulating oxides

To explain the recent successful three-dimensional atom probe (3DAP) analyses of insulating oxides by laser assisted field evaporation, we investigated the mechanism of the laser-induced field evaporation of oxides by ab initio calculations. The calculated potential energy surfaces (PESs) for the ground and excited states indicated that the activation barrier height for field evaporation is substantially reduced by the accumulation of holes near the tip apex. This would make the direct electronic excitation possible to promote field evaporation along with thermal excitation. These theoretical calculations are supported by experimental observations.     

Evaporation mechanisms of MgO in laser assisted atom probe tomography

In this paper the field evaporation properties of bulk MgO and sandwiched MgO layers in Fe are compared using laser assisted Atom Probe Tomography. The comparison of flight time spectra gives an estimate of the evaporation times as a function of the wavelength and the laser energy. It is shown that the evaporation takes place in two steps on two different time scales in MgO. It is also shown that as long as the MgO layer is buried in Fe, the evaporation is dominated by the photon absorption in Fe layer at the tip apex. Eventually the evaporation process of MgO is discussed based on the difference between the bulk materials and the multilayer samples.     

Broadening the applications of the atom probe technique by ultraviolet femtosecond laser

Laser assisted field evaporation using ultraviolet (UV) wavelength gives rise to better mass resolution and signal-to-noise ratio in atom probe mass spectra of metals, semiconductors and insulators compared to infrared and green lasers. Combined with the site specific specimen preparation techniques using the lift-out and annular Ga ion milling in a focused ion beam machine, a wide variety of materials including insulating oxides can be quantitatively analyzed by the three-dimensional atom probe using UV laser assisted field evaporation. After discussing laser irradiation conditions for optimized atom probe analyses, recent atom probe tomography results on oxides, semiconductor devices and grain boundaries of sintered magnets are presented.     

Laser assisted atom probe analysis of thin film on insulating substrate

We demonstrate that the atom probe analyses of metallic thin films on insulating substrates are possible using laser assisted field evaporation. The tips with metallic thin film and insulating substrate (0.6-3 μm in thickness) were prepared by the lift-out and annular ion beam milling techniques on tungsten supports. In spite of the existence of thick insulating layer between the metallic film and the tungsten support, atom probe tomography with practical mass resolution, signal-to-noise ratio and spatial resolution was found to be possible using laser assisted field evaporation.     

Pragmatic reconstruction methods in atom probe tomography

Data collected in atom probe tomography have to be carefully analysed in order to give reliable composition data accurately and precisely positioned in the probed volume. Indeed, the large analysed surfaces of recent instruments require reconstruction methods taking into account not only the tip geometry but also accurate knowledge of geometrical projection parameters. This is particularly crucial in the analysis of multilayers materials or planar interfaces. The current work presents a simulation model that enables extraction of the two main projection features as a function of the tip and atom probe instrumentation geometries. Conversely to standard assumptions, the image compression factor and the field factor vary significantly during the analysis. An improved reconstruction method taking into account the intrinsic shape of a sample containing planar features is proposed to overcome this shortcoming.     

Quantitative atom probe analysis of carbides

Compared to atom probe analysis of metallic materials, the analysis of carbide phases results in an enhanced formation of molecular ions and multiple events. In addition, many multiple events appear to consist of two or more ions originating from adjacent sites in the material. Due to limitations of the ion detectors measurements generally underestimate the carbon concentration. Analyses using laser-pulsed atom probe tomography have been performed on SiC, WC, Ti(C,N) and Ti₂AlC grains in different materials as well as on large M₂₃C₆ precipitates in steel. Using standard evaluation methods, the obtained carbon concentration was 6-24% lower than expected from the known stoichiometry. The results improved remarkably by using only the ¹³C isotope, and calculating the concentration of ¹²C from the natural isotope abundance. This confirms that the main reason for obtaining a too low carbon concentration is the dead time of the detector, mainly affecting carbon since it is more frequently evaporated as multiple ions. In the case of Ti(C,N) and Ti₂AlC an additional difficulty arises from the overlap between C₂⁺, C₄²⁺ and Ti²⁺ at the mass-to-charge 24 Da.     

The shape of field emitters and the ion trajectories in three-dimensional atom probes

The lateral resolution of three-dimensional atom probes is mainly controlled by the aberrations of the ion trajectories near the specimen surface. For the first time, a simulation program has been developed to reconstruct the ion trajectories near a sharp hemispherical electrode defined at the atomic scale. Surface atoms submitted to the highest field were removed one by one. The consecutive gradual change of the surface topology was taken into account in the calculation of ion trajectories. As the tip was 'field evaporated', the initial spherical shape of the emitter was observed to transform gradually into a polygonal shape. When the tip reached its equilibrium shape, the field distribution at the tip surface was found to be much more uniform compared to the initial distribution. The calculated distribution of ion impacts on the detector exhibits the presence of depleted zones both at the centre of low index poles and along <001> zone axes. These predictions are in excellent agreement with experiments.     

