一种新型的非接触式掩膜板台阶高度测量仪

提出一种外差干涉与共焦显微技术融合用于微电子掩膜板台阶高度测量的方法，同时实现了高分辨率(亚纳米)与较大量程(5μm以上)测量，构成了双频干涉共焦显微系统DICM。实验比较了3组物镜数值孔径NA、放大倍数β条件下的共焦显微系统轴向响应曲线，证实了纯共焦方法在轴向分辨率提高方面的局限性，但其光强变化足以区分干涉条纹的级次。将该系统应用于微电子掩模板台阶高度标准的测量，实验表明DICM的测量值与国际比对结果相符合，系统具有良好的复现性，极限偏差小于5nm。     

基于白光相移干涉术的微结构几何尺寸表征

将Carré等步长相移法与白光垂直扫描相结合形成了一种白光等步长相移算法,该方法快速、准确、非接触,垂直分辨力可达亚纳米级.测量系统集成了Mirau显微干涉物镜,并通过高精度压电陶瓷纳米定位器带动物镜进行垂直扫描.分析了Carré法应用于白光干涉信号的相位提取的精度,对不同扫描步距以及不同信噪比情况下的测量进行了计算机仿真,确定了测量参数.结合重心法将相位计算的数据范围直接定位于干涉信号的零级条纹,从而省去了相位解包裹过程.通过对微谐振器和标准台阶的测量说明了该方法的有效性,并使用白光相移干涉、白光垂直扫描和单色光相移干涉对44 nm标准台阶进行了测量,并对测量结果进行了比较.     

基于激光差动共焦技术的后顶焦度测量系统

为满足后顶焦度高精度测量需求,提出了一种基于激光差动共焦技术的后顶焦度测量方法,研制了一套测量系统。该系统将激光差动共焦技术的精密定焦性能应用于后顶焦度测量,显著地提高了定焦定位能力,利用干涉测长技术测量相应偏离距离,最终实现后顶焦度的精密测量。分析了测量装置的设计思路和测量精度的影响因素。理论分析和实验结果表明,该系统测量精度可达0.03 m ^-1。     

采用长工作距离物镜的低噪声相移数字全息显微研究

在数字全息显微技术中,为了提高测量精度,提出了一种利用长工作距离物镜的相移数字全息显微的测量装置和方法。该装置采用LED作为照明光源,可以有效地抑制相位噪声,提高了重建精度。通过在长工作距离物镜和样品之间加入分光棱镜的方法,构建了一种准物参共路的迈克尔逊干涉仪。该装置结构简单,调整方便,在部分相干光照明时,容易实现干涉。重建时,采用盲相移干涉技术,结合两步盲相移算法,重建出物体的表面相位分布。实验中,分别采用LED照明和He-Ne激光照明,测量了一个反射式USAF1951分辨率板的高度分布。结果表明,两者的测量结果相互吻合,但是LED照明时的噪声与激光照明时相比降低了70%。此外,为了进一步验证装置的有效性,使用该装置对刻于硅基底的微纳矩形台阶进行测量,测量结果与标称值具有良好的一致性,表明该装置在微结构的形貌测量方面有广阔的应用前景。     

共焦三维超精密测量技术研究进展

三维超精密测量技术对提升高端装备制造质量具有基础支撑作用。随着先进制造技术的不断进步,减小系统测量误差和扩大测量范围已成为三维超精密测量技术发展的关键。近年来,共焦三维测量技术发展迅猛,其应用领域也从生物医学逐步扩展到加工制造领域。本文系统介绍了共焦三维测量技术的研究现状和应用进展,从技术原理角度阐述了提高共焦三维测量分辨力以及扩大共焦三维测量范围的方法,对比总结了干涉共焦测量、差动共焦三维测量、光谱共焦测量等技术的相关研究成果,详细介绍了共焦三维测量技术在表面轮廓测量、微结构特征尺寸测量和关键部件内间隙测量等领域的应用情况,并在此基础上,对共焦三维测量技术的未来发展方向进行了展望,以期为后续研究提供技术参考。     

