首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 78 毫秒
1.
用电子束蒸镀方法在(100)单晶Si衬底上,生长Zn0.85Co0.15O薄膜,并研究了衬底温度对薄膜质量的影响,结果表明当衬底温度为400℃时,外延膜取向性最好,且其(002)衍射峰半高宽最窄(为0.4834°)。  相似文献   

2.
在衬底温度为1000℃条件下, 利用固源分子束外延(SSMBE)技术在Si衬底上生长3C-SiC单晶薄膜. RHEED结果显示在Si(111)上所生长的SiC薄膜为3C-SiC, 并与衬底的取向基本一致. 采用同步辐射掠入射X射线衍射(GID)技术并结合常规X射线衍射(XRD)研究了SiC薄膜内的应变和晶体质量. 常规衍射的联动扫描曲线得到薄膜处于双轴张应变状态. 3C-SiC薄膜和Si衬底的晶格失配和热膨胀系数失配是导致双轴张应变的原因. 根据不同角度的掠入射衍射Phi扫描的摇摆曲线结果, 发现薄膜晶体质量在远离SiC/Si界面区变好. 这是由于SiC薄膜中的缺陷随着远离界面逐渐减少的原因. GID和XRD的摇摆曲线结果表明薄膜中镶嵌块的倾斜大于扭转, 表明SiC薄膜在面内的晶格排列要比垂直方向更加有序.  相似文献   

3.
Al诱导a-Si:H薄膜的晶化   总被引:6,自引:0,他引:6  
采用等离子体化学气相沉积方法在镀Al玻璃及单晶Si衬底上制备了氢化非晶硅(a-Si:H)薄膜,研究了样品在不同的热处理过程中Al对其晶化过程的影响.X射线衍射测量发现,由于Al的存在使a-Si:H的晶化温度大幅度降低,并得到了有强烈(111)结晶取向的多晶Si薄膜.X射线光电子能谱分析表明,热处理过程中Al向Si薄膜表面的扩散降低了Si的成核温度.  相似文献   

4.
利用固源分子束外延(SSMBE)技术, 在Si(111)衬底上异质外延生长3C-SiC单晶薄膜, 通过RHEED、XRD、AFM、XPS等实验方法研究了衬底温度对薄膜结构、形貌和化学组分的影响. 研究结果表明, 1000℃生长的样品具有好的结晶质量和单晶性. 在更高的衬底温度下生长, 会导致大的孔洞形成, 衬底和薄膜间大的热失配使降温过程中薄膜内形成更多位错, 从而使晶体质量变差. 在低衬底温度下生长, 由于偏离理想的化学配比也会导致薄膜的晶体质量降低.  相似文献   

5.
采用射频磁控溅射法在单晶SrTiO3 (STO)衬底和硅(Si)衬底上制备出不同取向的SrRuO3 (SRO)薄膜, 对薄膜的残余应力进行了分析, 并研究了应力对不同取向SRO薄膜磁学性能与电输运特性的影响。根据X射线衍射(XRD)结果分析可知, Si基SRO薄膜为多晶单轴取向薄膜, 且应力来源主要为热失配拉应力; STO基SRO薄膜为外延薄膜, 其应力主要为热失配压应力和外延压应力; 磁学性能测试表明, (001)取向SRO薄膜比(110)取向薄膜拥有更高的居里温度TC; 压应力提高了(001)取向SRO薄膜的TC, 却降低了(110)取向薄膜的TC。电阻性能测试表明, 对于在同种类型衬底上沉积的SRO薄膜, (001)取向的薄膜的剩余表面电阻比(RRR)高于(110)取向的薄膜。另外, 拉应力引起了薄膜微结构的无序度增加, 弱化了表面电阻率的温度依赖性, 提高了金属绝缘体转变温度(TMI)。  相似文献   

6.
不同衬底上低温生长的ZnO晶体薄膜的结构及光学性质比较   总被引:2,自引:0,他引:2  
采用电子束反应蒸发方法,在单晶Si(001)及玻璃衬底上低温外延生长了沿c轴高度取向的单晶ZnO薄膜,并对沉积的ZnO晶体薄膜的结构和光学性质进行了分析比较。通过对ZnO薄膜的X射线衍射(XRD)分析及光致荧光激发谱(PLE)测量,研究了衬底材料结构特性、生长温度及反应气氛中充O  相似文献   

