Ni掺杂对钛酸锶钡铁电薄膜性能的影响

在醋酸水溶液体系中采用溶胶-凝胶法在Pt／Ti／SiO2／Si（100）衬底上制备了未掺杂和掺Ni的钛酸锶钡（BST）薄膜，研究了Ni的加入对BST薄膜的结构和电学性能的影响。试验结果表明，随着Ni加入量的增加，BST薄膜的晶粒尺寸减小，介电常数减小，介电损耗降低；当Ni的加入量在10％（摩尔分数）时，薄膜的介电常数、介电损耗、可调性和FOM分别为230．25、0．015、30．8％、20．53。研究结果表明，适量掺Ni的钛酸锶钡薄膜能满足可调微波器件的要求。     

C60聚氨酯胺薄膜的非线性光学特性的研究

利用Z扫描技术，分别测量了五种C60聚氨酯胺薄膜（C60含量分别为0％、0．16％、0．30％、0．42％、0．52％，厚度均为0．3mm）的非线性光学吸收系数和折射系数，并研究了该薄膜的光限幅特性。实验表明：随着样品中C60的含量由0增加到0．52％，薄膜的透射率可由70％逐渐减小到10％，且透射光功率可限制在25mJ／cm^2以下。薄膜的透射率或透射功率可以随C60含量不同而改变，即薄膜的光限幅性能可以通过调节C60含量的方式加以控制。最后，基于C60分子的五能级模型，采用激发态吸收（反饱和吸收）物理机理解释了薄膜的非线性光学特性及光限幅性能。     

铁电薄膜Bi3.2Nd0.8Ti3O12的制备及其特性的研究

用脉冲激光淀积法成功地在p-Si底片上制备了高c轴取向的Bi3．2Nd0．8Ti3O12铁电薄膜，研究了薄膜的铁电性能及疲劳特性。研究表明，用钕Nd替代Bi的3．2Nd0．8Ti3O12薄膜具有较好电滞回线（P-E），在应用电压为10V，测试频率为1MHz下，其剩余极化（Pr）及矫顽场（E）分别达到27μC／cm^2和70kV／cm。更为重要的是，Au／Bi3．20Nd0.80Ti3O12／p-Si（100）电容在读／写开关次数达到10^10后仍表现出较好的抗疲劳特性。     

LiNbO_3/SiO_2/Si薄膜的蓝光发射

采用射频磁控溅射方法制备了LiNbO3/SiO2／Si薄膜。通过X射线衍射（XRD）、电感耦合等离子体质谱（ICP-MS）和傅立叶变换红外吸收光谱（FT-IR）对薄膜的物相、晶体取向和成分进行了表征。采用荧光分光光度计研究了LiNbO3／SiO2／Si薄膜的光致发光。研究结果表明：在280nm激发光的激发下,LiNbO3／SiO2／Si薄膜在室温下发射470nm的蓝光,来源于LiNbO3薄膜与SiO2层界面处白捕获激子的辐射复合,发现在SiO2／Si薄膜上生长LiNbO3薄膜调制SiO2／Si薄膜的发光机制。     

RF磁控溅射功率对ZnO：AI薄膜结构和性能的影响

采用RF磁控溅射技术以ZnO2Al2O3（2wt％Al2O3）为靶材在石英玻璃衬底上制备多晶ZnO：Al（AZO）薄膜,通过XRD、AFM、AES以及Hall效应、透射光谱、折射率等手段研究了RF溅射功率（50-300w）对薄膜的组织结构和电学,光学性能的影响。分析表明：所制备的AZO薄膜具有c轴择优取向,并且通过对不同功率下薄膜载流子浓度与迁移率的研究发现对于室温下沉积的AZO薄膜,晶粒间界中的O原子吸附是影响薄膜电学性能的主要因素。同时发现当功率为250W时薄膜的电阻率降至最低（3．995×10^-33Ω·cm）,可见光区平均透射率为91％。     

非晶态SiO2过渡层对生长C轴取向LiNbO3薄膜的影响

采用磁控溅射方法,在Si衬底和LiNbO3薄膜之间引入SiO2过渡层制备LiNbO3薄膜。采用X射线衍射（XRD〉、傅里叶变换红外吸收光谱（FT-IR）和扫描电子显微镜（SEM）对LiNbO3薄膜的结晶取向、组成成分和表面形貌进行了表征,重点研究了非晶态SiO2过渡层对LiNbO3薄膜C轴取向的影响。结果表明,非晶态S...     

