A new analytical method for characterising the bonding environment at rough interfaces in high-k gate stacks using electron energy loss spectroscopy

Determining the bonding environment at a rough interface, using for example the near-edge fine structure in electron energy loss spectroscopy (EELS), is problematic since the measurement contains information from the interface and surrounding matrix phase. Here we present a novel analytical method for determining the interfacial EELS difference spectrum (with respect to the matrix phase) from a rough interface of unknown geometry, which, unlike multiple linear least squares (MLLS) fitting, does not require the use of reference spectra from suitable standards. The method is based on analysing a series of EELS spectra with variable interface to matrix volume fraction and, as an example, is applied to a TiN/poly-Si interface containing oxygen in a HfO₂-based, high-k dielectric gate stack. A silicon oxynitride layer was detected at the interface consistent with previous results based on MLLS fitting.     

Quantification and thickness correction of EFTEM phosphorus maps

We describe a method for correcting plural inelastic scattering effects in elemental maps that are acquired in the energy filtering transmission electron microscope (EFTEM) using just two energy windows, one above and one below a core edge in the electron energy loss spectrum (EELS). The technique is demonstrated for mapping low concentrations of phosphorus in biological samples. First, the single-scattering EELS distributions are obtained from specimens of pure carbon and plastic embedding material. Then, spectra are calculated for different specimen thicknesses t, expressed in units of the inelastic mean free path lambda. In this way, standard curves are generated for the ratio k0 of post-edge to pre-edge intensities at the phosphorus L2,3 excitation energy, as a function of relative specimen thickness t/lambda. Thickness effects in a two-window phosphorus map are corrected by successive acquisition of zero-loss and unfiltered images, from which it is possible to determine a t/lambda image and hence a background k0-ratio image. Knowledge of the thickness-dependent k0-ratio at each pixel thus enables a more accurate determination of the phosphorus distribution in the specimen. Systematic and statistical errors are calculated as a function of specimen thickness, and elemental maps are quantified in terms of the number of phosphorus atoms per pixel. Further analysis of the k0-curve shows that the EFTEM can be used to obtain reliable two-window phosphorus maps from specimens that are considerably thicker than previously possible.     

Near-simultaneous dual energy range EELS spectrum imaging

A system that allows the collection of the low loss spectrum and the core loss spectrum, covering different energy regions, at each pixel in a spectrum image is described. It makes use of a fast electrostatic shutter with control signals provided by the spectrum imaging software and synchronisation provided by the CCD camera controller. The system also allows simultaneous collection of the X-ray spectrum and the signals from the imaging detectors while allowing the use of the existing features of the spectrum imaging software including drift correction and sub-pixel scanning. The system allows acquisition of high-quality spectra from both the core and the low loss regions, allowing full processing of the EELS data. Examples are given to show the benefits, including deconvolution, absolute thickness mapping and determination of numbers of atoms per unit area and per unit volume. Possible further developments are considered.     

ESI contrast analysis: a new approach for element analysis with energy-filtering transmission electron microscopy (EFTEM)

Element microanalysis with energy-filtering transmission electron microscopy can be performed in different ways. Electron energy-loss spectroscopy (EELS) records the intensity as a function of the energy loss from selected regions. Elemental mapping with electron spectroscopic imaging (ESI) uses energy-filtered images at an element-specific energy loss from which a background image has to be subtracted. A combination of these two approaches is Image-EELS, which records a series of energy-filtered images, each at a different energy loss and measures the intensity of selected regions as a function of the energy loss. As an additional procedure ESI contrast analysis is introduced; with this we can investigate the image contrast as a function of the energy loss. The contrast can be measured for the total image or for selected regions as the standard deviation of the grey levels divided by the mean grey level. This procedure is added as a new feature to the existing Image-EELS program, so that EELS intensity spectra and the contrast can be directly compared. Alternatively, the contrast can be calculated step by step from individually recorded electron spectroscopic images, so that only simple equipment for image analysis is sufficient to realize this new method. Inner shell ionizations produce characteristic, but often weak element edges in energy-loss spectra which can be detected more sensitively and reliably as a rapid increase in contrast. Regional analysis of the contrast as a function of the energy loss, combination of data from different regions and the possibility to increase the intensity during recording of the images expand the application range of this new analytical method which bridges the gap between ESI and EELS analysis. With ESI contrast analysis it is possible to discriminate between faint element signals and artefacts in elemental mapping. This new approach for element detection is especially advantageous for biological objects which usually contain very small amounts of the interesting elements in heterogeneous and complex objects. As an example, nervous tissue of a fish was analysed after cytochemical precipitation of endogenous calcium.     

