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纳米电子科技的新亮点——量子点器件简介 总被引:1,自引:0,他引:1
<正> 纳米电子科技的新亮点——量子点电子器件,是集成电路(IC)技术发展的必然结果。 1.量子点器件产生的背景 近30年来,IC技术飞速发展的基础来自电路功能器件——金属氧化物场效应晶体管(MOSFET)特征尺寸(栅长或沟道长度)的不断缩小。通过特征尺 相似文献
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介绍固体纳米电子器件及其应用。固体纳米电子器件包括共振隧穿器件(RTD)、量子点器件(QD)和单电子器件(SED)。单电子器件又分为单电子晶体管(SET)和单电子存储器(SEM), 相似文献
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纳米光电子器件的最新进展及发展趋势 总被引:2,自引:1,他引:2
纳米技术和光电子技术是一门新兴的技术,近年来,越来越受到世界各国的重视。本文主要介绍纳米光电子学的基本概念,发展模式,纳米光电子器件的最新进展和发展趋势。 相似文献
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用MBE设备在半绝缘的InP衬底上依次生长高电子迁移率晶体管(HEMT)外延材料和共振遂穿二极管(RTD)外延材料,在此材料结构基础上研究和分析了RTD与HEMT器件单片集成工艺中的隔离工艺、欧姆接触工艺、HEMT栅挖槽工艺和空气桥工艺等几步关键工艺,给出了这些工艺的相关参数。利用上述工艺成功地制作了RTD和HEMT器件,并在室温下分别测试了RTD器件和HEMT器件的电学特性。测试表明:在室温下,RTD器件的峰电流密度与谷电流密度之比(PVCR)为3.66;HEMT器件的最大跨导约为370 mS/mm,在Vds=1.5 V时的饱和电流约为391 mA/mm。这将为RTD与HEMT的单片集成研究奠定工艺基础。 相似文献
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D. A. Grützmacher T. O. Sedgwick A. Zaslavsky A. R. Powell R. A. Kiehl W. Ziegler J. Cotte 《Journal of Electronic Materials》1993,22(3):303-308
First structural and electrical data are reported for SiGe/Si quantum well structures grown by a new ultra clean low temperature
epitaxial deposition process at atmospheric pressure. It is found that the process suppresses the segregation of germanium,
possibly by a chemical termination of the surface during the growth. Mutiple-quantum-well structures with controllable well
widths and abrupt interfaces have been prepared at temperatures ranging from 550 to 650°C. Magneto-transport measurements
of modulation doped quantum wells reveal hole mobilities of 2000 cm2/Vs at 4.2 K at a carrier density of 1.7*1012 cm−2 and a germanium concentration of 18% in the SiGe channel. Resonant tunneling diodes grown by this technique exhibit well
resolved regions of negative differential resistance within a very symmetric I-V characteristic. 相似文献
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RTD与PHEMT集成的几个关键工艺 总被引:1,自引:0,他引:1
在新型的共振隧穿二极管(RTD)器件与PHEMT器件单片集成材料结构上,研究和分析了分立器件的制作工艺,给出了分立器件的制作工艺参数.利用上述工艺成功制作了RTD和PHEMT器件,并在室温下分别测试了RTD器件和PHEMT器件的电学特性.测试表明:在室温下,RTD器件的峰电流密度与谷电流密度之比提高到1.78;PHEMT器件的最大跨导约为120mS/mm,在Vgs=0.5V时的饱和电流约为270mA/mm.这将为RTD集成电路的研制奠定工艺基础. 相似文献
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A new material structure with Al0.22Ga0.78As/In0.15Ga0.85As/GaAs emitter spacer layer and GaAs/In0.15Ga0.85As/GaAs well for resonant tunneling diodes is designed and the corresponding device is fabricated.RTDs DC characteristics are measured at room temperature. Peak to valley current ratio and the available current density for RTDs at room temperature are computed.Analysis on these results suggests that adjusting material structure and optimizing fabrication processes will be an effective means to improve the quality of RTDs. 相似文献
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E. S. Alves M. L. Leadbeater L. Eaves M. Henini O. H. Hughes 《Solid-state electronics》1989,32(12):1627-1631
The current-voltage characteristics of resonant tunneling devices with well widths between 12 and 180 nm are studied. The voltage interval between the resonant peaks in the current is measured as a function of well width. For the wide wells the amplitude of the peaks in the differential conductance is modulated by an “over the barrier” interference effect involving the collector barrier. Space charge buildup and intrinsic bistability effects for a particular resonant state are found to depend critically on its energy difference from the top of the collector barrier and from lower lying standing wave states of the quantum well. 相似文献