Development and evaluation of a compact 6-axis force/moment sensor with a serial structure for the humanoid robot foot

In order to walk safely, forces and moments exerted on humanoid robot foot should be measured and used for controlling the robot. This paper describes the development and evaluation of a six-axis force/moment sensor used under humanoid robot foot. The developed sensor is capable of measuring 400 N horizontal force, 1000 N vertical force, 20 N·m moment about the horizontal axis and 10 N·m moment about the vertical axis using rectangular cross-sectional beams. The structure of the sensor is newly modeled, and the sensing elements are simulated by using finite element method (FEM). Then the sensor is fabricated by attaching strain gages onto the beams. Finally, a characteristic test of the developed sensor is carried out, and the output from FEM analysis agrees with those from the characteristic test.     

Development and evaluation of a two-axial shearing force sensor consisting of an optical sensor chip and elastic gum frame

We developed a promising shearing force sensor that is small in size and can measure shearing force along two axes independently. This sensor consists of an elastic gum frame and an optical sensor chip (6 mm × 6 mm × 8 mm). From the experimental results, the resolutions of the sensor along the x- and y-axes are found to be 0.070 N and 0.063 N. We also experimentally demonstrated that the sensor can separately measure shearing force along two axes. Finally, we demonstrated that the scale factor which correspond to resolution and linear portion which correspond to measuring range of the signals can be changed easily by using three types of elastic gum frame. This sensor can be embedded in the finger of a robot hand and use it to not only measure shearing force but also detect the slip phenomenon.     

High-precision and high-speed positioning of 100 G linear synchronous motor

The present paper describes a moving permanent magnet linear synchronous motor (MPM LSM) that can move with an acceleration above 100 G (=980 m/s²), and is also capable of high-precision and high-speed positioning. The MPM LSM consists of a mover including permanent magnets and a double-sided electromagnet stator. It can produce a thrust of 4.56 × 10³ N and has a working range wider than 1 m. The MPM LSM mover is improved for light weight and is driven using a suitable phase lead for flux weakening. The combination of the improved mover and the suitable phase lead provides motion at an acceleration above 100 G and a velocity above 12 m/s. The positioning characteristics of the improved MPM LSM are examined using a controller with two suitable phase lead functions. The control system shows a positioning accuracy and a positioning resolution of 500 nm, which is similar to the vibration amplitude of the sensor output in open loop. In 300-mm step positioning, the improved MPM LSM shows an acceleration above 660 m/s² and a velocity above 8.3 m/s. It takes less than 101 ms to reduce the positioning error to less than 5 μm. The temperature rise during positioning is also examined experimentally. Continuous positioning for longer than 30 minutes increases the temperature of the MPM LSM, but by less than 6 °C.     

An orifice meter for bidirectional air flow measurements: Influence of gas thermo-hygrometric content on static response and bidirectionality

This paper presents the design and calibration of an ISO non-compliant orifice plate flowmeter whose intended use is for respiratory function measurements in the bidirectional air flow range ±9 L/min.The novelty of the proposed sensor consists of a plate beveled in both upstream and downstream sides: a symmetrical geometry is adopted in order to perform bidirectional measurements of flow rate. A mathematical model is introduced to quantify the influence of temperature on the sensor output. Four different positions of the pressure static taps are evaluated in order to maximize bidirectionality. An index is also introduced in order to quantitatively estimate the anti-symmetry of the sensor's response curve.Trials are carried out to evaluate the influence on sensor output of air temperatures (22 °C, 30 °C and 37 °C) at different values of relative humidity (5%, 55% and 85%). Experimental data show a quite good agreement with the theoretical model (R²>0.98 in each condition).The influence of air temperature on the sensor output is minimized by introducing a correction factor based on the theoretical model leading to measurement repeatability better than 2% in overall range of calibration. The mean sensitivity in the calibration range is about 2 kPa L⁻¹·min allowing to obtain a sensor discrimination threshold lower than 0.2 L/min in both directions. The time constant of the whole measurement system, equal to 2.40±0.03 ms, leads to a bandwidth up to 80 Hz making the sensor suitable for respiratory function measurements.     