In situ EELS study of dehydration of Al(OH)₃ by electron beam irradiation

The dehydration of Al(OH)₃ by an electron beam has been investigated using the time-dependent electron energy-loss spectroscopy (EELS) technique. Based on an analysis of low-loss EELS, Al L₂₃ and O K-edge, it is found that the processes are initially induced by the loss of H, followed by sputtering of O, which induce local structural changes. Some of the octahedrally coordinated Al transfer to tetrahedrally coordinated Al. The time-dependent O K-edge shows that the pre-edge peak in the O K-edge of Al(OH)₃ is induced by the formation of unpaired O, rather than an intrinsic feature of the OH bond.     

Elemental occurrence maps: a starting point for quantitative EELS spectrum image processing

A mechanism for automatic detection, identification and compositional quantification of elements in an EELS spectrum image is described. The method is capable of locating elemental occurrences, discovering signal overlaps, correctly modeling and subtracting the background, or alternatively fitting reference spectra to each image pixel to convert image intensities at any point in a spectrum image to a concentration without almost any operator input, thus paving the way for a completely automated spectrum image analysis. We describe the steps involved in extracting the elemental content in a spectrum image and demonstrate how an image can be derived that clearly reveals the problem zones that prevent accurate results in a subsequent quantification. Such an automatically generated image can then serve as a binary mask, which allows performing selective calculations on certain specimen areas, when applied to the original data set. We demonstrate the feasibility of such an approach by displaying examples computed from ceramic as well as alloy and steel specimens.     

Quantitative water mapping of cryosectioned cells by electron energy-loss spectroscopy

A direct technique based on electron energy-loss spectroscopy (EELS) in the scanning transmission electron microscope (STEM) has been developed to map subcellular distributions of water in frozen-hydrated biological cryosections. Previously, methods for water determination have been indirect in that they have required the cryosections to be dehydrated first. The new approach makes use of spectrum-imaging, where EELS data are collected in parallel at each pixel. Several operations are required to process the spectra including: subtraction of the detector dark current, deconvolution by the detector point-spread function, removal of plural inelastic scattering and correction for the support film. The resulting single scattering distributions are fitted to standard reference spectra at each pixel, and water content can be determined from the fitting coefficients. Although the darkfield or brightfield image from a hydrated cryosection shows minimal structure, the processed EELS image reveals strong contrast due to variations in water content. Reference spectra have been recorded from the major biomolecules (protein, lipid, carbohydrate, nucleic acid) as well as from vitrified water and crystalline ice. It has been found that quantitative results can be obtained for the majority of subcellular compartments by fitting only water and protein reference spectra, and the accuracy of the method for these compartments has been estimated as ± 3·5%. With the present instrumentation the maximum allowed dose of 2 × 10³ e/nm² limits the useful spatial resolution to around 80 nm for ± 5% precision at a single pixel. By averaging pixel intensities a value of 56·8% with a precision of ± 2·0% has been determined for the water content of liver mitochondria. The water mapping technique may prove useful for applications to cell physiology and pathophysiology.     

Varying SiO2 thickness of core–shell noble-grains on a gradient sensing plate to enhance field Raman scattering

This study demonstrates a strong surface-enhanced Raman scattering (SERS) of crystal violet (CV) dye by using SiO₂ shell/Ag core nanoparticle in gradient-size surface plate. The excitation of CV dye can be enhanced by the localized surface plasmons of Ag core/shell SiO₂ grains due to electromagnetic (EM) enhancement induced. For SERS resonance, the change of dielectric environment of grains results in red shift and magnification of spectra in varying SiO₂ thickness. Herein, the enhanced SERS conducted the core/shell grain with an SiO₂ thickness of 8.7 nm to magnify the intensity about 83 %-fold that is a direct evidence in enhanced charge transport and mutative dielectric environment.

