An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging

State-of-the-art 3-D medical ultrasound imaging requires transmitting and receiving ultrasound using a 2-D array of ultrasound transducers with hundreds or thousands of elements. A tight combination of the transducer array with integrated circuitry eliminates bulky cables connecting the elements of the transducer array to a separate system of electronics. Furthermore, preamplifiers located close to the array can lead to improved receive sensitivity. A combined IC and transducer array can lead to a portable, high-performance, and inexpensive 3-D ultrasound imaging system. This paper presents an IC flip-chip bonded to a 16 x 16-element capacitive micromachined ultrasonic transducer (CMUT) array for 3-D ultrasound imaging. The IC includes a transmit beamformer that generates 25-V unipolar pulses with programmable focusing delays to 224 of the 256 transducer elements. One-shot circuits allow adjustment of the pulse widths for different ultrasound transducer center frequencies. For receiving reflected ultrasound signals, the IC uses the 32-elements along the array diagonals. The IC provides each receiving element with a low-noise 25-MHz-bandwidth transimpedance amplifier. Using a field-programmable gate array (FPGA) clocked at 100 MHz to operate the IC, the IC generated properly timed transmit pulses with 5-ns accuracy. With the IC flip-chip bonded to a CMUT array, we show that the IC can produce steered and focused ultrasound beams. We present 2-D and 3-D images of a wire phantom and 2-D orthogonal cross-sectional images (Bscans) of a latex heart phantom.     

Real-time 3-D ultrasound guidance of interventional devices

We have previously developed 2-D array transducers for many real-time volumetric imaging applications. These applications include transducers operating up to 7 MHz for transthoracic imaging, up to 15 MHz for intracardiac echocardiography (ICE), 5 MHz for transesophageal echocardiography (TEE) and intracranial imaging, and 7 MHz for laparoscopic ultrasound imaging (LUS). Now we have developed a new generation of miniature ring-array transducers integrated into the catheter deployment kits of interventional devices to enable real-time 3-D ultrasound scanning for improved guidance of minimally invasive procedures. We have constructed 3 new ring transducers. The first consists of 54 elements operating at 5 MHz. Typical measured transducer element bandwidth was 25%, and the 50 Ohm round trip insertion loss was -65 dB. Average nearest neighbor cross talk was -23.8 dB. The second is a prototype 108-element transducer operating at 5 MHz. The third is a prototype 108-element ring array with a transducer center frequency of 8.9 MHz and a -6 dB bandwidth of 25%. All transducers were integrated with an 8.5 French catheter sheath of a Cook Medical, Inc. vena cava filter deployment device.     

Modeling of piezoelectric multilayer ceramics using finite elementanalysis

For medical ultrasound imaging, 2-D array transducers have greater versatility than linear arrays. Unfortunately, the tiny array elements in a 2-D array have poor signal-to-noise ratio (SNR). We have previously shown that SNR is increased in 2-D array transducers made from piezoelectric multilayer ceramics. Conventional one-dimensional models provide accurate results when comparing multilayer ceramic performance relative to single layer transducers. However, these models are not accurate when comparing simulations directly to measurements. Because multilayer ceramics have a complex structure, a 3-D model, such as finite element analysis, is needed for accurate simulations. We modeled four arrays that were previously fabricated: a single layer and multilayer 1 MHz, 2-D array element, and a single layer and multilayer 2.25 MHz, 1.5-D array element that can focus and steer in azimuth but only steer in the elevation dimension. We compared the simulated and measured impedance plots for each transducer. The finite element analysis plots accurately predicted the impedance for each vibration mode. On the other hand, the one dimensional KLM transmission line model could simulate only the thickness mode vibrations and the results were inaccurate compared to measurements. We also simulated the transmit output pressure for the 2.25 MHz arrays and compared the results to measurements. The simulated pressure vs. time plots and their spectra were accurate when compared to measurements. Finally, we obtained a series of images that show the impulse response vibrations for the 2.25 MHz, arrays. These animations show the vibration modes in the complex multilayer ceramic structure. Measurements were not available to confirm the animations. Our results show that finite element analysis in three dimensions is a valuable tool to predict the performance of multi-layer transducers     

