Demonstration of Ultraviolet 6H-SiC PIN Avalanche Photodiodes

We report electrical and electrooptical characteristic of mesa-structure 6H-SiC PIN avalanche photodiodes. At a gain of 1000, the dark current density is 9.2 muA/cm². The excess noise factor corresponds to a k value of ~0.1. In addition, peak responsivity of 80 mA/W was observed at 290 nm (external quantum efficiency of ~35%)     

High Detection Sensitivity of Ultraviolet 4H-SiC Avalanche Photodiodes

We report 4H-SiC p-i-n avalanche photodiodes (APDs) with very low dark current. When biased for a photocurrent gain M of 1000, a 100-mum-diameter device exhibits dark current of 5 pA (63 nA/cm²), corresponding to primary multiplied dark current of 5 fA (63 pA/cm²). The peak responsivity at unity gain is 93 mA/W (external quantum efficiency = 41%) at lambda = 280 nm. The excess noise factor corresponds to k = 0.1. Detection of several tens of femtowatts of ultraviolet light is reported.     

Ultra-low noise avalanche photodiodes with a "centered-well" multiplication region

We report avalanche photodiodes with a "centered-well" multiplication region that have achieved high gain, low noise, and low dark current. The multiplication region consists of an /spl sim/80 nm-thick Al/sub 0.2/Ga/sub 0.8/As layer sandwiched between two thin (10/spl sim/20 nm) layers of Al/sub 0.6/Ga/sub 0.4/As. Monte Carlo simulation shows the beneficial effect of spatial modulation of the ionization rates in this structure compared to homojunctions.     

Self-consistent 2-D Monte Carlo Simulations of InSb APD

Self-consistent Monte Carlo simulations are used to study the low noise and high gain potential of InSb avalanche photodiodes. It is found that for an electron-initiated avalanche, excess noise factors well below the minimum McIntyre value persist up to gain values of around 60 for a 3.2 /spl mu/m avalanche region. For these very low noise values, it is found that multiplication has a very unusual voltage dependence which may be exploited for highly efficient novel low noise planar arrays operating at low voltage.     

High-responsivity high-gain In/sub 0.53/Ga/sub 0.47/As-InP quantum-well infrared photodetectors grown using metal-organic vapor phase epitaxy

We report the growth and fabrication of bound-to-bound In/sub 0.53/Ga/sub 0.47/As-InP quantum-well infrared photodetectors using metal-organic vapor phase epitaxy. These detectors have a peak detection wavelength of 8.5 /spl mu/m. The peak responsivities are extremely large with R/sub pk/=6.9 A/W at bias voltage V/sub b/=3.4 V and temperature T=10 K. These large responsivities arise from large detector gain that was found to be g/sub n/=82 at V/sub b/=3.8 V from dark current noise measurements at T=77 K and g/sub p/=18.4 at V/sub b/=3.4 V from photoresponse data at T=10 K. The background-limited temperature with F/1.2 optics is T/sub BLIP/=65 K for 0相似文献   

Optimized breakdown probabilities in Al/sub 0.6/Ga/sub 0.4/As-GaAs heterojunction avalanche photodiodes

Recently, it has been shown that the noise characteristics of heterojunction Al/sub 0.6/Ga/sub 0.4/As-GaAs avalanche photodiodes (APDs) can be optimized by proper selection of the width of the Al/sub 0.6/Ga/sub 0.4/As layer. Similar trends have also been shown theoretically for the bandwidth characteristics. The resulting noise reduction and potential bandwidth enhancement have been attributed to the fact that the high bandgap Al/sub 0.6/Ga/sub 0.4/As layer serves to energize the injected electrons, thereby minimizing their first dead space in the GaAs layer. We show theoretically that the same optimized structures yield optimal breakdown-probability characteristics when the APD is operated in Geiger mode. The steep breakdown-probability characteristics, as a function of the excess bias, of thick multiplication regions (e.g., in a 1000-nm GaAs homojunction) can be mimicked in much thinner optimized Al/sub 0.6/Ga/sub 0.4/As-GaAs APDs (e.g., in a 40-nm Al/sub 0.6/Ga/sub 0.4/As and 200-nm GaAs structure) with the added advantage of having a reduced breakdown voltage (e.g., from 36.5 V to 13.7 V).     

Low-voltage high-gain resonant-cavity avalanche photodiode

For p-i-n photodiodes and avalanche photodiodes (APDs) in the low-gain regime, there is a performance tradeoff between the transit-time contribution to the bandwidth and the quantum efficiency. A new photodetector structure is demonstrated that alleviates limitations imposed by this tradeoff. This structure utilizes a thin ( approximately=900 AA) depleted absorbing layer to reduce the transit time and achieve avalanche gain at low bias voltage (V/sub b/ approximately=9 V). The external quantum efficiency has been enhanced ( eta /sub e/>49%) by incorporating the structure into a resonant cavity.<>     

Low-noise visible-blind UV avalanche photodiodes with edgeterminated by 2° positive bevel

4H-SiC avalanche photodiodes edge terminated by a 2° positive bevel have been fabricated and characterised. Low leakage current, positive temperature dependence of breakdown voltage, high avalanche gain and very low noise have been achieved     

Avalanche Noise Characteristics in Submicron InP Diodes

We report excess noise factors measured on a series of InP diodes with varying avalanche region thickness, covering a wide electric field range from 180 to 850 kV/cm. The increased significance of dead space in diodes with thin avalanche region thickness decreases the excess noise. An excess noise factor of F = 3.5 at multiplication factor M = 10 was measured, the lowest value reported so far for InP. The electric field dependence of impact ionization coefficients and threshold energies in InP have been determined using a non-local model to take into account the dead space effects. This work suggests that further optimization of InP separate absorption multiplication avalanche photodiodes (SAM APDs) could result in a noise performance comparable to InAlAs SAM APDs.     

