Thin-Film PZT Lateral Actuators With Extended Stroke

Many microelectromechanical system applications require large in-plane actuation forces, with stroke lengths ranging from submicrometer to tens of micrometers in distance. Piezoelectric thin films are capable of generating very large actuation forces, but their motion is not easily directed into lateral displacement in microscale devices. A new piezoelectric thin-film actuator that uses a combination of piezoelectric unimorph beams to generate lateral displacement has been developed. The piezoelectric actuators were fabricated using chemical-solution-derived lead zirconate titanate thin films. These actuators have demonstrated forces greater than 7 mN at displacements of nearly 1 $muhbox{m}$, with maximum stroke lengths at 20 V greater than 5 $muhbox{m}$ in a 500- $muhbox{m}$-long by 100-$mu hbox{m}$-wide actuator. Force and displacement capabilities can be manipulated through simple changes to the actuator design, while actuator nonlinearity can produce dramatic gains in work capacity and stroke length for longer actuators.$hfill$[2007-0298]      

Thin-Film Piezoelectric Unimorph Actuator-Based Deformable Mirror With a Transferred Silicon Membrane

This paper describes a proof-of-concept deformable mirror (DM) technology, with a continuous single-crystal silicon membrane reflecting surface, based on$ PbZr _0.52 Ti_0.48 O _3$(PZT) unimorph membrane microactuators. A potential application for a terrestrial planet finder adaptive er is also discussed. The DM comprises a continuous, large-aperture, silicon membrane “transferred” onto a 20$,times,$20 piezoelectric unimorph actuator array. The actuator array was prepared on an electroded silicon substrate using chemical-solution-deposited 2-$mu m$-thick PZT films working in a$d _31$mode. The substrate was subsequently bulk-micromachined to create membrane structures with residual silicon acting as the passive layer in the actuator structure. A mathematical model simulated the membrane microactuator performance and aided in the optimization of membrane thicknesses and electrode geometries. Excellent agreement was obtained between the model and the experimental results. The resulting piezoelectric unimorph actuators with patterned PZT films produced large strokes at low voltages. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/silicon thickness and design showed a deflection of 5.7$~mu m$at 20 V. A DM structure with a 20-$mu m$-thick silicon membrane mirror (50 mm$times,$50 mm area) supported by 400 PZT unimorph actuators was successfully fabricated and optically characterized. The measured maximum mirror deflection at 30 V was approximately 1$~mu m$. An assembled DM showed an operating frequency bandwidth of 30 kHz and an influence function of approximately 30%. 1738     

Torsional actuator based on mechanically amplified shear piezoelectric response

A torsional actuator, based on the concept of mechanical amplification of piezoelectric shear strain and capable of generating large angular displacement, was proposed and studied experimentally. The actuator is a tube consisting of an even number of the segments poled along the length, which are adhesively bonded together, and the joints act as electrodes to apply the driving voltage. The experimental data measured on the prototype actuators (i) prove the proposed concept of mechanical amplification of small piezoelectric shear strain to generate large torsional motion, (ii) show that the actuator functions well both without load and under the torque load and (iii) demonstrate that the actuator can operate continuously for a long period of time without drop in its performance. Also, the results demonstrated that the proposed torsional actuator is capable of producing both large torque and large angular displacement in a compact package, sufficient to meet many smart structures requirements, and can be tailored for a variety of application requirements. Finally, one of the obvious advantages of the present design of the actuator is its simplicity: the piezoelectric shear strain is transformed directly into the angular displacement, whereas in the previously reported actuators, the conversion mechanism into the torsional motion was rather complicated which thus required a sophisticated design of the whole system.     

