石英晶体元件负载谐振频率测量技术的研究

在分析与对比三种测量石英晶体元件负载谐振频率方法的基础上,设计适用于测量法的π网络与整个测量系统,采用自动网络分析仪测量晶体的阻抗,采用测量法测出负载谐振频率.实验表明,在1 MHz～200MHz频率范围内,系统对负载谐振频率重复测量一致性能达到士1×10-6以内,在30 MHz～200MHz频段,测量误差达到士2×10-6以内.     

石英晶体元件串联谐振频率快速测量技术的研究

在介绍π网络法石英晶体元件电气参数测量原理的基础上,设计了测量系统,并对π网络输出电压以及π网络两端电压之间相位差进行分析与建模,提出迭代法和对分法相结合的快速测量算法。此结合算法测量速度快、测试精度高,适合1~200MHz频段石英晶体元件半成品加工控制和成品测量,且通过实验证明整个测量系统的测量精度和稳定性都达到国际先进水平。     

石英晶体频率标准频率准确度测量结果的不确定度评定

本文主要介绍了石英晶体频率标准频率准确度测量结果的不确定度评定的测量依据，环境条件，测量标准，测量方法，评定结果的使用。     

石英晶体表面溅射成膜及频率偏离特性的研究

提出了用磁控溅射法在石英晶体表面形成TiN薄膜，研究了TiN薄膜的性能及其频率偏离特性。对生物检疫和液体粘度等动态测定有广阔的应用前景。     

石英真空计的工作原理

本文介绍石英真空计的原理及石英晶振的特性.     

一种新颖的石英晶体微量天平探头

本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。它具有测量精度高、对真空系统无污染及结构简单等优点，有实用价值。     

零相位法石英晶片测试技术研究

研究符合IEC标准的石英晶片测试技术,介绍了π网络零相位法石英晶片测试系统的设计,分析了测头气隙对测试精度的影响.所设计的系统在90MHz的测试范围内,谐振频率的重复测试精度达到±10ppm.     

激励功率对微机械谐振梁谐振频率的影响

对谐振式微机械传感器的敏感元件——微机械谐振梁的谐振频率特性进行了详细的实验研究,并从理论上分析了激励功率对谐振频率的影响．实验结果表明,谐振频率随着激励功率的增加而近似线性减小,当激励功率从1．1mW提高到10．1mW时,谐振梁的谐振频率降低了1．609kHz,灵敏度为0．179kHz／mW．实验结论与理论分析的结果基本一致．若要使激励功率对谐振频率的影响减小,则要求降低激励功率并减小梁的长度,增大梁的厚度和宽度．上述研究结论对优化谐振式微机械传感器敏感元件结构尺寸的设计有指导意义．     

石英晶片镀膜频率监控技术研究

石英晶片镀膜是石英晶体谐振器生产中的重要工序之一,通过控制镀膜厚度使石英晶片谐振频率达到目标值.传统的镀膜采用时间控制方法,膜层厚度取决于镀源材料蒸发速率和镀膜时间,用该方法石英晶片谐振频率的控制精度较低.为提高石英晶片的镀膜精度,提出了基于晶体微量天平原理的晶片镀膜过程频率监控方案.重点探讨了镀膜过程中石英晶片和标晶谐振频率变化与镀膜厚度之问的关系,并通过实验给出石英晶片和标晶表面膜层沉积质量的比率关系.设计了监控晶片谐振频率的振荡器电路.实验证明,将研究的石英晶片镀膜监控技术应用于生产实际,可以显著提高镀膜后的石英晶片谐振频率的控制精度,具有较高的实际应用价值.     

嵌入式石英晶体网络分析仪的设计和实现

石英晶体元件参数测旦的原理以及一种测量频率可达200MHz的嵌入式石英晶体网络分析仪的原理和设计，并利用GPS(全球定位系统)高精度的授时信号作为频率校准信号，     

The modulational method of quartz crystal oscillator frequency stabilization

A new trend in self-contained (without the use of quantum discriminators) frequency stabilization of an oven controlled crystal oscillator (OCXO) and frequency standard is proposed and discussed. The method developing the trend is called a modulational method and is based on the use of the reference properties of crystal resonator natural bulk vibrations (double-frequency and multi-frequency oscillators are not used in this case). The concept is based on dynamic modulation characteristics of an oscillator, and basic relationships are found for their calculation. The construction principles of the frequency control systems are formulated substantiating mathematically the essence of the method. Basic ratios of modulating signals are determined, the solution of which shows only a slight influence of the modulation signal on the Allan variance and spectral density of an OCXO. The results of the method's practical use are considered. Their subject is the OCXO with the oven system adapted to the ambient temperature and crystal frequency standard with aging rate compensation.     

