Properties of multilayer composite thin films based on morphotropic phase boundary Pb(Mg1/3Nb2/3)O3-PbTiO3

It has been reported that ferroelectric and piezoelectric properties of Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (PMNT) thin films, with compositions close to the morphotropic phase boundary (MPB), show lower values than those reported for bulk ceramics with the same composition, which has been attributed to a reduction of the remnant polarization caused by the small size of the grains in the films. An alternative has been proposed to take full advantage of the excellent piezoelectric properties of polycrystalline PMNT in thin film form: a multilayer configuration that uses ferroelectric layers with large remnant polarization, in this case PbTiO₃, to generate an internal electric bias within the PMNT layers and, thus, anchor an induced polarization on them, resulting in a consequent large piezoelectric behavior. The detailed study of the properties of these multilayer composite films reveals the complex correlations that arise in these heterostructures, which are key for the design of optimized piezoelectric films based on MPB PMNT.     

Nanoscale study by piezoresponse force microscopy of relaxor 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 and 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 thin films grown on platinum and LaNiO3 electrodes

Relaxor 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ (70/30 PMN-PT) and 0.9Pb(Mg_1/3Nb_2/3)O₃-0.1PbTiO₃ (90/10 PMN-PT) thin films have been grown by RF-sputtering on platinum (Pt) and lanthanum nickelate (LaNiO₃) bottom electrodes. For both electrodes, macroscopic measurements evidence lower coercive fields, remnant polarizations and piezoelectric coefficients d₃₃ for 90/10 PMN-PT films compared to 70/30 PMN-PT films. For both compositions, coercive fields and remnant polarizations are lower for films grown on LaNiO₃ compared to on Pt while piezoelectric coefficients d₃₃ are higher. For each electrode and composition, a similar behavior is revealed for electromechanical activity at the nanoscale when measuring local piezoelectric hysteresis loops; on the other hand, the voltages required for switching the domains are the highest for 90/10 PMN-PT films grown on LaNiO₃. The existence of large grain boundaries in the films grown on Pt and the presence of local random fields with polar nano-domains for the 90/10 composition could explain the differences measured in domains switching properties at the macroscale and nanoscale levels.     

Role of La0.5Sr0.5CoO3 template layers on dielectric and electrical properties of pulsed-laser ablated Pb(Nb2/3Mg1/3)O3-PbTiO3 thin films

Relaxor ferroelectric thin films of 0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ (PMN-PT) deposited on platinized silicon substrates with and without template layers were studied. Perovskite phase (80% by volume) was obtained through proper selection of the processing conditions on bare Pt/Ti/SiO₂/Si substrates. The films were initially grown at 300 °C using pulsed-laser ablation and subsequently annealed in a rapid thermal annealing furnace in the temperature range of 750-850 °C to induce crystallization. Comparison of microstructure of the films annealed at different temperatures showed change in perovskite phase formation and grain size etc. Results from compositional analysis of the films revealed that the films initially possessed high content of lead percentage, which subsequently decreased after annealing at temperature 750-850 °C. Films with highest perovskite content were found to form at 820-840 °C on Pt substrates where the Pb content was near stoichiometric. Further improvement in the formation of perovskite PMN-PT phase was obtained by using buffer layers of La_0.5Sr_0.5CoO₃ (LSCO) on the Pt substrate. This resulted 100% perovskite phase formation in the films deposited at 650 °C. Dielectric studies on the PMN-PT films with LSCO template layers showed high values of relative dielectric constant (3800) with a loss factor (tan δ) of 0.035 at a frequency of 1 kHz at room temperature.     