A novel snap-through buckling behaviour of axisymmetric shallow shells with possible application in transducer design

In this study, the snap-through buckling behaviour of axisymmetric shells, subjected to axisymmetric horizontal peripheral load or displacement for various shell parameters and various boundary conditions, is investigated. Results obtained seem not to have been reported previously. An application of peripheral displacement type of loading is seen in metal-ceramic composite transducers developed by sandwiching a piezoelectric (PZT) ceramic between two metal end caps which serve as mechanical transformers for converting and amplifying the lateral displacement of the ceramic into an axial motion normal to the metal cap. In our numerical search, we have observed that snap-through and snap-back buckling is possible for shallow spherical caps for a very narrow range of the shell parameter used. When a hole is opened around the apex of the cap, buckling is possible for a larger range of the shell parameter. Obtaining the displacement amplification and the blocking or generative force for various material and geometric properties is necessary for the possible application of the findings in transducer design. The numerical results are presented in graphical forms.     

Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror

Micromachined deformable mirror technology can boost the imaging performance of an otherwise nonrigid, lower-quality telescope structure. This paper describes the optimization of lead zirconium titanate (PZT) unimorph membrane microactuators for deformable mirrors. PZT unimorph actuators consisting of a variety of electrode designs, silicon-membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to accurately simulate the membrane microactuator performance and to aid in the optimization of membrane thicknesses and electrode geometries. Excellent agreement was obtained between the model and the experimental results. Using the above approach, we have successfully demonstrated a 2.5-mm-diameter PZT unimorph actuator. A measured deflection of 5 /spl mu/m was obtained for 50 V applied voltage. Complete deformable mirror structures consisting of 10-/spl mu/m-thick single-crystal silicon mirror membranes mounted over the aforementioned 4/spl times/4 4 PZT unimorph membrane microactuator arrays were designed, fabricated, assembled, and optically characterized. The fully assembled deformable mirror showed an individual pixel stroke of 2.5 /spl mu/m at 50 V actuation voltage. The deformable mirror has a resonance frequency of 42 kHz and an influence function of approximately 25%.     

Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study

We use energy methods and lumped-element modelling in the analysis and optimization of a miniaturized aluminum nitride based piezoelectric energy harvester which utilizes tritiated silicon as an uninterrupted energy source. Tritiated silicon serves as a radioisotope source which emits energetic β particles that results in an electrostatic force between the radioactive source and collector that traps the emitted particles. The generated electrostatic force will drive the charging and actuating cycles of the piezoelectric cantilever leading to a continuous charge–discharge cycles, thus inducing vibrations in the piezoelectric cantilever. The energy generated from the piezoelectric thin-film is appropriately rectified and stored to provide continuous and uninterrupted electrical power to a low-power devices. The modelled results have been benchmarked against available experimental data for a unimorph piezoelectric harvester with very good agreement. Furthermore, the model was applied to a bimorph piezoelectric harvester, showing that the output power can be doubled in relation to a unimorph design. Moreover, the model accounts for the entire range of design and operating factors such as the ambient medium and associated damping losses, current leakage, and device scaling.     

Radioisotope Thin-Film Fueled Microfabricated Reciprocating Electromechanical Power Generator

A radioisotope power generator with a potential lifetime of decades is demonstrated by employing a 100.3-year half-lifetime $^{63}hbox{Ni}$ radioisotope thin-film source to electrostatically actuate and cause reciprocation in a microfabricated piezoelectric unimorph cantilever. The radioisotope direct-charged electrostatic actuation of the piezoelectric unimorph cantilever results in the conversion of radiation energy into mechanical energy stored in the strained unimorph cantilever. The gradual accumulation of the actuation charges leads to the pull-in of the unimorph cantilever into the radioisotope thin-film, and the resulting discharge leads to vibrations in the unimorph cantilever. During the vibrations, the stored mechanical energy is converted into electrical energy by the piezoelectric thin-film. The generator was realized by using both microfabricated lead zirconate titanate oxide–silicon (PZT–Si) and aluminum nitride–silicon (AlN–Si) unimorph cantilevers. The radioisotope direct-charged electrostatic actuation of the AlN–Si unimorph cantilevers by a 2.9-mCi $^{63}hbox{Ni}$ thin-film radiating 0.3 $muhbox{W}$ led to charge–discharge–vibrate cycles that resulted in the generation of 0.25% duty cycle 12.95- $muhbox{W}$ power pulses (across an optimal load impedance of 521 $hbox{k}Omega$) at an overall energy conversion efficiency of 3.97%. These electrical power pulses can potentially be useful for periodically sampling sensor microsystems. $hfill$[2008-0009]      