A force-matching method for quantitative hardness measurements by atomic force microscopy with diamond-tipped sapphire cantilevers

We present a new method to improve the accuracy of force application and hardness measurements in hard surfaces by using low-force (<50 μN) nanoindentation technique with a cube-corner diamond tip mounted on an atomic force microscopy (AFM) sapphire cantilever. A force calibration procedure based on the force-matching method, which explicitly includes the tip geometry and the tip-substrate deformation during calibration, is proposed. A computer algorithm to automate this calibration procedure is also made available. The proposed methodology is verified experimentally by conducting AFM nanoindentations on fused quartz, Si(1 0 0) and a 100-nm-thick film of gold deposited on Si(1 0 0). Comparison of experimental results with finite element simulations and literature data yields excellent agreement. In particular, hardness measurements using AFM nanoindentation in fused quartz show a systematic error less than 2% when applying the force-matching method, as opposed to 37% with the standard protocol. Furthermore, the residual impressions left in the different substrates are examined in detail using non-contact AFM imaging with the same diamond probe. The uncertainty of method to measure the projected area of contact at maximum force due to elastic recovery effects is also discussed.     

Small-capacity deadweight force standard machine compensating loading frame

The Korea Research Institute of Standards and Science (KRISS) has developed a 20 N deadweight force standard machine. The machine consists of a weight stack, a loading frame, a taring system, a main body and a control system. The taring system has the role of compensating the initial force generated by the loading frame. With two motors, a displacement sensor, several limit switches, and a synthetic control system consisting of a programmable logic controller and an operating PC, the machine can be operated almost fully automatically. The machine can generate a compressive force in the range of 0.5–22 N with a relative expanded uncertainty of 1.0 × 10^–4. The machine was compared with a 200 N deadweight force standard machine. In the comparison, the relative deviation was 5.8 × 10^–5, less than the declared expanded uncertainty of the force standard machines, therefore confirming the machine’s accuracy.     

Effect of silicon nitride coating thickness on fatigue of silicon microbeams

In this paper, two silicon nitride layers with thickness, 0.2 and 0.4 μm, are coated onto single crystal silicon (SCS) in order to achieve Si₃N₄/Si cantilever microbeams. The effect of LPCVD silicon nitride surface coatings on fatigue properties of SCS cantilever microbeams is investigated. Fatigue testing is conducted at both 40 Hz and 100 Hz. Typical S–N (strain amplitude–fatigue cycle) curves of the beams are achieved and correlated fatigue failure modes are investigated. It is found that thinner Si₃N₄ coating of 0.2 μm results in better fatigue lives of Si₃N₄/Si beams than thicker Si₃N₄ coating of 0.4 μm. Both thinner and thicker coated beams have major fatigue crack planes along {1 1 1} planes; however, thicker coated beams possess specific failure mode of delamination, which is not found in thinner coated beams. Delamination reduces the reinforcing effect of thicker Si₃N₄ coating and leads to its shorter fatigue life. For thicker coated beams, fatigue life at 100 Hz is longer than that at 40 Hz. The mechanism for delamination and the effect of cyclic frequency is investigated, and factors for better fatigue life are proposed.     

Design and application of fiber Bragg grating (FBG) geophone for higher sensitivity and wider frequency range

The fiber Bragg grating geophone sensor with higher sensitivity and wider frequency range was reported. The methods to increase the sensitivity of the FBG cantilever sensor were presented. The acceleration sensitivity of the optimized FBG geophone is 220 pm/g, and the resonant frequency can reach to 295 Hz. The experiments show that the FBG geophone system has the minimum detectable acceleration of 1 mm/s². Some factual application examples of using this fiber Bragg grating geophone monitoring system for micro seismic monitoring in coal mine were presented.     

Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Application of two-output port fiber coupler as gasoline level sensor

Detection of gasoline level can be done in a safe and simple way using two output port multimode fiber coupler with a structure of 2 × 2 as a sensor. Two output ports (sensing port) are connected with two reflector displacement device (RDD) and functioned as two probes. These probes are placed on the wall of gasoline tank in a storied and work interchangeably or together depending on setting of these probes. Detection mechanism of the system is based on changes in intensity of reflected light from the reflector RDD that shifts due to changes in level of gasoline (hydrostatic pressure principle). Changes in intensity of light coming into the sensing port are then forwarded to the optical detector. Experiments performed by varying the location of the second probe as 45 cm, 50 cm, and 55 cm above the first probe to detect the level of gasoline in the process of filling and emptying the tank. Experimental results show the process of filling and emptying the tank have small differences of 6% with the dynamic range, the linear region, and resolution are 100 cm, 70 cm, and 0.4 cm respectively. Sensor sensitivity in filling and emptying process of the tank are 2.7 mV/cm and 2.8 mV/cm respectively. These results were the best performance of the sensor, which occurs when the level of the second probe was 55 cm above the first probe.     

Plastic deformation of 25CrMo4 steel during wear: Effect of the temperature,the normal force,the sliding velocity and the structural state

This article follows a previous study on friction and wear of 25CrMo4 steel [N. Khanafi-Benghalem, K. Loucif, E. Felder, F. Delamare, Influence de la température sur les mécanismes de frottement et d’usure des aciers X12NiCrMoSi25-20 et 25CrMo4 glissant sur du carbure de tungstène, Matériaux et techniques 93 (2005) 347–362]. The aim of our work is to study in more details the process of plastic deformation and the wear rate of this steel in lubricated sliding against cemented tungsten carbide, process observed in the previous work. The considered parameters are the temperature T (from 20 to 200 °C), the normal force P (from 500 to 1500 N), the steel structure (normalised HV 220 and quenched/tempered HV 480 states) and the sliding velocity v (from 0.05 to 0.3 m/s). We measured the friction coefficient and the sample total volume loss. A displacement sensor follows the volume loss evolution during the test; this follow-up is approximate because of the sample plastic flow which leads to the formation of peripheral burrs. All the tests conditions generate a significant plastic deformation of the sample steel, even in the quenched/tempered state: it produces a marked increase of the surface hardness, the work hardened layer being much finer for the quenched/tempered state (15 μm) than for the normalised state (40 μm at 20 °C). For temperatures T ≤ 100 °C in normalised state, the wear follows the Archard's law with an increasing rate with temperature. For T ≥ 120 °C, the wear rate decreases during the test, the global volume of wear being a decreasing function of T. For the quenched/tempered state, the wear rate decreases with the increase of the normal force, this decrease is less than 30% of the normalised state value. The material heating during the wear tests is well correlated with the friction dissipated power, but remains small, except in extreme cases (v maximum, great friction at high temperatures). These results suggest the existence of two wear mechanisms: abrasion by sample debris and burrs emission by plastic flow. The abrasion is probably the dominating mechanism for the tests carried out at the lowest temperatures. The plastic flow becomes a significant component at the highest temperatures. Using a contact model, we discuss to what extent the influence of the temperature and the strain rate on the steel hardness and ductility could explain the temperature and the sliding velocity effect on wear. Other phenomena are probably present: the influence of the steel microstructure and the lubricant on the size and/or the number of particles responsible for abrasion.     

Wear characteristics of Cr3C2–NiCr and WC–Co coatings deposited by LPG fueled HVOF

Wear behavior of the HVOF deposited Cr₃C₂–NiCr and WC–Co coatings on Fe-base steels were evaluated by the pin-on-disc mechanism. The constant normal load applied to the pin was 49 N and sliding distance was 4500 m with velocity of 1 m/s, at ambient temperature and humidity. The specific wear rate of WC–Co coating was 3 mm³/N m and Cr₃C₂–NiCr coating was 5.3 mm³/N m. SEM/EDAX and XRD techniques were used to analyze the worn out surface and wear debris. The Fe₂O₃ was identified as the major phase in the wear debris. The wear mechanism is mild adhesive wear in nature.     

