SiO2薄膜制备方法、性能及其应用的研究进展

综述了二氧化硅(SiO2)薄膜的制备方法和研究进展,介绍了磁控溅射、溶胶凝胶法和真空镀等SiO2薄膜制备方法及其优缺点,论述SiO2薄膜在光学、电学和光电等性能研究方面的新进展,最后对SiO2薄膜的应用和发展进行了展望.     

纳米TiO2-SiO2自清洁复合薄膜制备及其光催化机理

采用溶胶-凝胶法在普通载玻片上制备TiO2-SiO2复合薄膜,研究SiO2添加量对光催化活性的影响,探讨TiO2光催化的机理．结果表明：光催化性随SiO2含量的增加而增加。但SiO2添加量过大,煅烧过程中对TiO2锐钛矿相晶粒生长有抑制作用,而且光催化活性有所下降．当SiO2添加量为30％时,在紫外光照1h时TiO2-SiO2薄膜的光催化活性最佳．     

TiO_2薄膜的亲水性及光催化自清洁效果

以溶胶-凝胶法为基础,在普通玻璃表面制备了具有纳米尺寸气孔、纳米及微米尺寸复合气孔结构的TiO2薄膜或TiO2/SiO2复合薄膜,并考察了它们的亲水性能及表面经空气中灰尘污染后,其超亲水性能在紫外光照射下的恢复能力。所有纯TiO2薄膜于制备后测试的表面水接触角均达到0°。SiO2的掺杂量较小（10%）时,SiO2的掺入增大了薄膜的水接触角,但随着SiO2掺杂量的增大,接触角减小,可达到超亲水效果。表面污染的薄膜经紫外光照射后,其超亲水性的光致恢复能力基本不受前驱体溶胶的陈化时间、SiO2掺杂浓度、表面形态的影响,但与薄膜的光催化活性有关。4层以上的薄膜或带有SiO2中间隔离层的薄膜由于可以抑制玻璃基底中Na＋扩散至薄膜表面,光催化降解灰尘污染物的能力较高,紫外光照射后均能恢复其超亲水性能。     

金红石型TiO2/锐钛矿型TiO2/SiO2三元复合薄膜的合成

采用水热法,以钛酸正丁醑为初始原料,在FTO基底上沉积了金红石型TiO2纳米棒阵列,然后利用锐钛矿型TiO2纳米粒子及无定形SiO2对纳米棒进行了表面修饰,获得金红石型TiO2/锐钛矿型TiO2/SiO2三元复合薄膜.扫描电镜及X射线衍射分析结果表明,在FTO表面上沉积的TiO2为金红石型单晶纳米棒,其尺寸随反应时间的增加而增大.电化学测试结果表明,随着纳米棒尺寸的增大,相应复合薄膜的电化学反应电荷转移阻力增大.2种TiO2晶型混合引起的电子-空穴分离效应及混合的均匀程度直接影响到复合薄膜的光催化活性.水热反应7h得到的纳米棒阵列相应的复合薄膜显示了较好的电化学性能及光催化活性.     

Au/SiO_2复合薄膜的紫外光还原制备与光吸收性能

通过溶胶-凝胶法,利用紫外光辐射还原金(Au)得到了高均匀性Au/SiO2复合薄膜,并用SEM、TEM、XRD、UV-Vis光谱等手段对薄膜样品进行了性能表征,讨论了紫外光对金纳米粒子的还原机理。XRD结果表明,均匀分散于非晶SiO2中的Au纳米粒子呈现出面心立方多晶相;SEM结果表明,所得到的Au/SiO2复合薄膜中,纳米颗粒的尺寸较小,分布均匀;复合薄膜的UV谱表明,Au纳米粒子的表面等离子共振吸收峰随着焙烧温度的增加以及nAu/nSi的改变,从585nm附近逐渐红移至600nm附近,并逐渐增强,同时,nAu/nSi较大的3个薄膜样品分别在820,900和830nm附近的近红外区出现了吸收。     

MOD法制备SrBi2Ta2O9铁电薄膜及其性能研究

在Pt/TiO2/SiO2/Si衬底上,用金属有机物分解法(MOD)制备了SrBi2Ta2O9(SBT)铁电薄膜.研究了SBT薄膜的晶体结构,表面形貌以及它的电学性能,结果表明SrBi2Ta2O9铁电薄膜具有良好的抗疲劳特性,在经过109次极化反转后其剩余极化强度Pr变化不大,约为3%,并且漏电流较低,在测量电压为1V时,漏电流密度为5.73×10-8A/cm2.     