A 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode (APD) array. The mean breakdown voltage of the APD was 57.9 V and the standard deviation was less than 0.1 V. The mean dark current was /spl sim/2 and /spl sim/300 nA, and the standard deviation was /spl sim/0.19 and /spl sim/60 nA at unity gain (V/sub bias/ = 13.5 V) and at 90% of the breakdown voltage, respectively. External quantum efficiency was above 40% in the wavelength range from 1.0 to 1.6 /spl mu/m. It was /spl sim/57% and /spl sim/45% at 1.3 and 1.55 /spl mu/m, respectively. A bandwidth of 13 GHz was achieved at low gain.     

Effect of dead space on gain and noise in Si and GaAs avalanchephotodiodes

The effect of dead space on the mean gain, the excess noise factor, and the avalanche breakdown voltage for Si and GaAs avalanche photodiodes (APDs) with nonuniform carrier ionization coefficients are examined. The dead space, which is a function of the electric field and position within the multiplication region of the APD, is the minimum distance that a newly generated carrier must travel in order to acquire sufficient energy to become capable of causing impact ionization. Recurrence relations in the form of coupled linear integral equations are derived to characterize the underlying avalanche multiplication process. Numerical solutions to the integral equations are obtained and the mean gain and the excess noise factor are computed     

Lucky drift estimation of excess noise factor for conventionalavalanche photodiodes including the dead space effect

A technique for estimating the excess noise factor in conventional avalanche photodiodes has been developed. It is based upon a computer simulation of carrier motion using the lucky drift concept. The importance of the impact ionization dead space is demonstrated, and an established theory is shown to overestimate the excess noise factor due to the neglect of the dead space phenomenon in conventional avalanche photodiodes     

Long-wavelength In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As large-area avalanche photodiodes and arrays

Large-area (500-/spl mu/m diameter) mesa-structure In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiodes (APDs) are reported. The dark current density was /spl sim/2.5/spl times/10/sup -2/ nA//spl mu/m/sup 2/ at 90% of breakdown; low surface leakage current density (/spl sim/4.2 pA//spl mu/m) was achieved with wet chemical etching and SiO/sub 2/ passivation. An 18 /spl times/ 18 APD array with uniform distributions of breakdown voltage, dark current, and multiplication gain has also been demonstrated. The APDs in the array achieved 3-dB bandwidth of /spl sim/8 GHz at low gain and a gain-bandwidth product of /spl sim/120 GHz.     

A Monte Carlo investigation of multiplication noise in thin p+-i-n+ GaAs avalanche photodiodes

A Monte Carlo (MC) model has been used to estimate the excess noise factor in thin p⁺-i-n⁺ GaAs avalanche photodiodes (APD's). Multiplication initiated both by pure electron and hole injection is studied for different lengths of multiplication region and for a range of electric fields. In each ease a reduction in excess noise factor is observed as the multiplication length decreases, in good agreement with recent experimental measurements. This low noise behavior results from the higher operating electric field needed in short devices, which causes the probability distribution function for both electron and hole ionization path lengths to change from the conventionally assumed exponential shape and to exhibit a strong dead space effect. In turn this reduces the probability of higher order ionization events and narrows the probability distribution for multiplication. In addition, our simulations suggest that fur a given overall multiplication, electron initiated multiplication in short devices has inherently reduced noise, despite the higher feedback from hole ionization, compared to long devices     

Ultralow leakage In/sub 0.53/Ga/sub 0.47/As p-i-n photodetector grown on linearly graded metamorphic In/sub x/Ga/sub 1-x/P buffered GaAs substrate

A novel top-illuminated In/sub 0.53/Ga/sub 0.47/As p-i-n photodiodes (MM-PINPD) grown on GaAs substrate by using linearly graded metamorphic In/sub x/Ga/sub 1-x/P (x graded from 0.49 to 1) buffer layer is reported. The dark current, optical responsivities, noise equivalent power, and operational bandwidth of the MM-PINPD with aperture diameter of 60 /spl mu/m are 13 pA, 0.6 A/W, 3.4/spl times/10/sup -15/ W/Hz/sup 1/2/, and 7.5 GHz, respectively, at 1550 nm. The performances of the MM-PINPD on GaAs are demonstrated to be comparable to those of a similar device made on InGaAs-InP substrate.     

