Resonance based DC current sensor

The paper presents design, development and testing of a resonant proximity DC current sensor to measure current in the range of 0-20 mA. The sensor is built using cantilever structure with piezoelectric excitation, sensing and closed loop electronics. The sensor measures the DC current by measuring the shift in resonance frequency of the cantilever beam. The proposed measurement system is novel, simple and accuracy is found to be 1.1% of full scale deflection.     

基于槽式悬臂梁结构的微质量传感器设计

压电式微质量传感器的测试精度直接依赖于结构频率对质量变化的灵敏程度。本文利用对称槽型梁和压电薄膜组成的对称敏感结构,提出了一种提高传感器灵敏度的结构设计方法,并设计了一种高精度谐振式微质量传感器。建立了结构频率变化对吸附质量敏感性的分析模型,并研究了槽型截面参数、自振频率及振动模态对灵敏度的影响。与矩形截面结构进行了仿真与实验对比,结果表明,相同几何尺寸参数下,槽型截面悬臂梁的一阶自振频率为1 851 Hz,矩形截面悬臂梁的一阶自振频率为1 610 Hz,相应的传感器灵敏度则分别为3.12×10⁴ Hz/g和1.5×10⁴ Hz/g,前者是后者的2倍。该项设计为提高微质量传感器灵敏度提供了一种新思路。     

一种低成本测量材料杨氏模量的方法

杨氏模量是一种重要的材料参数,对结构的固有频率,刚度等有着直接的影响。材料杨氏模量测量方法一般有拉伸法、共振法等,但这些传统方法通常要用到较为昂贵的设备及传感器。为了减小测量成本,文中将压电陶瓷片作为传感元件,利用悬臂梁结构,通过测量自由振动频率,并利用力学公式反推出杨氏模量。文中分析了误差的来源,利用ANSYS软件进行结构仿真,讨论了附加的压电片对悬臂梁的影响,选取较薄的压电片以减小测量误差。实验验证了这种方法可用于杨氏模量的测量。未来可以研究使用电脑麦克风进行数据采集,代替示波器以进一步减小测量成本。     

A new cantilever system for gas and liquid sensing

A novel setup for gas and liquid sensing was developed and tested. It is based on both detection of frequency shift and of bending of micro-cantilevers to measure mass changes as well as viscosity changes. To drive the cantilevers new electrostatic and magnetic actuations were invented with a closed feed-back loop which forces the cantilever to oscillate always at its resonance frequency. The oscillation is detected via the beam-deflection technique. By measuring the DC signal of the photodiode the static bending of the cantilever can be monitored simultaneously. The closed feed-back loop propagates a very stable oscillation at the resonance frequency and gives a strong increase in the quality factor compared to a system without such feed-back loop. Furthermore, it is possible to operate this cantilever transducer system in liquids.These cantilever sensors hence, show the potential for use in easy-to-use and highly sensitive sensor systems for gas and liquid phase chemical and biochemical sensing.     

Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor

We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.     

Modeling and characterization of piezoelectric cantilever in fluids at different temperatures

This paper introduces measurement and modeling of a piezoelectric beam used as a sensor in different types of liquids. It is immersed in different fluids at temperatures increasing from 20 °C to 50 °C. The working principle is based on detecting different resonance frequencies of the cantilever in different solutions. The oscillation of piezoelectric beam is measured using a vector network analyzer. An electrical equivalent circuit derived from a resonator model is used to simulate the experimental data. These calculated circuit constants have been related to physical properties of liquids under test. The combination of these liquids which includes non-conducting and conducting solutions, exhibiting low and high viscosity covers a good range of common physical properties of fluids. Main focus of this research is to explore the capability of piezoelectric cantilever as a liquid sensor with the influence of temperature. The equivalent circuit model has been proved to be viable to fit experimental data in non-conducting solution but less effective in conducting solution.     