Tribological property investigation on a novel pneumatic actuator with integrated piezo actuators

Pneumatic piston–cylinder actuators are commonly used in industry for a variety of automation and robotics applications. In order to suppress leakage, these actuators comprise seal rings which unfortunately introduce friction and affect the positioning accuracy and output force. This article investigates vibrations of the seal generated by integrated piezo actuators to reduce friction force. For this, two piezoelectric stacks are integrated in the cylinder and used to excite vibration modes. This concept was studied in a compact cylinder pneumatic actuator with a bore diameter of 5 mm and a stroke of 10 mm. Dry friction measurement shows a 52% reduction from the original friction force at a driving frequency of 18.29 kHz and vibration amplitude of 0.05 μm. In the wet friction experiments, the friction force can be reduced by 54% from the original wet friction with vibrations at amplitude of 0.04 μm.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Characteristics of a dynamic atomic force microscopy based on a higher-order resonant silicon cantilever and experiments

In order to improve the sensitivity and scanning speed of the dynamic AFM, a surface scanning method using higher-order resonant cantilever is adopted and investigated based on the higher-order resonance characteristics of the silicon cantilever, and the theoretical analysis and experimental verification on the higher-order resonance characteristics of the corresponding dynamic AFM cantilever are given. In this method, the cantilever is excited to oscillate near to its higher-order resonant frequency which is several times higher than that of the fundamental mode. Then the characteristic changes a lot compared with the first-order resonant cantilever. Because of the changes of the quality factor, amplitude and the mode shape of the cantilever, the higher-order resonant AFM gets higher sensitivity and scanning speed. Based on the home-built tapping-mode AFM experiment system, the resolution and the response time of the first and second order resonance measured by experiment are respectively: 0.83 nm, 0.42 nm; 1265 μs, 573 μs. The higher-order resonance cantilever has higher sensitivity and the dynamic measurement performance of the cantilever is significantly improved from the experimental results. This can be a useful method to develop AFM with high speed and high sensitivity. Besides above, the surface profile of a grating sample and its three-dimensional topography are obtained by the higher-order resonant mode AFM.     

Tribology characteristics of magnesium alloy AZ31B and its composites

In this paper, wear characteristics of magnesium alloy, AZ31B, and its nano-composites, AZ31B/nano-Al₂O_3, processed by the disintegrated melt deposition technique are investigated. The experiments were carried out using a pin-on-disk configuration against a steel disk counterface under different sliding speeds of 1, 3, 5, 7 and 10 m/s for 10 N normal load, and 1, 3 and 5 m/s for 30 N normal load. The worn samples and wear debris were then examined under a field emission scanning electron microscopy equipped with an energy dispersive spectrometer to reveal its wear features. The wear test results show that the wear rates of the composites are gradually reduced over the sliding speed range for both normal loads. The composite wear rates are higher than that of the alloy at low speeds and lower when sliding speed further increased. The coefficient of friction results of both the alloy and composites are in the range of 0.25–0.45 and reaches minimums at 5 m/s under 10 N and 3 m/s under 30 N load. Microstructural characterization results established different dominant mechanisms at different sliding speeds, namely, abrasion, delamination, oxidation, adhesion and thermal softening and melting. An experimental wear map was then constructed.     

Open-loop linear differential current sensor based on dual-mode Hall effect

This study proposes a novel double Hall linear differential sensor and investigates its output and temperature characteristics in detail. Finite element method is used to confirm the effectiveness of the proposed method. A practical, open-loop current sensor circuit is designed and constructed based on dual-mode Hall effect theory. Results show that the quiescent output voltage is significantly reduced, and that the signal amplitude is increased by 99.5%. Moreover, sensitivity is more than 40 mV/mT, linearity is 1.2% full scale, and the zero drift coefficient is 0.033 mV/°C. The differential output model can suppress common mode interference and zero drift. The sensor also exhibits temperature self-compensation and non-linear correction functions.     

