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1.
Si(111)衬底上生长的立方MgxZn1-x晶体薄膜   总被引:1,自引:0,他引:1  
在国际上第一次采用电子束反应蒸发法在Si(111)衬底上生长了MgxZn1-xO晶体薄膜。能量色散X射线(EDX)特征能谱及X射线衍射(XRD)分析表明薄膜呈立方结构,薄膜的晶面取向依赖于生长温度,在200℃温度下生长得到高度(200)取向的立方MgxZn1-xO薄膜,温度过高时得到多晶薄膜。对高度(200)取向的立方MgxZn1-xO薄膜的光荧光激发谱(PLE)分析表明其光学带隙为4.20eV,相对于MgO的带隙红移量为3.50eV。XRD分析还表明立方MgxZn1-xO薄膜与MgO衬底之间的晶格失配仅为0.16%。这使得高质量立方MgxZn1-xO多量子阱材料的制备成为可能。  相似文献   

2.
采用电子束反应蒸发法,(MnO)y(ZnO)1-y(y≥0.3)陶瓷靶作为蒸发源,高心含量的Ar/O2混合气为反应气体,在石英玻璃衬底上生长得到Mn含量超过50%(原子分数)的Zn1-xMnxO薄膜。场发射扫描电子显微镜和X射线衍射测量显示x〉O.5的Zn1-xMnxO薄膜呈单一晶相的立方相、岩盐矿结构。这与采用abinifio方法计算得到的结果一致(作为简化,计算时未考虑Mn的自旋的影响),即对于x≥0.5的Zn1-xMnxO材料体系,其取类MnO的立方岩盐矿结构比取类ZnO的六方相纤锌矿结构更稳定。对石英玻璃基Zn1-xMnxO薄膜的紫外.可见透射光谱测量表明,随着Mn含量从0增大到0.68,Zn1-xMnxO薄膜的光学带隙从3.35eV增大到5.02eV.磁性测量结果表明,所制备立方Zn0.32Mn0.68O薄膜在室温下没有表现出宏观磁性.  相似文献   

3.
采用Sol-gel工艺在石英玻璃和硅衬底上成功地制备了纳米晶La1-xSrxFeO3(x=0~0.4)系列薄膜,薄膜为钙钛矿结构,平均粒度在30nm左右。XPS结果表明,随着Sr含量的增大薄膜表面吸附氧含量增大。  相似文献   

4.
介绍了在Si衬底和石英玻璃衬底上生长的立方相MgxZn1-xO(0.55≤x≤1)晶体薄膜的物理特性,AFM和XRD等微结构特性表征显示了良好的表面形貌和高度的(111)取向生长特性.采用Manifacier方法,根据透射光谱中的干涉峰,计算得到立方相MgxZn1-xO薄膜的折射率.与已报道的六方相MgxZn1-xO(0≤x≤0.5)薄膜的折射率相类似,在400~800nm的可见光区域,不同Mg含量的立方相MgxZn1-xO薄膜,其折射率随入射波长的色散关系遵循一阶Sellmeier方程.对给定400nm的入射光波长,当薄膜中的Mg含量由55%增至100%时,其折射率由1.89衰减至1.73.  相似文献   

5.
在国际上第一次采用电子束反应蒸发法在Si(111)衬底上生长了MgxZn1-xO晶体薄膜.能量色散X射线(EDX)特征能谱及X射线衍射(XRD)分析表明薄膜呈立方结构,薄膜的晶面取向依赖于生长温度,在200C温度下生长得到高度(200)取向的立方MgxZn1-xO薄膜,温度过高时得到多晶薄膜.对高度(200)取向的立方MgxZn1-xO薄膜的光荧光激发谱(PLE)分析表明其光学带隙为4.20eV,相对于MgO的带隙红移量为3.50eV.XRD分析还表明立方MgxZn1-xO薄膜与MgO衬底之间的晶格失配仅为0.16%.这使得高质量立方MgxZn1-xO/MgO多量子阱材料的制备成为可能.  相似文献   

6.
采用射频磁控溅射法在80℃衬底温度下制备了MgxZn1-xO(x=0.23)薄膜,用X射线衍射(XRD)、高分辨透射电镜(HRTEM)、喇曼(Raman)光谱和原子力显微镜(AFM)研究了薄膜的结构特性.XRD和HRTEM分析结果表明MgxZn1-xO薄膜为单相六角纤锌矿结构,且具有沿c轴的择优取向,晶格常数与ZnO晶体的近似相等.Raman光谱不仅揭示MgxZn1-xO薄膜具有六角纤锌矿结构,而且也表明MgxZn1-xO薄膜的结晶质量比在相同条件下制备的ZnO薄膜好.AFM图像则显示出MgxZn1-xO薄膜为多晶结构.  相似文献   