溶胶-凝胶法制备HPMC/SiO2杂化复合薄膜

采用溶胶-凝胶法(sol-gel)在聚乳酸(PLA)基膜上负载羟丙基甲基纤维素/二氧化硅(HPMC/SiO2)有机-无机杂化层,制备HPMC/SiO2有杂化复合薄膜。表征和测试杂化复合薄膜的结构与性能。结果表明:当HPMC溶液体积分数为6%时,杂化复合薄膜的氧气阻隔性能比PLA薄膜的氧气阻隔性能提高了36倍,同时,杂化复合薄膜的拉伸强度优于PLA薄膜。     

Sol-Gel V2O5薄膜的成膜和取向研究

采用溶胶-凝胶法在SiO2/Si衬底上沉积V2O5薄膜,详细介绍了对衬底表面作亲水处理的方法.以不同浓度溶胶,在不同温度和不同气氛下对薄膜进行热处理,得到以〈001〉向为主取向的高取向薄膜,从理论上解释了V2O5薄膜的取向机理,并与相同衬底上的热蒸发和PLD氧化钒薄膜的取向作了比较.     

TiO2/SiO2薄膜的制备及光催化降解氯前水的TOC

TiO2光催化降解有机污染物存在反应后催化剂难于分离、颗粒不适宜循环使用和易失活等缺点，在实际应用中受到一定限制，而以SiO2为基底的负载型薄膜能较好地解决上述问题．采用溶胶一凝胶法制备TiO2／SiO2复合薄膜，在光催化作用下，将不同温度下制备的薄膜对自来水厂氯前水的TOC进行降解实验．结果表明，热处理温度在450℃时制备的TiO2／SiO2复合薄膜降解效果最好，该薄膜能生成大量的有利于光生空穴和电子分离的表面层，减小了电子一空穴在TiO2表面的复合几率，使薄膜的光催化效率大大提高，氯前水的TOC值有较大幅度的降低．     

玻璃基SiO_2-TiO_2纳米孔薄膜

针对光伏组件封装盖板玻璃,用溶胶-凝胶方法在玻璃上镀制了SiO2-TiO2纳米孔膜。研究了膜层中二氧化钛与二氧化硅比例对薄膜折射率的影响,分析了去离子水、无水乙醇与TEOS比例和薄膜可见光透射率的关系,以及快速热处理温度对膜层硬度的影响。用X射线光电子能谱(XPS)表征了薄膜的元素组成,用扫描电镜(SEM)观察了薄膜的表面形貌,使用接触角测试仪测试了镀膜玻璃的润湿性能,分析了薄膜的组成和表面形貌与光学性能的关系,对得到的结果进行了讨论。     

The Effect of SiO_2 Additive on Super-hydrophilic Property of TiO_2-SiO_2 Thin Film by Sol-gel Method

TiO2-SiO2 thin films have been prepared on slide glass substrates by sol-gel method, and the effect of SiO2 additive on photo-generated hydrophilicity of TiO2 thin film was investigated by measuring the contact angle of water, the microstructure, the transmittance, the photocatalytic activity and the specific surface area . The results showed that 10mol% of SiO2 additive was the most effective for decreasing contact angle of water. The SiO2 additive of less than 30mol% has a suppressive effect on the crystal growth of anatase in calcinations, resulting in a large surface area. Consequently, the super-hydrophilicity was improved.     

