SECM微纳米定位建模及控制器设计

为适应扫描电化学显微镜（SECM）常规应用中100nm左右的微定位精度需求,同时降低其微定位控制器的成本,在分析SECM压电工作台运动定位数学模型的基础上,结合SECM实际应用中的特点,将压电工作台数学模型进行了合理的简化,并在此基础上设计了算法简单且易于实现的开环微定位控制器。以CHI900B型扫描电化学显微镜的三维压电工作台为实验对象进行建模和控制器设计,实验结果表明,压电工作台运动定位平均跟踪误差和最大跟踪误差分别为0.093、0.115μm,误差约0.1μm,可满足SECM常规应用中的微定位精度需求。建模过程和控制器设计简单易行且无须额外的微定位传感器,适于SECM的常规应用。     

STM微位移工作台的遗传神经网络控制技术

为了提高扫描隧道显微镜微位移工作台的定位精度,提出了一种基于遗传算法的神经网络PID控制方案。微位移工作台以压电陶瓷为驱动器、柔性铰链为导向机构,在分析工作原理的基础上,建立了工作台的数学模型。神经网络PID控制器对工作台进行闭环控制,能够在线调整网络加权值,实时改变PID控制器的系数,减小工作台的位移误差。利用遗传算法的全局搜索能力对BP网络的初始权值进行学习优化,有效消除了神经网络对初始权值敏感和容易局部收敛的缺陷,改善了控制器的控制效果。性能测试表明,12μm阶跃参考输入下的稳态误差从3.24%减小到2.55%,稳态时间从1.7 s缩短到1.1 s。     

一维压电式微定位机构的设计研究

针对精密工作台高速、低精度的矛盾,以柔性铰链为导向元件、压电陶瓷为驱动器,研究、设计了一种一维高分辨率压电式微定位机构。由于精密工作台高速运动产生的运动惯量较大,欲实现亚微米级的定位精度是很困难的,因而在精密工作台运行到位后,由微定位机构对检测装置所检测出的定位误差进行补偿,以提高工作台的定位精度;由于压电陶瓷微位移器件输出位移过小,因此提出了一种单自由度对称式柔性铰链放大机构来提高微定位行程。给出了机构的动力学模型,并结合光栅尺检测装置,设计并研制了数字闭环定位控制系统,对微定位机构的定位特性进行了测试。实测结果表明,此微定位系统可实现高分辨率、长行程定位,定位分辨率达0.01μm。     

气压式血液循环驱动器预防骨科术后下肢深静脉血栓

为提高压电陶瓷驱动的微定位工作台的模型精度,提出了一种基于动态递归神经网络的建模方法.压电陶瓷具有极高的位移分辨率,但存在着迟滞非线性.分析了压电陶瓷驱动器的结构和特性,利用动态神经网络的自反馈结构和自学习能力,建立起工作台的网络模型,通过在线调整模型结构和参数,减小了工作台的建模误差.测量工作台的定位数据对网络模型进行了训练,实验结果表明,当工作台最大行程为80 μm时,平均定位误差0.07 μm,最大误差0.09 μm,比采用静态网络模型有了一定的提高.     

精密工作台扰动观测器的设计

针对直线电机驱动、气浮导轨支撑的精密工作台没有阻尼、抗扰性能差的特点,为了抑制各种线缆扰动和直线电机推力波动的影响,提高工作台的定位精度、减小轨迹跟踪误差,采用扰动观测方法,基于直线电机精密工作台设计了前馈 反馈 扰动观测的控制器.详细讨论了扰动观测器的设计方法.实验结果表明,采用扰动观测器后,实现了±0.15μm 的静态定位精度,以150 mm/s匀速运动时轨迹跟踪精度保持在±1.5 μm 的误差带范围内.扰动观测器能够有效地抑制低频噪声和克服参数变化的不利影响.     

