Cu/Zr纳米多层膜微结构与力学性能

本文利用直流磁控溅射方法在石英玻璃基片上制备一系列自支撑Cu/Zr纳米多层膜,使用箱式电炉对多层膜进行退火处理,利用显微硬度计,X射线衍射仪、扫描探针显微镜表征了多层膜的力学性能与微观结构,研究了不同工艺参数对纳米多层膜性能的影响.研究结果表明:当Cu调制层厚从42 nm增加至140nm时,多层膜显微硬度从4.9 GPa逐渐降低至4.0 GPa;当Zr调制层厚从3.2 nm增加至4.8 nm时,显微硬度值从6.51 GPa降低至5.64 GPa,硬度值降低13.4%,而从4.8 nm增至8 nm时,显微硬度值变化不大(约5.7 GPa);合适的温度退火时,多层膜微观缺陷消失,表面形貌更均匀,显微硬度增加.利用Chu和Barnett提出的硬度增强理论模型对Cu/Zr纳米多层膜表现出的超硬现象进行了理论分析和解释.     

TbFe/Fe交换耦合磁致伸缩多层膜的制备

采用双靶磁控溅射法制备了 TbFe/Fe交换耦合磁致伸缩多层膜,考察了热处理时间、Fe层厚度、溅射功率以及Ar气分压对多层膜低场磁致伸缩性能的影响。研究结果表明:TbFe 磁致伸缩层与软磁 Fe层之间通过交换耦合作用以及热处理能明显提高薄膜的软磁性能和磁致伸缩性能;TbFe/Fe多层膜的磁致伸缩性能对热处理时间、Fe 层厚度、溅射功率、Ar 气分压等薄膜沉积参数十分敏感;与 TbFe 磁致伸缩薄膜相比TbFe/Fe交换耦合磁致伸缩多层膜水平方向的矫顽力从 16kA/m降低到 9.6 kA/m。在外加磁场为8000 A/m条件下,TbFe/Fe磁致伸缩多层膜最大磁致伸缩系数可达1.58×10-4。     

NbN/TaN纳米多层膜的微结构及超高硬度效应

用磁控反应溅射的方法在不锈钢基片上制备了NbN／TaN纳米多层薄膜,试验采用X射线衍射仪（XRD）、透射电子显微镜（TEM）及显微硬度仪对薄膜的微结构和硬度进行分析,结果表明：在NbN／TaN多层膜中,NbN层为面心晶体结构,TaN层为六方晶体结构;NbN／TaN纳米多层膜存在超硬效应,在调制周期2．3～170nm这一放宽的范围内保持超高硬度,硬度最大值HK达51.0GPa     

纳米多层膜的界面微结构与超硬度

综述了近年来纳米多层膜界面微结构及超硬度效应的研究进展,表明纳米多层膜硬化的主要机制是位错镜像力及hall-petch模型,超模效应及晶格错配引起的交变应变场对硬化起次要作用。     

磁控溅射SiC／W纳米多层膜的微结构研究

用磁控溅射法在Ｓｉ基底上制备了不同调制波长的ＳｉＣ／Ｗ纳米多层膜。利用小角度Ｘ射线衍射技术，详细研究了其中典型的多层膜的调制周期性。各子层的厚度及界面平整度等界面微观结构。结果表明：磁控溅射法制备的纳米多层膜具有较好的周期结构及陡峭的界面梯度，由衍射峰位置计算出的界面不均匀旗与子层厚度之比一般在５％以内。     

纳米多层膜制备概述

纳米多层膜具有很多特殊性能，得到了广泛的应用。阐述了多种纳米多层膜的制备方法，主要包括电化学沉积法、物理和化学气相沉积法、溶胶-凝胶法、组装技术以及其它制备技术。大量研究和试验表明，不同的制备方法得到的多层膜具有其特殊的性能。     

TiAlN/VN纳米多层膜的微结构与力学和摩擦学性能

采用反应磁控溅射制备了TiAlN/VN纳米多层膜, 并使用X射线衍射分析(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)、纳米压痕仪和多功能摩擦磨损试验机对多层膜的微结构与力学和摩擦学性能进行了表征和分析。研究结果表明: 不同调制周期的TiAlN/VN多层膜均呈典型的柱状晶生长结构, 插入VN层并没有打断TiAlN涂层柱状晶的生长。在一定调制周期下, TiAlN/VN纳米多层膜中的TiAlN和VN层之间能够形成共格生长结构, 其硬度和弹性模量相比于TiAlN单层膜均有显著提升, 其中, TiAlN (10 nm)/VN (10 nm)的硬度和弹性模量最大增量分别达到39.3%和40.9%。TiAlN/VN纳米多层膜的强化主要与其共格界面生长结构有关。另外, TiAlN单层膜的摩擦系数较高(~0.9), 通过周期性地插入摩擦系数较低的VN层能够使得TiAlN的摩擦系数大大降低, TiAlN/VN纳米多层膜的摩擦系数最低为0.4。     