Successful application of spatial difference technique to electron energy-loss spectroscopy studies of Mo/SrTiO3 interfaces

The electron energy‐loss near‐edge structure (ELNES) of Mo/SrTiO₃ interfaces has been studied using high spatial resolution electron energy‐loss spectroscopy (EELS) in a dedicated scanning transmission electron microscope. Thin films of Mo with a thickness of 50 nm were grown on (001)‐orientated SrTiO₃ surfaces by molecular beam epitaxy at 600 °C. High‐resolution transmission electron microscopy revealed that the interfaces were atomically abrupt with the (110)_Mo plane parallel to the substrate surface. Ti‐L_2,3 (～460 eV), O‐K (～530 eV), Sr‐L_2,3 (～1950 eV) and Mo‐L_2,3 (～2500 eV) absorption edges were acquired by using the Gatan Enfina parallel EELS system with a CCD detector. The interface‐specific components of the ELNES were extracted by employing the spatial difference method. The interfacial Ti‐L_2,3 edge shifted to lower energy values and the splitting due to crystal field became less pronounced compared to bulk SrTiO₃, which indicated that the Ti atoms at the interface were in a reduced oxidation state and that the symmetry of the TiO₆ octahedra was disturbed. No interfacial Sr‐L_2,3 edge was observed, which may demonstrate that Sr atoms do not participate in the interfacial bonding. An evident interface‐specific O‐K edge was found, which differs from that of the bulk in both position (0.8 ± 0.2 eV positive shift) and shape. In addition, a positive shift (0.9 ± 0.3 eV) occurred for the interfacial Mo‐L_2,3, revealing an oxidized state of Mo at the interface. Our results indicated that at the interface SrTiO₃ was terminated with TiO₂. The validity of the spatial difference technique is discussed and examined by introducing subchannel drift intentionally.     

Quantitative electron energy loss spectroscopy in biology

The potential for applying electron energy loss spectroscopy (EELS) in biology is assessed. Some recent developments in instrumentation, spectrometer design, parallel detection and elemental mapping are discussed. Quantitation is demonstrated by means of the spectrum from DNA which gives an elemental ratio for N:P close to the expected value. A range of biologically important elements that can be usefully analyzed by EELS is tabulated and some possible applications for each are indicated. Detection limits and the effects of radiation damage are illustrated by spectra from the protein, insulin, and from the fluorinated amino-acid, histidine. Calcium detectability under optimum conditions may be as low as 1 mmol/kg dry weight. The application of EELS to analysis of cryosectioned adrenomedullary (chromaffin) cells is described in order to help determine the composition of the secretory granule. Water content can be determined from the amount of inelastic scattering as measured by the low-loss spectrum. The nitrogen/phosphorus ratio can be measured to provide information about the relative concentrations of ATP, chromogranin, and catecholamines. Quantitative EELS elemental maps are obtained in the STEM mode from chromaffin cells in order to measure the distribution of light elements.     

Electron spectroscopic study (ESI,EELS) of Nanoplast-embedded mammalian lung

The potential of Nanoplast melamine resin embedding for the study of mammalian lung parenchyma was examined by means of electron spectroscopic imaging (ESI) and electron energy-loss spectroscopy (EELS). Samples were either fixed with glutaralde-hyde-paraformaldehyde or glutaraldehyde-tannic acid, or were directly transferred to the embedding medium without prior fixation. Organic dehydrants, as well as fixatives containing heavy metals and stains, were omitted. A very high level of ultrastructural detail of chromatin, ribosomes, mitochondria and plasma membranes was achieved by ESI from the Nanoplast-embedded samples. The most prominent gain in ultrastructural detail was achieved when moving from an energy loss just below the L_2,3 edge of phosphorus at 132 eV to an energy loss just beyond this edge. This reflects the prominent P L_2,3 edge observed by EELS of Nanoplast-embedded samples in comparison with conventionally processed samples. Thus, taking into account possible sectioning artefacts, excellent heterochromatin images which rely on the phosphorus distribution can be obtained from Nanoplast-embedded samples by computer-assisted analysis of electron spectroscopic images. In this respect glutaraldehyde-paraformaldehyde fixation is preferable to glutaraldehyde-tannic acid fixation because the presence of silicon, revealed by EELS, in tannic-acid-fixed samples may introduce artefacts in phosphorus distribution images obtained by the three-window method because of the close proximity of the L_2,3 edges of silicon and phosphorus.     

Interpretation of O K-edge EELS in zircon using a structural variation approach

This work describes an approach to interpret the near-edge fine structure of electron energy-loss spectroscopy (EELS) of O K-edge in zircon using a structural variation method. The positions and intensities of several peaks in the O K-edge EELS spectrum are assigned to specific structural parameters. It suggests that the near-edge structures in EELS can be used to measure atomic structure changes.     