Laser-assisted atom probe analysis of sol–gel silica layers

Semi-conducting nanocrystals embedded in a non-conducting matrix of silicate glass may be used as non-volatile data storage device. Structures of silicate glasses are conveniently produced by a sol–gel process, which offers the possibility to coat tip-shaped substrates with a silica layer. The study presents first results of their local chemical analysis by laser-assisted atom probe. Till date the exact mechanisms of laser pulsing are still controversial. But it is common sense that there is an at least considerable heating effect on the tip, which leads to a short temperature rise and a prolonged cooling period in materials of low heat conductivity. This effect alters the shape of mass peaks and is examined here using a one-dimensional model of heat transport.     

Pulsed laser atom probe analysis of semiconductor materials

As the size of semiconductor devices is reduced the active volumes of material in each device is also decreased. Under these circumstances it becomes more important to understand the microchemistry of semiconducting materials, as small fluctuations in composition can dramatically affect both the operation of the devices, and of the contacts to semiconductors. Atom probe microanalysis has been shown to be able to analyse the microchemistry of metallic materials with plane-by-plane resolution, and by using a pulsed laser to replace the more conventional voltage pulses the analysis of semiconducting and insulating materials becomes possible. The pulsed laser atom probe has been shown to give very accurate chemical analysis of the stoichiometry of extremely small volumes of III-V compound semiconductors, and the composition of the interfacial layer between silicon dioxide and silicon has been identified as SiO of thickness about 0.3 nm. It has been shown to be possible to prepare specimens for analysis from thin films of semiconductors, thus allowing the microanalysis of a wide range of materials that are deposited in thin film form.     

Investigation of wüstite (Fe1-xO) by femtosecond laser assisted atom probe tomography

In this paper, we report results obtained from laser assisted three-dimensional (3-D) atom probe tomography (APT) on wüstite (Fe_1−xO). Oxides are generally insulating and hence hard to analyse in conventional electrical assisted APT. To overcome this problem, femtosecond laser pulses are used instead of voltage pulses. Here we discuss some aspects of pulsed laser field evaporation and optimization of parameters to achieve better chemical accuracy.     

Some aspects of the field evaporation behaviour of GaSb

In-depth analysis of pulsed laser atom probe tomography (APT) data on the field evaporation of the III-V semiconductor material GaSb reveals strong variations in charge states, relative abundances of different cluster ions, multiplicity of detector events and spatial correlation of evaporation events, as a function of the effective electric field at the specimen surface. These variations are discussed in comparison with the behaviour of two different metallic specimen materials, an Al-6XXX series alloy and pure W, studied under closely related experimental conditions in the same atom probe instrument. It is proposed that the complex behaviour of GaSb originates from a combination of spatially correlated evaporation events and the subsequent field induced dissociation of cluster ions, the latter contributing to inaccuracies in the overall atom probe composition determination for this material.     

Multivariate statistical analysis of atom probe tomography data

The application of spectrum imaging multivariate statistical analysis methods, specifically principal component analysis (PCA), to atom probe tomography (APT) data has been investigated. The mathematical method of analysis is described and the results for two example datasets are analyzed and presented. The first dataset is from the analysis of a PM 2000 Fe–Cr–Al–Ti steel containing two different ultrafine precipitate populations. PCA properly describes the matrix and precipitate phases in a simple and intuitive manner. A second APT example is from the analysis of an irradiated reactor pressure vessel steel. Fine, nm-scale Cu-enriched precipitates having a core-shell structure were identified and qualitatively described by PCA. Advantages, disadvantages, and future prospects for implementing these data analysis methodologies for APT datasets, particularly with regard to quantitative analysis, are also discussed.     

Quantitative atom probe analyses of rare-earth-doped ceria by femtosecond pulsed laser

We have investigated the irradiation conditions of femtosecond laser pulses for quantitative atom probe analyses of rare-earth (RE) doped ceria. The influence of laser wavelength, power, pulse frequency, as well as specimen temperature on mass resolution and background noise of atom probe mass spectra were investigated. Furthermore, quantitative atom probe analysis of yttrium distribution in Y-doped ceria was carried out with the optimized evaporation conditions. The distribution of yttrium was found to be uniform within the grains, but they were confirmed to be segregated at grain boundaries.     

Correlated ion analysis and the interpretation of atom probe mass spectra

Several techniques are presented for extracting information from atom probe mass spectra by investigating correlations within multiple-ion detector events. Analyses of this kind can provide insights into the origins of noise, the shape of mass peaks, or unexpected anomalies within the spectrum. Data can often be recovered from within the spectrum noise by considering the time-of-flight differences between ions within a multiple event. Correlated ion detection, particularly when associated with shifts in ion energies, may be used to probe the phenomenon of molecular ion dissociation, including the questions of data loss due to ion pile-up or the generation of neutrals in the dissociation process.     

