Quantifying neutral base recombination and the effects ofcollector-base junction traps in UHV/CVD SiGe HBTs

This work quantifies neutral base recombination in UHV/CVD SiGe heterojunction bipolar transistors (HBTs) using calibrated two-dimensional (2-D) simulation. The simulated collector-base conductance through neutral base recombination (NBR) modulation is far below the experimentally observed values, and hence does not explain the measured output resistance degradation under forced-I_B operation. In spite of the output resistance degradation, these UHV/CVD SiGe HBTs have approximately the same base current as the silicon control, and hence higher current gain. Based on the observation of the majority carrier concentration limited recombination in the CB junction depletion layer, as opposed to the minority carrier concentration limited recombination in the neutral base, local presence of traps in the CB junction depletion layer is suggested. This explains the measured CB conductance modulation and the related output resistance degradation without compromising the current gain. Numerical simulations using traps locally introduced into the CB junctions successfully reproduced the measured collector-base conductance from simulation without appreciable degradation in current gain     

Measurement of collector-base junction avalanche multiplicationeffects in advanced UHV/CVD SiGe HBT's

This paper presents measurements of the avalanche multiplication factor (M-1) in SiGe HBTs using a new technique capable of separating the avalanche multiplication and Early effect contributions to the increase of collector current with collector-base bias, as well as allowing safe measurements at practical current densities. The impact of collector doping, current density, Ge profile, and operation temperature are reported for the first time using measured and simulated results from a production quality UHV/CVD SiGe HBT technology. Limitations of the technique in the presence of significant self-heating are discussed. By turning on the secondary hole impact ionization, we revealed the difference in impact ionization between strained SiGe and Si in the presence of the “dead space” effect. Despite its smaller bandgap, the compressively strained SiGe layer shows an apparent decrease in the secondary hole impact ionization rate compared to Si     

Substrate current based avalanche multiplication measurement in 120 GHz SiGe HBTs

A new substrate current-based technique for measuring the avalanche multiplication factor (M - 1) in high-speed SiGe heterojunction bipolar transistors (HBTs) is proposed. The technique enables M - 1 measurement at high operating current densities required for high-speed operation, where conventional techniques fail because of self-heating. Using the proposed technique, M - 1 was measured up to 10 mA//spl mu/m/sup 2/ on SiGe HBTs featuring 120 GHz peak f/sub T/ which occurs at J/sub C/ about 7 mA//spl mu/m/sup 2/. Implications for circuit applications are also discussed.     

UHV/CVD生长SiGe/Si异质结构材料

以Si2H6和GeH4作为源气体,用UHV/CVD方法在Si(100)衬底上生长了Sil-xGex合金材料和Si1-xGex/Si多量子阱结构.用原子力显微镜、X光双晶衍射和透射电子显微镜对样品的表面形貌、均匀性、晶格质量、界面质量等进行了研究.结果表明样品的表面平整光滑,平均粗糙度为1.2nm;整个外延片各处的晶体质量都比较好,各处生长速率平均偏差为3.31％,合金组分x值的平均偏差为2.01％;Si1-xGex/Si多量子阱材料的X光双晶衍射曲线中不仅存在多级卫星峰,而且在卫星峰之间观察到了Pendellosung条纹,表明晶格质量和界面质量都很好;Si1-xGex/Si多量子阱材料的TEM照片中观察不到位错的存在.     

UHV/CVD生长SiGe/Si异质结构材料

以 Si2 H6 和 Ge H4 作为源气体 ,用 UHV/CVD方法在 Si( 1 0 0 )衬底上生长了 Si1- x Gex 合金材料和 Si1- x Gex/Si多量子阱结构 .用原子力显微镜、X光双晶衍射和透射电子显微镜对样品的表面形貌、均匀性、晶格质量、界面质量等进行了研究 .结果表明样品的表面平整光滑 ,平均粗糙度为 1 .2 nm;整个外延片各处的晶体质量都比较好 ,各处生长速率平均偏差为 3.31 % ,合金组分 x值的平均偏差为 2 .0 1 % ;Si1- x Gex/Si多量子阱材料的 X光双晶衍射曲线中不仅存在多级卫星峰 ,而且在卫星峰之间观察到了 Pendellosung条纹 ,表明晶格质量和界面质量都很好 ;Si     

Characterization and modeling of avalanche multiplication in HBTs

The accurate modeling of weak avalanche breakdown of HBTs in compact bipolar transistor models for circuit simulation is presented. Based on various device electrical characteristics that are grouped into three classes, a modified VBIC avalanche multiplication model is proposed. By simply replacing one constant avalanche model parameter with current linear dependence, the new model predicts well broad behaviors of breakdown from weak avalanche up into high level injections.     

