集成电路铜互连钌阻挡层异质材料去除选择性的研究

针对集成电路铜互连钌阻挡层异质材料(包括Cu、Ru、TEOS)在化学机械抛光(CMP)中选择性差的问题,在SiO2 H2O2体系抛光液中研究了(NH4)2SO4和2,2′{[(甲基1H苯并三唑1基)甲基]亚氨基}双乙醇(TT)对Cu、Ru、TEOS去除速率的影响,并使用钌阻挡层图形片对抛光液的平坦化性能进行验证。结果表明,(NH4)2SO4的添加可以提高Cu、Ru和TEOS的去除速率,进一步加入TT后,Cu的去除速率减小,Ru和TEOS的去除速率基本不变。采用由5%(质量分数,下同)SiO2、0.15%H2O2、40 mmol/L(NH4)2SO4和1 g/L TT组成的抛光液对钌阻挡层图形片化学机械抛光30 s后,碟形坑和蚀坑的深度得到了有效降低。     

工艺参数对GLSI铜互连阻挡层CMP抛光效果的影响

采用无氧化剂、无抑制剂的弱碱性抛光液对阻挡层材料进行化学机械抛光(CMP)。研究了胶体二氧化硅质量分数、抛光液流量、抛头转速、抛盘转速等工艺参数对Cu和正硅酸乙酯(TEOS)去除速率及铜互连钽基阻挡层图形片CMP后表面缺陷数量的影响。在Si O2磨料质量分数7.5%、抛光液流量250 mL/min、抛头转速107 r/min和抛盘转速113 r/min的条件下CMP时，Cu的去除速率为521?/min,TEOS的去除速率为878?/min,TEOS/Cu去除速率选择比为1.68，对图形片表面碟形坑和蚀坑分别修正了400?和200?，缺陷数低至57，表面粗糙度(Sq)低至0.778 nm。     

铜/钽/绝缘介质用碱性化学机械抛光液的优化

在工作压力2 psi,抛光头转速55 r/min,抛光盘转速60 r/min,流量150 m L/L,温度22.7°C的条件下,采用一种不含H_2O_2的碱性抛光液对Cu、Ta、SiO_2绝缘介质3种材料进行化学机械抛光(CMP)。通过研究抛光液中SiO_2磨料粒径和用量、FA/O II型螯合剂和非离子型表面活性剂用量对3种材料去除速率的影响,得到了高选择性的阻挡层抛光液:SiO_2粒径为50 nm的浆料20%(质量分数),FA/O II型螯合剂0.15%(体积分数),表面活性剂3%(体积分数)。该抛光液的SiO_2/Ta/Cu去除速率之比为3.4∶1.6∶1.0。采用该抛光液抛光后,铜的表面粗糙度由5.18 nm降至1.45 nm,碟形坑和蚀坑分别由116 nm和46 nm降至42 nm和24 nm。     

从锂离子电池回收钴铜物料盐酸浸出机理研究

对由失效锂离子电池焙烧得到的物料进行了化学物相和SEM分析,利用热力学原理研究了使用盐酸浸出物料时各物相的反应机理,并进行了试验证明。分析表明物料含高品位钴和铜,主要以金属和不同价态的氧化物形式存在。除CoO、Co和CuO易溶于酸外,Co能优先置换沉淀已溶解的Cu2+,Co3O4和Co2O3能被盐酸还原浸出,Cu2O会发生歧化反应,Cu最终被氯化浸出,部分铜在浸出体系中经历了一个溶解-置换沉淀-复溶解的过程。热力学研究表明,使用盐酸浸出物料中的钴和铜是可行的。钴和铜成分在浸出过程中有相互影响,有利于提高钴和铜的浸出率。盐酸浸出试验证明了分析结论,当使用2 mol/L盐酸318 K下浸出6 h、液固体积质量比为(20∶1)mL/g、搅拌转速200 r/m in时,钴和铜的浸出率分别达到99.3%和95.9%。     

铜离子在硫酸锌电解液深度净化除钴中的作用

对Cu2+在湿法炼锌浸出液锑盐法深度净化除钴过程中的作用进行了研究. 考察了钴离子浓度达到深度净化浓度([Co2+]<0.1 mg/L)的时间、低于该浓度的持续时间及所需初始铜离子浓度([Cu2+]0)等因素,综合衡量除钴效果,得到优化实验条件为：[Co2+]0=15 mg/L时,钴/锑质量比(Co/Sb)=2:1,[Cu2+]0=200 mg/L,达到深度净化浓度的时间和保持该浓度的时间分别是25和70 min;[Co2+]0=7.5 mg/L时,Co/Sb=2:1,[Cu2+]0=100 mg/L,达到和保持深度净化浓度的时间分别是40和55 min. 搅拌转速对除钴效果影响不大,高转速有利于钴返溶,返溶的原因可能是沉积的碱式钴盐溶解.     