Hybrid multi/single layer array transducers for increased signal-to-noise ratio

In medical ultrasound imaging, two-dimensional (2-D) array transducers are necessary to implement dynamic focusing in two dimensions, phase correction in two dimensions and high speed volumetric imaging. However, the small size of a 2-D array element results in a small clamped capacitance and a large electrical impedance, which decreases the transducer signal-to-noise ratio (SNR). We have previously shown that SNR is improved using transducers made from multi-layer PZT, due to their lower electrical impedance. In this work, we hypothesize that SNR is further increased using a hybrid array configuration: in the transmit mode, a 10 Omega electronic transmitter excites a 10 Omega multi-layer array element; in the receive mode, a single layer element drives a high impedance preamplifier located in the transducer handle. The preamplifier drives the coaxial cable connected to the ultrasound scanner. For comparison, the following control configuration was used: in the transmit mode, a 50 Omega source excites a single layer element, and in the receive mode, a single layer element drives a coaxial cable load. For a 5x102 hybrid array operating at 7.5 MHz, maximum transmit output power was obtained with 9 PZT layers according to the KLM transmission line model. In this case, the simulated pulse-echo SNR was improved by 23.7 dB for the hybrid configuration compared to the control. With such dramatic improvement in pulse-echo SNR, low voltage transmitters can be used. These can be fabricated on integrated circuits and incorporated into the transducer handle.     

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

Integrated catheter for 3-D intracardiac echocardiography and ultrasound ablation

A catheter device with integrated ultrasound imaging array and ultrasound ablation transducer is introduced. This device has been designed for use in interventional cardiac procedures in which the cardiac anatomy is first imaged using real-time three-dimensional (3-D) ultrasound, then ablated to treat arrhythmias. The imaging array includes 112 elements operating at 5.4 MHz arranged in a 2-D matrix. Individual elements have a bandwidth of 21% and an insertion loss of 80 dB. The array has an azimuth resolution of 12 degrees and an elevation resolution of 8.7 degrees. The ablation transducer is a concentric piezoelectric transducer PZT-4 ring (outside diameter (O.D.), 4.5 mm, inside diameter (I.D.), 3.1 mm) operating at 10 MHz that surrounds the imaging array. It can produce a spatial-peak, temporal-average intensity up to 16 W/cm2. The entire device fits into a 9 Fr lumen with a 14 Fr tip to accommodate the ablation ring. With this device we have imaged, in realtime 3-D, a variety of targets including wire phantoms, fixed sheep hearts, and fresh bovine tissue. The ablation ring has been used to heat tissue-mimicking rubber 14 degrees C, as well as create lesions in fresh bovine tissue.     

High frequency ultrasound imaging with optical arrays

Dynamically focused and steered high frequency ultrasound imaging systems require arrays with fine element spacing, wide bandwidths, and large apertures. However, these characteristics are difficult to achieve at frequencies greater than 30 MHz using conventional array construction methods. Optical schemes offer a solution. Focused laser beams incident on a suitable surface can generate and detect acoustic radiation. Precisely controlling the position and size of the beams defines points of transmission and detection, making it possible for pulse-echo image formation by synthetic aperture methods. An optical detection array was built, relying on a conventional piezoelectric transducer as an ultrasound source. The detection system, with near optimal resolution over a wide depth of field, demonstrates the potential for high frequency array implementation using optical techniques. A possible application is in pathology, where 2-D or 3-D fine resolution pulse-echo imaging can be performed in situ without the need for biopsies.     

Novel transmit protection scheme for ultrasound systems

The problem of protecting or isolating extremely sensitive receive circuitry from high-voltage transmit circuitry is commonly addressed through the use of diode bridges, transformers, or high-voltage switches, which prove to be prohibitively expensive, bulky, and power consuming for use in portable, low-cost, battery-powered systems. These approaches also compound the interconnect difficulties associated with two-dimensional (2-D) transducer arrays. In this paper we present a novel transmit protection scheme that allows compact MOSFET shunting devices to be brought on-chip within each receive channel implemented in a standard CMOS integrated circuit process. During transmit, the high voltage transmit pulse is driven onto the common connection of the transducer array and the on-chip MOSFET devices shunt the current to ground. During receive, these devices are turned off, the common connection of the transducer array is shunted to ground, and the received echo can be detected as usual. The transmit protection scheme was experimentally shown to shunt a 16 mA peak current resulting from the equivalent of a 100-V, 25-ns-risetime transmit pulse through a 4 pF transducer element. The scheme was also incorporated into a prototype 1024-channel, low-cost, ultrasound system successfully used to form pulse echo images.     