Large electrocaloric effect of highly (100)-oriented 0.68PbMg1/3Nb2/3O3-0.32PbTiO3 thin films with a Pb(Zr0.3Ti0.7)O3/PbOx buffer layer

0.68PbMg_1/3Nb_2/3O₃-0.32PbTiO₃ (PMN-PT) thin films with a lead zirconate titanate Pb(Zr_0.3Ti_0.7)O₃ (PZT)/PbO_x buffer layer were deposited on Pt/TiO₂/SiO₂/Si substrates by radio frequency magnetron sputtering technique, and pure perovskite crystalline phase with highly (100)-preferred orientation was formed in the ferroelectric films. We found that the highly (100)-oriented thin films possess not only excellent dielectric and ferroelectric properties but also a large electrocaloric effect (13.4 K at 15 V, i.e., 0.89 K/V) which is attributed to the large electric field-induced polarization and entropy change during the ferroelectric-paraelectric phase transition. The experimental results indicate that the use of PZT/PbO_x buffer layer can induce the crystal orientation and phase purity of the PMN-PT thin films, and consequently enhance their electrical properties.     

Enhancement of remnant polarization in multilayered Bi4Ti3O12/(Bi3.25La0.75)Ti3O12 films obtained by chemical solution deposition

Enhancement of remnant polarization was observed in artificially multilayered Bi₄Ti₃O₁₂ (BT)/(Bi_3.25La_0.75)Ti₃O₁₂ (BLT) films_. The multilayer were prepared on platinum coated silicon substrate by chemical solution deposition and compared with the single-phase BT, BLT and (Bi_3.5La_0.5)Ti₃O₁₂ films_. The multilayered film with a stacking periodicity of 60 nm BLT/30 nm BT shows a remnant polarization (2Pr) of about 61 μC/cm², which is much higher than those of the single-phase films. In addition, the multilayered films show a good fatigue-endurance character. After post-annealing the multilayered films at 700 °C for a long time (20 h), its remnant polarization decreased to a value close to the corresponding uniform film. Some possible mechanisms behind the polarization enhancement were proposed.     

Comparative investigating the properties of Pb-based multilayer ferroelectric thin films for FeRAM

The PbZr_0.3Ti_0.7O₃(PZT) thin film and multilayer PbZr_0.3Ti_0.7O₃/PbTiO₃(PZT/PT), PbTiO₃/PbZr_0.3Ti_0.7O₃/ PbTiO₃(PT/PZT/PT) thin films were prepared by a Sol-Gel method on the Pt(111)/Ti/SiO₂/Si(100) substrate for FeRAM application. The microstructure, ferroelectric, fatigue, dielectric, and leakage current properties of these thin films were investigated. The results indicate that the multilayer PT/PZT/PT thin film have a better ferroelectric, fatigue, dielectric and leakage current density properties. Its remanent polarization P_r reaches a maximum value of 21.2 μC/cm² and the coercive field E_c gets to a minimum value of 64.2kV/cm. After 10¹⁰ cycles, it still has more than 80% remnant polarization. The PT/PZT/PT thin film exhibits lower dielectric constant and lower dielectric loss, which is beneficial for FeRAM application. It also has the lowest leakage current density. The leakage current mechanism of the PZT, PZT/PT and PT/PZT/PT thin films is correlated to the microstructure and can be modeled in terms of GBLC and SCLC theory. The microstructure and electric properties of these films are correlated. The double-sided PT seed layers enhance not only the microstructure but also the electric properties. It is evident that the PT/PZT/PT multilayer thin film is a promising candidate for FeRAM application.     

Microstructure and ferroelectric properties of epitaxial BaTiO3/SrRuO3/SrTiO3 (001) films grown by pulsed laser deposition under high oxygen pressure

BaTiO₃ films were epitaxially grown on SrTiO₃ (001) substrates buffered with SrRuO₃ films as bottom electrode by pulsed laser deposition under high oxygen pressure of 30 Pa. The quality of the BaTiO₃/SrRuO₃/SrTiO₃ multilayer films was analyzed by means of X-ray diffraction, atomic force microscopy and transmission electron microscopy. BaTiO₃ films were found to be highly c-axis-oriented tetragonal phase with c/a = 1.002. The dielectric constant first increased with increasing temperature, and showed a peak at the Curie temperature of about 356 K. The films had well-saturated hysteresis loops with a remnant polarization of 7.3 μC/cm² and a coercive field of 29.5 kV/cm at room temperature.     