表面修饰的ZnPc薄膜晶体管性能研究

以热生长的SiO2作为栅绝缘层,酞菁锌(ZnPc)作为有源层,研究了具有十八烷基三氯硅烷(OTS,C18H37SiCl3)/SiO2双绝缘层结构的有机薄膜晶体管(OTFT)。实验表明,采用OTS可以有效地降低SiO2栅绝缘层的表面能并改善表面的平整度,器件的场效应迁移率提高了3.5倍,漏电流从10-9A降到10-10A,阈值电压降低了5 V,开关电流比从103增加到104。结果显示,具有OTS/SiO2双绝缘层的器件结构能有效改进OTFT的性能。     

The Effect of SiO2 Additive on Super-hydrophilic Property of TiO2-SiO2

TiO2-SiO2 thin films have been prepared on slide glass substratesby sol-gel method, and the effect of SiO2 additive on photo-generated hydrophilicity of TiO2 thin film was investigated by measuring the contact angle of water, the microstructure, the transmittance, the photocatalytic activity and the specific surface area. The results showed that 10mol% of SiO2 additive was the most effective for decreasing contact angle of water. The SiO2 additive of less than 30mol% has a suppressive effect on the crystal growth of anatase in calcinations, resulting in a large surface area. Consequently, the super-hydrophilicity was improved.     

SnO2 - CdO复合薄膜的制备及其光电性能研究

使用射频磁控溅射技术,以原子百分比为4:1和1:4的SnO₂和CdO制备了SnO₂- CdO复合薄膜.XRD分析表明, SnO₂- CdO(4:1)复合薄膜为SnO₂(310)和Cd₂SnO₄(011)的混合相多晶结构,且结晶性能良好.随着氧流量的增加,薄膜的择优生长方向由SnO₂(310)转变为Cd₂SnO₄(011).薄膜在可见光和近红外光范围内的最高透过率达到95%和91%, 最高平均透过率达到87%和85%, 光学带隙在3.80～3.90 eV范围内变化.电阻率随着薄氧流量的增加而下降,最低为0.133 Ω·cm.薄膜的厚度约为330 nm, 其表面由大量分布均匀的球形颗粒组成.原子百分比为4:1的SnO₂- CdO复合薄膜的光电性能优于原子百分比为1:4的SnO₂- CdO复合薄膜.     

Improved visible transparency of SIO<Subscript>2</Subscript>/ZNO:AL /CEO<Subscript>2</Subscript>-TIO<Subscript>2</Subscript>/SIO<Subscript>2</Subscript> multilayer films with high UV absorption and infrared reflection rate

New visible transparent, UV absorption, and high infrared reflection properties have been realized by depositing multilayer SiO₂/ZnO: Al/CeO₂-TiO₂/SiO₂ films onto glass substrates at low temperature by radio frequency magnetron sputtering. Optimum thickness of SiO₂, ZnO: Al (ZAO) and CeO₂-TiO₂ (CTO) films were designed with the aid of thin film design software. The degree of antireflection can be controlled by adjusting the thickness and refractive index. The outer SiO₂ film can diminish the interference coloring and increase the transparency; the inner SiO₂ film improves the adhesion of the coating on the glass substrate and prevents Ca²⁺, Na⁺ in the glass substrate from entering the ZAO film. The average transmittance in the visible light range increases by nearly 18%-20%, as compared to double layer ZAO/CTO films. And the films display high infrared reflection rate of above 75% in the wavelength range of 10-25 μm and good UV absorption (> 98%) properties. These systems are easy to produce on a large scale at low cost and exhibit high mechanical and chemical durability. The triple functional films with high UV absorption, antireflective and high infrared reflection rate will adapt to application in flat panel display and architectural coating glass, automotive glass, with diminishing light pollution as well as decreasing eye fatigue and increasing comfort.     

Al_2O_3含量对CaO－Al_2O_3－SiO_2玻璃结构单元Q_n分布影响

利用Ｒａｍａｎ光谱并对谱带进行高斯线型拟合，研究了ＣａＯ／ＳｉＯ２＝１／２玻璃中引入３、６、９ｍｏｌ％的Ａｌ２Ｏ３后结构单元Ｑｎ分布的变化。发现链状结构单元丰度减小，层状结构单元增多，而三维网络结构单元的丰度基本不变。根据这个结果解释了Ａｌ２Ｏ３对玻璃分相和析晶的抑制作用。     

Preparation of TiO_2 Thin Film and Its Antibacterial Activity

1　IntroductionInrecentyears ,theuseofinorganicantimicrobialagentshasattractedinterestforthecontrolofmicrobes[1-3 ] .Thekeyadvantagesofinorganicantimicro bialagentsareimprovedsafetyandstability ,ascomparedwithorganicantimicrobialagents .Atpresent,mostanti…