A multifunctional, reconfigurable pulse generator for high-frequency ultrasound imaging

High-frequency (>20 MHz) ultrasound (HFUS) imaging systems have made it possible to image small structures with fine spatial resolution. They find a variety of biomedical applications in dermatology, ophthalmology, intravascular imaging, and small-animal imaging. One critical technical challenge of HFUS is to generate high-voltage, high-frequency pulsed signals to effectively excite the transducer for a high SNR. This paper presents the development of a multifunctional, reconfigurable pulse generator for HFUS imaging. The pulse generator can produce a high-voltage unipolar pulse, a bipolar pulse, or arbitrary pulses for B-mode imaging, Doppler measurement, and modulated excitation imaging. The characteristics of the pulses, such as timing, waveform, and frequency are reconfigurable by a high-speed field-programmable gate array (FPGA). Customized software was developed to interface with the FPGA through a USB connector for pulse selection, and easy, flexible, real-time pulse management. The hardware was implemented in a compact, printed circuit board (PCB)-based scheme using state-of-the-art electronics for costeffectiveness and fully digital control. Testing results show that the unipolar pulse can reach over 165 Vpp with a 6-dB bandwidth of 70 MHz, and the bipolar pulse and arbitrary pulses can reach 150 and 60 Vpp with central frequencies of 60 and 120 MHz, respectively.     

Two-dimensional ultrasound receive array using an angle-tuned Fabry-Perot polymer film sensor for transducer field characterization and transmission ultrasound imaging

A 2-D optical ultrasound receive array has been investigated. The transduction mechanism is based upon the detection of acoustically induced changes in the optical thickness of a thin polymer film acting as a Fabry-Perot sensing interferometer (FPI). By illuminating the sensor with a large-area laser beam and mechanically scanning a photodiode across the reflected output beam, while using a novel angle-tuned phase bias control system to optimally set the FPI working point, a notional 2-D ultrasound array was synthesized. To demonstrate the concept, 1-D and 2-D ultrasound field distributions produced by planar 3.5-MHz and focused 5-MHz PZT ultrasound transducers were mapped. The system was also evaluated by performing transmission ultrasound imaging of a spatially calibrated target. The "array" aperture, defined by the dimensions of the incident optical field, was elliptical, of dimensions 16 x 12 mm and spatially sampled in steps of 0.1 mm or 0.2 mm. Element sizes, defined by the photodiode aperture, of 0.8, 0.4, and 0.2 mm were variously used for these experiments. Two types of sensor were evaluated. One was a discrete 75-microm-thick polyethylene terephthalate FPI bonded to a polymer backing stub which had a wideband peak noise-equivalent pressure of 6.5 kPa and an acoustic bandwidth 12 MHz. The other was a 40-microm Parylene film FPI which was directly vacuum-deposited onto a glass backing stub and had an NEP of 8 kPa and an acoustic bandwidth of 17.5 MHz. It is considered that this approach offers an alternative to piezoelectric ultrasound arrays for transducer field characterization, transmission medical and industrial ultrasound imaging, biomedical photoacoustic imaging, and ultrasonic nondestructive testing.     

Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays

We report on the characterization of 1D arrays of capacitive micromachined ultrasonic transducers (cMUT). A 275×5600 μm 1D CMUT array element is experimentally characterized, and the results are found to be in agreement with theoretical predictions. As a receiver, the transducer has a 0.28-fm/√Hz displacement sensitivity, and, as a transmitter, it produces 5 kPa/V of output pressure at the transducer surface at 3 MHz with a DC bias of 35 V. The transducer has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging. The radiation pattern of isolated single elements, as well as those of array elements are measured, and two major sources of acoustical crosstalk are identified. A weakly dispersive non-leaky interface wave (Stoneley wave) is observed to be propagating at the silicon substrate-fluid interface at a speed close to the speed of sound in the fluid. This wave causes internal reflections, spurious resonance, and radiation from the edges of the silicon substrate. The large lateral component of the particle velocity generated by the membranes at the edge of the cMUT array elements is found to be the source of this interface wave. Lowest order Lamb waves in the silicon substrate are also found to contribute to the crosstalk between elements. These waves are excited at the edges of individual vibrating membranes, where they are anchored to the substrate, and result in a narrowing of the beam profile of the array elements. Several methods, such as trench isolation and wafer thinning, are proposed and implemented to modify the acoustical cross coupling between array elements     

High-speed ultrasound volumetric imaging system. I. Transducer design and beam steering

Transducer design and phased array beam steering are developed for a volumetric ultrasound scanner that enables the 3-D visualization of dynamic structures in real time. The authors describe the design considerations and preliminary evaluation of a high-speed, online volumetric ultrasound imaging system that uses the principles of pulse-echo, phased array scanning with a 2-D array transducer. Several 2-D array designs are analyzed for resolution and main lobe-side lobe ratio by simulation using 2-D fast Fourier transform methods. Fabrication techniques are described for 2-D array transducer. Experimental measurements of pulse-echo point spread responses for 2-D arrays agree with the simulations. Measurements of pulse-echo sensitivity, bandwidth, and crosstalk are included     