基于二进小波的雷达干涉图条纹探测相位解绕

以二进小波和相位解绕理论为基础，利用二进小波变换的快速算法，对雷达干涉条纹图进行多尺度相位突变边缘探测，进而根据信号和噪声的奇异性在二进小波变换下的局部模极大值随尺度变化的不同演化规律，提出了对雷达干涉条纹图的噪声有一定压制的基于二进小波的干涉条纹检测的相位解绕算法，结果表明，在噪声没有严重破坏相位突变边缘的情况下，相位解绕结果是令人满意的。     

基于空间频域算法的三维微观形貌的测量

白光干涉术测量表面形貌,解决了单色光干涉测量中的相位不确定困扰。基于扫描白光干涉术的空间频域算法,具有受噪声影响小、计算精度高的优点。运用这一算法通过Mirau扫描干涉显微镜对台阶状样品表面进行了两次白光扫描测试,得出了台阶表面形貌结果,且两次测量的台阶高度相差不超过1 nm。同时,利用Zygo Newview 7200白光形貌仪对同一样品表面进行了测试对比,结果表明:两者得到的样品表面形貌一致,台阶高度相差0.9 nm。此外,实验数据处理的结果还表明:运用空间频域算法进行分析时二阶以上的色散完全可以忽略。     

一种新型单频激光干涉系统的研究

这种单频激光干涉系统采用共光路设计布局,通过偏振分束器以及1/4波长片等光学器件对干涉条纹进行空间移相,提取相位依次相差90°的三路干涉输出信号,进行比较放大,解决了常规单频激光干涉仪中的光强“零漂”问题。利用共模抑制技术,提高了干涉系统的测量稳定性和重复性。采用光程差放大技术,提高了干涉系统的分辨力。     

时间相移显微干涉术用于微机电系统的尺寸表征

提出了将时间相移显微干涉测量方法用于微结构和器件的几何特性检测上．该方法速度快、无损、非接触、易在晶片级进行,具有亚微米级的水平分辨力,垂直分辨力在纳米量级．测量系统采用Mirau显微干涉物镜,利用高性能压电陶瓷物镜纳米定位器实现垂直方向的相移,并通过健壮的5帧Hariharan算法获取表面的相位信息．通过测量美国国家标准研究院（NIST）认证的标准台阶对系统进行了精度标定,并通过测量微谐振器和压力传感器微薄膜的几何尺寸说明了该方法作为测量和过程表征工具的功能．     

微流体衍射相位显微成像及其在寄生虫测量中的应用

本文提出了一种将衍射相位显微技术与微流体芯片相结合的方法对水源性寄生虫进行定量测量。结合干涉技术与光学显微镜搭建了衍射相位显微成像系统,实现对寄生虫的高灵敏度实时测量。基于光刻工艺,设计和制作了U型捕获结构双层微流体芯片,实现高通量的单个寄生虫捕获。将与聚二甲基硅氧烷(PDMS)折射率相同的聚蔗糖水溶液通入微腔,消除U型捕获结构边缘衍射在相位成像时产生的显著干扰噪声。利用不同直径的标准聚苯乙烯微球验证了该系统的准确性,最大相位值误差不超过3%。采用上述系统测量了100个贾第鞭毛虫包囊和100个隐孢子虫卵囊,然后从干涉图中重构出两虫的相位图。通过对定量相位图的分析得出两虫的形态学参数与定量的光体积差分布,定量的数据为了解其生理特性提供了依据。微流体衍射相位显微成像系统结构简单,稳定性好,测量精度高,在对单个微生物进行实时监测和无标记定量研究方面具有巨大的潜力。     

Edge localization of subwavelength structures by use of polarization interferometry and extreme-value criteria