悬臂梁单晶压电发电机的实验研究

建立了悬臂梁单晶压电振子的发电测试系统,对压电晶体与磷青铜基板材料的厚度比对单晶压电振子输出电压的影响进行了有限元分析,得出了压电晶体与磷青铜基板材料的最佳厚度比并进行了实验验证,同时对具有最佳厚度比的单晶压电振子进行了压电发电能力测试。研究结果表明,当压电晶体与磷青铜金属基板的最佳厚度比为0.5,单晶压电振子的输出电压最大,有限元分析与实验结果基本吻合。单晶压电振子输出电压随着负载的增大而随之增大,而输出功率并不随负载的增大而增大。压电振子存在一个最佳负载,当负载与压电振子内阻匹配时,此时的输出功率最大,能量转化效率最高。单晶压电振子在负载为50 时,输出电压最大可达5.4 ;当负载电阻为 时,负载与压电振子内阻匹配较好,输出功率达到最大为1.18 ,产生的能量能满足网络传感器等低耗能电子产品的供能需求。     

磁力调频压电电磁复合发电设计与实验

开展了基于环境振动发电作为微电源弥补传统化学电池供能缺陷的研究。基于非线性磁力调频开发了低宽频振动能采集压电电磁复合发电系统。介绍了发电装置工作原理;利用ANSYS和Ansoft Maxwell有限元分析软件仿真分析了压电和电磁发电的输出特性;最后,搭建了压电电磁复合宽频发电装置实验测试系统,测试了发电系统在磁力自调过程中的输出特性。实验结果显示:复合发电系统在谐振频率60Hz时输出开路电压峰值为5.8V,高于压电系统(5.5V)和电磁系统(410mV)独立发电的开路电压峰值。施加磁力拓宽装置后,当压电悬臂梁沿竖直方向上下移动0~15mm时,系统适应谐振频带拓宽为45~76Hz;悬臂梁沿水平方向平移0~30mm时,谐振频带拓宽为51~70 Hz。结果表明仿真分析与实验测试结果吻合很好。该宽频带能量采集技术可用于低频振动环境的能量采集,可在频变环境中为微型低功耗系统提供低电能。     

Smart Coriolis mass flowmeter

A piezoelectric element is provided for a Coriolis flowmeter having a flow tube adapted to vibrate at a predetermined resonance frequency to determine mass flowrate of a fluid passing there through. The driver includes a strain element, such as an elongated piezoelectric element fastened axially along the wall of the tube. The piezoelectric element is adapted to oscillate in the axial direction along the wall of the tube to generate and/or sense vibration of the tube in response to. The piezoelectric element may be utilized as a driver or, alternately, as a sensor wherein the piezoelectric element is oscillated along with oscillation of tube wall in the axial direction to generate an output signal responsive thereto. The piezoelectric material PZT is placed at different locations for actuation and sensing and for various lengths like .35 m, .45 m, .55 m, .6 m. The different locations of actuation are centre actuation, side actuation, actuation near fixture.     

双晶悬臂梁压电发电装置发电能力的仿真

针对双晶片悬臂梁式压电振子的理论模型,分析了压电振子的结构参数对压电发电装置发电能力的影响。运用ANSYS有限元软件建立了压电振子的压电耦合模型,研究了压电振子的配重质量、悬臂梁长度和金属基板厚度等结构参数对压电振子的固有频率以及压电发电装置发电量的影响规律。为了验证有限元模型的正确性,对典型结构参数压电悬臂梁的一阶固有频率和发电电压进行了实验测量。仿真结果表明,增加悬臂梁的配置质量和长度、减小悬臂梁基板的厚度都可以降低结构的固有频率,选择恰当的结构参数匹配可以使发电装置的固有频率接近外界的激振频率,从而实现最佳的发电性能。     

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: sensor calibration and glycerine evaporation rate measurement

This paper presents mass measurements of glycerine beads performed by means of laterally resonant micro-cantilevers. The transducer architecture is based on a resonant cantilever electrostatically coupled by two parallel placed electrodes. Previous to glycerine measurements, a calibration of the mass sensor has been performed by measuring a standard mass based on latex spheres. From these measurements, a value of the mass responsivity is deduced. In addition, a study of the transducer phase noise has been carried out in order to determine the minimum detectable mass. Mass measurements experiments have been performed by detecting the change on the resonance frequency of the on-plane cantilever resonant mode, produced by locally deposited mass. Additionally, the mass losses detected on the calibrated transducer after glycerine drop deposition allowed determining its evaporation rate.     

Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique

Capacitive resonant mass sensing using a single-crystalline silicon resonator with an electrical LC oscillator was demonstrated in ambient atmosphere. Using capacitive detection method, the detectable minimum mass of 1 x 10(-14) g was obtained in the self-oscillation of cantilever with a thickness of 250 nm. The noise amplitude of the sensor output corresponds to a vibration amplitude of 0.05 nm(Hz)(0.5) in the frequency domain compared with the actuation signal, which is equivalent to the detectable minimum capacitance variation of 2.4 x 10(-21) F. Using the capacitive detection method, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor in a pure N(2) gas as a carrier is successfully demonstrated. These results show the high potential of capacitive silicon resonator for high mass/stress-sensitive sensor.     

悬臂梁单晶压电发电机的实验

建立了悬臂梁单晶压电振子的发电测试系统,针对压电晶体与磷青铜基板材料的厚度比对单晶压电振子输出电压的影响进行了有限元分析,得出了压电晶体与磷青铜基板材料的最佳厚度比并进行了实验验证,同时对具有最佳厚度比的单晶压电振子进行了压电发电能力测试.研究结果表明,当压电晶体与磷青铜金属基板的最佳厚度比为0.5时,单晶压电振子的输出电压最大,有限元分析与实验结果基本吻合.单晶压电振子输出电压随着负载的增大而增大,而输出功率并不随负载的增大而增大.压电振子存在一个最佳负载,当负载与压电振子内阻相匹配时,输出功率最大,能量转化效率最高.单晶压电振子在负载为50 kΩ时,输出电压最大可达5.4 V;当负载电阻为10 kΩ时,负载与压电振子内阻匹配良好,输出功率达到最大为1.18 mW,产生的能量能满足网络传感器等低耗能电子产品的供能需求.     

PVDF压电式谐振传感器在密度测量中的实验研究

密度测量在现代生产生活中占有很重要的地位,因此研究出能够快速精确测量密度的方法会极大地改善生活和生产质量。现利用聚偏氟乙烯(PVDF)压电薄膜的压电效应和逆压电效应制成薄膜压电式谐振传感器,用于气体或液体的密度测量,从而得出传感器谐振频率与被测气体和液体密度之间存在的关系。从实验和分析结果看,该谐振传感器可用于气体或液体的密度测量,且测量结果具有较高的分辨力。     

振动式压电发电机及其在无线传感器网络中的应用

为了预测基于悬臂梁结构的振动式压电发电机的固有频率、输出电压和输出功率等关键参数,通过理论分析得到了悬臂梁式压电发电机的理论模型,该模型比Roundy模型与试验结果更加吻合。针对故障诊断无线传感节点瞬时功率大、平均功率小的特点,设计了基于多振子的功率调节电路,当主回路超级电容器储存的电能可以使无线传感节点正常工作时,将主回路打开,开始进行测量和向监测中心传送数据。在轮船发动机上进行的现场试验表明振动式压电发电机可以为无线传感器节点供电。     

两自由度悬臂梁压电发电装置的宽频发电性能

研究一种两自由度悬臂梁压电发电装置,以提高悬臂梁式压电发电装置在环境振源振动频率波动情况下的发电能力。建立了两自由度悬臂梁压电发电装置的频率特性理论模型,并对该理论模型进行了有限元仿真验证,结果显示理论计算与有限元仿真结果基本一致。对两自由度悬臂梁压电发电装置的频率特性模型进行了数值模拟,模拟显示:装置的前两阶模态频率比随着长度比、宽度比、厚度比及质量块的质量比的增大均出现一个最小值,且在长度比为0.8,宽度比为2.0,厚度比为1.0,质量块的质量比为0.5时,装置的前两阶模态频率比最小,结果表明通过合理设计两自由度悬臂梁压电发电装置的结构参数,可以使得装置的前两阶模态频率最接近。最后,实例设计了两自由度悬臂梁压电发电装置,并进行了试验测试,证实了优化后的两自由度悬臂梁压电发电装置具有宽频带发电能力。     