Finite element analysis of a deformable array transducer

Deformable array transducers have previously been described to implement 2-D phase aberration correction of near-field aberrators with only a 1xN or 2xN array configuration. This transducer design combines mechanical phase correction using an actuator with electronic phase correction for a 2-D correction with significantly fewer elements than a full 2-D array. We have previously reported the fabrication and results of a 1x32 deformable array fabricated with a RAINBOW (Reduced And INternally Biased Wafer) actuator. Because of the complicated construction of deformable arrays, we propose to use finite element analysis (FEA) as a design tool for array development. In this paper, we use 2-D and 3-D FEA to model the experimental results of the deformable array as the first step toward development of a design tool. Because the deformable array combines a mechanical actuator with a medical ultrasound transducer, improvement in performance must consider both the ultrasound characterization along with the low frequency actuator characterization. For the ultrasound characterization, time domain FEA simulations of electrical vector impedance accurately predicted the measurements of single array elements. Additionally, simulations of pulse-echo sensitivity and bandwidth were also well matched to measurements. For the low frequency actuator characterization, time domain simulation of the low frequency vector impedance accurately predicted measurement and confirmed the fundamental flexure resonance of the cantilever configuration at 1.3 kHz. Frequency domain FEA included thermal processing effects and predicted actuator curvature arising during fabrication. Finally, frequency domain FEA simulations of voltage-induced displacement accurately predicted measured displacement.     

A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS

As ultrasound imagers become increasingly portable and lower cost, breakthroughs in transducer technology will be needed to provide high-resolution, real-time 3-D imaging while maintaining the affordability needed for portable systems. This paper presents a 32 x 32 ultrasound array prototype, manufactured using a CMUT-in-CMOS approach whereby ultrasonic transducer elements and readout circuits are integrated on a single chip using a standard integrated circuit manufacturing process in a commercial CMOS foundry. Only blanket wet-etch and sealing steps are added to complete the MEMS devices after the CMOS process. This process typically yields better than 99% working elements per array, with less than ±1.5 dB variation in receive sensitivity among the 1024 individually addressable elements. The CMUT pulseecho frequency response is typically centered at 2.1 MHz with a -6 dB fractional bandwidth of 60%, and elements are arranged on a 250 μm hexagonal grid (less than half-wavelength pitch). Multiplexers and CMOS buffers within the array are used to make on-chip routing manageable, reduce the number of physical output leads, and drive the transducer cable. The array has been interfaced to a commercial imager as well as a set of custom transmit and receive electronics, and volumetric images of nylon fishing line targets have been produced.     

Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

In this letter, a 400-mumx400-mum 2-D capacitive micromachined ultrasonic transducer (cMUT) array element is experimentally characterised, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8x10(-7) nm/ radical(Hz) displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging.     

Real-time 3-D ultrasound imaging using sparse synthetic aperture beamforming

A method for real-time three-dimensional (3-D) ultrasound imaging using a mechanically scanned linear phased array is proposed. The high frame rate necessary for real-time volumetric imaging is achieved using a sparse synthetic aperture beamforming technique utilizing only a few transmit pulses for each image. Grating lobes in the two-way radiation pattern are avoided by adjusting the transmit element spacing and the receive aperture functions to account for the missing transmit elements. The signal loss associated with fewer transmit pulses is minimized by increasing the power delivered to each transmit element and by using multiple transmit elements for each transmit pulse. By mechanically rocking the array, in a way similar to what is done with an annular array, a 3-D set of images can be collected in the time normally required for a single image.     

Fabrication and characterization of transducer elements in two-dimensional arrays for medical ultrasound imaging

Some of the problems of developing a two-dimensional (2-D) transducer array for medical imaging are examined. The fabrication of a 2-D array material consisting of lead zirconate titanate (PZT) elements separated by epoxy is discussed. Ultrasound pulses and transmitted radiation patterns from individual elements in the arrays are measured. A diffraction theory for the continuous wave pressure field of a 2-D array element is generalized to include both electrical and acoustical cross-coupling between elements. This theory can be fit to model the measured radiation patterns of 2-D array elements, giving an indication of the level of cross-coupling in the array, and the velocity of the acoustic cross-coupling wave. Improvements in bandwidth and cross-coupling resulting from the inclusion of a front acoustic matching layer are demonstrated, and the effects of including a lossy backing material on the array are discussed. A broadband electrical matching network is described, and pulse-echo waveforms and insertion loss from a 2-D array element are measured.     