膜电解处理含铜电镀废水研究

以氨水为电解质处理含铜电镀废水的膜电解过程中,通过阳离子交换膜迁移的主要离子包括Cu2、NH4+及H+,废水中Cu2的去除方式包括在电场力和渗析作用下废水中Cu2+通过阳离子交换膜进入阴极室,以及由于NH4+的迁移,在废水中形成Cu(OH)2絮体.采用膜电解技术,在V(氨水)∶V(纯水)分别为3∶5、2∶5、1∶8的情况下,对p(Cu2+)=109 mg/L电镀废水进行膜电解去除废水中Cu2的实验研究.结果表明,在V(氨水):V(纯水)为3∶5时,电解5h,废水中Cu2+去除率为94.71％,ρ(Cu2+)为5.79 mg/L;废水中形成的Cu(OH)2絮体中Cu2的质量浓度约占膜电解过程去除ρ(Cu2+)的40％.     

纳米Co/rGO磁性复合吸附材料的制备及对Cu2+的吸附性能

以改进Hummer法制备的薄片状氧化石墨烯(GO)为载体和模板负载钴离子,然后采用原位还原法制得纳米金属Co/石墨烯磁性复合吸附材料(Co/rGO),并将其应用于对Cu2+的吸附和脱除,以期为高效可复用的铜离子脱除剂的合成与应用提供指导。实验结果证实,Co/rGO复合材料具有超顺磁性,能够很方便的使用磁铁进行分离并在无磁场情况下振荡分散。Co/rGO复合材料对Cu2+具有稳定的吸附/脱附性能,实验条件下对Cu2+的最大吸附容量达到117.5 mg/g且5 min内实现吸附平衡,远优于其原料GO的60 min吸附容量27.6 mg/g。本工作系统考察了NaOH加入量、络合剂种类、溶剂种类等关键因素对Co粒子在rGO载体上形貌和分布特性的影响,比较了不同合成条件下的复合材料对Cu2+吸附效果的影响,并对优选条件下制备的Co/rGO复合材料进行了FT-IR, XRD, SEM表征。研究结果表明,纳米Co/rGO磁性材料对Cu2+的吸附过程更符合Freundlich模型,属于多层吸附。室温下吸附焓ΔH=17.81 kJ/mol,吸附反应平衡常数Kθ=3.65。当初始Cu2+浓度为39.22 mg/L时,对Cu2+的吸附率为93.47%,五次吸附/脱附循环后吸附容量仍保持在初始值的94%,每次吸附后溶液中残余Cu2+浓度均满足钴电解液对杂质铜离子的浓度去除要求(5 mg/L)或GB 8978-1996污水综合排放标准3级(2 mg/L),有望在相关领域发挥作用。     

抛光液组分对3D微同轴中铜和光刻胶化学机械抛光速率选择性的影响

研究了碱性抛光液的pH、SiO₂磨料质量分数、H₂O₂体积分数和甘氨酸质量分数对3D微同轴加工中铜和光刻胶化学机械抛光(CMP)去除速率的影响,得到较佳的抛光液组成为：SiO₂ 5%,H₂O₂ 20 mL/L,甘氨酸2.5%,pH=10。采用该抛光液时,铜和光刻胶的去除速率非常接近,满足3D微同轴加工对铜和光刻胶CMP去除速率选择性的要求。     

巯基乙酰壳聚糖制备条件的优化及其絮凝性能

通过正交试验研究了巯基乙酰壳聚糖(MAC)的最佳制备条件,探讨了MAC捕集重金属离子的机理,研究了pH、浊度对MAC除铜效果的影响,并对MAC去除重金属离子Cu2+、Cd2+、Ni2+的效果进行了对比。结果表明:制备MAC的最佳条件为:m(壳聚糖)∶m(巯基乙酸)为1∶2,pH为5.0,反应时间为3.5 h;水样浊度对铜离子的去除有促进作用;优化条件下,MAC对重金属离子的选择性顺序为Cd2+Cu2+Ni2+。     

非洲某氧化铜钴矿高效浸出钴铜的工艺研究

针对非洲某氧化铜钴矿还原浸出工艺,研究了矿样粒度、单还原剂和双还原剂、硫酸浓度、浸出时间、浸出温度、液固比等因素对钴铜浸出率的影响。结果表明:双还原剂优于单还原剂;最佳工艺条件为:球磨矿样粒度120目,加入浓硫酸使其质量浓度为0.15 g/L;按照先后顺序加入自来水体积8%的双氧水+矿样质量10%的亚硫酸钠,液固比为5∶1,浸出温度70℃,浸出时间30 min。钴、铜浸出率分别为99.01%和98.44%,浸出渣中w(Co)为0.12%、w(Cu)为0.052%。该最佳工艺条件可适用于非洲w(Co)为0.62%～8.88%的复杂品位氧化铜钴矿,尤其是低品位氧化铜钴矿处理。     

乙苯,苯乙烯的生产及合成乙苯,苯乙烯催化剂的研究进展

苯乙烯是重要的石油化工原料。本文介绍了国内外苯乙烯生产的发展概况，合成乙苯，苯乙烯所用的催化剂种类，并就苯乙烯生产及催化剂的发展趋势提出了自己的观点。     

Synthesis and characterization of homopolymers and copolymers of various acrylates and acrylonitrile

Various homopolymers and copolymers of methyl acrylate, ethyl acrylate, butyl acrylate, and acrylonitrile in different feed ratios were synthesized. These were characterized by IR, ¹³C-NMR, DSC, DTA, and TGA. Spectroscopic characterization helped in differentiating copolymers of different mol ratios. Thermal analysis revealed different degradation patterns for homopolymers and copolymers. The temperature and energy changes associated with various phase transitions were dependent on the chemical composition of homo- and copolymers, as expected. © 1993 John Wiley & Sons, Inc.     