Dynamic reconstruction for atom probe tomography

Progress in the reconstruction for atom probe tomography has been limited since the first implementation of the protocol proposed by Bas et al. in 1995. This approach and those subsequently developed assume that the geometric parameters used to build the three-dimensional atom map are constant over the course of an analysis. Here, we test this assumption within the analyses of low-alloyed materials. By building upon methods recently proposed to measure the tomographic reconstruction parameters, we demonstrate that this assumption can introduce significant limitations in the accuracy of the analysis. Moreover, we propose a strategy to alleviate this problem through the implementation of a new reconstruction algorithm that dynamically accommodates variations in the tomographic reconstruction parameters.     

Advances in the reconstruction of atom probe tomography data

Key to the integrity of atom probe microanalysis, the tomographic reconstruction is built atom by atom following a simplistic protocol established for previous generations of instruments. In this paper, after a short review of the main reconstruction protocols, we describe recent improvements originating from the use of exact formulae enabling significant reduction of spatial distortions, especially near the edges of the reconstruction. We also show how predictive values for the reconstruction parameters can be derived from electrostatic simulations, and finally introduce parameters varying throughout the analysis.     

Improvements in planar feature reconstructions in atom probe tomography

Standard atom probe tomography spatial reconstruction techniques have been reasonably successful in reproducing single crystal datasets. However, artefacts persist in the reconstructions that can be attributed to the incorrect assumption of a spherical evaporation surface. Using simulated and experimental field evaporation, we examine the expected shape of the evaporating surface and propose the use of a variable point projection position to mitigate to some degree these reconstruction artefacts. We show initial results from an implementation of a variable projection position, illustrating the effect on simulated and experimental data, while still maintaining a spherical projection surface. Specimen shapes during evaporation of model structures with interfaces between regions of low- and high-evaporation-field material are presented. Use of two-and three-dimensional projection-point maps in the reconstruction of more complicated datasets is discussed.     

Quantitative analysis of carbon content in cementite in steel by atom probe tomography

Atom probe performance in the quantitative analysis of carbon atoms in steel was investigated through analysis of stoichiometric spherical cementite (Fe₃C) in steel. The carbon concentration was estimated by determining the mean carbon number of molecular ions having a mass-to-charge ratio of 24. The apparent carbon concentration of cementite increased as the specimen temperature decreased, and it was several at% higher than the stoichiometric value (25 at%) under the preferable condition of low specimen temperature. On the other hand, the apparent carbon concentration was not changed by pulse fraction. These results indicate that the large deviation from the stoichiometric value did not arise from the preferential retention and evaporation between carbon and iron. The other mechanisms explaining the phenomenon have been discussed.     

Field evaporation behavior in [0 0 1] FePt thin films

Though the atom probe has provided unprecedented atomic identification and spatial imaging capability, the basic reconstruction assumption of a smooth hemispherical tip shape creates significant challenges in yielding high fidelity chemical information for atomic species with extreme differences in fields required for field evaporation. In the present study, the evaporation behavior and accompanying artifacts are examined for the super-cell lattice structure of L1₀ FePt, where alternating Fe and Pt planes exist in the [0 0 1] orientation. Elemental Fe and Pt have significant differences in field strengths providing a candidate system to quantify these issues. Though alloys can result in changes in the elemental field strength, the intrinsic nature of elemental planes in [0 0 1] L1₀ provides a system to determine to what extent basic assumptions of elemental field strengths can break down in understanding reconstruction artifacts in this intermetallic alloy. The reconstruction of field evaporation experiments has shown depletion of Fe at the (0 0 2) pole and zone axes. Compositional profiles revealed an increase in Fe and atom count moving outward from the pole. The depletion at the low indexed pole and zone axes was determined to be the result of local magnification and electrostatic effects. The experimental results are compared to an electrostatic simulation model.     

Application of Fourier transform and autocorrelation to cluster identification in the three-dimensional atom probe

Because of the increasing number of collected atoms (up to millions) in the three‐dimensional atom probe, derivation of chemical or structural information from the direct observation of three‐dimensional images is becoming more and more difficult. New data analysis tools are thus required. Application of a discrete Fourier transform algorithm to three‐dimensional atom probe datasets provides information that is not easily accessible in real space. Derivation of mean particle size from Fourier intensities or from three‐dimensional autocorrelation is an example. These powerful methods can be used to detect and image nano‐segregations. Using three‐dimensional ‘bright‐field’ imaging, single nano‐segregations were isolated from the surrounding matrix of an iron–copper alloy. Measurement of the inner concentration within clusters is, therefore, straightforward. Theoretical aspects related to filtering in reciprocal space are developed.