Real-time angular scatter imaging system for improved tissuecontrast in diagnostic ultrasound images

A new type of real-time ultrasound imaging system has been developed. In contrast to conventional systems, which process only echoes scattered directly back from tissue to form an image, this system images tissue by displaying energy scattered at other angles. In its present form, the system uses one 32 element, 2.4 MHz phased array transducer in transmit and a second, spatially separate 32 element, 2.4 MHz phased array transducer in receive, to detect sound which is scattered away from the transmit transducer. In order to form an image line, the transmit transducer sends into the body a steered pulse, which is tracked dynamically from the side by the receive transducer. The signal detected by the receive transducer is processed in the same manner as in a standard B-mode phased array system. The final display format is a gray scale sector originating from the transmit transducer. Real-time angular scatter images of phantom and in vivo targets have been formed and compared to standard backscatter B-mode images of the same targets     

Quantitative 3-d diagnostic ultrasound imaging using a modified transducer array and an automated image tracking technique

An approach for acquiring dimensionally accurate three-dimensional (3-D) ultrasound data from multiple 2-D image planes is presented. This is based on the use of a modified linear-phased array comprising a central imaging array that acquires multiple, essentially parallel, 2-D slices as the transducer is translated over the tissue of interest. Small, perpendicularly oriented, tracking arrays are integrally mounted on each end of the imaging transducer. As the transducer is translated in an elevational direction with respect to the central imaging array, the images obtained by the tracking arrays remain largely coplanar. The motion between successive tracking images is determined using a minimum sum of absolute difference (MSAD) image matching technique with subpixel matching resolution. An initial phantom scanning-based test of a prototype 8 MHz array indicates that linear dimensional accuracy of 4.6% (2 /spl sigma/) is achievable. This result compares favorably with those obtained using an assumed average velocity [31.5% (2 /spl sigma/) accuracy] and using an approach based on measuring image-to-image decorrelation [8.4% (2 /spl sigma/) accuracy]. The prototype array and imaging system were also tested in a clinical environment, and early results suggest that the approach has the potential to enable a low cost, rapid, screening method for detecting carotid artery stenosis. The average time for performing a screening test for carotid stenosis was reduced from an average of 45 minutes using 2-D duplex Doppler to 12 minutes using the new 3-D scanning approach.     

Experimental characterization of collapse-mode CMUT operation

This paper reports on the experimental characterization of collapse-mode operation of capacitive micromachined ultrasonic transducers (CMUTs). CMUTs are conventionally operated by applying a direct current (DC) bias voltage less than the collapse voltage of the membrane, so that the membrane is deflected toward the bottom electrode. In the conventional regime, there is no contact between the membrane and the substrate; the maximum alternating current (AC) displacement occurs at the center of the membrane. In collapse-mode operation, the DC bias voltage is first increased beyond the collapse voltage, then reduced without releasing the collapsed membrane. In collapse-mode operation, the center of the membrane is always in contact with the substrate. In the case of a circular membrane, the maximum AC displacement occurs along the ring formed between the center and the edge of the membrane. The experimental characterization presented in this paper includes impedance measurements in air, pulse-echo experiments in immersion, and one-way optical displacement measurements in immersion for both conventional and collapse-mode operations. A 205-microm x 205-microm 2-D CMUT array element composed of circular silicon nitride membranes is used in the experiments. In pulse-echo experiments, a custom integrated circuit (IC) comprising a pulse driver, a transmit/receive switch, a wideband low-noise preamplifier, and a line driver is used. By reducing the parasitic capacitance, the use of a custom IC enables pulse-echo measurements at high frequencies with a very small transducer. By comparing frequency response and efficiency of the transducer in conventional and collapse regimes, experimental results show that a collapsed membrane can be used to generate and detect ultrasound more efficiently than a membrane operated in the conventional mode. Furthermore, the center frequency of the collapsed membrane can be changed by varying the applied DC voltage. In this study, the center frequency of a collapsed transducer in immersion is shown to vary from 20 MHz to 28 MHz with applied DC bias; the same transducer operates at 10 MHz in the conventional mode. In conventional mode, the maximum peak-to-peak pressure is 370 kPa on the transducer surface for a 40-ns, 25-V unipolar pulse excitation. In collapse mode, a 25-ns, 25-V unipolar pulse generates 590 kPa pressure at the surface of the transducer.