An analytical approximation for the excess noise factor ofavalanche photodiodes with dead space

Approximate analytical expressions are derived for the mean gain and the excess noise factor of avalanche photodiodes including the effect of dead space. The analysis is based on undertaking a characteristic-equation approach to obtain an approximate analytical solution to the existing system of recurrence equations which characterize the statistics of the random multiplication gain. The analytical expressions for the excess noise factor and the mean gain are shown to be in good agreement with the exact results obtained from numerical solutions of the recurrence equations for values of the dead space reaching up to 20% of the width of the multiplication region     

Study of reverse dark current in 4H-SiC avalanche photodiodes

Temperature-dependent current-voltage (I-V) measurements have been used to determine the reverse dark current mechanisms in 4H-SiC avalanche photodiodes (APDs). A pn junction vertical mesa structure, passivated with SiO/sub 2/ grown by plasma enhanced chemical vapor deposition, exhibits predominate leakage current along the mesa sidewall. Similar APDs, passivated by thermal oxide, exhibit lower dark current before breakdown; however, when the temperature is higher than 146/spl deg/C, an anomalous dark current, which increases rapidly with temperature, is observed. This current component appears to be eliminated by the removal of the thermal oxide. Near breakdown, tunneling is the dominant dark current mechanism for these pn devices. APDs fabricated from a pp/sup -/n structure show reduced tunneling current. At room temperature, the dark current at 95% of breakdown voltage is 140 fA (1.8 nA/cm/sup 2/) for a 100-/spl mu/m diameter APD. At a gain of 1000, the dark current is 35 pA (0.44 /spl mu/A/cm/sup 2/).     

The HgCdTe electron avalanche photodiode

Electron injection avalanche photodiodes in short-wave infrared (SWIR) to long-wave infrared (LWIR) HgCdTe show gain and excess noise properties indicative of a single ionizing carrier gain process. The result is an electron avalanche photodiode (EAPD) with “ideal” APD characteristics including near noiseless gain. This paper reports results obtained on long-, mid-, and short-wave cutoff infrared Hg_1−xCd_xTe EAPDs (10 μm, 5 μm, and 2.2 μm) that use a cylindrical “p-around-n” front side illuminated n+/n-/p geometry that favors electron injection into the gain region. These devices are characterized by a uniform, exponential, gain voltage characteristic that is consistent with a hole-to-electron ionization coefficient ratio, k=α_h/α_e, of zero. Gains of greater than 1,000 have been measured in MWIR EAPDS without any sign of avalanche breakdown. Excess noise measurements on midwave infrared (MWIR) and SWIR EAPDs show a gain independent excess noise factor at high gains that has a limiting value less than 2. At 77 K, 4.3-μm cutoff devices show excess noise factors of close to unity out to gains of 1,000. A noise equivalent input of 7.5 photons at a 10-ns pulsed signal gain of 964 measured on an MWIR APD at 77 K provides an indication of the capability of this new device. The excess noise factor at room temperature on SWIR EAPDs, while still consistent with the k=0 operation, approaches a gain independent limiting value of just under 2 because of electron-phonon interactions expected at room temperature. The k=0 operation is explained by the band structure of the HgCdTe. Monte Carlo modeling based on the band structure and scattering models for HgCdTe predict the measured gain and excess noise behavior.     

Experimental demonstration of in-loop intracavity intensity-noise suppression

Experimental results for intracavity-laser intensity-noise suppression, or "squashing," manifested as reduced fluctuations on the transmitted field photodetector voltage are presented. It is experimentally demonstrated that a rigid optical cavity within the feedback loop is compatible with squashing. The observed closed loop detector noise floor is approximately 16 nV/sub rms///spl radic/Hz in the acoustic frequency range (/spl sim/100 Hz), well below the quantum limit due to shot noise of 148 nV/sub rms///spl radic/Hz. This corresponds to 19 dB of observed noise suppression below the quantum limit and is consistent with the measured disturbance suppression function of the feedback loop. We also present measurements demonstrating the orthogonality of the squashing and frequency-locking control loops.     

Comparison of multiquantum well, graded barrier, and doped quantum well GaInAs/AlInAs avalanche photodiodes: A theoretical approach

A comparison of the multiquantum well; graded barrier, and doped quantum well Ga0.47In0.53As/Al0.48In0.52As avalanche photodiodes (APD's) is presented based on the calculated gain, excess noise factor, bandwidth, and gain-bandwidth product. A general numerical method, based on an ensemble Monte Carlo calculation, is used to determine the device performance, measured in terms of the electron and hole ionization probabilities, as a function of the device geometries and applied electric field. From a determination of the ionization rates, critical performance figures such as the gain, excess noise factor, and bandwidth can be determined. Various device geometries are examined (different layer widths, dopings, and overall applied electric field strength) among the three device types. The results indicate that the doped quantum well device gives the largest gain-bandwidth product at the lowest noise factor of the three device types. Surprisingly, the highest absolute gain is achievable in a simple multiquantum well APD, but at a much smaller bandwidth than in a doped quantum well device. At comparable device sizes, the doped quantum well device can deliver roughly two orders of magnitude more gain and gain-bandwidth product than either the simple multiquantum well or graded barrier device.