7.
带本征薄层的异质结(HIT)太阳能电池要求本征非晶硅薄膜具有生长速率低,暗电导大,光学带隙宽的特点。采用等离子增强化学气相沉积(PECVD)制备符合HIT太阳能电池要求的本征非晶硅薄膜,并通过分析薄膜的透射光谱,采用Tauc法计算了薄膜的光学带隙,为约1.87eV,衬底温度为180℃,放电功率为80W时获得的薄膜性能最佳。  相似文献   

8.
热丝CVD法低温制备的多晶硅薄膜质量对衬底依赖性的研究   总被引:2,自引:0,他引:2  
以SiH4和H2作为反应气体,采用HWCVD的方法分别在石英玻璃、AZO、Si(100)和Si(111)衬底上制备了多晶硅薄膜。利用X射线衍射(XRD),拉曼(Raman)光谱和傅里叶红外(FT-IR)吸收光谱研究了不同衬底对多晶硅薄膜的择优取向、晶化率和应力的影响,用SEM观察了多晶硅薄膜的表面形貌。研究发现在4种衬底上生长的多晶硅薄膜均为(111)择优取向。单晶硅片对多晶硅薄膜有很强的诱导作用,并且Si(111)的诱导作用优于Si(100)的诱导作用。AZO对多晶硅薄膜生长也有一定的诱导作用。通过计算薄膜晶态比,得到除以石英为衬底的样品外,其它3种样品的晶态比均在90%以上,尤其以单晶硅片为衬底的样品更高。石英玻璃、AZO和Si(100)上生长的多晶硅薄膜中均存在压应力。  相似文献   

9.
以光学石英片为衬底,采用热丝 等离子体辅助化学气相沉积方法(HF PECVD)沉积了BN1-xPx薄膜。通过 X 射线衍射(XRD)、X 射线光电子能谱(XPS)、扫描电子显微镜 ( SEM )、X 射线能谱(EDAX)、紫外 可见(UV VIS)等测试手段研究了薄膜的化学组成、结构以及 P元素掺杂量对 BN1-xPx 薄膜材料光学带隙的调制规律。结果表明所沉积薄膜为B、P、N组成的三元化合物,没有相偏析,定向生长,与石英衬底结合牢固。BN1-xPx 薄膜中随着磷元素相对含量的增加,其光学带隙相应窄化,即通过控制磷的掺杂量可以有效调整该薄膜材料的光学带隙。  相似文献   

10.
采用脉冲准分子激光大面积扫描沉积技术,在Si(111)单晶衬底上沉积了WOx薄膜,采用X射线衍射(XRD)、喇曼光谱(RS),付里叶红外光谱(FT-IR)及透射电镜扫描附件(STEM)对不同条件下沉积的样品进行了结构分析,结果表明,氧分压和沉积温度是决定薄膜结构和成份的主要参数,在沉积温度300℃以上及20Pa氧压下得到了三斜相纳米晶WO3薄膜。  相似文献   

11.
We report on the microstructure and optical properties of AlxOy–Pt–AlxOy interference-type multilayer films, deposited by electron beam (e-beam) deposition onto corning 1737 glass, silicon (1 1 1) and copper substrates. The structural properties were investigated by Rutherford backscattering spectrometry, X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy and atomic force microscopy. The optical properties were extracted from specular reflection/transmission, diffuse reflectance and emissometer measurements. The stratification of the coatings consists of a semi-transparent middle Pt layer sandwiched between two layers of AlxOy. The top and bottom AlxOy layers were non-stoichiometric with no crystalline phases present. The Pt layer is in the fcc crystalline phase with a broad size distribution and spheroidal shape in and between the rims of AlxOy. The surface roughness of the stack was found to be comparable to the inter-particle distance. The optical calculations confirm a high solar absorptance of ∼0.94 and a low thermal emittance of ∼0.06 for the multilayer stack, which is attributed not only to the optimized nature of the multilayer interference stacks, but also to the specific surface morphology and texture of the coatings. These optical characteristics validate the spectral selectivity of the AlxOy–Pt–AlxOy interference-type multilayer stack for use in high temperature solar-thermal applications.  相似文献   