Distribution of pyrochlore phase in Pb(Mg1/3Nb2/3)O3-PbTiO3 films and suppression with a Pb(Zr0.52Ti0.48)O3 interfacial layer

Thin films of the relaxor ferroelectric Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (PMN-PT) on Pt/Ti/SiO₂/Si (Pt/Si) substrates both with and without a Pb(Zr_0.52Ti_0.48)O₃ (PZT) interfacial layer were investigated. Perovskite and pyrochlore coexistence was observed for PMN-PT thin films without a PZT interfacial layer. Interestingly, most of the pyrochlore phase was observed in single-coated films and in the first layer of multi-coated films. The pyrochlore phase exhibited grains with an average size of about 25 nm, which is smaller than those of the perovskite phase (about 90 nm). In contrast, for PMN-PT thin films grown on a PZT interfacial layer, the formation of a pyrochlore phase at the interface between PMN-PT layers and the substrate is completely suppressed. Moreover, small grains are not observed in the films with a PZT interfacial layer. The measured polarization-electric field (P-E) hysteresis loops of PMN-PT films with and without PZT layers indicate that enhanced electrical properties can be obtained when a PZT interfacial layer is used. These enhanced properties include an increase in the value of remanent polarization P_r from 2.7 to 5.8 μC/cm² and a decrease in the coercive field E_c from 60.5 to 28.0 kV/cm.     

Enhanced ferroelectric properties of Fe-doped BaTiO3 thin film deposited on LaNiO3/Si substrate by sol–gel technique

The ferroelectric thin films of Fe-doped BaTiO₃ and undoped BaTiO₃ were prepared on LaNiO₃ coating Si substrates by sol–gel technique. It was found that a small amount of Fe dopant could significantly enhance the ferroelectric properties of the BaTiO₃ thin film. The remnant polarization of Fe-doped BaTiO₃ thin film at room temperature reached to 14.9 μC/cm². The loss tangent, compared to the undoped BaTiO₃ film, was increased with frequency increasing and the dielectric constant was decreased. The possible mechanism of enhanced ferroelectric properties of Fe-doped BaTiO₃ thin film was discussed. The results show the potential role of Fe dopant in improving the ferroelectric properties of BaTiO₃ thin film.     

Enhanced tunable dielectric properties of Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7 multilayer thin films by a sol-gel process

Ba_0.5Sr_0.5TiO₃(BST)/Bi_1.5Zn_1.0Nb_1.5O₇(BZN) multilayer thin films were prepared on Pt/Ti/SiO₂/Si substrates by a sol-gel method. The structures and morphologies of BST/BZN multilayer thin films were analyzed by X-ray diffraction (XRD) and field-emission scanning electron microscope. The XRD results showed that the perovskite BST and the cubic pyrochlore BZN phases can be observed in the multilayer thin films annealed at 700 °C and 750 °C. The surface of the multilayer thin films annealed at 750 °C was smooth and crack-free. The BST/BZN multilayer thin films annealed at 750 °C exhibited a medium dielectric constant of around 147, a low loss tangent of 0.0034, and a relative tunability of 12% measured with dc bias field of 580 kV/cm at 10 kHz.     

Improved dielectric and ferroelectric properties in Ti-doped BiFeO3-PbTiO3 thin films prepared by pulsed laser deposition

Ti-modified thin films of multiferroic 0.72Bi(Fe_1 − xTi_x)O₃-0.28PbTiO₃ (BFPT, x = 0 and 0.02) solid solution were prepared by pulsed laser deposition. The BFPT (x = 0 and 0.02) films possess a tetragonal structure with highly preferential (001) orientation. The effects of the ionic substitution on the properties of BFPT (x = 0 and 0.02) films have been investigated. The leakage current of the BFPT (x = 0.02) thin film is significantly reduced, and the dielectric and ferroelectric properties greatly improved by the aliovalent ionic substitution of Ti⁴⁺ for Fe³⁺. The BFPT (x = 0.02) thin film exhibits a reasonably high remnant polarization P_r with 2P_r up to 90 μC/cm² at 312 kV/cm and a switchable polarization up to 92 μC/cm² at 417 kV/cm.     