掺铈钛酸钡薄膜的光学二次谐波

钛酸钡（BaTiO3）是最常用的铁电晶体之一，它具有大的自发极化率和高的非线性光学系数，而这些特性会由于掺铈而得到增强．因而研究掺铈钛酸钢（Ce:BaTiO3）薄膜的非线性光学特性以探讨其构成相应微器件的前景是一项有意义的工作．1992年以来，关于BaTiO3薄膜上产生二次谐波（SH）已有若干文章，但我们未见关于Ce：BaTiO3薄膜SH的研究报道．最近我们用自制的脉冲激光沉积装置生长的纯BaTiO3和Ce：BaTiO3薄膜作了SH的研究．通过对a-轴方向生长薄膜SH信号强度与基波偏振方向关系的实验数据的理论拟合，我们导出纯BaTiO3薄膜d33…     

高度择优取向(111)PbTiO3薄膜的制备及光学特性

单一取向铁电薄膜是大家长期以来研究的目标之一，文中采用组合靶射频溅射在白宝石（α-Al2O3)衬底上制备出具有较好的（111）择优取向的PbTiO3薄膜。从薄膜的光学射射谱计算所得的折射率和波长的关系能够较好地符合单振子模型，由此得出了薄膜在400－2400nm区域的折射率变化，在长波极限时薄膜的折射率为2．51。     

电子束共蒸发Al2O3-La2O3和ZrO2-Ta2O5复合薄膜的介电性能研究

Al2O3、ZrO2、Ta2O5和La2O3薄膜在栅介质、无机EL介质和光学薄膜方面有着重要用途,但对其复合薄膜介电性能方面的研究很少。文章采用电子束共蒸发法制备了厚度分别为414nm和143nm的Al2O3-La2O3（ALO）和ZrO2-Ta2O5（ZTO）复合薄膜,用Sawyer—Tower电路测得介电常数分别为17和34,反映介电损耗的参数△Vy分别为0．013V和0．56V,击穿场强分别为128MV／m和175MV／m,在50MV／m场强下,ALO的正、反向漏电流密度分别为3．1×10-5／cm2和4．1×10-5A／cm2,ZTO的正、反向漏电流密度分别为3．9×10-5／cm2和3．7×10-5A／cm2。另外,实验还与电子束蒸发和反应溅射制备的Al2O3、ZrO2、Ta2O5的介电性能做了比较,结果表明,上述复合薄膜单独作为无机EL绝缘层是不合适的。     

（Ba1—xSrx）TiO3薄膜的制备及性能的研究

选用Ba(C2H3O2)2、Sr(C2H3O2)2.1/2H2O和Ti（OC4H9）4为原材料,冰醋酸为催化剂,乙二醇乙醚为溶剂。用改进的溶胶－凝胶技术在Pt/Ti/SiO2/Si基片上成功地制备出钙钛型结构的（Ba1-xSrx)TiO3薄膜。该薄膜是制备铁电动态随机存储器、微波电容和非致冷红外焦平面阵列的优选材料;分析了薄膜的结构;测试了薄膜的介电和铁电性能。在室温10kHz下,（Ba0.73Sr0.27)TiO3薄膜介电系数和损耗分别为300和0．03。在室温1kHz下,（Ba0.95Sr0.05)TiO3薄膜剩余极化强度的矫顽场分别为3μC／cm^2和50kV/cm。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.