压电悬臂梁采收低频振动能的理论分析与仿真

采收环境振动能量为无线网络传感器供电是近年来研究的热点,目前还没有一个完整的理论和解决方案.文中设计了一种压电悬臂梁结构的环境振动能量采收装置,研究了悬臂梁压电振子结构受激励后产生电荷量与频率的关系,并进行了ANSYS仿真,得出了最佳的机电耦合模型和压电悬臂梁几何尺寸对固有频率的影响的关系.为采收环境低频振动能量,实现网络传感器自供电装置提供了设计的理论依据.     

Step response measurement of AFM cantilever for analysis of frequency-resolved viscoelasticity

Extension of AFM-based viscoelasticity measurement into a frequency-resolved analysis is attempted. A cantilever immersed into and interacting with distilled water was employed for the trial system. Using a home-built wideband magnetic excitation AFM, a step force with a transient time less than 1 μs is applied to the AFM cantilever and its deflection is measured. The 1st and 2nd mode resonance ringing of the cantilever was suppressed using quality-factor-control technique, so that the measurement system becomes equivalent to driving a resonance-free virtual cantilever within the bandwidth limited by the surviving 3rd mode resonance. From the obtained response of the cantilever deflection, a frequency-dependent complex compliance of the cantilever-water system was derived in a frequency range of 1–100 kHz. Effect of water confining between the tip and a mica substrate is discussed.     

基于构型优化的高阶模态微质量传感器灵敏度提升方法

高灵敏度是微质量传感器准确探测细菌、病毒和气体等物质的关键指标。虽然借助微型化的高阶模态梁振动可以有效提升探测灵敏度,但微尺度效应也降低了传感器的抗环境干扰能力。因此,如何在特定尺度约束下提升高阶模态传感器的灵敏度已成为谐振式微传感器设计的前沿问题。本文在研究弹性梁几何构型、压电层尺寸与有效质量分布对振动模态影响关系的基础上,建立了压电驱动多阶梯梁式微质量传感器的灵敏度分析模型,以传感器灵敏度提升最大为目标,建立了高阶振动模态下悬臂梁几何构型优化设计模型,得到了在不同振动模态下具有最高灵敏度的悬臂梁构型,使同尺寸传感器的灵敏度提升了10.0~15.0倍。考虑驱动位置与制造成本约束,设计并研制了具有六阶梯梁结构的高阶模态微质量传感器。实验结果表明,总长度为17.6mm的六阶梯梁微质量传感器的灵敏度为18.8×10~4 Hz/g,考虑制造误差的影响,其二阶模态灵敏度为同尺寸等截面梁传感器的10.0倍,较一阶模态同尺寸传感器灵敏度提升了19.8倍,从而验证了所提出的高阶模态微质量传感器灵敏度提升方法的有效性和可行性。     

谐振式MEMS温度传感器设计

为了实现以频率输出为信号的气象温度测量,提出了一种基于双层悬臂梁的谐振式微温度传感器。基于双悬臂梁不同材料热膨胀系数的差异会导致悬臂梁谐振频率偏移的原理,采用压电方式同时实现悬臂梁的驱动及其谐振频率的检测,从而实现温度的测量。根据硅基传感器的正面腐蚀工艺,设计了谐振悬臂梁的双层结构,采用有限元方法分析了悬臂梁的谐振模态、可利用的振型及其温度与各模态谐振频率的关系,并利用多普勒振动系统对悬臂梁的谐振特性进行了研究。实验发现悬臂梁的二阶弯曲振型Q值相对于其它振型是最大的,其Q值约为150;高阶振型特别是二阶弯曲振型适合用于以ZnO为压电材料的温度传感器的频率检测,并且具有相对较高的灵敏度(约为20Hz/℃)和频率温度系数(1.9×10-4/℃)。结果表明,微型温度传感器能够满足气象温度检测的要求,并具有抗干扰能力强、灵敏度高、信号传输接口简单等优点。