A piezoelectric model based multi-objective optimization of robot gripper design

The field of robotics is evolving at a very high pace and with its increasing applicability in varied fields, the need to incorporate optimization analysis in robot system design is becoming more prominent. The present work deals with the optimization of the design of a 7-link gripper. As actuators play a crucial role in functioning of the gripper, the actuation system (piezoelectric (PZ), in this case) is also taken into consideration while performing the optimization study. A minimalistic model of PZ actuator, consisting different series and parallel assembly arrangements for both mechanical and electrical parts of the PZ actuators, is proposed. To include the effects of connector spring, the relationship of force with actuator displacement is replaced by the relation between force and the displacement of point of actuation at the physical system. The design optimization problem of the gripper is a non-linear, multi modal optimization problem, which was originally formulated by Osyczka (2002). In the original work, however, the actuator was a ‘constant output-force actuator model’ providing a constant output without describing the internal structure. Thus, the actuator model was not integrated in the optimization study. Four different cases of the PZ modelling have been solved using multi-objective evolutionary algorithm (MOEA). Relationship between force and actuator displacement is obtained using each set of non-dominated solutions. These relationships can provide a better insight to the end user to select the appropriate voltage and gripper design for specific application.     

Design,modeling and test of a novel compliant orthogonal displacement amplification mechanism for the compact micro-grasping system

In the compact micro-grasping system, the combination of precisely orthogonal movement transformation, displacement amplification and simple structure is important. The typical solution of the combination issue requires bidirectional symmetric input forces/displacements. However, under a certain driving condition, numerous actuators used in micro-manipulation only supply unidirectional input froce/displacement for the driven mechanism, which makes the typical solution infeasible. In this study, a novel compliant orthogonal displacement amplification mechanism (DAM) is proposed to solve the combination issue for numerous actuators used in micro-grasping. The proposed mechanism is a triangulation amplification-based mechanism with undetermined structural parameters. The number of the undetermined parameters and the solution principle are analyzed. The design process is presented. Finite element analysis (FEA) is used to verify the design method. The FEA results show that, for the design examples, the errors evaluating the orthogonal movement transformation are smaller than 0.56 % and 0.15 % respectively, and the displacement amplification ratios are larger than 4.6. The orthogonal displacement amplification is realized. A precise model of the displacement amplification ratio is derived. The dynamic performances of the proposed orthogonal DAM are modeled and FEA verified. Furthermore, a microgripper utilizing the proposed mechanism is presented. The performances of the gripper, including the displacement amplification and the parallel movement of the jaws, are verified by FEA and experiments.

     

大位移压电陶瓷驱动器的有限元分析

为研究压电陶瓷驱动器的驱动效能,制作了大位移压电陶瓷驱动器.基于压电陶瓷材料的机电耦合特性,应用动力学有限元分析方法,将大位移压电陶瓷驱动器离散成一系列四面体单元,分别进行了力学和电学分析.根据压电陶瓷的基本压电方程,耦合了位移模式与电场模式的有限元模型,建立了压电陶瓷驱动器的有限元动力学模性.利用有限元分析软件ANSYS中的直接耦合场进行分析求解,分析结果与试验测量值取得了良好的一致,证实了利用压电陶瓷双晶片弯曲变形,制作的大位移压电陶瓷驱动器结构设计的合理性.该分析方法对压电陶瓷驱动器的设计、制造与测试具有理论指导意义.     

Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films

In this study, we report piezoelectric microactuators composed of Pb(Zr,Ti)O₃ (PZT) films for low-voltage RF-MEMS switches. In order to realize a flat beam shape as well as a large displacement, we have adopted an X-shaped connector at the center of the beam. Finite element method (FEM) simulation indicates that the bending motion of the beam is almost same as two connected cantilevers, and the maximum displacement reaches 3.2 μm/5 V. To fabricate the microactuators, piezoelectric PZT films were deposited on Si substrates using rf-sputtering and microfabricated into the PZT/Cr unimorph actuators of 800 μm in length and 200 μm in width, respectively. Although the X-shaped connector effectively releases the stress of the multilayered beam so that the beam shape is almost flat, small residual stress caused slight concave curvature along the width. The displacement at the center of the beam was measured using a laser Doppler vibrometer. The measurement revealed that the displacement was 0.5 μm/5 V which was lower than the FEM result. The reduction of the displacement is attributed to the increase of the stiffness of the beam due to the concave curvature of the beam width.     

Optimization of clamped circular piezoelectric composite actuators

This paper addresses the design of clamped circular piezoceramic composite unimorph and bimorph configurations, specifically the conflicting requirements of maximum volume displacement for a prescribed bandwidth. An optimization problem is formulated that implements analytical solutions for unimorph and bimorph configurations using laminated plate theory, including the use of oppositely polarized piezoceramic patches. A range of actuator geometric parameters are studied, and bounds for volume displacement and natural frequency of optimal designs are determined and presented via design curves. In the selected design space, Pareto optimization results for unimorph and bimorph configurations show that optimal volume displacement is related to the bandwidth by a universal power law such that the product of the square of the natural frequency and the displaced volume, a “gain-bandwidth” product, is a constant. Characteristic trends are also described that are independent of the actuator radius for the Pareto optimal piezoceramic patch thickness and radius versus normalized bandwidth. The results are relevant, for example, in the design of zero-net mass-flux or synthetic jet actuators used in flow control applications.     

Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation

This paper reports the design, fabrication and control of arrayed microelectromechanical systems (MEMS)-based actuators for distributed micromanipulation by generation and control of an air-flow force field. The authors present an original design of pneumatic microactuator, improving reliability and durability of a distributed planar micromanipulator described in the previous study. The fabrication process is based on silicon-on-insulator (SOI) wafer and HF (hydroflouric acid) vapor release, which also significantly increases the production yield of the 560 microactuator array device of 35/spl times/35 mm/sup 2/. Minimization of the electrostatic actuation pull-in voltage through suspension shaping fabrication was also studied, and successfully validated for electrical efficiency improvement. A distributed control method to achieve good conveyance performance and reduce motion control instability was investigated. An emulation approach was chosen to validate a decentralized control strategy on the distributed active surface in order to conduct a proof-of-concept of a future smart structure, integrating sensors, intelligence, and microactuators. Thus, a centralized/decentralized control flow, inspired by autonomous mobile robot principles, was applied. It was modeled and implemented using C-programming language. Experimental and characterization results validate the control method for feedback micromanipulation with good velocity and load capacity performance.     

Magnetic microactuation of polysilicon flexure structures

A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment. A microactuator consisting of a 400×(47-40)×7 μm³ rectangular plate of NiFe attached to a 400×(0.9-1.4)×2.25 μm³ polysilicon cantilever beam has been displaced over 1.2 mm, rotated over 180°, and actuated with over 0.185 nNm of torque. The microactuator is capable of motion both in and out of the wafer plane and has been operated in a conductive fluid environment. Theoretical expressions for the displacement and torque are developed and compared to experimental results     

A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.     

Serially Connected Weight-Balanced Digital Actuators for Wide-Range High-Precision Low-Voltage-Displacement Control

This paper presents the design, fabrication, and characterization of a new serial digital actuator, achieving an improvement in range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with a serial arrangement of unit digital actuators. We have measured the displacement range, precision, and drive voltage of unit and serial actuation at 1 Hz. The serial digital actuators produce a full-range displacement of $28.44 pm 0.02 muhbox{m}$ , accumulating unit displacements of $2.8 pm 0.5 muhbox{m}$ at an operating voltage of 4.47 $pm$ 0.07 V. In addition, the serial digital actuators that have a displacement precision of 37.94 $pm$ 6.26 nm do not accumulate the displacement errors of the unit actuators, i.e., 36.0 $pm$ 17.7 nm. We experimentally verify that the serial digital actuators achieve a range-to-squared-voltage ratio of 1.423 $muhbox{m/V}^{2}$ and a range-to-precision ratio of 749.6.$hfill$ [2009-0020]      