生物质气化及生物质与煤共气化技术的研发与应用

总结了生物质原料的特点及生物质单独气化的缺点;介绍了国内外生物质气化技术及生物质与煤共气化技术的研发与应用现状;分析了在此领域国内外的发展趋势与前景;概括了开展生物质与煤共气化技术研发的意义。     

Electronic structures and reactivities of monometallic and bimetallic clusters of Au and Cu

The variation of the Au 4f binding energy of Au clusters with the cluster size has been established by measuring the binding energies of clusters whose size distributions were independently determined by HREM and STM. The binding energy increases significantly when the cluster size is less than 2 nm. Au-Cu bimetallic clusters of the composition Cu₃Au have been deposited for the first time on carbon substrates. The shifts in the core level binding energies of the bimetallic clusters show the effect of alloying in the case of large clusters, but show effects of both alloying and cluster size in the case of the small clusters. The interaction of CO with Cu₃Au clusters is stronger than with a bulk Cu metal. The interaction of CO with small Cu clusters also seems to be stronger than with bulk Cu or with large Cu clusters.     

钾盐资源及钾肥供需情况分析及预测

阐述了国内外钾盐资源及钾肥生产现状,对国内外钾盐的供需形势进行了分析及预测,从资源、原材料、国际市场三方面提出了解决我国钾盐短缺的措施。     

Kinetics and Mechanism of Oxidation of Mono- and Polyacetals

Abstract

Kinetics and mechanisms of oxidation of 6 acetals by molecular oxygen and ozone in liquid phase have been studied. Reaction with molecular oxygen (70°C, 15–16 hr) leads to the formation monoethers of the corresponding glycols with 68–90% selectivity. Salts of metals and complexes with crown-ethers have increased the reaction rate significally. Ozone have reacted with acetals with formation similar products. The mechanisms of intermediate stages have been proposed.     

Comparison of the Adhesion and Cohesion of Triblock and Random Copolymers of Styrene and Butadiene

A substantially greater detachment energy is required to strip a polyethylene tereph-thalate (Mylar) film from a styrene-butadiene-styrene (SBS) triblock copolymer compared to that for peeling from a random styrene-butadiene (SBR) copolymer. This is true even though the intrinsic interaction between the Mylar and each elastomer is expected to be similar because of their virtually identical chemical composition. It is proposed that this difference in peel strength (between the SBS and SBR) is a consequence of the much higher dissipative capacity of the former elastomer. Another manifestation of this is the higher cohesive tear strength of the SBS compared to the SBR. Extents of energy dissipation within each elastomer during detachment of the Mylar adherend are consistent with the hypothesis that the average maximum stress experience before detachment is some similar fraction of each elastomer's tensile strength.     

责任和责任心的涵义与结构

责任是人应主动承担的角色义务和对其因过失所造成后果应承担的责罚.有两层涵义:一是义务;二是后果.责任心是个体自觉做好分内事务和履行道德义务的心理倾向,是个性心理品质成分中自我特征维度上的重要内容.责任心具有两个方面的涵义:一是角色分内职责;二是角色道德义务.责任心是一种通过责任认知、责任个性和责任适应的动态形式表现出来的静态品质,责任心是责任心过程结构与责任心关系结构相互制约、相互影响的统一体.     

二甲基二烯丙基氯化铵和丙烯酰胺的合成及应用

用复合引发体系(过硫酸盐-偶氮类引发剂)和脂肪胺类氧化还原体系引发,在实验室获得了单体转化率≥98%,特性粘数高于13.6 dL/g的阳离子共聚物PDA,探讨了控制聚合物分子量的影响因素.     

Wetting properties of homopolymers and copolymers of pentafluorostyrene and methylacrylate and homopolymer blends

Polypentafluorostyrene (PPFS), polymethylacrylate (PMA), and poly(pentafluorostyrene-co-methylacrylate), poly(PFS-co-MA) were prepared and the wetting characteristics of polymer blends of PPFS and PMA were compared with that of poly(PFS-co-MA) via contact angle measurements. The critical surface tension of polypentafluorostyrene was found to be 22.6 dyne/cm, which is comparable to the value reported for polytrifluoroethylene (22 dyne/cm). The critical surface tension of poly(PFS-co-MA) is not linearly related to its composition. The polymer blends of PPFS and PMA exhibit significant surface enrichment of the fluoropolymer. The harmonic-mean method¹ was employed to determine surface tensions of these polymers and many known polymers. It is found that the method produces useful surface tension data provided the contact angle values are derived from testing liquids of dissimilar polarity.