磁控溅射SiC/W纳米多层膜的微结构研究

用磁控溅射法在Si基底上制备了不同调制波长的SiC／W纳米多层膜。利用小角度X射线衍射技术（LXD），详细研究了其中典型的多层膜的调制周期性，各子层的厚度及界面平整度等界面微观结构。结果表明：磁控溅射法制备的纳米多层膜具有较好的周期结构及陡峭的界面梯度，由衍射峰位置计算出的界面不均匀度与子层厚度之比一般在5％以内。另外，对于小角度X射线衍射谱线中的所谓峰分裂现象进行了分析和计算。     

Ni80Fe20/Mo纳米多层膜的互扩散

针对Ni80Fe20/Mo纳米多层膜在实际应用中经常面临的热稳定性问题，研究了多层膜在343－683K温度范围内的互扩散行为，测定了其有效互扩散系数Dλ。小的激活焓来源于多层膜中存在的共格应变。当温度低于483K时，NiFe/Mo多层膜具有较强的抵制NiFe和Mo亚层间互扩散能力，这对NiFe/Mo多层膜今后的实际应用有重要意义。     

用IBAD方法合成ZrN/W纳米多层膜

本文利用高真空离子束辅助沉积系统（IBAD）在室温下制备具有纳米尺寸的ZrN／W多层膜，通过改变双靶的沉积时间，合成一系列的具有不同调制周期（3nm～10nm）的纳米多层膜。利用AES，XRD和纳米力学测试系统，表面形貌仪表征了薄膜的成分、结构和机械性能，分析了不同调制周期对薄膜结构与机械性能的影响。结果表明：多层膜的机械性能普遍优于两种个体材料的混合相；在调制周期为8．6nm时，显示出强的ZrN（111），W（110）织构和较弱的ZrN（220）峰，与其他条件下制备的样品比较，它具有较高的硬度（～26GPa），较高的弹性模量（-310GPa）和较强的膜基结合力（～80mN）。低角度XRD分析证明了薄膜的多层结构。     

Low temperature magnetic hardening in self-assembled FePt/Ag core-shell nanoparticles

The FePt/Ag core-shell nanoparticles with different Ag shell thickness have been fabricated using a seed mediated technique. The core-shell nanoparticles are annealed at temperatures ranging from 350 to 600 °C for 30 min in vacuum. The magnetic measurement demonstrates that the FePt/Ag core-shell nanoparticles show a better chemical ordering tendency with a magnetic hardening temperature of 400–450 °C, which is almost 100 °C lower than that of pure FePt nanoparticles. Negative peaks on the δM curves of the annealed FePt/Ag core-shell nanoparticles demonstrate that the predominant interparticle interactions are dipolar type rather than exchange coupling one. Besides, the FePt/Ag core-shell nanoparticles show both sensitive plasmonic and superparamagnetic properties. The present results indicate that our composite nanoparticles are very promising from the viewpoint of the optoelectronics and biomedical applications.     

Interlayer Magnetic Coupling for Fe/Si Multilayers

The antiferromagnetic (AFM) interlayer exchange coupling for sputtered Fe/Si multilayers have been studied by magnetometry, wide-angle neutron diffraction, and spin-polarized neutron reflectometry. Ferromagnetic resonance and Raman scattering measurements have been applied for the characterization of the multilayers. To look for a possible modification of exchange coupling when Si is replaced by Ge, similar Fe/Ge multilayers have been prepared by the same technique. No AFM coupling has been found for Fe/Ge system. Present results differ in part from the literature data and suggest an influence of the sample preparation on the details of its magnetic properties.     

Superior Magnetic Performance in FePt L10 Nanomaterials

The discovery of the high maximum energy product of 59 MGOe for NdFeB magnets is a breakthrough in the development of permanent magnets with a tremendous impact in many fields of technology. This value is still the world record, for 40 years. This work reports on a reliable and robust route to realize nearly perfectly ordered L1₀‐phase FePt nanoparticles, leading to an unprecedented energy product of 80 MGOe at room temperature. Furthermore, with a 3 nm Au coverage, the magnetic polarization of these nanomagnets can be enhanced by 25% exceeding 1.8 T. This exceptional magnetization and anisotropy is confirmed by using multiple imaging and spectroscopic methods, which reveal highly consistent results. Due to the unprecedented huge energy product, this material can be envisaged as a new advanced basic magnetic component in modern micro and nanosized devices.     

