利用离子风实现后吸式进样与电离集成的离子源

针对现用离子源工作时需外接庞大复杂的供气装置,不利于便携的不足,提出了一种基于离子风的敞开式离子源和微型气泵集成系统。设计了一种新型阵列式针-柱放电电极结构,其可以在大气压下实现敞开式离子源和微型气泵双重功能。选用0~-20 000V的负直流高压供电电源,10mm的针-柱间距,分别对单排针-单柱,单排针-双柱,双排针-双柱3种放电电极结构进行电晕放电,并采用testo 405-V1风速计进行风速测量。结果表明,双排针-双柱产生的风速最大。采用COMSOL多物理场仿真软件对3种电极结构进行离子风仿真,并与实验结果对比,结果吻合良好。以双排针-双柱电极结构进行了离子源和微型气泵集成系统实验。结果显示:该结构放电产生的离子风最大为2.11m/s,可以将装置后端处的乙酸样品吸入;电离产生的最大电流信号为-10nA左右,表明该装置实现了电离功能。本文所设计的离子源和微型气泵集成系统,实现了后吸式进样并电离,省去了庞大复杂的供气装置,有望应用于便携式分析仪器中。     

针-柱结构敞开式离子源和微型气泵集成系统的放电特性

设计了一种小型针-柱电晕放电结构,实现了敞开式离子源和微型气泵的系统集成。通过数码相机拍摄的针-柱放电图像和示波器记录的特里切尔放电波形,验证了该针-柱结构在没有外界气流、间隙仅2 mm的实验条件下实现了稳定的电晕放电。对针-柱结构电晕放电特性进行了研究,讨论了放电电压、镇流电阻、柱直径大小、针-柱间距等参数对针-柱电晕放电的影响,通过伏安特性曲线分析得出在放电电压为-3 800 V、镇流电阻为10 MΩ、柱直径为4 mm、间距为2 mm的实验条件下,产生的离子风气体流速最大（采用testo 405-V1风速仪测得最大气体流速为1.15 m/s）。该针-柱结构可采用微机电系统（MEMS）工艺加工实现,有望应用于质谱仪、离子迁移谱、高场非对称波形离子迁移谱等便携式分析仪器中,实现敞开式离子源和微型气泵的双重功能。     

敞开式小型线-筒电极负电晕放电离子源(英文)

针对目前商用质谱仪的离子源都为封闭式且工作在真空或者低气压环境中,应用范围十分受限这一问题,提出了一种新型的可在大气环境下工作的离子源.该离子源通过电晕放电产生离子,呈线-筒结构,由内电极和外筒电极组成,电极直径分别为0.16 mm和4 mm.外筒电极上开有对称的4个槽,用于通入样品和牵引离子.实验结果表明,在大气环境下,当载气为N2,内电极电压达到-3 800 V时,内电极和外筒电极之间发生电晕放电,可以很好地电离乙酸等负电性的化学物质.质谱图显示,大气中的N2和O2可能也参与电离,生成了NO-2 (m/z:46)、 NO-3 (m/z:62)和[M+NO-H]- (m/z: 89).结合COMSOL仿真软件,对该离子源的放电起始电压进行了理论分析,分析结果与实验结果相符.此外,该离子源接口简单,可广泛应用于敞开式质谱仪、离子迁移质谱仪(IMS)和高场非对称波形离子迁移质谱仪(FAIMS)中.     

采用针-环离子源的集成式高场非对称波形离子迁移谱系统

为了实现离子源和高场非对称波形离子迁移谱的其它部分的集成,本文基于PCB工艺设计了一种新型的针-环离子源结构。该结构主要由针电极、环电极、进气底座以及针固定底座组成,针电极采用针尖曲率半径为28μm的不锈钢针作为放电阴极,直径为3mm、高度为16mm的铜环作为放电阳极。放电特性实验结果表明:针-环离子源在放电电压-2kV和-2.8kV时,分别进入了电晕放电和辉光放电,能够在大气压环境下实现稳定放电。在载气流速为1.5L/min、方波射频电压幅值为300V的条件下,两者FAIMS谱图中补偿电压基本相同,且采用针-环离子源和紫外灯离子源所得的FAIMS谱图的电流峰值分别为64pA和45pA,由此表明集成式针-环离子源FAIMS系统能够稳定工作,且相比紫外灯离子源集成性更好,电流信号更强。     

基于叠型场线性离子阱的便携式质谱仪研制与应用

介绍了自行研制的基于叠型场线性离子阱的便携式质谱仪结构,以及初步的应用测试。该质谱仪的质量分析器采用叠型场线性离子阱,离子源采用辉光放电电子轰击电离源和介质阻挡放电离子源。仪器重10 kg,功耗低于100 W,体积33 cm×20 cm×20 cm,可以对气体、固体和液体进行检测。挥发性有机气体通过膜进样接口实现大气压直接进样,采用内置的辉光放电电子轰击电离源对其电离。介质阻挡放电离子源作为大气压离子源,通过非连续大气压接口实现质谱的大体积进样,及对枪击残留物DDU和去痛片等的快速检测。     

