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为获得适合单片集成的硅基PZT压电功能结构,对近年PZT薄(厚)膜在MEMS领域的研究现状进行了综述分析,提出了一种新型的双杯PZT/Si膜片式功能结构.采用有限元方法对双杯PZT/Si膜片进行了结构优化,得到PZT和上下硅杯的结构优化值为DPZT∶D1∶D2 =0.75∶1.1∶1,一阶模态谐振频率为13.2 kHz.以氧化、双面光刻、各向异性刻蚀以及精密丝网印刷等工艺技术制作了双杯硅基PZT压电厚膜膜片,膜片具有压电驱动功能,PZT压电膜厚达80 μm.实验表明,双杯PZT/Si膜片式功能结构的MEMS技术兼容性好,对芯片内其它元件或电路的影响小,适合作为MEMS片内执行元件的驱动机构. 相似文献
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利用锆钛酸铅(PZT)的逆压电效应,设计并制备了膜片式压电微泵。通过将电能转换为机械能,实现了液体的微流体控制。微泵由微驱动器与单向微阀两部分组成;微驱动器主要为液体流动提供驱动力,单向微阀则用于精确控制液体的流动方向。通过对PZT-Si膜片的位移量、位移形状的仿真分析,确定了微驱动器的设计尺寸,并估算其液体驱动性能。利用共晶键合工艺、研磨减薄工艺、硅深反应离子刻蚀工艺和准分子激光加工工艺等制备出了微驱动器和单向微阀。最后,设计了驱动测试实验,检测了微泵的液体驱动性能。测试结果表明:所制备的膜片式压电微泵驱动的谐振频率约为70kHz,能驱动微米量级的液体位移或运动。当微泵驱动电压为30Vp-p、频率为600Hz时,液体的驱动流速约为65μL/min。该微泵具有体积小,线性度好等特点。 相似文献
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以PZT/PVDF复合压电材料采用热压工艺制备了压电厚膜,并制做了不锈钢/压电厚膜/金电极结构的压电振子。为了表征压电振子的阻抗特性,在室温下对样品介电特性进行了测量和分析。利用制备的压电振子采用简支支撑方式设计和制作了压电发电装置,运用压电方程对该装置建立了压电发电数学模型,并根据模型影响参数进行压电发电实验研究。实验结果表明,单片压电厚膜在外加作用力频率从0~2 Hz发生变化时,在负载电阻值为105 kΩ左右时单个压电振子可以获得约130μW的最大输出电功率。研究中还发现增加并联的厚膜片数目可以成比例的增加输出功率。 相似文献
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张九惠 《仪表技术与传感器》1995,(1):35-37
本文介绍了圆形膜片E型杯硅微压传感元件的设计原理。并针对硅微压传感元件研制中存在的问题,提出采用化学腐蚀技术,选择性腐蚀工艺控制膜厚。用E型杯代替C型杯的设计,改善非线性误差获得成功。研制出量程≤kPa,精度优于0.5%的微压元件。 相似文献
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基于圆形振动膜的MEMS压电传声器研究 总被引:2,自引:0,他引:2
为提高微电子机械系统(Micro-electro-mechanical systems,MEMS)压电传声器的灵敏度和成品率,提出一种优化设计的圆形振动膜MEMS压电传声器。采用硼扩散方法实现振动膜的圆形支撑墙,避免由于方形支撑墙造成的四角应力集中,并通过深硼扩散技术,增加圆形围墙的厚度,避免了振动膜的"软"支撑问题;振动膜采用Si3N4/SiO2/Si3N4复合结构,减少振动膜的内应力;采用电极分割串联技术,传声器被分割成在声学上并联、在电学上串联的若干部分,以期提高MEMS传声器的灵敏度。在结构优化的基础上,利用MEMS技术制备压电微传声器,所制备传声器振动膜平坦、无褶皱,成品率有了明显提高。在消声室中采用同时比较法对传声器进行测量,优化设计的圆形振动膜传声器的灵敏度有了明显提高,达到0.3 mV/Pa。 相似文献
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F. Dauchy R. A. Dorey 《The International Journal of Advanced Manufacturing Technology》2007,33(1-2):86-94
The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite
sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite
slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce
PZT films between 10 and 40 μm thick. Due to the low firing temperature (<720°C), it has also been possible to produce PZT
films with embedded thin (ca. 100 nm thick) metal electrodes. The PZT thick films have also been structured using a wet etching
technique. Examples of features and cavities with lateral dimensions in the order of tens of micrometres are presented. The
ability to fabricate and structure thick functional films with embedded metal electrode structures offers the possibility
to create novel micro-device structures suitable for use in micro-electromechanical systems (MEMS). 相似文献
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PZT piezoelectric very thin films suitable for a microactuator have been deposited onto Invar alloy substrate using a high-temperature RF magnetron sputtering technique. PZT thin films must be deposited onto conductive substrate for a monomorph or a bimorph actuator. The chemical composition and the crystalline structure of these films were measured by ESCA and XRD, respectively. The chemical composition of PZT deposited stoichiometrically was almost the same as commercially-produced bulk PZT. Crystal planes (1 1 0) and (1 1 1) of PZT perovskite structure were observed in XRD analysis. When the substrate was heated to above 600 °C, SEM revealed only a very small number of pinholes on the surface. A thin (500 nm) film actuator has been characterized by measuring the piezoelectric property using a Laser Doppler Vibrograph. It was confirmed that the piezoelectric property has a linear relationship with the grain size, which also increased with the substrate temperature. The piezoelectric property of deposited PZT thin films showed a good agreement with a quoted value of bulk PZT, when the substrates were heated to 600 °C. 相似文献