A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine

This paper presents a long-stroke contact scanning probe with high precision and low stiffness for micro/nano coordinate measuring machines (micro/nano CMMs). The displacements of the probe tip in 3D are detected by two plane mirrors supported by an elastic mechanism, which is comprised of a tungsten stylus, a floating plate and two orthogonal Z-shaped leaf springs fixed to the outer case. A Michelson interferometer is used to detect the vertical displacement of the mirror mounted on the center of the floating plate. An autocollimator based two dimensional angle sensor is used to detect the tilt of the other plane mirror located at the end of the arm of the floating plate. The stiffness and the dynamic properties are investigated by simulation. The optimal structural parameters of the probe are obtained based on the force-motion model and the constrained conditions of stiffness, measurement range and horizontal size. The results of the performance tests show that the probe has a contact force gradient within 0.5 mN/μm, a measuring range of (±20 μm), (±20 μm), and 20 μm, respectively, in X, Y and Z directions, and a measurement standard deviation of 30 nm. The feasibility of the probe has preliminarily been verified by testing the curved surface of a convex lens.     

Influences of lubrication conditions and blank holder force on micro deep drawing of C1100 micro conical–cylindrical cup

Lubrication conditions and blank holder force (BHF) are two key processing parameters in deep drawing. This is more obvious in micro forming because of the miniaturization of the specimen size. Micro conical–cylindrical cups with internal conical bottom diameter of only 0.4 mm were well formed. The influences of lubrication conditions and BHF on micro deep drawing of micro conical–cylindrical cups were investigated using a micro blanking–deep drawing compound mold. Pure copper C1100 with a thickness of 50 μm, which was annealed at 450 °C for 2 h in vacuum condition, was chosen as the specimen material. The experiments were conducted on a universal testing machine with a forming velocity of 0.05 mm/s under 4 kinds of lubrication conditions and BHF. The experimental results showed that a micro conical–cylindrical cup with internal conical bottom diameter of only 0.4 mm was well formed, and the limiting drawing ratio (LDR) reached 2.1. The polyethylene (PE) film, which decreased the drawing force and increased the drawing ratio (DR), was superior to castor oil, petroleum jelly and dry friction, and can be chosen as a proper lubricant for micro deep drawing. The rim of the micro cup seriously wrinkled when BHF was less than 4.2 N. The bottom of the micro cup cracked when the BHF was larger than 5.6 N.     

Performance tests of a new non-invasive sensor unit and ultrasound electronics

Industrial applications involving pulsed ultrasound instrumentation require complete non-invasive setups due to high temperatures, pressures and possible abrasive fluids. Recently, new pulser-receiver electronics and a new sensor unit were developed by Flow-Viz. The complete sensor unit setup enables non-invasive Doppler measurements through high grade stainless steel. In this work a non-invasive sensor unit developed for one inch pipes (22.5 mm ID) and two inch pipes (48.4 mm ID) were evaluated. Performance tests were conducted using a Doppler string phantom setup and the Doppler velocity results were compared to the moving string target velocities. Eight different positions along the pipe internal diameter (22.5 mm) were investigated and at each position six speeds (0.1–0.6 m/s) were tested. Error differences ranged from 0.18 to 7.8% for the tested velocity range. The average accuracy of Doppler measurements for the 22.5 mm sensor unit decreased slightly from 1.3 to 2.3% across the ultrasound beam axis. Eleven positions were tested along the diameter of the 48.4 mm pipe (eight positions covered the pipe radius) and five speeds were tested (0.2–0.6 m/s). The average accuracy of Doppler measurements for the 48.4 mm sensor unit was between 2.4 and 5.9%, with the lowest accuracy at the point furthest away from the sensor unit. Error differences varied between 0.07 and 11.85% for the tested velocity range, where mostly overestimated velocities were recorded. This systematic error explains the higher average error difference percentage when comparing the 48.4 mm (2.4–5.9%) and 22.5 mm (1.3–2.3%) sensor unit performance. The overall performance of the combined Flow-Viz system (electronics, software, sensor) was excellent as similar or higher errors were typically reported in the medical field. This study has for the first time validated non-invasive Doppler measurements through high grade stainless steel pipes by using an advanced string phantom setup.