Development of piezoelectric MEMS deformable mirror

This paper reports on piezoelectric micro-electro-mechanical systems deformable mirrors with high-density actuator array for low-voltage and high-resolution retinal imaging with adaptive optics. The deformable mirror was composed of unimorph structure of lead zirconate titanate (PZT) thin film deposited on Pt-coated silicon on insulator substrate and a diaphragm of 10?mm in diameter formed by backside-etching the Si handle wafer. 61 hexagonal electrodes were laid out on the PZT thin film for the high-density actuator array. In order to reduce the dead space for the lead lines between the electrodes and connecting pads, a polyimide layer with through holes on the electrodes was patterned as an electrical insulator. To confirm the application feasibility of the fabricated DMs, displacement profiles of the actuators were measured by a laser Doppler vibrometer. Independent applications of voltages on individual actuators were confirmed.     

Dynamic cellular actuator arrays and the expanded fingerprint method for dynamic modeling

A key step to understanding and producing natural motion is creating a physical, well understood actuator with a dynamic model resembling biological muscle. This actuator can then serve as the basis for building viable, full-strength, and safe muscles for disabled patients, rehabilitation, human force amplification, telerobotics, and humanoid robotic systems. This paper presents a cell-based flexible actuator modeling methodology and the General Fingerprint Method for systematically and efficiently calculating the actuators’ respective dynamic equations of motion. The cellular actuator arrays combine many flexible ‘cells’ in complex and varied topologies for combined large-scale motion. The cells can have varied internal dynamic models and common actuators such as piezoelectric, SMA, linear motor, and pneumatic technologies can fit the model by adding a flexible element in series with the actuator. The topology of the cellular actuator array lends it many of its properties allowing the final muscle to be catered to particular applications. The General Fingerprint Method allows for fast recalculation for different and/or changing structures and internal dynamics, and provides an intuitive base for future controls work. This paper also presents two physical SMA based cellular actuator arrays which validate the presented theory and give a basis for future development.     

Preparation and characterization of unimorph actuators based on piezoelectric Pb(Zr0.52Ti0.48)O3 materials

This paper describes the preparation and characterization of unimorph actuators for deformable mirrors, based on Pb(Zr_0.52Ti_0.48)O₃ (PZT52) thin film. As comparison, two different designs, where the PZT layer in the unimorph actuators was driven by either interdigitated electrodes (IDT-mode) or parallel plate electrodes (d₃₁-mode), were investigated. The actuators utilize a unimorph membrane (diaphragm) structure consisting of an active PZT piezoelectric layer and a passive SiO₂/Si composite layer. To fabricate the diaphragm structures, n-type (1 0 0) silicon-on-insulator (SOI) wafers with 1 μm thermal SiO₂ were used as substrates (for d₃₁-mode actuators, the upper Si part of SOI need to be heavily doped and used as bottom electrodes simultaneously). Sol-gel derived PZT piezoelectric layers with PbTiO₃ (PT) bufferlayer in total of 0.86 μm were then fabricated on them, and 0.15 μm Al reflective layers were deposited and patterned into top electrode geometries, subsequently. The diaphragms were released using orientation-dependent wet etching (ODE) with 5-10 μm residual silicon layers. The complete unimorph actuators comprise 4 × 4 discrete units (4 mm² in size) with patterned PZT films for parallel plate configuration or 3 × 3 individual pixels (2 mm in IDT diameter) with continuous PZT films in graphic region for IDT configuration. The measurement results indicated that both of the two configurations can generate considerable deflections at low voltage. The measured maximum central deflections at 15 V were approximately 2.5 μm and 2.8 μm, respectively. The intrinsic strain conditions shaping the deflection profiles for the diaphragm actuators were also analyzed. In this paper, the behaviors of clamped parallel plate configuration without a diaphragm were also evaluated.     

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d_31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.