Avalanche multiplication and pinch-in models for simulating electrical instability effects in SiGe HBTs

The onset of impact ionization-induced instabilities limits the operative range of SiGe hetero-junction bipolar transistors. Based on referential Monte Carlo simulation results, a critical review of major models for the avalanche multiplication factor (M) is presented, and a new analytical model is proposed and successfully verified by measurements. The novel M formulation has been incorporated in a two-dimensional theoretical model describing bipolar transistor operation under pinch-in conditions/above the open-base breakdown voltage BV_CEO. The physical mechanisms leading to electrical instability are addressed, and closed form analytical relations defining the onset of instability under forced-I_E conditions are derived. The proposed model defines the limits of the Safe Operating Area (SOA) related to impact ionization, enabling the reliable usage of HBTs above BV_CEO.     

用于SiGe材料生长的新型UHV/UV/CVD系统

介绍了新近研制的用于ＳｉＧｅ材料生长的超高真空（ＵＨＶ）／紫外光（ＵＶ）／能量辅助ＣＶＤ工艺系统。     

用于SiGeHBT器件的UHV/CVDn~-型硅外延研究

利用超高真空化学气相淀积(UHV/CVD)设备,在掺Asn+型Si衬底上生长了掺Pn-型Si外延层.用扩展电阻法分析了在不同的生长温度和PH3气体流量下生长的Si外延层的过渡区厚度.结果表明,生长温度对n+-Si衬底的As外扩有明显影响,在700℃下生长的Si外延层的过渡区厚度为0.16μm,而在500℃下仅为0.06μm,且杂质分布非常陡峭.X射线双晶衍射分析表明在700℃下生长的Si外延层的质量很高.制作的锗硅异质结晶体管(SiGeHBT)的击穿特性很硬,击穿电压为14.5V,在VCB=14.0V下的漏电流仅为0.3μA;输出特性很好,在VCE=5V,IC=3mA时的放大倍数为60     

Low-frequency noise in UHV/CVD epitaxial Si and SiGe bipolartransistors

In this work a comprehensive investigation of low-frequency noise in ultrahigh vacuum/chemical vapor deposition (UHV/CVD) Si and SiGe bipolar transistors is presented. The magnitude of the noise of SiGe transistors is found to be comparable to the Si devices for the identical profile, geometry, and bias. A comparison with different technologies demonstrates that the SiGe devices have excellent noise properties compared to AlGaAs/GaAs heterojunction bipolar transistors (HBT's) and conventional Si bipolar junction transistors (BJT's). Results from different bias configurations show that the 1/f base noise source is dominant in these devices. The combination of a 1/Area dependence on geometry and near quadratic dependence on base current indicates that the 1/f noise sources are homogeneously distributed over the entire emitter area and are probably located at the polysilicon-Si interface. Generation/recombination (Gm) noise and random telegraph signal (RTS) noise was observed in selected Si and SiGe devices. The bias dependence and temperature measurements suggest that these G/R centers are located in the base-emitter space charge region. The activation energies of the G/R traps participating in these noise processes were found to be within 250 meV of the conduction and valence band edges     

用于SiGe HBT器件的UHV/CVDn-型硅外延研究

利用超高真空化学气相淀积(UHV/CVD)设备,在掺As n+型Si衬底上生长了掺P n-型Si外延层.用扩展电阻法分析了在不同的生长温度和PH3气体流量下生长的Si外延层的过渡区厚度.结果表明,生长温度对n+-Si衬底的As外扩有明显影响,在700℃下生长的Si外延层的过渡区厚度为0.16μm,而在500℃下仅为0.06μm,且杂质分布非常陡峭.X射线双晶衍射分析表明在700℃下生长的Si外延层的质量很高.制作的锗硅异质结晶体管(SiGe HBT)的击穿特性很硬,击穿电压为14.5V,在 V CB =14.0V下的漏电流仅为0.3μA;输出特性很好,在 V CE =5V, I C=3mA时的放大倍数为60.     