Tuning exchange spring effects in FePt/Fe(Co) magnetic bilayers

Structural and magnetic properties of exchange spring magnets consisting of hard magnetic (FePt) and soft magnetic (Fe and Co) bilayers, prepared by ion beam sputtering method are studied via X-ray diffraction (XRD), magneto-optic Kerr effect (MOKE) and vibrating sample magnetometry (VSM). Thin tracer layers of ⁵⁷Fe were introduced in the soft layer in order to observe the Fe spin structure and interfacial diffusion by Conversion Electron Mössbauer Spectroscopy (CEMS). The observed in-plane exchange spring behavior extends also to the magnetic hard layer, whose switching field can be tuned in an unexpected manner via the top soft magnetic layer. To explain the observed phenomenon it is suggested that the increased switching field, found in the system with a Co/Fe bilayer acting as a single soft magnetic layer, is compatible with a peculiar behavior of the stiffness coefficient of the heterogeneous soft magnetic layer. According to this observation, possibilities to maximize the exchange spring effects via suitably chosen non-homogeneous soft magnetic layers are open.     

Onset of hard magnetic L10 FePt phase with (001) texture

The perpendicular anisotropic magnetic properties of in-situ deposited FePt/Pt/Cr trilayer films were elucidated as functions of the deposition temperature and the sputtering rate of the FePt magnetic layer. Ordered L1₀ FePt thin films with perpendicular anisotropy and a (001) texture can be developed at a temperature as low as 300 °C with the sputtering of a FePt layer at a low rate. The larger Pt(001)[100] lattice induced an expansion of the FePt a- and b-axis, leading to the contraction of the FePt c-axis, enabling the epitaxial growth of the L1₀ FePt(001) texture to occur. A low rate of sputtering of the FePt thin film promotes the formation of the magnetically hard FePt(001) texture on the surface of the Pt(001) buffer layer at low temperature, while the high sputtering rate of FePt layer suppresses the phase transformation.     

Effects of annealing time on the structural and magnetic properties of L10 FePt thin films

Thermal annealing of [Fe 1.65 nm/Pt 1.84 nm]₅₀ multilayers at 673 K for various annealing times between 60 and 12000 s leads to the direct formation of the fully ordered L1₀ FePt phase with (111) texture. The average grain sizes, determined from X-ray diffraction size-strain analysis, are smaller than the critical size for multi-domain FePt particles, suggesting the presence of single-domain (SD) grains. The coercivity increases with annealing time and increasing grain size and reaches values of about 955 kA/m. The remanence values are typical for randomly oriented weakly-interacting particles. A decrease of the remanence with annealing time suggests a decrease of the intergrain exchange interactions with annealing time. Analysis of minor loops and the initial magnetization curves shows the presence of a broad distribution of critical fields, which the individual SD particles have to overcome for the magnetization reversal.     

交换耦合双层膜PtMn/Co的微观结构和磁性

采用磁控溅射法在Si（100）基片上沉积了PtMn／Co双层膜，研究退火温度与样品微结构以及磁性的关系，发现退火温度越高，反铁磁性PtMn层由fcc非磁性相向fct反铁磁性相转变越充分，交换偏置场值Hex越高。同时，随着退火温度的升高，反铁磁层的晶粒尺寸逐渐增大，交换偏置场Hex值随着反铁磁层晶粒尺寸的增大几乎呈线性增加。研究了交换偏置场与铁磁层、反铁磁层厚度的关系，结果表明，在250℃退火时Hex与PtMn厚度关系为有峰值的曲线，此退火温度下反铁磁层临界厚度为20nm，最佳反铁磁层厚度为60nm。还发现了交换偏置场Hex随着铁磁性Co层厚度的增大几乎呈线性降低，充分说明铁磁、反铁磁交换耦合作用是一种界面耦合效应。     

调制周期对TaN/VN纳米多层膜的影响

本研究选择钽和钒的氮化物作为个体层材料,利用射频磁控溅射系统制备TaN、VN及一系列的TaN/VN多层薄膜。通过XRD和纳米力学测试系统分析了该体系合成以后的晶体结构、调制周期对力学性能的影响。结果表明：多层膜的纳米硬度值普遍高于两种个体材料混合相的硬度值;当调制周期为30 nm时TaN/VN多层膜达到最大硬度31 GPa,结晶出现多元化,多层膜体系的硬度、弹性模量以及耐磨性能均达到最佳效果。     

FePt/B4C垂直磁记录介质薄膜的制备与表征

采用直流及射频磁控溅射结合真空退火的方法成功制备了（001）择优生长的FcPt/B4C多层薄膜并对其结构与磁性能做了初步的表征．结果表明，在每一个FbPt单元层中能得到较好（001）面择优的fet相FbPt合金，并且随着B4C含量的增大，薄膜的有序度提高．高分辨透射电子显微镜及其傅立叶变换表明，FePt层为具有（001）织构的fct相Fe55Pt45合金．样品的M-H曲线显示其垂直膜面方向矫顽力约为302.481kA/m；平行膜面方向矫顽力很小．