A polarization interferometric method is presented for the quantitative microscopy of topographical structures with subwavelength linewidths. A liquid-crystal phase shifter is inserted into the imaging optics of a reflected-light microscope, and the principles of phase-shifting interferometry are applied to measuring the phase and the contrast of the TE-polarized image (E parallel edge) with the TM-polarized image (E perpendicular edge) as the reference. This common-path interferometric method provides selective edge detection for line structures because the polarization difference is localized at the structure edges. Two different threshold criteria for linewidth determination are discussed: distance of the contrast minima and distance of the points of the steepest phase change. Linewidths as small as 300 nm were measured at a 635-nm wavelength. The dependence on the illumination numerical aperture, as well as on the material, the width, and the depth of the structure, is investigated both experimentally and by rigorous numerical simulations.     

用于检测激光棒的变倾角马赫-曾德尔干涉仪

为实现激光棒透射波前的测量,改善一般泰曼型或斐索型干涉仪测量小口径激光棒透射波前时的边缘衍射效应,研究了一种变倾角移相马赫-曾德尔干涉仪。通过调整移相反射镜的倾斜姿态,改变入射到马赫-曾德尔干涉光路的光束倾角,参考光束与测试光束的光程差随之变化,从而在相干光之间引入相移,实现了相移干涉测量。利用该干涉仪测量一根口径为Ф6 mm、长度为60 mm激光棒(Nd:YAG)的透射波前,测量结果的峰谷值(PV)为0.391λ,均方根值(RMS)为0.056λ;使用ZYGO激光干涉仪测量同一根激光棒,其透射波前的峰谷值(PV)为0.370λ,均方根值(RMS)为0.064λ。对比结果表明该干涉仪能实现光学元件透射波前的高精度检测,测试结果的一致性验证了该方案的可行性。该变倾角移相方法具有较高的移相精度和较大的移相范围,且该变倾角干涉系统中光束仅一次透过待测激光棒,可有效抑制多光束干涉现象,改善小口径激光棒的边缘衍射效应。     

准外差干涉计量算法分析及应用

采用最小二乘方法，在更一般的意义下推导了准外差干涉计量的相位计算公式，提出了测量误差与采样方式、采样次数、信噪比及相位漂移的关系，提出了相位算法选择的基本依据。建立了准外差全息干涉计量系统，能对条纹图进行全场、高精度、全自动的定量分析；将其应用于实际物体变形的测量之中，给出了实验结果。     

Effects of step slope on thickness measurement by optical interferometry for opaque thin films

Optical interferometry is a simple, quick and cheap method to measure the thickness of opaque thin films. The film edge, being formed as a step on the sample surface, is lighted with monochromatic light in an interference microscope, producing the interferogram that is recorded with a CCD camera. The film thickness (step height) is calculated by measuring offsets of the fringes across the step. However, the morphology of the film edge (step) significantly affects the thickness measurement, in some cases even yields false results. In this work, three kinds of methods were adopted to mask a part of the substrate surface during the deposition for fabrication of the step. The mask used was a thin silicon slice, a straight line of ink imprinted by a pen, or an Aluminum film. The step morphology recorded by a profilometer revealed large variation from one method to another. Accordingly, the accuracy of film thickness (step height) measurement by interferometry varies significantly. Results showed that large error occurs when the slope of the step is small and the step out spans the view field of the microscope. Therefore, the step should be fully visible in the view field of the microscope for reasonable measurement of thickness. A simple equation, in terms of geometrical configuration, is developed for this requirement.     

Determination of the refractive index and the chiral parameter of a chiral solution based on chiral reflection equations and heterodyne interferometry

This study develops a method for determining the chiral parameter and the refractive index of an isotropic chiral medium using chiral reflection equations and critical angle phenomena. Linearly polarized light propagates back and forth in a parallelogram prism between two parallel compartments with chiral solutions. A beam splitter then divides the light that emerges from the prism into a reflected light beam and a transmitted light beam. The two beams pass through a compensator and an analyzer, respectively, to cause phase compensation and interference of s and p polarizations. The phase difference between the two interference signals are initially optimized by a suitable optical arrangement and subsequently measured by heterodyne interferometry. Additionally, the refractive index of the solution is determined from the critical angle that occurred at the discontinuity of the phase difference between the two interference signals. These results are substituted into derived equations to calculate the chiral parameter. The approach has the merits of both common-path interferometry and heterodyne interferometry.     