UHV/CVD外延生长SiGe/Si表面反应动力学

利用 Si H4 和 Ge H4 作为源气体 ,对 UHV/CVD生长 Si1- x Gex/Si外延层的表面反应机理进行了研究 ,通过 TPD、RHEED等实验观察了 Si( 1 0 0 )表面 Si H4 的饱和吸附、热脱附过程 ,得出 Si H4 的分解应该是每个 Si H4 分子的 4个 H原子全部都吸附到了 Si表面 ,Si H4 的吸附率正比于表面空位的 4次方 ,并分析了 Ge H4 的表面吸附机制 .在此基础上建立了 UHV/CVD生长Si1- x Gex/Si的表面反应动力学模型 ,利用模型对实验结果进行了模拟 ,二者符合得很好     

UHV/CVD外延生长SiGe/Si表面反应动力学

利用SiH4和GeH4作为源气体,对UHV/CVD生长Si1-xGex/Si外延层的表面反应机理进行了研究,通过TPD、RHEED等实验观察了Si(100)表面SiH4的饱和吸附、热脱附过程,得出SiH4的分解应该是每个SiH4分子的4个H原子全部都吸附到了Si表面,SiH4的吸附率正比于表面空位的4次方,并分析了GeH4的表面吸附机制.在此基础上建立了UHV/CVD生长Si1-xGex/Si的表面反应动力学模型,利用模型对实验结果进行了模拟,二者符合得很好.     

超高真空化学气相生长用于应变硅的高质量SiGe缓冲层

采用UHV/CVD技术,以多层SiGe/Si结构作为缓冲层来生长应变弛豫SiGe虚衬底,并在此基础上生长出了具有张应力的Si层.利用高分辨X射线、二次离子质谱仪和原子力显微镜分别对薄膜的晶体质量、厚度以及平整度进行了分析.结果表明,通过这种方法制备的SiGe虚衬底,不仅可以有效提高外延层中Ge含量,以达到器件设计需要,而且保证很好的晶体质量和平整的表面.Schimmel液腐蚀后观察到的位错密度只有1×106cm-2.     

Hot electron and hot hole degradation of UHV/CVD SiGe HBT's

We investigate the degradation in current gain and low-frequency noise of SiGe HBT's under reverse emitter-base stress due to hot electrons (forward-collector stress) and hot holes (open-collector stress). Contrary to previous assumptions we show that hot electrons and hot holes with the same kinetic energy generate different amounts of traps and hence have a different impact on device degradation. These results suggest that the accuracy of using forward-collector stress as an acceleration tool and reliability predictor must be carefully examined. We also present, for the first time, the effect of Ge profile shape on the reliability of SiGe HBT's, as well as discuss measurements on SiGe HBT's as a function of device geometry and temperature     

超高真空化学气相生长用于应变硅的高质量SiGe缓冲层

采用UHV/CVD技术,以多层SiGe/Si结构作为缓冲层来生长应变弛豫SiGe虚衬底,并在此基础上生长出了具有张应力的Si层.利用高分辨X射线、二次离子质谱仪和原子力显微镜分别对薄膜的晶体质量、厚度以及平整度进行了分析.结果表明,通过这种方法制备的SiGe虚衬底,不仅可以有效提高外延层中Ge含量,以达到器件设计需要,而且保证很好的晶体质量和平整的表面.Schimmel液腐蚀后观察到的位错密度只有1×106cm-2.     

超高真空CVD对锗硅外延材料中锗分布的优化

对自行研制的超高真空化学气相外延设备(RHT/UHV/CVD SGE500)的气路系统进行了改进,使之能够生长出较好的Ge分布图形。利用X射线双晶衍射(DCXRD)和二次离子质谱(SIMS)测试技术,研究并优化了外延生长参量,最终得到了具有优化Ge分布的SiGe材料。     

Hot-carrier effects on power characteristics of SiGe HBTs

This letter investigates hot-carrier (HC) effects on the power characteristics of Si-SiGe HBTs using load-pull measurements. We found that the output power, power gain, and linearity of Si-SiGe HBTs are degraded after HC stress. Under constant base-current measurement, the HC-induced power performance degradation is found to be much worse than that under constant collector-current measurement. The HC effects on the cutoff frequency, nonlinearity terms of base-current and collector-current, and third-order intermodulation (IM3) cancellation effect have been analyzed to explain the experimental observations.     

Si／SiGe／Si HBT的优化设计

给出了常温和低温Ｓｉ／ＳｉＧｅ／ＳｉＨＢＴ的设计原则，并进行了讨论。指出了低温和室温ＨＢＴ设计上的差异。这些原则可用于设计特定要求的Ｓｉ／ＳｉＧｅ／ＳｉＨＢＴ。