Microstructural study of YBa2Cu3O7/SrTiO3/YBa2Cu3O7 heteroepitaxial trilayer films grown on (100) SrTiO3 substrates

Detailed transmission electron microscopic study has been carried out on heteroepitaxial YBa₂Cu₃O₇/SrTiO₃/YBa₂Cu₃O₇ trilayer thin films grown on (100)SrTiO₃ substrates prepared by DC and RF magnetron sputtering. The microstructural results showed the existence of somea-axis-oriented YBCO grains 20–90 nm wide in thec-axis-oriented YBCO matrix. Some of thea-axis grains in the lower YBCO thin film layer have protruded into the above SrTiO₃ layer, which may cause short circuit between the two YBCO superconducting layers. This is unsuitable for the application of trilayer thin films for microelectronic devices. The defects on the surface of the substrates would also influence the growth quality of the YBCO thin films.     

Effect of TiOx seed layer on the texture and electric properties in La and Ca modified PbTiO3 thin films

Lanthanum-and calcium-modified PbTiO₃ (PLCT) ferroelectric thin films were successfully prepared on Pt(111)/Ti/SiO₂/Si substrates by pulsed laser deposition. Influence of TiO_x seed layer on texture and electric properties of PLCT films was investigated. It is found the PLCT films without seed layer exhibited highly (100)-textured, while using about 9 nm TiO_x as seed layer lead to highly (301)-textured. The PLCT film with TiO_x seed layer possess higher remnant polarization (Pr = 26 µC/cm²), better pyroelectric coefficient and figure of merit at room temperature (p = 370 µC/m²k, F_d = 190 × 10^− 5 Pa^− 1/2) than that of film without seed layer. The mechanism of the enhanced electric properties was also discussed.     

Enhanced ferroelectric properties of Pb(Zr0.80Ti0.20)O3/PbO thin films prepared by radio frequency magnetron sputtering

The Pb(Zr_0.80Ti_0.20)O₃ (PZT) thin films with and without a PbO buffer layer were deposited on the Pt(1 1 1)/Ti/SiO₂/Si(1 0 0) substrates by radio frequency (rf) magnetron sputtering method. The PbO buffer layer improves the microstructure and electrical properties of the PZT thin films. High phase purity and good microstructure of the PZT thin films with a PbO buffer layer were obtained. The effect of the PbO buffer layer on the ferroelectric properties of the PZT thin films was also investigated. The PZT thin films with a PbO buffer layer possess better ferroelectric properties with higher remnant polarization (P_r = 25.6 μC/cm²), and lower coercive field (E_c = 60.5 kV/cm) than that of the films without a PbO buffer layer (P_r = 9.4 μC/cm², E_c = 101.3 kV/cm). Enhanced ferroelectric properties of the PZT thin films with a PbO buffer layer is attributed to high phase purity and good microstructure.     

Nd-substituted SrBi2Ta2O9 ferroelectric thin films prepared by radio frequency magnetron sputtering

Nd-substituted SrBi₂Ta₂O₉ (SNBT) thin films are sputtered on Pt/Ta/SiO₂/Si substrates. X-ray diffraction and x-ray photoelectron spectroscopy studies indicate that Nd³⁺ is substituted into the bismuth layered perovskite structure, preferentially at the Sr²⁺ site. The annealed thin film is polycrystalline with plate/needle-like grain microstructure. Secondary ion mass spectrometry results show that elements in SNBT thin film homogeneously distribute along film depth and interfacial diffusion takes place during post annealing. The Nd substitution leads to enhanced remnant polarization (2P_r = 18 μC/cm²) and reduced coercivity (2E_c = 64 kV/cm) at 180 kV/cm measured at 25 °C. After 10¹⁰ switching cycles, around 9% remnant polarization is decreased.     

Thickness effects of Bi3.5Nd0.5Ti3O12 buffer layers on structure and electrical properties of BiFeO3 films

BiFeO₃ (BFO) thin films deposited on various thicknesses (0, 40, 80, and 160 nm) of Bi_3.5Nd_0.5Ti₃O₁₂ (BNT) buffer layers were fabricated on indium tin oxide (ITO)/Si substrates using a metal organic decomposition process. X-ray diffraction (XRD) measurements reveal that the BNT buffer layers can favor the growth of (110)-oriented grains in the BFO films. Well-saturated P–E hysteresis loops can be obtained in BFO films with BNT buffer layers due to their lower leakage current densities compared with that in BFO film deposited directly on ITO/Si substrate. A remanent polarization (P _r) as large as 70.2 ± 2 μC/cm² can be achieved in BFO film with 40-nm-thick BNT buffer layer. Further increase of the buffer layer thickness results in the degradation of the rectangularity of P–E hysteresis loops, reduction of the P _r value, as well as deterioration of the charge-retaining ability for the double-layered films.     