12.
Spectrally selective AlxOy/Pt/AlxOy multilayer absorber coatings were deposited onto corning 1737 glass, Si (111) and copper substrates using electron beam (e-beam) vacuum evaporator at room temperature. The employment of ellipsometric measurements and optical simulation was proposed as an effective method to optimize and deposit multilayer solar absorber coatings. The optical constants (n and k) measured using spectroscopic ellipsometry, showed that both AlxOy layers, which used in the coatings, were dielectric in nature and the Pt layer was semi-transparent. The optimized multilayer coatings exhibited high solar absorptance α ∼ 0.94 ± 0.01 and low thermal emittance ? ∼ 0.06 ± 0.01 at 82 °C. The Rutherford backscattering spectroscopy (RBS) data of AlxOy/Pt/AlxOy multilayer absorber indicated the AlxOy layers present in the coating were nearly stoichiometry. The scanning electron microscope analysis (SEM) result indicated that the average diameter and inter-particles distance of Pt grains were statistically about 146 ± 0.17 nm and 6-10 ± 0.2 nm respectively.  相似文献   

13.
14.
Integration of NiSix based fully silicided metal gates with HfO2 high-k gate dielectrics offers promise for further scaling of complementary metal-oxide- semiconductor devices. A combination of high resolution transmission electron microscopy and small probe electron energy loss spectroscopy (EELS) and energy dispersive X-ray analysis has been applied to study interfacial reactions in the undoped gate stack. NiSi was found to be polycrystalline with the grain size decreasing from top to bottom of NiSix film. Ni content varies near the NiSi/HfOx interface whereby both Ni-rich and monosilicide phases were observed. Spatially non-uniform distribution of oxygen along NiSix/HfO2 interface was observed by dark field Scanning Transmission Electron Microscopy and EELS. Interfacial roughness of NiSix/HfOx was found higher than that of poly-Si/HfO2, likely due to compositional non-uniformity of NiSix. No intermixing between Hf, Ni and Si beyond interfacial roughness was observed.  相似文献   

15.
In our previous works, we have shown that most existing ceramic superconductors can be considered to be built of superconductor-semiconductor composite and we have estimated the change in phonon spectrum of the intrinsic superconductor unit if a semiconductor unit is attached to it. Moreover, the proximity effect under the size quantization condition has been examined in the superconductor-semiconductor composite. Each of the stated effects by itself could causeT c enhancement in general as more semiconductor blocks are added to the system. We extend our study in this paper to analyze the combined actions of phonon spectral change and proximity effect without size quantization condition onT c variation in members of the Tl1 series of high-T c superconductors. Our results indicate that an optimumT c is obtained if the stated effects are included in the idealized unit cells of the superconductors made up of a superconductor-semiconductor array.  相似文献   

16.
The Anomalous Hall Effect (AHE) was investigated in IV–VI ferromagnetic semimagnetic semiconductors of Sn1–x Mn x Te codoped with either Eu or Er. The analysis of experimental data is as follows. Hall resistivity and magnetization showed that AHE coefficient R s depends on temperature and its value decreases with thetemperature increase. We observe that above ferromagnet–paramagnet transition temperature R s changes sign. We discuss the possible physical mechanisms responsible for observed temperature dependence of R s , particularly change of the sign.  相似文献   

17.
A high-pressure technique was adopted to obtain perovskite-type Pb(Li14Nb34)O3. A new perovskite Pb(Li14Nb34)O3 was characterized to have a cubic symmetry with ao = 4.069A?; Li and Nb ions in the B-site of perovskite lattice may be in a random arrangement.  相似文献   

18.
The preparation conditions of the high TC ceramic superconductor Ba(Pb,Bi)O3 is correlated with the superconducting transition. Transition onsets of all materials are similar, but transition widths and transition completeness is strongly dependent on firing temperature. Only materials prepared over a narrow temperature range, resulting in a nearly ideal weight loss, have a complete and narrow transition.  相似文献   

19.
The electrostriction in Pb (Zn13Nb23)O3 crystals has been investigated using a strain gauge method. In the ferroelectric phase below 140 C, the strain vs the electric field shows a hysteresis, which is ascribed to the effect of ferroelectric domains. A quadratic relation holds between the strain x and the electric polarization P as x = QP2 above about 170 C in the paraelectric phase. Values of the electrostrictive Q coefficients are determined from the measurements near 190 C, as Q11 = 1.6·10?2m4/C2, Q12 = ?0.86·10?2m4/C2, and Q44 = 0.85·10?2m4/C2.  相似文献   

20.
The superconducting transition temperature,T c , of La2–x Ba x CuO4 has been measured under high pressure up to 8 GPa.T c is found to change drastically at the pressure where the structural phase transition takes place. This finding clearly indicates that there exists an intimate relation between the crystal structure and superconductivity.  相似文献   

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