EHD空气泵气流加速分析

为了得到更高的空气放电离子风速度和流量,对基于空气放电离子风技术的电流体动力学(EHD)空气泵气流加速机理进行了微观说明和宏观分析。在理想流体下,对EHD空气泵进行数学建模,应用Matlab软件对EHD空气泵电气耦合过程进行了理论探讨。并建立了多极静电空气泵气流加速系统模型。研究结果表明EHD空气泵极间距、极间夹角、极间电压值和极间电流对气流速度影响较大,为后续实验研究提供理论基础。     

基于厚膜工艺的微型FAIMS生化气体传感器设计

据高场非对称波形离子迁移谱(high-field asymmetric waveform ion mobility spectrometry,FAIMS)原理,设计了一种微型生化气体传感器。在大气压环境下,采用波长116.5 nm、电离能为10.6 e V真空紫外灯离子源对样品进行电离。迁移管的制作采用厚膜工艺,将迁移区和检测区集成到了陶瓷芯片上,迁移区由上下两块平板电极构成,尺寸为20 mm×10 mm×0.45 mm;检测区尺寸为8 mm×10 mm×0.45 mm。搭建了相应的FAIMS外围检测平台,以丙酮和甲苯为样品进行实验,通过高场非对称波形离子迁移谱技术进行传感器的性能验证实验,实验得到了它们的FIAMS谱图,表明所设计的基于FAIMS原理的气体传感器可以实现离子分离和过滤功能。     

针极电子枪化学电离

本文描述了用简单针极电子枪实现化学电离(CI)的方法。反应气体被针状电极发射的电子电离。此离子源能用于氧化或还原反应气。研究了离子源的特性,如反应离子对气压和放电电压的依赖性。对某些醇类的CI谱作了研究。这种CI法比通常的CI源更有效,而且二者产生的谱图相似。     

介质阻挡放电电离技术及其应用研究进展

介质阻挡放电电离源是一种非表面接触型的常压敞开式电离源,借助大气压下惰性气体的介质阻挡放电产生稳定的低温等离子体,可在几秒钟内实现液态、固态和气态样品的解吸附离子化,将其用于质谱检测,无需复杂的样品前处理,在常温、常压环境下即可对样品进行原位、实时、快速和无损检测。介质阻挡放电电离源自提出以来发展迅速,现已被广泛应用于食品安全、公共安全、药物分析、环境监测、生命科学等诸多领域。本文综述了介质阻挡放电电离源的发展历程、电离机理、结构分类、影响因素及应用进展,并对其发展趋势进行了展望。     

高能量离子束诊断质谱仪的研制及性能表征

本研究开发了一台应用于高能量离子束诊断的直线式飞行时间质谱仪,实现了其与高能真空弧放电离子源的联用。该仪器加速电压30 kV,飞行腔有效飞行距离1.5 m,通过短脉冲离子门精确截取,ICCD高速相机优化聚焦,仪器分辨率优于90 FWHM,对放电过程中产生的等离子体可实现不同时间的离子成分分析。将该方法用于真空弧放电离子源放电过程中离子成分的检测,放电2 μs时,电离成分以气态离子C⁺、O⁺、C²⁺、O²⁺为主;放电6 μs后,除气体成分外,还可以检测到Fe⁺、Cu⁺及其同位素金属离子峰。该仪器能够给出离子源放电产生离子的种类、价态以及相对含量等信息,可实现整个放电过程产生离子成分信息的准确诊断。     

MICRO ELECTRICAL DISCHARGE MACHINING DEPOSITION IN AIR

A new deposition method is described using micro electrical discharge machining (EDM) to deposit tool electrode material on workpiece in air. The basic principles of micro electrical discharge deposition (EDD) are analyzed and the realized conditions are predicted. With an ordinary EDM shaping machine, brass as the electrode, high-speed steel as the workpiece, a lot of experiments are carried out on micro EDD systematically and thoroughly. The effects of major processing parameters, such as the discharge current, discharge duration, pulse interval and working medium, are obtained. As a result, a micro cylinder with 0.19 mm in diameter and 7.35 mm in height is deposited. By exchanging the polarities of the electrode and workpiece the micro cylinder can be removed selectively. So the reversible machining of deposition and removal is achieved, which breaks through the constraint of traditional EDM. Measurements show that the deposited material is compact and close to workpiece base, whose components depend on the tool electrode material.     

