Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

We have proposed an optical method that can be applied to in-process or in situ measurement of the microsurface profile. The present method is based on optically performed spectral analysis and the phase retrieval technique. Spectral information of a surface profile is obtained by measuring the Fraunhofer diffraction intensity. The phase retrieval technique is used to reconstruct the surface profile from the measured spectrum. We have developed an instrument on the basis of the general principles of the present method, and measured the surface of a reference standard having rectangular pockets 44 nm deep at intervals of 10 μm. The measured surface profile was in good agreement with the nominal dimensions of the specimen as well as the surface profile obtained by atomic force microscopy (AFM).     

基于坐标测量机和拟粒子群进化算法的圆柱度误差检测与评定

建立了任意位置下基于坐标测量机检测的圆柱度误差最小区域解的数学模型,提出了采用拟粒子群进化算法求解最小区域圆柱度误差新方法。该算法使用实数编码,由拟随机Halton序列产生粒子的初始位置和速度,基于浓缩因子法修改粒子的速度。为了验证算法的有效性,对文献中测量数据采用提出的方法进行圆柱度误差计算并将结果与多种算法计算结果进行比较,同时在加工中心加工大量轴类零件,使用三坐标测量机对零件进行实测,应用该进化算法计算最小区域圆柱度误差并与三坐标测量机给出的结果进行比较。实验结果均证实了提出的方法不仅优化速度快、计算精度高,而且算法简单,需设置参数少,便于推广应用。     

A New Method of Non-Contact Measurement for Microtopography in Semiconductor Wafer Implementing a New Optical Probe Based on the Precision Defocus Measurement

In this paper, a new method of non-contact measurement has been developed for 3D topography for a semiconductor wafer, implementing a new optical probe based on precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. A distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. A precision calibration technique has been applied, giving about 10 nm resolution and 72 nm four-sigma uncertainty. In order to quantitise the micro pattern on the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and the excellent 3D measurement capability.     

连续Nd:YAG激光光纤耦合效率的实验

对0.6mm芯径3m长光纤输出100W连续Nd:YAG激光的光纤耦合效率进行了实验分析。围绕光纤耦合效率相关的量:激光模式、发散角、数值孔径、焦斑直径、精密光纤耦合器等问题进行了讨论;并给出实验结果:3m长光纤输出0～100W激光耦合效率典型值≥87%,最佳值为90%.     

Mapping micro-mechanical properties of carbon-filled polymer composites by TPM

This paper presents a new approach to the characterisation of carbon-filled polymer composites by using a novel multi-function tribological probe microscope (TPM). The TPM is capable of measuring four functions in a single scan to provide area mappings of topography, friction, Young's modulus and nanohardness. The measurement is based on point-by-point scanning so values of the four measured functions are linked in space and in time. The specimens are PA6.6 and PA12 filled with carbon black or carbon fibre, specially prepared at the Institute for Materials Research III of Karlsruhe Research Centre. The four-in-one measurement of TPM enables us to identify the material difference on the surface in order to estimate the distribution of a particular material within the composite. For each specimen, mappings of topography, hardness and Young's modulus were obtained, and from the latter two, it is easy to see the existence of two different materials. Comparing the topography and hardness mappings, we are able to pick up the areas where carbons are located.     

A Study on an Evaluation Method for Form Deviations of 2D Contours from Coordinate Measurement

A practical approach towards evaluating form deviations of 2D complex contour profiles from the coordinate measurement data of discrete points is proposed. In this approach, a 2D complex contour is represented approximately by the combination of straight line and circular arc segments under the condition of satisfying the prespecified interpolation accuracy. The form deviation of a measured point is calculated relative to the approximate contour and the form deviation of the whole contour is evaluated using either the minimum zone criterion (MZC) or the least squares criterion (LSC). It has been demonstrated that the difference between the deviation definitions, one relative to the original contour and the other to the approximate contour, is not larger than the prespecified accuracy value, i.e. the evaluation precision of the form deviation can be sufficiently guaranteed. The effectiveness and the efficiency of the approach are verified with a practical example of a planar cam contour. Moreover, a weighted LSC technique is proposed in order to obtain a rational evaluation result for the measured points with non-uniform length interval.     

Measurement of the viscosity of biodiesel by using an optical viscometer

In this paper, we report the characterization of the viscosity of biodiesel produced from jatropha curcas. The viscosity measurement has been carried out by using a modified falling ball viscometer as well as optical technology. The viscosity was measured from 28 to 70 °C, which is the interest for determining the quality of biodiesel. We found that the falling ball optical viscometer offers a resolution of a viscosity measurement of ±0.039 mPa s with a relative error of 1.47933%. The measurement process was compared with a commercial viscometer, and it has been demonstrated that the biodiesel produced in Chiapas has good quality.     

Optical counting of guided particles in a vortex beam as an optical tube by laser-two-focus method

In this study, microscopic particles such as aerosols were counted by Laser-Two-Focus method, L2F, after being trapped and guided by an optical tube. This prevents particles diffusivity as they pass through the Gaussian beam in the L2F method by optical forces such as radiation pressure and photophoretic forces. In optical tube, particles can guid to the center of the beam where the intensity gets zero. A single-charged Bessel Gaussian beam, BG₀₁, is used as the particle guidance beam in this method, which is generated by passing the first-order Laguerre-Gaussian beam, LG₀₁, from an axicon lens. LG₀₁ beam are also produced by using holographic interference grid mask. The results of the theory and simulations showed that by optical guiding of particles in the L2F-method measurement, their transverse turbulence can be reduced by about 60% and then the probability of measuring all particles to be increased by about 30%. Measurements of in-laboratory aerosols less than 3.5 μm with this method showed a 20% increase in their condensation of them compared to the conventional L2F method.     

Simultaneous distributed measurement of the strain and temperature for a four-point bending test using polarization-maintaining fiber Bragg grating interrogated by optical frequency domain reflectometry

We demonstrate a simultaneous distributed strain and temperature measurement technique with the spatial resolution of 1 mm using fiber Bragg gratings inscribed in a polarization-maintaining and absorption-reducing fiber (PANDA-FBGs) and optical frequency domain reflectometry (OFDR). We conduct four-point bending tests in an environmental chamber. Using high birefringent PANDA-FBGs that are manufactured specifically for the simultaneous measurements, the uniform temperature distributions and the typical strain distribution profiles of the four-point bending tests were successfully obtained. The measurement errors of strain were from −31 με to 19 με, and of temperature were from −0.9 °C to 1.3 °C. The spatial standard deviation was 7.5 με and 0.9 °C. We also discussed the effect of the residual strain of the sensor-bonding procedures and the data averaging.