7.
Si(100)衬底上SiC的外延生长   总被引:6,自引:0,他引:6  
在1050℃下用Si2H6和C2H4在Si(100)衬底上外延生长了3C-SiC,生长前只通入C2H4将Si衬底碳化形成SiC缓冲层.碳化过程中C2H4与Si表面反应形成了SiC孪晶,但随着生长时间的延长,外延层转变为单晶层,其表面呈现典型的单晶SiC的(2×1)再构.从外延层的Raman谱观察到明显的SiC的TO和LO声子模;SEM观测结果表明,外延层的表面比较平整.  相似文献   

8.
用ICB外延技术在NaCl解理面和(100)GaAs衬底上外延的CdTe单晶薄膜,以透射电子衍射及RHEED分析,都表明获得了好的单晶结构及平滑膜面。外延取向关系为:GdTe(100)//NaCl(100);当衬底预处理温度为480℃时,CdTe(100)//GaAs(100);当预处理温度为580℃时,CdTe(100) (111)//GaAs(100)。实验发现,当坩埚内CdTe蒸气压足够高时,薄膜生长体现出团粒束淀积所特有的规律,即随着团粒能量的增大,CdTe外延膜的结构质量显著改善。在CaAs衬底上外延所得的最好的CdTe膜,其双晶衍射摆动曲线半高宽为630arc,  相似文献   

9.
不同衬底上低温生长的ZnO晶体薄膜的结构及光学性质比较   总被引:2,自引:0,他引:2  
采用电子束反应蒸发方法,在单晶Si(001)及玻璃衬底上低温外延生长了沿C轴高度取向的单晶ZnO薄膜,并对沉积的ZnO晶体薄膜的结构和光学性质进行了分析比较。通过对ZnO蒲膜的X射线衍射(XRD)分析及光致荧光激发谱(PLE)测量,研究了衬底材料结构特性、生长温度及反应气氛中充O2对ZnO薄膜的晶体结构和晶体光学吸收特性的影响。结果表明:①衬底温度对沉积的ZnO薄膜的晶体结构影响显,玻璃衬底上生长ZnO薄膜的最佳温度比Si(001)衬底上生长的最佳温度要高70℃;②虽在最佳生长条件下获得的ZnO薄膜的的XRD结果(半高宽和衍射强度)相近,但光学吸收特性有较大差异,Si(001)衬底上生长的ZnO薄膜优于玻璃衬底上生长的ZnO薄膜;③反应气氛中的O2分压对XRD结构影响不大,但对PLE谱影响显,充O2后能明显改善吸收边特性。  相似文献   

10.
硅衬底碳化对异质外延SiC薄膜结构的影响   总被引:2,自引:0,他引:2  
用LPMOCVD方法在P—Si(111)衬底上异质外延生长SiC,用碳化方法生长出具有单晶结构的3C—SiC薄膜,研究了开始碳化温度、丙烷流量和碳化时间对结晶质量的影响.结果表明,在较低的温度开始碳化不利于丙烷的分解,不能形成很好的过渡层;碳化时丙烷流量过大会造成碳污染,碳化时间过长使过渡层的结晶质量降低.最佳的碳化条件为:开始碳化温度1150℃,碳化时间和碳化时丙烷的流量分别为8min和2sccm.  相似文献   

11.
B.-Z. Maytal 《低温学》2006,46(1):21-29
Real gas choked mass flux is calculated for a frictionless stream expanding isentropically until it reaches the speed of sound and without phase changes. The other parameters associated with the choked state are the pressure, density, temperature ratios, and the speed of sound. Departure of the choked mass flux from the ideal gas model is discussed first in absolute terms and then in relative terms, using the Principle of Corresponding States, for gases with boiling points in the low temperature range. Reduced-stagnation pressures are examined up to values of 30 for hydrogen, neon, nitrogen, argon, methane, krypton, xenon, and R-14 and up to 100 for 4He. The corresponding reduced-stagnation temperatures go down to 1.4 and in some cases down to 1.2 for nitrogen and argon. Also discussed are the limiting values of stagnation parameters for which no phase change occurs in the choked state. Compared to the ideal gas, the mass flux may almost double and the critical pressure ratio may decrease by an order of magnitude. The relevance of results is discussed qualitatively and quantitatively for Joule-Thomson cryocooling.  相似文献   