低频率射频辉光放电的研究

辉光放电电离源可用来检测固态、液态及气态样品,目前主要用于无机固体样品的元素分析和定量检测。本研究将低频率射频辉光放电（Lf-RFGD）与飞行时间质谱仪（TOF MS）联用用于分析液体和气体样品。研究了电离腔真空度、进样管尺寸、辅助气压力、放电频率及电极板压差对电离效率的影响。最优分析条件为：电离腔真空度约30 Pa,进样管长150 mm、内径0.25 mm,辅助气压强约1.0 MPa,放电频率2 MHz,电极板压差约100 V。在此条件下,放电功率约20 W,对液体样品的检出限约0.1 pg、对挥发性样品的检出限约20 mg/m³,检测半峰分辨率约3 000（FWHM）。将Lf-RFGD TOF MS应用于实际药品溶液和挥发性有机物（VOCs）的检测。本仪器对药品溶液的检测灵敏度与常用检测仪器相比无优势,但对挥发性有机物的检测效果较好,为开发低成本的VOCs检测仪器提供了有吸引力的选择。     

Micro electro discharge machine with an inchworm type of micro feed mechanism

A micro electro discharge machine with an inchworm type of micro feed mechanism has been developed. The prototype of micro electro discharge machine is comprised of a wire electro discharge grinding unit, a rotating unit of electrode, RC circuitry for micro electro discharge generation and a subsystem detecting and controlling machining process, in addition to the inchworm mechanism. In the design of the inchworm mechanism, a novel clamp mechanism with force magnifying structure is devised to increase its thrust capability and a pair of guide sleeves together with the clamps are used to decrease yawing error. The inchworm mechanism prototype has 60 mm stroke only limited by the length of the shaft, less than 2 μm yawing error and reaches to 30N output thrust force. The machining experiments carried out on the micro EDM prototype are also described. The techniques to machine micro electrode, micro holes with high aspect ratio, micro structures on stainless steel and silicon materials are discussed. Micro electrode diameter as small as 25 μm and micro holes with minimum size of less than 50 μm are obtained. And the maximum aspect ratios of micro electrodes and micro holes exceed 20 and 10 respectively.     

Bipolar corona assisted jet flow for fluidic application

In this paper, we present a study on a jet flow, assisted by low net charge ion wind from bipolar corona discharge setup. The ion wind is simultaneously generated from both positive and negative electrodes placed in parallel, adding momentum to the bulk flow directed alongside the electrodes and focused in the middle of interelectrode space. The electrodes are connected to a single battery-operated power source in a symmetrical arrangement, where the electrode creating charged ions of one polarity also serves as the reference electrode to establish the electric field required for ion creation by the opposite electrode, and vice versa. Multiphysics numerical simulation is carried out with programmable open source OpenFOAM, where the measured current-voltage is applied as a boundary condition to simulate the electrohydrodynamics flow. The jet flow inside the device is verified by hotwire anemometry using hotwires embedded within the device, with the measured values in good agreement with simulation. The corona discharge helped to focus the jet and increased the flow peak velocity from 1.41 m/s to 2.42 m/s with only 27.1 mW of consumed discharge power. The device is robust, ready-to-use and minimal in cost. In addition, as the oppositely charged corona flows are self-neutralized, the generated air flow remains neutral and therefore does not attach to a particular target, which expands the application range. These are important features, which can contribute to the development of multi-axis fluidic inertial sensors, fluidic amplifiers, micro blowers, gas mixing, coupling and analysis with space constraints and/or where neutralized discharge process is required, such as circulatory flow heat transfer or the formation of low charged aerosol for inhalation and charged particle deposition.     

Fabrication of micro spur gears by step powder extrusion of Zn-22wt%Al powder without sintering process

Micro spur gears were fabricated using the LIGA process and step powder extrusion without sintering. It is important to manufacture micro dies with high aspect ratios and determine the appropriate extrusion conditions for the micro-forming process. Micro-extrusion dies with close tolerance and long bearing length were produced by the LIGA process. Superplastic Zn-22wt%Al powders can deform under low stresses and exhibit a good micro-formability (average strain rate: 10^?3s^?1; constant temperature: 250°C). These powders were compacted to a cylinder (diameter: 3 mm; height: 10 mm) under 10kN compressive force, and sintered at 350°C for two hours. Micro spur gear shafts were not produced upon extrusion because of the high working pressure on the die surface. For the reduction of the forming load, step powder extrusion was carried out on the compacted powder without a sintering process, but controlling the temperature dwelling period. This process has succeeded in fabricating micro-gear shafts.     

Experimental research on effects of process parameters on servo scanning 3D micro electrical discharge machining

Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials.In 3D SSMEDM process,the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap,instead of the traditional methods that depend on experiential models or intermittent compensation.However,the effects of process parameters on 3D SSMEDM have not been reported up until now.In this study,the emphasis is laid on the effects of pulse duration,peak current,machining polarity,track style,track overlap,and scanning velocity on the 3D SSMEDM performances of machining efficiency,processing status,and surface accuracy.A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon.The experimental results were obtained as follows.Peak current plays a main role in machining efficiency and surface accuracy.Pulse duration affects obviously the stability of discharge state.The material removal rate of cathode processing is about 3/5 of that of anode processing.Compared with direction-parallel path,contour-parallel path is better in counteracting the lateral wear of tool electrode end.Scanning velocity should be selected moderately to avoid electric arc and short.Track overlap should be slightly less than the radius of tool electrode.In addition,a typical 3D micro structure of eye shape was machined based on the optimized process parameters.These results are beneficial to improve machining stability,accuracy,and efficiency in 3D SSMEDM.