自适应控制在纳米加工微驱动器中的应用研究

为提高扫描隧道显微镜微驱动器的响应速度和定位精度,提出了一种基于自适应理论的控制方法。微驱动器采用压电陶瓷驱动,在分析其结构的基础上,建立了驱动器的简化运动模型,利用最小二乘法对驱动器参数进行了在线辨识。把自适应控制理论引入到微驱动器的控制中,在参数自校正PID控制律的作用下,实现了PID控制器参数的自动整定。采用专用的压电陶瓷驱动电源,进行了位移的测试实验。结果表明,参考位移量为12.39μm时,相对于传统PID控制,动态响应时间由3 s缩短到1.4 s,稳态位移误差由3.2%减小到2.7%。     

压电式微定位工作台及其控制系统

为了提高机床的定位精度，研究、设计了一种以柔性铰链为导向元件、压电陶瓷为驱动器的微定位工作台。微定位工作台在滚珠丝杠副驱动的基础上，对工作台进行了二次精定位。给出了工作台的设计简图，并对其动力学模型进行了分析，结合检测装置和微机控制系统，设计了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位控制系统。实测表明，微定位工作台定位分辨率可达到0．01μm，可满足精密、超精密加工的需要。     

基于压电驱动的纳米级精密定位系统的研究

利用压电陶瓷致动器作为驱动元件设计了X-Y两自由度精密定位工作台,并利用有限元分析法对机构进行了优化设计,采用电阻应变片作为微位移检测传感器,在此基础上设计了闭环控制器,该控制器包括压电陶瓷驱动单元、微位移传感器检测单元和中央处理单元,最后利用PID控制法进行了闭环控制实验研究。实验结果表明,本系统具有较好的控制品质和优异的动态性能,在对10μm×10μm两自由度工作台的控制中,闭环控制精度达10nm,阶跃响应的稳定时间小于8ms。     

直线电机精密工作台运动控制器设计

为了提高精密工作台的轨迹跟踪精度和动态响应性能,基于辨识出的控制对象离散化模型,利用极点配置方法设计了精密工作台运动控制器的前馈环节和反馈环节,构成具有两自由度结构的精密工作台运动控制系统.通过实验,与PD＋加速度前馈的控制方式相比较,精密工作台静态定位误差提高了0.5 μm;当精密工作台以120 mm/s匀速运动时,轨迹跟踪精度提高了3 μm;定位建立时间缩短了10 ms.结果表明,采用极点配置方法设计的运动控制器具有较好的动态响应和轨迹跟踪性能.     

基于PI迟滞模型的压电陶瓷复合控制算法研究

为减小压电陶瓷的迟滞非线性对系统跟踪精度的影响,该文采用经典的存在逆解析的PI迟滞模型对压电陶瓷的迟滞特性进行建模,将PI模型的逆模型用于压电陶瓷的前馈控制算法中,然后设计了神经元比例、积分、微分(PID)反馈控制算法,将前馈控制算法与神经元PID反馈控制算法结合得到了压电陶瓷的复合控制算法。将仅含前馈的控制算法和复合控制算法在压电陶瓷的控制器上执行,实验结果表明,仅含前馈的控制算法的跟踪误差为1.256μm,而复合控制算法的跟踪误差仅为0.092μm,该复合控制算法使跟踪精度提高了1.164μm。     

Positive acceleration,velocity and position feedback based damping control approach for piezo-actuated nanopositioning stages

This paper proposes a new damping control approach with positive acceleration, velocity and position feedback (PAVPF) scheme for piezo-actuated nanopositioning stages to implement high-bandwidth operation. To achieve this objective, the intrinsic hysteresis nonlinearity of the piezoelectric actuator is firstly handled by a feedforward compensator with a modified Prandtl–Ishlinskii model. Afterwards, the PAVPF controller with the pole-placement method is implemented to suppress the lightly damped resonant mode of the hysteresis compensated system. With the PAVPF controller, the poles of the damped system in a third-model can be placed to arbitrary positions with an analytical method. Finally, for accurately tracking a predefined trajectory, a high-gain proportional-integral (PI) controller is designed, which could deal with the disturbance and the unmodeled dynamics. For verifying the proposed PAVPF-based control approach, comparative experiments with positive velocity and position feedback controller and with PI controller are conducted on a piezo-actuated nanopositioning stage. Experimental results demonstrate that the developed control approach with PAVPF controller is effective on damping control and improves the control bandwidth of the conventional PI controller from 111 Hz to 766 Hz, which leads to the significant increase of the tracking speed.     