Ferroelectric and fatigue-free properties of Au/(Bi,La)4Ti3O12/ITO thin film capacitors by pulsed laser deposition

Ferroelectric Bi_3.25La_0.75Ti₃O₁₂ (BLT) thin films were deposited on indium-tin-oxide (ITO) coated glass substrates by pulsed-laser-ablation method. Films deposited at 400 °C and annealed at 650 °C resulted in remnant polarization and coercive field values of 14-16 μC/cm² and 90-100 kV/cm, respectively. The fatigue measurements were conducted until 1 × 10¹¹ cycles but the individual switched and unswitched polarizations showed unequal magnitudes. Such an unequal switching polarization proves that an extrinsic effect mainly associated with the electrode exists in this thin film capacitor. The overall switching polarizations showed no polarization degradation, suggesting that BLT films are fatigue resistive even on hybrid-metal-oxide electrodes.     

Electrical transport and magnetoresistance in La2/3Sr1/3MnO3 polycrystalline composite thin films

The manganite La_2/3Sr_1/3MnO₃ (LSMO)/CuO and LSMO/Al₂O₃ polycrystalline composite thin films are deposited on Si (111) substrates in a magnetron sputtering system, using the tandem deposition method. The electrical transport and magnetoresistance properties of the films have been systematically investigated. By considering two parallel conduction channels at the grain boundary, we obtain a general expression for the temperature dependency of the resistance that agrees with the experimental data measured in LSMO polycrystalline composite thin films at whole temperature region of 300 K-10 K under the condition of zero magnetic field. Also, the resistance vs. temperature curve under an external magnetic field can be obtained by only varying one parameter in the model. It provides an effective way to obtain the high-temperature grain boundary magnetoresistance in the polycrystalline manganite.     

Ferroelectric properties of epitaxial Bi3.15Nd0.85Ti3O12 films on SiO2/Si using biaxially oriented MgO as templates

High quality epitaxial Bi_3.15Nd_0.85Ti₃O₁₂ (BNT) thin films with thicknesses from 30 to 80 nm have been integrated on SiO₂/Si substrates. MgO templates deposited by ion-beam-assisted deposition and SrRuO₃ (SRO) buffer layers processed by pulsed laser deposition have been used to initiate the epitaxial growth of BNT films on the amorphous SiO₂/Si substrates. The structural and ferroelectric properties were investigated. Microstructural studies by X-ray diffraction and transmission electron microscopy revealed high quality crystalline with an epitaxial relationship of (001)_BNT||(001)_SRO||(001)_MgO and [100]_BNT||[110]_SRO||[110]_MgO. A ferroelectric hysteresis loop with a remanent polarization of 3.1 μC/cm² has been observed for a 30 nm thick film. The polarization exhibits a fatigue-free characteristic up to 1.44 × 10¹⁰ switching cycles.     

Hysteresis loops of polarization and magnetization in (BiNd0.05)(Fe0.97Mn0.03)O3/Pt/CoFe2O4 layered epitaxial thin film grown by pulsed laser deposition

(BiNd_0.05)(Fe_0.97Mn_0.03)O₃ (BNFM)/Pt/CoFe₂O₄ (CFO) layered thin film was fabricated on (100) SrTiO₃ substrate by pulsed laser deposition. BNFM, Pt, and CFO layers were epitaxially grown on the substrate. Almost no increase of leakage current due to the formation of heteroepitaxial structure was found, and well-saturated hysteresis loops in the polarization vs electric field and magnetization vs magnetic field curves coexist at room temperature. The remnant polarization and remnant magnetization values were 55 μC/cm², and 70-145 mA/m, respectively.