Quantitative and qualitative characterization of aquatic iron oxyhydroxide particles by EF-TEM

Electron energy-loss spectroscopy (EELS) and elemental imaging under the energy-filtered transmission electron microscope are powerful tools for the characterization of iron-rich particles present in natural waters. Features present in EEL spectra (Fe-M_2,3 Fe-L_2,3 and O-K ionization edges) of goethite (α-FeOOH) have been studied with an energy filter operated at 80 keV to determine optimal quantification and elemental imaging of Fe-rich natural aquatic particles in the 30–200 nm range of thickness. For quantitative aims, the Fe-M_2,3 ionization edge cannot be used easily, but the Fe-L_2,3 edge provides more accurate results owing to a better background extrapolation. The partial cross-section of the Fe(III) M shell has been determined for iron oxide. The use of two-windows (jump-ratio) and three-windows (background stripping) imaging methods is discussed in relation to the specimen thickness.     

Detection of low phosphorus contents in neurofilaments of squid axons by Image-EELS contrast spectroscopy

We show that Image-EELS is suitable for detecting relatively low phosphorus concentrations in very small axoplasmic structures of squid axons. Imaging plates and a CCD camera were used as electron sensors. From image series spanning a certain energy-loss range EELS (electron energy-loss spectra) were derived by averaging read-outs from many axoplasmic particles (APs). The ratio of these spectra to spectra of the background was plotted, showing the contrast modulation as a function of the energy loss. This new approach is called EELC (electron energy-loss-dependent contrast spectroscopy). A distinct phosphorus signal was found in APs of presynaptic terminals of the squid giant synapse, in the peripheral giant axon and, as controls, in ribosomes. Biochemical experiments supported this result. In neurofilament-enriched pellets a phosphorus signal could be directly detected by serial EELS and in electron spectroscopic micrographs. After dephosphorylation of either the pellets or the extruded axoplasm with alkaline phosphatase, phosphorus signals in electron spectroscopic micrographs were absent or much reduced in size and intensity. With Image-EELS inherent limitations of traditional element detection modes in energy filtering transmission electron microscopy can be overcome. Compared with serial EELS, the selective analysis of small areas with irregular shape is possible with greatly improved signal-to-noise ratio. The identification of the element-peak in Image-EEL spectra directly proves the presence of the element within the region of interest. For small peaks, the visualization is facilitated by the contrast presentation (EELC). However, the background subtraction modes used for elemental mapping in electron spectroscopic imaging are subject to uncertainties when elemental ionization edges like the P_L2,3 edge are examined. Imaging plates are very sensitive electron sensors with a wide dynamic range. Unlike photographic emulsions, they allow acquisition of image series covering a large energy-loss range without normalization of exposure times, and direct extraction of EEL spectra. Thus, the combination of Image-EELS and imaging plates is proposed as an efficient new tool for analytical electron microscopy.     

Spatially resolved electron energy-loss studies of metal–ceramic interfaces in transition metal/alumina cermets

Composites consisting of an alumina matrix and 20 vol.% transition metal (Ni or Fe) particles, prepared by hot pressing powder blends, have been studied using spatially resolved transmission electron energy-loss spectroscopy (EELS), and, to a lesser extent, by high-resolution electron microscopy (HREM). Particular attention was paid to the elucidation of the chemical bonding mechanisms at the metal-ceramic interface; EELS spectra from interfacial regions being obtained via a spatial difference technique. From both qualitative and quantitative interpretation of EELS near-edge structures, as well as observed HREM images, the data appear to be consistent with the presence of an Al-terminated alumina at the interface and the formation of direct transition metal – aluminium bonds in Al(O₃M) (M = Ni or Fe) tetrahedral units, possibly as a result of the dissolution and interfacial reprecipitation of Al during processing. These results correlate well with similar model studies on diffusion-bonded Nb/Al₂O₃ interfaces and may, in the light of recent theoretical electronic structure calculations, have implications for the resultant interfacial bond strength in such materials.     

Image-EELS: Simultaneous recording of multiple electron energy-loss spectra from series of electron spectroscopic images

A new approach for element microanalysis with energy-filtering transmission electron microscopy (EFTEM) is presented which was accomplished with the CEM 902 electron microscope (Zeiss, Germany). This method is called Image-EELS, because it is a synthesis of electron energy-loss spectroscopy (EELS) and electron spectroscopic imaging (ESI). Series of energy-filtered images at increasing energy losses are recorded from one area with a TV camera. In a second step the intensity of selected regions in the image stack is measured with an image analysis system and plotted as a function of the energy loss. Thus many spectra from different objects can be calculated from one image series and compared with each other. The spatial resolution of EELS is considerably enhanced, the noise is decreased because many pixels from irregular objects are integrated, and the information from ESI can be analysed as a function of the energy loss.     