Two-parameter robust repetitive control with application to a novel dual-stage actuator for noncircular Machining

This work presents a robust repetitive controller design for a novel dual-stage actuator system. The dual-stage actuator, which consists of an electrohydraulic actuator for 25-mm-gross motion and a piezoelectric actuator for 40-/spl mu/m fine motion, is designed for noncircular machining application. The controller is designed through a sequence of two single-input-single-output (SISO) designs by exploiting the triangular structure of the two by two actuator system dynamics. The tracking error from the first stage electrohydraulic actuator is used as reference for the second stage piezoelectric actuator. In this master-slave control arrangement, the overall sensitivity function is the product of two sensitivity functions from each actuator's servo loop. Thus, performance is improved at the frequencies where the sensitivity values are already well less than one. In the real-time control implementation, the effects of finite word length are analyzed and addressed via controller order reduction and realization. In an experiment of tracking an automotive cam profile at the rate of 10 cycles per second (600 rpm), the proposed dual-stage servo system generated tracking error of 4-/spl mu/m peak-to-valley and 0.80-/spl mu/m root-mean-square (RMS) value, showing a substantial improvement over the 16 micron peak-to-valley and 2.64-/spl mu/m RMS errors generated by the electrohydraulic servo system alone.     

Dual-stage repetitive control with Prandtl–Ishlinskii hysteresis inversion for piezo-based nanopositioning

The positioning performance of piezo-based nanopositioning systems is limited by dynamic and hysteresis effects in the piezoactuator. Herein, a high-performance, dual-stage repetitive controller (dual-RC) with a feedforward hysteresis compensator is proposed for tracking periodic trajectories, such as the scanning-type motion, in nanopositioning systems. Firstly, a discrete-time dual-RC is created by cascading a conventional RC with an odd-harmonic RC. The favorable gain characteristics of the dual-RC coincide with the odd harmonics of the scanning-type periodic reference trajectory, thus offering good robustness and low tracking error. Secondly, a new inverse-hysteresis compensator is developed based on the Prandtl–Ishlinskii hysteresis model. The structure of the inverse model mimics the structure of the forward model, where the parameters of the inverse model can be easily identified from measured input–output data. Finally, the controllers are applied to a custom-designed high-speed nanopositioner, and simulations and experimental results are provided to illustrate the performance improvement of the proposed control scheme compared to industry-standard PID control and conventional RC. High-speed positioning results (tracking of triangle scan trajectories) at rates of 1 kHz, 1.5 kHz, and 2 kHz are shown. Compared to a conventional RC, the tracking error of the dual-RC is 48% lower at 1 kHz and 33% lower at 2 kHz scanning frequency. It is also shown that by compensating for hysteresis, the performance of the RC system designed based on the linear dynamics can be enhanced.     

空间光通信中精跟踪控制器的设计

精跟踪伺服系统设计是APT的核心技术,决定了通信链路能否建立以及通信系统的性能.针对空间光通信中压电陶瓷驱动FSM偏转具有非线性、时变不确定性和纯滞后等特性,提出变论域自适应模糊PID控制方法.引入变论域思想,并通过对输入变量加入伸缩因子的方式来实现变论域的目的,自适应能力和抗干扰能力明显增强.可有效解决稳定性与准确性的矛盾.实验结果表明:模糊PID控制算法增强了伺服系统鲁棒性,并提高了伺服系统实时性;跟踪精度可达到5μrad,对卫星平台振动和大气湍流引起信标光斑抖动有一定的抑制作用,能够满足空间光通信精跟踪精度的要求.     