12.
Hafnium is often used to improve the high temperature oxidation resistance of superalloys but not to form carbides for strengthen them against creep. In this work hafnium was added in cobalt-based alloys for verifying that HfC can be obtained in cobalt-based alloys and for characterizing their behavior at a very temperature. Three Co–25Cr–0.25 and 0.50C alloys containing 3.7 and 7.4 Hf to promote HfC carbides, and four Co–25Cr– 0 to 1C alloys for comparison (all contents in wt.%), were cast and exposed at 1200 °C for 50 h in synthetic air. The HfC carbides formed instead chromium carbides during solidification, in eutectic with matrix and as dispersed compact particles. During the stage at 1200 °C the HfC carbides did not significantly evolve, even near the oxidation front despite oxidation early become very fast and generalized. At the same time the chromium carbides present in the Co–Cr–C alloys totally disappeared in the same conditions. Such HfC-alloys potentially bring efficient and sustainable mechanical strengthening at high temperature, but their hot oxidation resistance must be significantly improved.  相似文献   

13.
A novel composite scaffold based on chitosan-collagen/organomontmo-rillonite (CS-COL/OMMT) was prepared to improve swelling ratio, biodegradation ratio, biomineralization and mechanical properties for use in tissue engineering applications. In order to expend the basal spacing, montmorillonite (MMT) was modified with sodium dodecyl sulfate (SDS) and was characterized by XRD, TGA and FTIR. The results indicated that the anionic surfactants entered into interlayer of MMT and the basal spacing of MMT was expanded to 3.85 nm. The prepared composite scaffolds were characterized by FTIR, XRD and SEM. The swelling ratio, biodegradation ratio and mechanical properties of composite scaffolds were also studied. The results demonstrated that the scaffold decreased swelling ratio, degradation ratio and improved mechanical and biomineralization properties because of OMMT.  相似文献   

14.
This paper describes a method for measuring the mass of cryogenic fluids in on-board rocket propellant tanks or ground storage tanks. Linear approximations to the Clausius-Mossotti relationship serve as the foundation for a capacitance based mass sensor, regardless of fluid density stratification or tank shape. Sensor design considerations are presented along with the experimental results for a capacitance based mass gage tested in liquid nitrogen. This test data is shown to be consistent with theory resulting in a demonstrated mass measurement accuracy of ±0.75% and a deviation from linearity of less than ±0.30% of full scale mass. Theoretical accuracies are also shown to be ±0.73% for hydrogen and ±1.39% for oxygen for a select range of pressures and temperatures.  相似文献   

15.
A new apparatus designed to study, at cryogenic temperatures, thermodynamic equilibria of potentially explosive binary systems such as hydrocarbon-oxygen mixtures is described herein. This equipment has an equilibrium cell which was especially designed to minimize hazards while allowing accurate phase equilibrium measurements. Reliability of results, obtained with this equipment has been verified by working on the nitrogen-propane system, for which data are already available in literature, over a large range of compositions and at various temperatures. Four isothermal curves describing liquid phase compositions at 109.98, 113.77, 119.75 and 125.63 K have been determined. Our experimental data are represented within 2% in compositions and in pressures through the Peng-Robinson equation of state implying Mathias-Copeman alpha function and Huron-Vidal mixing rule. Comparisons to literature allow pointing out: good agreement is observed with Kremer and Knapp data (1983) while the three sets of Poon and Lu data (1974) presenting systematic positive deviation are consequently judged as suspicious.  相似文献   