Model based quantification of EELS spectra

Recent advances in model based quantification of electron energy loss spectra (EELS) are reported. The maximum likelihood method for the estimation of physical parameters describing an EELS spectrum, the validation of the model used in this estimation procedure, and the computation of the attainable precision, that is, the theoretical lower bound on the variance of these estimates, are discussed. Experimental examples on Au and GaAs samples show the power of the maximum likelihood method and show that the theoretical prediction of the attainable precision can be closely approached even for spectra with overlapping edges where conventional EELS quantification fails. To provide end-users with a low threshold alternative to conventional quantification, a user friendly program was developed which is freely available under a GNU public license.     

Intensity analysis of boron and nitrogen K-edge spectra for hexagonal boron nitride by EELS

Boron and nitrogen K-edge spectra for hexagonal boron nitride (h-BN) were measured by electron energy loss spectroscopy (EELS) at orientations of a momentum transfer q parallel and perpendicular to the c-axis in order to investigate anisotropic unoccupied states π* and σ*, separately. Differences between intensity profiles for B_K and N_K spectra are attributed to different transition probabilities at B_K and N_K edges from Is states to the π* and σ* states. The intensity of the first peak at q ∥ c in the B_K spectrum, which is ascribed to the transition from B-1s to the Q^—₂ state in the π* band, is 10 times as large as that in the N_K spectrum. Quantitative calculation of transition probabilities for B_K and N_K spectra at q ∥ c shows that the contribution of B-2p_z orbital to the Q^—₂ state is 1–7 times as large as that of N-2p_z. This value suggests that the enhanced peak in the B_K spectrum is explained by means of single electron excitations, disregarding the electron-electron interactions for the exciton reported by several workers. The contributions of 2p_x and 2p_y orbitals of B and N atoms to σ* states are also estimated by intensity analysis of B_K and N_K spectra at q⊥c .     

Preparation and Tribological Properties of Surface-Capped Copper Nanoparticle as a Water-Based Lubricant Additive

Cu nanoparticle surface-capped by methoxylpolyethyleneglycol xanthate was synthesized using in situ surface-modification technique. The size, morphology and phase structure of as-prepared Cu nanoparticle were analyzed by means of X-ray diffraction and transmission electron microscopy. The tribological properties of as-synthesized Cu nanoparticle as an additive in distilled water were investigated with a four-ball machine, and the morphology and elemental composition of worn steel surfaces were examined using X-ray photoelectron spectroscopy and scanning electron microscope equipped with an energy-dispersive spectrometer attachment. Results show that as-synthesized Cu nanoparticle as a water-based lubricant additive is able to significantly improve the tribological properties and load-carrying capacity of distilled water, which is ascribed to the deposition of Cu nanoparticles on steel sliding surfaces giving rise to a protective and lubricious Cu layer thereon. In the meantime, they may also tribochemically react with rubbing steel surfaces to generate a boundary lubricating film consisting of Cu, FeS and FeSO₄ on the rubbed steel surface, which helps to result in greatly improved tribological properties of distilled water, thereby reducing friction and wear of the steel–steel pair.     

Combining FIB milling and conventional Argon ion milling techniques to prepare high‐quality site‐specific TEM samples for quantitative EELS analysis of oxygen in molten iron

This paper reports a procedure to combine the focused ion beam micro‐sampling method with conventional Ar‐milling to prepare high‐quality site‐specific transmission electron microscopy cross‐section samples. The advantage is to enable chemical and structural evaluations of oxygen dissolved in a molten iron sample to be made after quenching and recovery from high‐pressure experiments in a laser‐heated diamond anvil cell. The evaluations were performed by using electron energy‐loss spectroscopy and high‐resolution transmission electron microscopy. The high signal to noise ratios of electron energy‐loss spectroscopy core‐loss spectra from the transmission electron microscopy thin foil, re‐thinned down to 40 nm in thickness by conventional Argon ion milling, provided us with oxygen quantitative analyses of the quenched molten iron phase. In addition, we could obtain lattice‐fringe images using high‐resolution transmission electron microscopy. The electron energy‐loss spectroscopy analysis of oxygen in Fe_0.94O has been carried out with a relative accuracy of 2%, using an analytical procedure proposed for foils thinner than 80 nm. Oxygen K‐edge energy‐loss near‐edge structure also allows us to identify the specific phase that results from quenching and its electronic structure by the technique of fingerprinting of the spectrum with reference spectra in the Fe‐O system.