High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input shaper

An integrated control strategy for piezo-actuated nanopositioning stages is proposed in this paper. The aim is to achieve high-speed and high-precision tracking control of nanopositioning stages. For this purpose, a direct inverse compensation method is firstly applied to eliminate the hysteresis nonlinearity without involving inverse model calculation. Then, an inside-the-loop input shaper is designed to suppress the vibration of the compensated system. A Smith predictor is introduced to prevent the potential closed-loop instability caused by the time delay of the inside-the-loop input shaper. Finally, a high-gain feedback controller is employed to handle the disturbances and modeling errors. To demonstrate the effectiveness of the proposed control method, comparative experiments are carried out on a piezoelectric actuated stage. The results show that the proposed control approach increases the tracking bandwidth of the stage from 22.6 Hz to 510 Hz.     

高精度USB电源管理器的设计

针对目前便携式设备对多电源供电的要求,提出了一种内嵌于DC/DC转换器中的高精度通用串行总线(USB)电源管理器。对该电源管理器的结构原理进行了分析,并用CSMC 0.5μm CMOS工艺进行模拟。经Cadence仿真证明了USB电源管理器的可行性和可靠性。所设计的电源管理器实现了USB接口电流的精确限制(最大误差2%),设置最大供给电流为500 mA,满足USB接口的国际规范。     

啁啾脉冲通过失调拼接光栅压缩池后的远场分析

建立一个能分析拼接光栅的拼接误差效应的数学模型。利用傅里叶光学方法,分析横截面为圆的啁啾高斯光束通过失调的拼接光栅对压缩池(每个压缩光栅都由四个子光栅拼接而成)以及理想透镜的物理过程,得到焦平面上光场的积分表达式(对于光束口径)。利用该模型通过数值模拟详细分析了几种误差对于焦斑强度分布的影响。结果表明,在要求远场焦斑的施特雷尔比大于0.9的条件下系统的各种拼接误差需要满足:横向平移型误差Δx-nd相似文献   

基于捷联惯性/GPS组合的伺服跟踪系统软件设计

介绍了数字伺服跟踪系统的组成和控制原理,讨论了影响微控制器选择的几个要素,以任务分类和软件模块化为设计思路研究了系统管理软件模块、捷联惯性/GPS组合的伺服控制算法模块、伺服控制测试模块。最后将设计的软件加载到微控制器中对伺服跟踪系统进行验证。实验结果表明,该伺服跟踪系统软件设计方法好,有工程推广应用价值。     

Sliding mode control of quadruple tank process

The process investigated herein is the quadruple tank system that is stable only within a limited zone of operating parameters. The process model has been developed from fundamentals and tuned with experimental data. A controller design based on feedback linearization has been tested on this process model. Coupling feedback linearization with sliding mode algorithm provides robust control of the process and performs far superior to conventional PI control. A PC based controller interfaced to the experimental quadruple tank experimental set up has been used to implement this algorithm and test its performance. Inserting a ‘boundary layer’ around the sliding surface reduced the ‘chattering’ associated with sliding mode control. The implemented controller provides robust control and excellent set point tracking.     

空间同轴三反相机φ520 mm次镜的加工与检测

为了满足空间同轴三反相机对大口径凸非球面高精度的面形质量和精确的几何参数控制要求,提出以计算机控制确定性研抛工艺为核心的多工序组合加工及检测技术。在加工阶段,首先利用超声振动磨削技术对非球面进行面形铣磨,其次应用机器人对非球面面形进行快速研磨和粗抛,最后采用离子束修形技术实现非球面的高精度加工;在检测阶段,首先利用三坐标测量机对铣磨和研磨过程中非球面的面形及几何参数进行控制,进入干涉仪测量范围后,再采用Hindle球法对非球面光学参数进行干涉检测。结合工程实例,对一口径520 mm的凸双曲面次镜进行了加工及检测,其面形精度RMS为0.015（=632.8 nm）,几何参数控制精度△R误差为0.1 mm、△K优于0.1%,满足光学设计技术指标要求。