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In this work, the results of compositional and microstructural analysis of lead zirconate titanate--lanthanum ruthenate thin film structures prepared by chemical solution deposition are discussed. The cross-section transmission electron microscope (TEM) micrographs of the La-Ru-O film deposited on a SiO2/Si substrate and annealed at 700 degrees C revealed RuO2 crystals embedded in a glassy silicate matrix. When the La-Ru-O film was deposited on a Pt/TiO2/SiO2/Si substrate, RuO2 and La4Ru6O19 crystallized after annealing at 700 degrees C. After firing at 550 degrees C randomly oriented lead zirconate titanate (PZT) thin films crystallized on the La-Ru-O/SiO2/Si substrate, while on La-Ru-O/Pt/TiO2/SiO2/Si substrates PZT thin films with (111) preferred orientation were obtained. No diffusion of the Ru atoms in the PZT film was found. Ferroelectric response of PZT thin films on these substrates is shown in comparison with the PZT film deposited directly on the Pt/TiO2/SiO2/Si substrate without a La-Ru-O layer. 相似文献
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Jun-Hyub Park Young-Ryun Oh Hyun-Suk Nam Yun-Jae Kim Tae-Hyun Kim Hee-Yeoun Kim 《Journal of Mechanical Science and Technology》2012,26(7):2139-2142
A new structure is described to measure the residual strain of thin film of piezoelectric multi-layers. The spiral shaped structure consists of the four fixed-guided beams. Piezoelectric multilayers consisting of SiOx/Pt/PZT/Pt on SiNx substrate are used to evaluate the suggested structure. Finite element analysis predicts that the out-of-plane displacement of the spiral structure by residual stress depends linearly on the beam length, but there is little difference depending on the beam width. PZT is prepared by sol-gel method and multilayered spiral structures are released by microfabrication technique. Sensitivity analysis of the spiral structure with various layer stack shows that the high displacement of piezoelectric multilayers can be decreased by the application of SiOx layer with compressive stress over the piezoelectric multilayers. 相似文献
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微电子机械系统的力学特性与尺度效应 总被引:11,自引:0,他引:11
针对微电子机械系统(MEMS)材料的力学特性,工艺过程对力学特性的影响以及微执行器、微机器人的尺度效应等力学问题进行了研究。从力学角度提出了硅和常用的薄膜材料作为MEMS结构材料时应遵循的设计和加工原则,并系统地分析、归纳了静电、电磁、压电、形状记忆合金等各种微执行器的尺度效应特征。通过对机器蚂蚁、微型飞机、微型机器鱼等微机器人在微尺度下的动力学特性分析,得到微机器人在尺寸越小时越容易被驱动的结论,为设计和制作微机器人等复杂微系统提供了理论依据。 相似文献
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Lead zirconate titanate (PZT) films have been extensively investigated for many applications: the nonvolatile memory devices based on their remarkable ferroelectric properties, the microelectromechanical system (MEMS) based on their piezoelectricity as well in sensors as in actuators. In this paper, we inject charges into PZT thin films, and then the charge storage and transportation through PZT thin films were observed by electric force microscopy (EFM). Results were studied and charging mechanisms were proposed. 相似文献
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This article describes a new approach to quantitatively measure the piezoelectric coefficients of thin films at the microscopic level using a scanning evanescent microwave microscope. This technique can resolve 10 pm deformation caused by the piezoelectric effect and has the advantages of high scanning speed, large scanning area, submicron spatial resolution, and a simultaneous accessibility to many other related properties. Results from the test measurements on the longitudinal piezoelectric coefficient of PZT thin film agree well with those from other techniques listed in literatures. 相似文献
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微光学自适应技术中基于PZT薄膜的微反射镜工艺研究 总被引:1,自引:0,他引:1
介绍了微光学自适应技术中基于PZT(PbZrxT i1-xO3)薄膜的微反射镜单元及其制作工艺。该制作过程中用重掺杂硅片作为基底和下电极,采用了钛酸丁脂[(C4H9O)4T i]、乙酸铅[Pb(CH3COO2).3H2O]以及异丙醇锆[Zr(OCH(CH3)2 4.(CH3)2CHOH]为原料,通过溶胶-凝胶法(so l-gel)制作薄膜,薄膜厚度为纳米级。制成的PZT薄膜通过逆压电效应产生形变,对反射镜面局部进行微调,实现波前位相控制。 相似文献
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Ansys在PZT压电薄膜微传感器压电分析中的应用 总被引:5,自引:0,他引:5
研究的PZT压电薄膜微传感器采用的弹性敏感元件为微悬臂梁结构,在压电原理和材料力学理论的基础上,采用简化的等效微器件结构建立了数学分析模型,将有限元方法发展应用于压电材料的结构分析中,并运用有限元软件Ansys7.0对PZT压电薄膜微悬臂梁结构的传感性能和线性度进行了模拟,同时分析了微悬臂梁结构的几何参数对输出电压的影响,这些分析结果和解析预测是一致的。 相似文献