药品包衣厚度测量系统晶振频率分析及实验研究

为提高药品包衣效果和包衣质量,针对包衣厚度在线监测问题,提出基于石英晶体谐振原理的包衣厚度测量方法。利用石英晶体的压电效应原理分析石英晶体谐振片厚度剪切振动的谐振频率与包衣厚度之间的函数关系,使用等效密度法建立有限元模型并分析石英晶体谐振器在不同膜厚情况下的模态和谐振频率,理论和有限元分析结果均表明晶片的谐振频率随薄膜厚度的增加而降低,且呈近似的线性关系,检测灵敏度约为12 k Hz/μm。使用石英晶体微天平系统进行包衣厚度的测量实验,实测厚度和分析结果具有很好的一致性。研究结果表明基于石英晶体谐振的膜厚测量法可以应用于制药包衣厚度的实时测量。     

Experimental study on the characteristic of the NS-GT cut quartz crystal resonator oscillating in the sub-resonant frequency

We previously reported that the dynamic photo-elastic method was a very effective measuring technique for the stress distribution of vibrating quartz crystal resonators. The existence of a twisted asymmetrical vibration mode has been verified experimentally when the NS-GT cut quartz crystal resonator was vibrating in the main resonant frequency (MRF). A MRF and a sub-resonant frequency (SRF) of the NS-GT cut quartz resonator were defined as follows. If a mechanical standing wave was in the x' or y' direction of the resonator, the former was MRF vibration and the latter was SRF vibration, respectively. In this paper, stress distributions of two samples of the NS-GT cut quartz crystal resonator, one of which had a thickness of 80 mum and the other 150 mum, were measured by the dynamic photo-elastic method when the resonators were vibrating in each SRF. Thereafter, vibration modes of those resonators were estimated by the experimental data of stress distributions. We find that the vibration mode of the 80-mum resonator had a simple mechanical standing wave on the y' direction and the vibration mode of the 150-mum resonator was combined with a shearing mode in the SRF vibration. From the experiment, we decided that vibration modes of the NS-GT cut quartz crystal resonator were composed of the longitudinal stress T(3)' belonging to the z' direction of the plate and of the shearing stress T(5)' when the plate thickness was thickened and the resonator was oscillating in the SRF.     

Application of the photo-elastic method to measurement of dynamicstress distribution for NS-GT cut quartz crystal resonators

NS-GT cut quartz crystal resonators are widely used as a frequency standard element in consumer products and communication equipment. The vibration mode of the resonators was analyzed by the finite element method (FEM) because they have a complicated shape. As a result, an asymmetrical vibration mode at the main resonant frequency has been obtained by the FEM simulation. But, it is necessary to confirm the asymmetrical vibration mode experimentally because it is just a simulation. In this paper, stress distributions of the NS-GT cut quartz crystal resonators are measured experimentally by using a dynamic photo-elastic method when the resonators are vibrating in the resonant frequency; thereafter, vibration modes of the NS-GT cut resonators are estimated with the experimental data of the stress distributions. This experiment for the NS-GT cut quartz crystal resonators exposes the existence of a twisted asymmetrical vibration mode at the main resonant frequency, with the magnitude of the twisted vibration in proportion to thickness of the resonators     

无晶振频率输出测时仪的一种检定方法

文章介绍了测时仪无晶振频率输出，又无电信号输入时，采用按键开关、直流稳压电源，使纳秒通用计数／计时器与被检测时仪同步来检定其内部晶振指标的方法，并对其不确定度进行了分析。     

Modeling of quartz crystal oscillators by using nonlinear dipolar method

A quartz crystal oscillator can be thought of as a resonator connected across an amplifier considered as a nonlinear dipole the impedance of which depends on the amplitude of the current that flows through it. The nonlinear amplifier resistance and reactance are obtained by using a time domain electrical simulator like SPICE (Simulation Program with Integrated Circuit Emphasis): the resonator is replaced with a sinusoidal current source of the same frequency and a set of transient analyses is performed by giving the current source a larger amplitude. A Fourier analysis of the steady-state voltage across the dipolar amplifier is performed to calculate both real and imaginary parts of the dipolar impedance as a function of the current amplitude. From these curves, it is then possible to accurately calculate the oscillation amplitude and frequency without having to perform unacceptably long transient analyses needed by a direct oscillator closed loop simulation. This method implemented in the Analyse Dipolaire des Oscillateurs a Quartz or Quartz Crystal Oscillators Dipolar Analysis (ADOQ) program calculates the oscillation start-up condition, the oscillation steady-state features (oscillation amplitude and frequency), and the oscillator sensitivity to various parameters. The oscillation nonlinear differential equation is solved by using the slowly varying function method so that the program quickly and accurately calculates the current amplitude and frequency transients. Measurements performed on an actual amplifier show a very good agreement with the results obtained by the simulation program.