串连差分白光干涉法测量金属极薄带厚度

利用白光作为光源的干涉仪(WLI)克服了单色相干光干涉相位不确定,不能够进行绝对测量的缺点,本文设计了一种串连差分白光干涉(DMLI)测量极薄金属带材厚度的新系统.该系统的特点是由两个迈克尔逊干涉仪(MI)串联组成差分干涉系统,两个干涉仪的测量反射面由薄带的两个对应表面承担,干涉系统的最后输出信号只与薄带的厚度有关,而与薄带在测量光路中的位置无关.理论分析及实验结果表明,该系统既有干涉测量的高精度,高灵敏度,又具有较强的抗干扰能力.     

Characterization of chromatic dispersion of optical filters by high-stability real-time spectral interferometry

Chromatic dispersion of optical filters is characterized by what is believed to be novel broadband spectral interferometry, which is based on dual-wavelength heterodyne measurement of spectral phase. High phase stability is achieved by differential phase detection using two lasers for wavelength-swept probe and phase-tracking reference. The technique provides self-tracking interferometry by passive stabilization of optical phase and allows real-time measurement of spectral phase and group delay with a low phase drift of less than 0.04pi. A fiber Bragg grating and a thin-film filter are characterized by this method.     

Adaptive restoration of a partially coherent blurred image using an all-optical feedback interferometer with a liquid-crystal device

A liquid-crystal adaptive optics system using all-optical feedback interferometry is applied to partially coherent imaging through a phase disturbance. A theoretical analysis based on the propagation of the cross-spectral density shows that the blurred image due to the phase disturbance can be restored, in principle, irrespective of the state of coherence of the light illuminating the object. Experimental verification of the theory has been performed for two cases when the object to be imaged is illuminated by spatially coherent light originating from a He-Ne laser and by spatially incoherent white light from a halogen lamp. We observed in both cases that images blurred by the phase disturbance were successfully restored, in agreement with the theory, immediately after the adaptive optics system was activated. The origin of the deviation of the experimental results from the theory, together with the effect of the feedback misalignment inherent in our optical arrangement, is also discussed.     

白光相移干涉中频谱对测量精度的影响

在相移干涉中有时采用白光干涉来扩大深度测量范围,白光光源的使用,缩短了光束的相干长度,降低了测量精度。本文从干涉理论出发推导了白光相移干涉法测量三维表面形貌的计算公式,通过数值积分的方法分析了干涉光频谱对测量精度的影响。分析表明,在白光相移干涉测量中表面形貌的测量精度与中心波长和频谱宽度有关,白光频谱越宽,测量精度越低,中心波长越大,测量精度越高。     

Measurement of interfacial fracture parameters using coherent gradient sensing (CGS)

An optical interferometry called coherent gradient sensing (CGS) has been extended for mapping interface crack tip fields and for evaluating fracture parameters. The optical technique is a double grating shearing interferometer with an on line spatial filtering arrangement. The method offers real time full field measurements and can be used both in transmission made and reflection mode. The interferometer measures small angular deflections of light rays which can be further related to in plane gradients of _x + _y in transmission through elasto-optic relations. Direct interfacial crack tip measurements in a high stiffness mismatch PMMA-aluminium bimaterial system are performed. A variety of crack tip mode mixities are studied using asymmetric four point bend specimens subjected to different far field mechanical loads. The. complex stress intensity factors and the associated phase angles are measured from CGS patterns using an asymptotic expansion field. The measurements are compared with finite element results.