16.
I. Catarino  D. Martins  G. Bonfait 《Vacuum》2009,83(10):1270-1273
The very low pressure obtained thanks to adsorption phenomenon at low temperature can be used to build cryogenic heat switches, which offer the possibility to make or break thermal contact between two parts of a cryogenic system. The ON (conducting) and OFF (insulating) states of the switch are obtained by varying the gas pressure between two copper blocks separated by a gap of 100 μm. This pressure is controlled by acting upon the temperature of a small sorption pump (activated charcoal) connected to the gap space. For a “high” sorption pump temperature, the gas previously adsorbed in the sorption pump is released to the gap between the two blocks, allowing a good thermal conduction through the gas (ON state). On the opposite, cooling the sorption pump allows a very good vacuum between the copper blocks, which efficiently break the thermal contact (OFF state). Experimental thermal characteristics (Conductance in the ON and OFF state, ON-OFF switching temperature) of such a “Gas Gap Heat Switch” are described using hydrogen or neon as exchange gas and are compared with theoretical calculations.  相似文献   

17.
A number of technological advances required to store and maintain normal-boiling-point and densified cryogenic liquids, including liquid hydrogen, under zero boil-off conditions in-space, for long periods of time, have been developed. These technologies include (1) thermally optimized compact cryogen storage systems that reduce environmental heat leak to the lowest-temperature cryogen, which minimizes cryocooler size and input power, and (2) actively-cooled shields that surround the storage systems and intercept heat leak. The processes and tools used to develop these technologies are discussed. A zero boil-off liquid hydrogen storage system technology demonstrator for validating the actively-cooled shield technology is presented.  相似文献   

18.
This article presents the development of a miniaturized cryogenic fluid circuit for distributed cooling of low-temperature tracking detectors in high-energy physics (HEP). The heart of the circuit is a prototype cryogenic micropump. This volumetric pump is compatible with cooling powers of about 10-100 W, and capable of producing pressure heads of up to around 0.3 MPa. Besides detector and electronics cooling in HEP, potential applications are found in the field of superconductor technology.  相似文献   

19.
Chinh T. Nguyen 《低温学》2010,50(9):529-533
Cooling distribution is a vital technology concerning cryogenic thermal management systems for many future space applications, such as in-space, zero boil-off, long-term propellant storage, cooling infrared sensors at multiple locations or at a distance from the cryocooler, and focal-plane arrays in telescopes. These applications require a cooling distribution technology that is able to efficiently and reliably deliver cooling power (generated by a cryocooler) to remote locations and uniformly distribute it over a large-surface area. On-going efforts by others under this technology development area have not shown any promising results.This paper introduces the concept of using a Resonant Self-Pumped Loop (RSPL) integrated with the proven, highly efficient pulse tube cryocooler. The RSPL and pulse tube cryocooler combination generates cooling power and provides a distributive cooling loop that can be extended long distances, has no moving parts, and is driven by a single linear compressor. The RSPL is fully coupled with the oscillating flow of the pulse tube working fluid and utilizes gas diodes to convert the oscillating flow to one-directional (DC) steady flow that circulates through the cooling loop. The proposed RSPL is extremely simple, lightweight, reliable, and flexible for packaging. There are several requirements for the RSPL to operate efficiently. These requirements will be presented in this paper. Compared to other distributive cooling technologies currently under development, the RSPL technology is unique.  相似文献   

20.
This paper describes helium liquefaction using a commercial cryocooler with 1.5 W cooling power at 4.2 K (Sumitomo model RDK415D with compressor CSW-71D, consuming 6.5 kW electrical power), equipped with heat exchangers for precooling the incoming gas. No additional cooling power of cryoliquids or additional Joule-Thomson stages were utilized. Measurements of the pressure dependence of the liquefaction rate were performed. A maximum value of 83.9 g/h was obtained for 2.25 bar stabilized input pressure. Including the time needed to cool the liquefied helium to 4.2 K at 1 bar after filling the bottle connected to the cold head, and correcting for heat screen influences, this results in a net liquefaction rate of 67.7 g/h. Maintaining a pressure close to 1 bar above the bath during liquefaction, a rate of 55.7 g/h was obtained. The simple design enables many applications of the apparatus.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号